JP4205321B2 - 顕微鏡等のフォーカス安定性機構 - Google Patents

顕微鏡等のフォーカス安定性機構 Download PDF

Info

Publication number
JP4205321B2
JP4205321B2 JP2001225306A JP2001225306A JP4205321B2 JP 4205321 B2 JP4205321 B2 JP 4205321B2 JP 2001225306 A JP2001225306 A JP 2001225306A JP 2001225306 A JP2001225306 A JP 2001225306A JP 4205321 B2 JP4205321 B2 JP 4205321B2
Authority
JP
Japan
Prior art keywords
axis
stage
microscope
optical system
correction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2001225306A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003043373A (ja
JP2003043373A5 (enExample
Inventor
一彦 木下
育 塩
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Science and Technology Agency
National Institute of Japan Science and Technology Agency
Original Assignee
Japan Science and Technology Agency
National Institute of Japan Science and Technology Agency
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Science and Technology Agency, National Institute of Japan Science and Technology Agency filed Critical Japan Science and Technology Agency
Priority to JP2001225306A priority Critical patent/JP4205321B2/ja
Priority to EP02738702A priority patent/EP1418456A4/en
Priority to US10/484,626 priority patent/US7315412B2/en
Priority to PCT/JP2002/005922 priority patent/WO2003012520A1/ja
Publication of JP2003043373A publication Critical patent/JP2003043373A/ja
Publication of JP2003043373A5 publication Critical patent/JP2003043373A5/ja
Application granted granted Critical
Publication of JP4205321B2 publication Critical patent/JP4205321B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/24Base structure
    • G02B21/26Stages; Adjusting means therefor
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/0004Microscopes specially adapted for specific applications
    • G02B21/0088Inverse microscopes
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/24Base structure
    • G02B21/241Devices for focusing
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/028Mountings, adjusting means, or light-tight connections, for optical elements for lenses with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Lens Barrels (AREA)
  • Microscoopes, Condenser (AREA)
  • Lenses (AREA)
JP2001225306A 2001-07-26 2001-07-26 顕微鏡等のフォーカス安定性機構 Expired - Lifetime JP4205321B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2001225306A JP4205321B2 (ja) 2001-07-26 2001-07-26 顕微鏡等のフォーカス安定性機構
EP02738702A EP1418456A4 (en) 2001-07-26 2002-06-13 FOCUS STABILIZATION MECHANISM OF A MICROSCOPE OR THE LIKE
US10/484,626 US7315412B2 (en) 2001-07-26 2002-06-13 Focus stabilizing mechanism for microscopes and similar optical instruments
PCT/JP2002/005922 WO2003012520A1 (en) 2001-07-26 2002-06-13 Focus stabilizing mechanism of microscope or the like

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001225306A JP4205321B2 (ja) 2001-07-26 2001-07-26 顕微鏡等のフォーカス安定性機構

Publications (3)

Publication Number Publication Date
JP2003043373A JP2003043373A (ja) 2003-02-13
JP2003043373A5 JP2003043373A5 (enExample) 2005-07-21
JP4205321B2 true JP4205321B2 (ja) 2009-01-07

Family

ID=19058315

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001225306A Expired - Lifetime JP4205321B2 (ja) 2001-07-26 2001-07-26 顕微鏡等のフォーカス安定性機構

Country Status (4)

Country Link
US (1) US7315412B2 (enExample)
EP (1) EP1418456A4 (enExample)
JP (1) JP4205321B2 (enExample)
WO (1) WO2003012520A1 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004057451A1 (de) * 2004-11-24 2006-06-01 Carl Zeiss Jena Gmbh Objektiv-Tisch-System für Mikroskope
DE102005001102B4 (de) * 2005-01-08 2021-04-29 Carl Zeiss Microscopy Gmbh Temperierbares Objektiv für Mikroskope
US20080174862A1 (en) * 2007-01-22 2008-07-24 Focht Daniel C Specimen Holder For Microscopy
WO2009014108A1 (ja) * 2007-07-20 2009-01-29 Nikon Corporation 対物レンズ、レボルバ及びこれらを備える倒立顕微鏡
US7854524B2 (en) * 2007-09-28 2010-12-21 Anorad Corporation High stiffness low mass supporting structure for a mirror assembly
DE202009010772U1 (de) 2009-08-11 2009-11-26 Deutsches Krebsforschungszentrum Stiftung des öffentlichen Rechts Anordnung zur Abbildungsstabilisierung
DE102010009679B4 (de) 2010-03-01 2020-03-05 Leica Microsystems Cms Gmbh Probenhalterung für ein Mikroskop und Mikroskop
DE102010060841B3 (de) * 2010-11-26 2012-06-06 Leica Microsystems Cms Gmbh Einrichtung zum Fokussieren eines Mikroskopobjektivs auf eine Probe
CN102981259B (zh) * 2012-11-26 2015-06-10 长春迪瑞医疗科技股份有限公司 一种光学成像系统的热膨胀补偿装置和方法
WO2016154200A1 (en) 2015-03-23 2016-09-29 Nanomechanics, Inc. Structure for achieving dimensional stability during temperature changes
JP2017040835A (ja) * 2015-08-21 2017-02-23 株式会社日立ハイテクノロジーズ 光学顕微鏡および電子顕微鏡

