JP2008054276A5 - - Google Patents
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- Publication number
- JP2008054276A5 JP2008054276A5 JP2007045044A JP2007045044A JP2008054276A5 JP 2008054276 A5 JP2008054276 A5 JP 2008054276A5 JP 2007045044 A JP2007045044 A JP 2007045044A JP 2007045044 A JP2007045044 A JP 2007045044A JP 2008054276 A5 JP2008054276 A5 JP 2008054276A5
- Authority
- JP
- Japan
- Prior art keywords
- film
- piezoelectric substrate
- base material
- linear expansion
- substrate according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007045044A JP4247281B2 (ja) | 2006-07-27 | 2007-02-26 | 圧電基板及びその製造方法 |
| US11/880,168 US7569976B2 (en) | 2006-07-27 | 2007-07-20 | Piezo-electric substrate and manufacturing method of the same |
| EP07014595.8A EP1885062B1 (en) | 2006-07-27 | 2007-07-25 | Piezo-electric substrate and manufacturing method of the same |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006204739 | 2006-07-27 | ||
| JP2007045044A JP4247281B2 (ja) | 2006-07-27 | 2007-02-26 | 圧電基板及びその製造方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008262369A Division JP4773494B2 (ja) | 2006-07-27 | 2008-10-09 | 圧電素子の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008054276A JP2008054276A (ja) | 2008-03-06 |
| JP2008054276A5 true JP2008054276A5 (enExample) | 2008-08-21 |
| JP4247281B2 JP4247281B2 (ja) | 2009-04-02 |
Family
ID=39237839
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007045044A Active JP4247281B2 (ja) | 2006-07-27 | 2007-02-26 | 圧電基板及びその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4247281B2 (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5115562B2 (ja) * | 2008-01-24 | 2013-01-09 | 株式会社村田製作所 | 弾性波素子の製造方法 |
| JP5150648B2 (ja) * | 2008-01-25 | 2013-02-20 | 株式会社村田製作所 | 弾性波素子及びその製造方法 |
| JP4636292B2 (ja) | 2008-08-27 | 2011-02-23 | 株式会社村田製作所 | 電子部品及び電子部品の製造方法 |
| JP5304386B2 (ja) * | 2009-03-27 | 2013-10-02 | 株式会社村田製作所 | 弾性表面波素子の製造方法 |
| CN103765773B (zh) * | 2012-08-17 | 2015-11-25 | 日本碍子株式会社 | 复合基板、弹性表面波器件以及复合基板的制造方法 |
| JP6076076B2 (ja) * | 2012-12-21 | 2017-02-08 | 日東電工株式会社 | 組織再生促進剤 |
| FR3079661B1 (fr) * | 2018-03-29 | 2026-01-02 | Soitec Silicon On Insulator | Procede de fabrication d'un substrat pour filtre radiofrequence |
| JP7439415B2 (ja) * | 2019-08-28 | 2024-02-28 | 住友金属鉱山株式会社 | 圧電性基板、圧電性基板の製造方法、及び複合基板 |
| JP7577559B2 (ja) * | 2021-02-15 | 2024-11-05 | 太陽誘電株式会社 | 弾性波デバイス、ウエハ、フィルタおよびマルチプレクサ |
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2007
- 2007-02-26 JP JP2007045044A patent/JP4247281B2/ja active Active