DE602007003053D1 - Waferskalierungsverfahren zur Herstellung optischer Wellenleitervorrichtungen und damit hergestellte optischer Wellenleitervorrichtungen - Google Patents

Waferskalierungsverfahren zur Herstellung optischer Wellenleitervorrichtungen und damit hergestellte optischer Wellenleitervorrichtungen

Info

Publication number
DE602007003053D1
DE602007003053D1 DE602007003053T DE602007003053T DE602007003053D1 DE 602007003053 D1 DE602007003053 D1 DE 602007003053D1 DE 602007003053 T DE602007003053 T DE 602007003053T DE 602007003053 T DE602007003053 T DE 602007003053T DE 602007003053 D1 DE602007003053 D1 DE 602007003053D1
Authority
DE
Germany
Prior art keywords
optical waveguide
waveguide devices
scaling method
wafer scaling
fabricated therewith
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602007003053T
Other languages
English (en)
Inventor
Benjamin F Catching
Donald M Friedrich
Charles A Hulse
Gunten Marc K Von
Jason Reed
Karl Kissa
Glen Drake
Julia Duncan
Hiren V Shah
Jerry Zieba
Xu Jason Jiazhan
William J Minford
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Viavi Solutions Inc
Original Assignee
JDS Uniphase Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JDS Uniphase Corp filed Critical JDS Uniphase Corp
Publication of DE602007003053D1 publication Critical patent/DE602007003053D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/37—Non-linear optics for second-harmonic generation
    • G02F1/377—Non-linear optics for second-harmonic generation in an optical waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/134—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms
    • G02B6/1342—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms using diffusion
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12035—Materials
    • G02B2006/1204—Lithium niobate (LiNbO3)
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12097—Ridge, rib or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/06—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 integrated waveguide
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/07—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 buffer layer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
DE602007003053T 2006-06-28 2007-06-26 Waferskalierungsverfahren zur Herstellung optischer Wellenleitervorrichtungen und damit hergestellte optischer Wellenleitervorrichtungen Active DE602007003053D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US80604006P 2006-06-28 2006-06-28

Publications (1)

Publication Number Publication Date
DE602007003053D1 true DE602007003053D1 (de) 2009-12-17

Family

ID=38462421

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602007003053T Active DE602007003053D1 (de) 2006-06-28 2007-06-26 Waferskalierungsverfahren zur Herstellung optischer Wellenleitervorrichtungen und damit hergestellte optischer Wellenleitervorrichtungen

Country Status (5)

Country Link
US (1) US7512303B2 (de)
EP (1) EP1873583B1 (de)
JP (1) JP5117126B2 (de)
CN (1) CN101097275B (de)
DE (1) DE602007003053D1 (de)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007241078A (ja) * 2006-03-10 2007-09-20 Ngk Insulators Ltd 波長変換素子
JP5087043B2 (ja) * 2009-05-13 2012-11-28 株式会社リコー 電気光学素子及びその製造方法
GB2486011A (en) * 2010-12-01 2012-06-06 Oclaro Technology Ltd Optical waveguide with etched ridge structure
US8743922B2 (en) * 2011-10-21 2014-06-03 Sharp Kabushiki Kaisha Ultraviolet laser
JP5951589B2 (ja) * 2013-11-28 2016-07-13 日本碍子株式会社 光導波路素子
FR3058830B1 (fr) * 2016-11-14 2018-11-30 Commissariat A L'energie Atomique Et Aux Energies Alternatives Procede de realisation collective d’une pluralite de puces optoelectroniques
US11886000B2 (en) 2018-04-02 2024-01-30 Magic Leap, Inc. Waveguides having integrated spacers, waveguides having edge absorbers, and methods for making the same
JP7070063B2 (ja) * 2018-05-11 2022-05-18 日本電信電話株式会社 波長変換素子および波長変換素子の作製方法
EP3987329A4 (de) * 2019-06-24 2023-10-11 Magic Leap, Inc. Wellenleiter mit integrierten abstandshaltern sowie verwandte systeme und verfahren
US11840034B2 (en) 2020-02-28 2023-12-12 Magic Leap, Inc. Method of fabricating molds for forming eyepieces with integrated spacers
CN115291325A (zh) * 2022-08-12 2022-11-04 福建中科晶创光电科技有限公司 一种脊形波导制作方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5616112A (en) 1979-07-19 1981-02-16 Sharp Corp Liquid crystal display unit
US5388170A (en) * 1993-11-22 1995-02-07 At&T Corp. Electrooptic device structure and method for reducing thermal effects in optical waveguide modulators
US5433911A (en) 1994-05-31 1995-07-18 Eastman Kodak Company Precisely aligning and bonding a glass cover plate over an image sensor
US6154310A (en) * 1997-11-21 2000-11-28 Imra America, Inc. Ultrashort-pulse source with controllable multiple-wavelength output
US6406636B1 (en) * 1999-06-02 2002-06-18 Megasense, Inc. Methods for wafer to wafer bonding using microstructures
US6631231B2 (en) * 2000-03-21 2003-10-07 Matsushita Electric Industrial Co., Ltd. Optical waveguide elements, optical wavelength conversion elements, and process for producing optical waveguide elements
JP3848093B2 (ja) * 2000-03-21 2006-11-22 松下電器産業株式会社 光導波路素子、光波長変換素子および光導波路素子の製造方法
US20020015552A1 (en) * 2000-08-01 2002-02-07 Link Gayle R. Optical wavelength router
US6896949B1 (en) 2001-03-15 2005-05-24 Bookham (Us) Inc. Wafer scale production of optical elements
JP3963313B2 (ja) * 2001-09-05 2007-08-22 日本碍子株式会社 光導波路デバイス、光変調器および光変調器の実装構造
WO2003058337A1 (en) * 2002-01-06 2003-07-17 Raicol Crystals Ltd. Multiple wavelength laser source
US7295742B2 (en) 2002-05-31 2007-11-13 Matsushita Electric Industrial Co., Ltd. Optical element and method for producing the same
JP4174377B2 (ja) * 2002-05-31 2008-10-29 松下電器産業株式会社 光学素子
JP2004219751A (ja) * 2003-01-15 2004-08-05 Matsushita Electric Ind Co Ltd 光導波路デバイスならびにそれを用いた光導波路レーザおよびそれを備えた光学装置
JP2005257985A (ja) * 2004-03-11 2005-09-22 Matsushita Electric Ind Co Ltd 光導波路および光変調素子および光通信システム
JP2005274793A (ja) * 2004-03-23 2005-10-06 Ngk Insulators Ltd 光導波路および光導波路デバイス
EP1801625B1 (de) * 2004-10-12 2019-11-20 NGK Insulators, Ltd. Optisches wellenleitersubstrat und einrichtung zur erzeugung von oberwellen

Also Published As

Publication number Publication date
JP2008040482A (ja) 2008-02-21
EP1873583A3 (de) 2008-02-27
CN101097275B (zh) 2010-12-01
EP1873583A2 (de) 2008-01-02
CN101097275A (zh) 2008-01-02
JP5117126B2 (ja) 2013-01-09
US7512303B2 (en) 2009-03-31
EP1873583B1 (de) 2009-11-04
US20080085089A1 (en) 2008-04-10

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