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4703181A (en) * 1986-04-07 1987-10-27 Gatan Inc. Anti-drift device for side entry electron microscope specimen holders
JP2883110B2 (ja) 1989-07-27 1999-04-19 オリンパス光学工業株式会社 顕微鏡の準焦装置
US5317153A (en) * 1991-08-08 1994-05-31 Nikon Corporation Scanning probe microscope
DE19530136C1 (de) 1995-08-16 1997-02-13 Leica Mikroskopie & Syst Einrichtung zur Fokusstabilisierung in einem Mikroskop
JP2778573B2 (ja) * 1996-03-22 1998-07-23 日本電気株式会社 加熱ステージ
JPH1090610A (ja) 1996-09-17 1998-04-10 Olympus Optical Co Ltd 走査型プローブ顕微鏡
US5978086A (en) * 1997-03-11 1999-11-02 Wyko Corporation Method and apparatus for correcting shifts between a reference focal point and a reference surface as a result of thermal effects in an interferometric optical objective
US6678089B1 (en) * 2000-04-13 2004-01-13 Leica Microsystems Heidelberg Gmbh Microscope
US6628459B2 (en) * 2000-04-19 2003-09-30 Olympus Optical Co., Ltd. Focus stabilizing apparatus
JP2001305432A (ja) * 2000-04-19 2001-10-31 Olympus Optical Co Ltd フォーカス安定装置
JP4914537B2 (ja) 2000-04-19 2012-04-11 オリンパス株式会社 倒立型顕微鏡に適用される試料支持装置
DE20106834U1 (de) * 2001-04-19 2001-06-28 Leica Microsystems Wetzlar GmbH, 35578 Wetzlar Vorrichtung zur Feinfokussierung
JP2003029162A (ja) 2001-07-11 2003-01-29 Nikon Corp 顕微鏡用対物レンズおよび顕微鏡

Also Published As

Publication number Publication date
JP2003043373A (ja) 2003-02-13
US7315412B2 (en) 2008-01-01
EP1418456A4 (en) 2004-09-01
US20040174589A1 (en) 2004-09-09
EP1418456A1 (en) 2004-05-12
WO2003012520A1 (en) 2003-02-13

Similar Documents

Publication Publication Date Title
US6980360B2 (en) Focus stabilizing apparatus
JP4205321B2 (ja) 顕微鏡等のフォーカス安定性機構
JP5588358B2 (ja) キネマティック光学マウント
CN103765315A (zh) 具有各个主动支撑组件的光学成像布置
US8134790B2 (en) Optical mounting and optical component comprising said type of optical mounting
CN100559228C (zh) 高稳定性光学显微镜
US8964287B2 (en) Device for focusing a microscope objective on a sample
US7835077B2 (en) Microscope system comprising arrangement for positioning of a platform
JPH0553060A (ja) 顕微鏡
JP4914537B2 (ja) 倒立型顕微鏡に適用される試料支持装置
JP2003043373A5 (enExample)
JP2003029162A (ja) 顕微鏡用対物レンズおよび顕微鏡
JP2001305432A (ja) フォーカス安定装置
Manske et al. Nanopositioning and nanomeasuring machine for high accuracy measuring procedures of small features in large areas
Manske et al. Advances in traceable nanometrology with the nanopositioning and nanomeasuring machine
JP4914580B2 (ja) 走査型プローブ顕微鏡
JP2002090652A (ja) 顕微鏡用ステージおよびこれを用いた顕微鏡
JP4575250B2 (ja) 走査型プローブ顕微鏡
JP2017040835A (ja) 光学顕微鏡および電子顕微鏡
JPH0334250A (ja) 光学顕微鏡複合走査型トンネル顕微鏡
JP3022648B2 (ja) 走査型プローブ顕微鏡
Fujita et al. Simple and accurate propagation-angle observation of a collimated laser beam within a short optical path range by use of a dual-focus Fresnel lens

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20010731

A711 Notification of change in applicant

Free format text: JAPANESE INTERMEDIATE CODE: A712

Effective date: 20031031

RD02 Notification of acceptance of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7422

Effective date: 20040108

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20041207

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20041207

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20080205

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20080311

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20080311

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20080708

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20081014

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20081016

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20111024

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Ref document number: 4205321

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20111024

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121024

Year of fee payment: 4

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131024

Year of fee payment: 5

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S533 Written request for registration of change of name

Free format text: JAPANESE INTERMEDIATE CODE: R313533

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term