JP2003177548A - 反射遮光型のシャッタを備えた光照射装置 - Google Patents

反射遮光型のシャッタを備えた光照射装置

Info

Publication number
JP2003177548A
JP2003177548A JP2001375759A JP2001375759A JP2003177548A JP 2003177548 A JP2003177548 A JP 2003177548A JP 2001375759 A JP2001375759 A JP 2001375759A JP 2001375759 A JP2001375759 A JP 2001375759A JP 2003177548 A JP2003177548 A JP 2003177548A
Authority
JP
Japan
Prior art keywords
light
shutter
light source
reflected
reflective
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001375759A
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English (en)
Japanese (ja)
Other versions
JP2003177548A5 (enExample
Inventor
Masayuki Arai
昌之 新井
Junichi Mori
順一 森
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP2001375759A priority Critical patent/JP2003177548A/ja
Publication of JP2003177548A publication Critical patent/JP2003177548A/ja
Publication of JP2003177548A5 publication Critical patent/JP2003177548A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP2001375759A 2001-12-10 2001-12-10 反射遮光型のシャッタを備えた光照射装置 Pending JP2003177548A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001375759A JP2003177548A (ja) 2001-12-10 2001-12-10 反射遮光型のシャッタを備えた光照射装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001375759A JP2003177548A (ja) 2001-12-10 2001-12-10 反射遮光型のシャッタを備えた光照射装置

Publications (2)

Publication Number Publication Date
JP2003177548A true JP2003177548A (ja) 2003-06-27
JP2003177548A5 JP2003177548A5 (enExample) 2005-07-21

Family

ID=19184072

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001375759A Pending JP2003177548A (ja) 2001-12-10 2001-12-10 反射遮光型のシャッタを備えた光照射装置

Country Status (1)

Country Link
JP (1) JP2003177548A (enExample)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07280719A (ja) * 1994-04-12 1995-10-27 Hitachi Electron Eng Co Ltd Ｃｖｄ装置用微粒子検出器
JPH1027751A (ja) * 1996-07-11 1998-01-27 Nikon Corp 照明装置及びこれを用いた露光装置
JPH11233423A (ja) * 1998-02-06 1999-08-27 Canon Inc 露光用シャッタおよび露光装置ならびにディバイス製造方法
JPH11338005A (ja) * 1998-05-27 1999-12-10 Ushio Inc 光照射装置のシャッター機構

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07280719A (ja) * 1994-04-12 1995-10-27 Hitachi Electron Eng Co Ltd Ｃｖｄ装置用微粒子検出器
JPH1027751A (ja) * 1996-07-11 1998-01-27 Nikon Corp 照明装置及びこれを用いた露光装置
JPH11233423A (ja) * 1998-02-06 1999-08-27 Canon Inc 露光用シャッタおよび露光装置ならびにディバイス製造方法
JPH11338005A (ja) * 1998-05-27 1999-12-10 Ushio Inc 光照射装置のシャッター機構

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