JP4208411B2 - Ｓｍｉｆポッド格納、搬送及び回収システム - Google Patents

Ｓｍｉｆポッド格納、搬送及び回収システム Download PDF

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Publication number
JP4208411B2
JP4208411B2 JP2000501973A JP2000501973A JP4208411B2 JP 4208411 B2 JP4208411 B2 JP 4208411B2 JP 2000501973 A JP2000501973 A JP 2000501973A JP 2000501973 A JP2000501973 A JP 2000501973A JP 4208411 B2 JP4208411 B2 JP 4208411B2
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Japan
Prior art keywords
gripper
pod
tool
shelf
storage
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Expired - Lifetime
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JP2000501973A
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Japanese (ja)
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JP2001509465A5 (enExample
JP2001509465A (ja
Inventor
アントニー シー ボノラ
レイモンド エス マーティン
ウィリアム ジェイ フォスナイト
ロバート ネッツ
ジョシュア ティー オーデン
テリー エル モーシア
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Asyst Technologies Inc
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Asyst Technologies Inc
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Publication of JP2001509465A5 publication Critical patent/JP2001509465A5/ja
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/14—Wafer cassette transporting

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2000501973A 1997-07-11 1998-07-09 Ｓｍｉｆポッド格納、搬送及び回収システム Expired - Lifetime JP4208411B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/891,543 US6579052B1 (en) 1997-07-11 1997-07-11 SMIF pod storage, delivery and retrieval system
US08/891,543 1997-07-11
PCT/US1998/014313 WO1999002436A1 (en) 1997-07-11 1998-07-09 Smif pod storage, delivery and retrieval system

Publications (3)

Publication Number Publication Date
JP2001509465A JP2001509465A (ja) 2001-07-24
JP2001509465A5 JP2001509465A5 (enExample) 2008-08-21
JP4208411B2 true JP4208411B2 (ja) 2009-01-14

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000501973A Expired - Lifetime JP4208411B2 (ja) 1997-07-11 1998-07-09 Ｓｍｉｆポッド格納、搬送及び回収システム

Country Status (4)

Country Link
US (1) US6579052B1 (enExample)
EP (1) EP1054829A4 (enExample)
JP (1) JP4208411B2 (enExample)
WO (1) WO1999002436A1 (enExample)

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WO1999002436A1 (en) 1999-01-21
US6579052B1 (en) 2003-06-17
EP1054829A4 (en) 2002-05-22
JP2001509465A (ja) 2001-07-24
EP1054829A1 (en) 2000-11-29

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