JP4247281B2 - 圧電基板及びその製造方法 - Google Patents

圧電基板及びその製造方法 Download PDF

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Publication number
JP4247281B2
JP4247281B2 JP2007045044A JP2007045044A JP4247281B2 JP 4247281 B2 JP4247281 B2 JP 4247281B2 JP 2007045044 A JP2007045044 A JP 2007045044A JP 2007045044 A JP2007045044 A JP 2007045044A JP 4247281 B2 JP4247281 B2 JP 4247281B2
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Prior art keywords
film
piezoelectric substrate
base material
main surface
substrate
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JP2007045044A
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English (en)
Japanese (ja)
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JP2008054276A (ja
JP2008054276A5 (enExample
Inventor
登 田村
半 市川
剛 高畠
要 安田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tocalo Co Ltd
Koike Co Ltd
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Tocalo Co Ltd
Koike Co Ltd
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Application filed by Tocalo Co Ltd, Koike Co Ltd filed Critical Tocalo Co Ltd
Priority to JP2007045044A priority Critical patent/JP4247281B2/ja
Priority to US11/880,168 priority patent/US7569976B2/en
Priority to EP07014595.8A priority patent/EP1885062B1/en
Publication of JP2008054276A publication Critical patent/JP2008054276A/ja
Publication of JP2008054276A5 publication Critical patent/JP2008054276A5/ja
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Publication of JP4247281B2 publication Critical patent/JP4247281B2/ja
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  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP2007045044A 2006-07-27 2007-02-26 圧電基板及びその製造方法 Active JP4247281B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2007045044A JP4247281B2 (ja) 2006-07-27 2007-02-26 圧電基板及びその製造方法
US11/880,168 US7569976B2 (en) 2006-07-27 2007-07-20 Piezo-electric substrate and manufacturing method of the same
EP07014595.8A EP1885062B1 (en) 2006-07-27 2007-07-25 Piezo-electric substrate and manufacturing method of the same

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006204739 2006-07-27
JP2007045044A JP4247281B2 (ja) 2006-07-27 2007-02-26 圧電基板及びその製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2008262369A Division JP4773494B2 (ja) 2006-07-27 2008-10-09 圧電素子の製造方法

Publications (3)

Publication Number Publication Date
JP2008054276A JP2008054276A (ja) 2008-03-06
JP2008054276A5 JP2008054276A5 (enExample) 2008-08-21
JP4247281B2 true JP4247281B2 (ja) 2009-04-02

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JP2007045044A Active JP4247281B2 (ja) 2006-07-27 2007-02-26 圧電基板及びその製造方法

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JP (1) JP4247281B2 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5115562B2 (ja) * 2008-01-24 2013-01-09 株式会社村田製作所 弾性波素子の製造方法
JP5150648B2 (ja) * 2008-01-25 2013-02-20 株式会社村田製作所 弾性波素子及びその製造方法
JP4636292B2 (ja) 2008-08-27 2011-02-23 株式会社村田製作所 電子部品及び電子部品の製造方法
JP5304386B2 (ja) * 2009-03-27 2013-10-02 株式会社村田製作所 弾性表面波素子の製造方法
EP2736169B1 (en) 2012-08-17 2016-09-14 NGK Insulators, Ltd. Composite substrate, elastic surface wave device, and method for producing composite substrate
JP6076076B2 (ja) * 2012-12-21 2017-02-08 日東電工株式会社 組織再生促進剤
FR3079661A1 (fr) * 2018-03-29 2019-10-04 Soitec Procede de fabrication d'un substrat pour filtre radiofrequence
JP7439415B2 (ja) * 2019-08-28 2024-02-28 住友金属鉱山株式会社 圧電性基板、圧電性基板の製造方法、及び複合基板
JP7577559B2 (ja) * 2021-02-15 2024-11-05 太陽誘電株式会社 弾性波デバイス、ウエハ、フィルタおよびマルチプレクサ

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Publication number Publication date
JP2008054276A (ja) 2008-03-06

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