JP4174468B2 - 光電変換装置及び撮像システム - Google Patents

光電変換装置及び撮像システム Download PDF

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Publication number
JP4174468B2
JP4174468B2 JP2004358342A JP2004358342A JP4174468B2 JP 4174468 B2 JP4174468 B2 JP 4174468B2 JP 2004358342 A JP2004358342 A JP 2004358342A JP 2004358342 A JP2004358342 A JP 2004358342A JP 4174468 B2 JP4174468 B2 JP 4174468B2
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Japan
Prior art keywords
impurity
impurity region
concentration
region
photoelectric conversion
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Expired - Fee Related
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JP2004358342A
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English (en)
Japanese (ja)
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JP2005197674A5 (enrdf_load_stackoverflow
JP2005197674A (ja
Inventor
浩 譲原
隆一 三島
高典 渡邉
武史 市川
清一 田村
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Canon Inc
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Canon Inc
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Priority to JP2004358342A priority Critical patent/JP4174468B2/ja
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  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
JP2004358342A 2003-12-12 2004-12-10 光電変換装置及び撮像システム Expired - Fee Related JP4174468B2 (ja)

Priority Applications (1)

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JP2004358342A JP4174468B2 (ja) 2003-12-12 2004-12-10 光電変換装置及び撮像システム

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003415011 2003-12-12
JP2004358342A JP4174468B2 (ja) 2003-12-12 2004-12-10 光電変換装置及び撮像システム

Related Child Applications (1)

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JP2008177064A Division JP4587187B2 (ja) 2003-12-12 2008-07-07 Ｃｍｏｓ型光電変換装置及び撮像システム

Publications (3)

Publication Number Publication Date
JP2005197674A JP2005197674A (ja) 2005-07-21
JP2005197674A5 JP2005197674A5 (enrdf_load_stackoverflow) 2007-10-11
JP4174468B2 true JP4174468B2 (ja) 2008-10-29

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JP2004358342A Expired - Fee Related JP4174468B2 (ja) 2003-12-12 2004-12-10 光電変換装置及び撮像システム

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JP (1) JP4174468B2 (enrdf_load_stackoverflow)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101369594B (zh) * 2003-12-12 2012-06-27 佳能株式会社 光电变换装置及其制造方法和摄像系统
JP4940607B2 (ja) * 2005-09-22 2012-05-30 ソニー株式会社 固体撮像装置およびその製造方法、並びにカメラ
JP5335271B2 (ja) 2008-04-09 2013-11-06 キヤノン株式会社 光電変換装置及びそれを用いた撮像システム
JP2010206178A (ja) 2009-02-06 2010-09-16 Canon Inc 光電変換装置、及び光電変換装置の製造方法
JP5538922B2 (ja) 2009-02-06 2014-07-02 キヤノン株式会社 固体撮像装置の製造方法
JP2010206181A (ja) 2009-02-06 2010-09-16 Canon Inc 光電変換装置及び撮像システム
JP2013021014A (ja) 2011-07-07 2013-01-31 Canon Inc エネルギー線検出装置の製造方法
JP6355311B2 (ja) * 2013-10-07 2018-07-11 キヤノン株式会社 固体撮像装置、その製造方法及び撮像システム
JP6541361B2 (ja) * 2015-02-05 2019-07-10 キヤノン株式会社 固体撮像装置
JP6029698B2 (ja) * 2015-02-19 2016-11-24 キヤノン株式会社 光電変換装置及びそれを用いた撮像システム
JP6861471B2 (ja) * 2015-06-12 2021-04-21 キヤノン株式会社 撮像装置およびその製造方法ならびにカメラ
EP3113224B1 (en) 2015-06-12 2020-07-08 Canon Kabushiki Kaisha Imaging apparatus, method of manufacturing the same, and camera
JP7013119B2 (ja) * 2016-07-21 2022-01-31 キヤノン株式会社 固体撮像素子、固体撮像素子の製造方法、及び撮像システム
JP6862129B2 (ja) * 2016-08-29 2021-04-21 キヤノン株式会社 光電変換装置および撮像システム
JP2018139328A (ja) * 2018-06-05 2018-09-06 キヤノン株式会社 固体撮像装置および撮像システム
JP7227802B2 (ja) * 2019-03-15 2023-02-22 株式会社東芝 固体撮像装置
JP7534902B2 (ja) 2020-09-23 2024-08-15 キヤノン株式会社 光電変換装置、撮像装置、半導体装置及び光電変換システム

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JP2005197674A (ja) 2005-07-21

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