JP4174377B2 - 光学素子 - Google Patents

光学素子 Download PDF

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Publication number
JP4174377B2
JP4174377B2 JP2003157083A JP2003157083A JP4174377B2 JP 4174377 B2 JP4174377 B2 JP 4174377B2 JP 2003157083 A JP2003157083 A JP 2003157083A JP 2003157083 A JP2003157083 A JP 2003157083A JP 4174377 B2 JP4174377 B2 JP 4174377B2
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JP
Japan
Prior art keywords
substrate
thin film
waveguide
film layer
optical element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2003157083A
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English (en)
Japanese (ja)
Other versions
JP2004145261A (ja
JP2004145261A5 (enExample
Inventor
知也 杉田
公典 水内
和久 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to JP2003157083A priority Critical patent/JP4174377B2/ja
Publication of JP2004145261A publication Critical patent/JP2004145261A/ja
Publication of JP2004145261A5 publication Critical patent/JP2004145261A5/ja
Application granted granted Critical
Publication of JP4174377B2 publication Critical patent/JP4174377B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2003157083A 2002-05-31 2003-06-02 光学素子 Expired - Fee Related JP4174377B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003157083A JP4174377B2 (ja) 2002-05-31 2003-06-02 光学素子

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2002159084 2002-05-31
JP2002246527 2002-08-27
JP2003157083A JP4174377B2 (ja) 2002-05-31 2003-06-02 光学素子

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2008179427A Division JP4825847B2 (ja) 2002-05-31 2008-07-09 光学素子およびその製造方法

Publications (3)

Publication Number Publication Date
JP2004145261A JP2004145261A (ja) 2004-05-20
JP2004145261A5 JP2004145261A5 (enExample) 2006-01-19
JP4174377B2 true JP4174377B2 (ja) 2008-10-29

Family

ID=32475152

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003157083A Expired - Fee Related JP4174377B2 (ja) 2002-05-31 2003-06-02 光学素子

Country Status (1)

Country Link
JP (1) JP4174377B2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021184075A (ja) * 2020-05-20 2021-12-02 日本碍子株式会社 電気光学素子用複合基板

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006041172A1 (ja) * 2004-10-12 2006-04-20 Ngk Insulators, Ltd. 光導波路基板および高調波発生デバイス
JP2006267324A (ja) * 2005-03-23 2006-10-05 Matsushita Electric Ind Co Ltd 光学素子およびコヒーレント光源
JP4667933B2 (ja) * 2005-03-31 2011-04-13 住友大阪セメント株式会社 光学素子及びその製造方法
JP4803546B2 (ja) * 2006-01-04 2011-10-26 プレサイスゲージ株式会社 波長変換導波路素子及びその製造方法
JP4847177B2 (ja) * 2006-03-30 2011-12-28 住友大阪セメント株式会社 光変調素子
DE602007003053D1 (de) 2006-06-28 2009-12-17 Jds Uniphase Corp Waferskalierungsverfahren zur Herstellung optischer Wellenleitervorrichtungen und damit hergestellte optischer Wellenleitervorrichtungen
JP4826469B2 (ja) * 2006-12-28 2011-11-30 株式会社島津製作所 擬似位相整合素子
JP4899948B2 (ja) * 2007-03-07 2012-03-21 パナソニック株式会社 光学素子の製造方法
JP5251037B2 (ja) * 2007-08-23 2013-07-31 沖電気工業株式会社 光導波路素子、その製造方法、及び光素子
JP2012078375A (ja) * 2010-09-30 2012-04-19 Sumitomo Osaka Cement Co Ltd 光導波路素子
JP6021118B2 (ja) 2014-03-27 2016-11-02 インターナショナル・ビジネス・マシーンズ・コーポレーションＩｎｔｅｒｎａｔｉｏｎａｌ Ｂｕｓｉｎｅｓｓ Ｍａｃｈｉｎｅｓ Ｃｏｒｐｏｒａｔｉｏｎ 光デバイスおよびその製造方法
WO2019180922A1 (ja) * 2018-03-23 2019-09-26 日本碍子株式会社 電気光学素子のための複合基板
WO2019224908A1 (ja) 2018-05-22 2019-11-28 日本碍子株式会社 電気光学素子のための複合基板とその製造方法
WO2020095421A1 (ja) * 2018-11-08 2020-05-14 日本碍子株式会社 電気光学素子のための複合基板とその製造方法
CN112955811B (zh) 2018-11-08 2022-05-24 日本碍子株式会社 电光元件用的复合基板及其制造方法
JP7380204B2 (ja) 2019-12-26 2023-11-15 住友大阪セメント株式会社 光導波路デバイス
JP7331208B2 (ja) * 2020-01-20 2023-08-22 日本碍子株式会社 電気光学素子のための複合基板とその製造方法
JP7410068B2 (ja) * 2020-03-16 2024-01-09 日本碍子株式会社 接合体、光導波路基板および光変調器
CN115291325A (zh) * 2022-08-12 2022-11-04 福建中科晶创光电科技有限公司 一种脊形波导制作方法
JP7752649B2 (ja) * 2023-01-27 2025-10-10 日本碍子株式会社 複合基板

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021184075A (ja) * 2020-05-20 2021-12-02 日本碍子株式会社 電気光学素子用複合基板
DE112021000100T5 (de) 2020-05-20 2022-05-12 Ngk Insulators, Ltd. Verbundsubstrat für elektro-optisches Element
US12411367B2 (en) 2020-05-20 2025-09-09 Ngk Insulators, Ltd. Composite substrate for electro-optical element

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JP2004145261A (ja) 2004-05-20

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