DE602007003053D1 - Waferskalierungsverfahren zur Herstellung optischer Wellenleitervorrichtungen und damit hergestellte optischer Wellenleitervorrichtungen - Google Patents
Waferskalierungsverfahren zur Herstellung optischer Wellenleitervorrichtungen und damit hergestellte optischer WellenleitervorrichtungenInfo
- Publication number
- DE602007003053D1 DE602007003053D1 DE602007003053T DE602007003053T DE602007003053D1 DE 602007003053 D1 DE602007003053 D1 DE 602007003053D1 DE 602007003053 T DE602007003053 T DE 602007003053T DE 602007003053 T DE602007003053 T DE 602007003053T DE 602007003053 D1 DE602007003053 D1 DE 602007003053D1
- Authority
- DE
- Germany
- Prior art keywords
- optical waveguide
- waveguide devices
- scaling method
- wafer scaling
- fabricated therewith
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/37—Non-linear optics for second-harmonic generation
- G02F1/377—Non-linear optics for second-harmonic generation in an optical waveguide structure
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/134—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms
- G02B6/1342—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms using diffusion
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12035—Materials
- G02B2006/1204—Lithium niobate (LiNbO3)
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12097—Ridge, rib or the like
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/06—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 integrated waveguide
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/07—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 buffer layer
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Nonlinear Science (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Integrated Circuits (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US80604006P | 2006-06-28 | 2006-06-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602007003053D1 true DE602007003053D1 (de) | 2009-12-17 |
Family
ID=38462421
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602007003053T Active DE602007003053D1 (de) | 2006-06-28 | 2007-06-26 | Waferskalierungsverfahren zur Herstellung optischer Wellenleitervorrichtungen und damit hergestellte optischer Wellenleitervorrichtungen |
Country Status (5)
Country | Link |
---|---|
US (1) | US7512303B2 (de) |
EP (1) | EP1873583B1 (de) |
JP (1) | JP5117126B2 (de) |
CN (1) | CN101097275B (de) |
DE (1) | DE602007003053D1 (de) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007241078A (ja) * | 2006-03-10 | 2007-09-20 | Ngk Insulators Ltd | 波長変換素子 |
JP5087043B2 (ja) * | 2009-05-13 | 2012-11-28 | 株式会社リコー | 電気光学素子及びその製造方法 |
GB2486011A (en) * | 2010-12-01 | 2012-06-06 | Oclaro Technology Ltd | Optical waveguide with etched ridge structure |
US8743922B2 (en) * | 2011-10-21 | 2014-06-03 | Sharp Kabushiki Kaisha | Ultraviolet laser |
JP5951589B2 (ja) * | 2013-11-28 | 2016-07-13 | 日本碍子株式会社 | 光導波路素子 |
FR3058830B1 (fr) * | 2016-11-14 | 2018-11-30 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Procede de realisation collective d’une pluralite de puces optoelectroniques |
US11886000B2 (en) | 2018-04-02 | 2024-01-30 | Magic Leap, Inc. | Waveguides having integrated spacers, waveguides having edge absorbers, and methods for making the same |
JP7070063B2 (ja) * | 2018-05-11 | 2022-05-18 | 日本電信電話株式会社 | 波長変換素子および波長変換素子の作製方法 |
EP3987329A4 (de) * | 2019-06-24 | 2023-10-11 | Magic Leap, Inc. | Wellenleiter mit integrierten abstandshaltern sowie verwandte systeme und verfahren |
US11840034B2 (en) | 2020-02-28 | 2023-12-12 | Magic Leap, Inc. | Method of fabricating molds for forming eyepieces with integrated spacers |
CN115291325A (zh) * | 2022-08-12 | 2022-11-04 | 福建中科晶创光电科技有限公司 | 一种脊形波导制作方法 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5616112A (en) | 1979-07-19 | 1981-02-16 | Sharp Corp | Liquid crystal display unit |
US5388170A (en) * | 1993-11-22 | 1995-02-07 | At&T Corp. | Electrooptic device structure and method for reducing thermal effects in optical waveguide modulators |
US5433911A (en) | 1994-05-31 | 1995-07-18 | Eastman Kodak Company | Precisely aligning and bonding a glass cover plate over an image sensor |
US6154310A (en) * | 1997-11-21 | 2000-11-28 | Imra America, Inc. | Ultrashort-pulse source with controllable multiple-wavelength output |
US6406636B1 (en) * | 1999-06-02 | 2002-06-18 | Megasense, Inc. | Methods for wafer to wafer bonding using microstructures |
US6631231B2 (en) * | 2000-03-21 | 2003-10-07 | Matsushita Electric Industrial Co., Ltd. | Optical waveguide elements, optical wavelength conversion elements, and process for producing optical waveguide elements |
JP3848093B2 (ja) * | 2000-03-21 | 2006-11-22 | 松下電器産業株式会社 | 光導波路素子、光波長変換素子および光導波路素子の製造方法 |
US20020015552A1 (en) * | 2000-08-01 | 2002-02-07 | Link Gayle R. | Optical wavelength router |
US6896949B1 (en) | 2001-03-15 | 2005-05-24 | Bookham (Us) Inc. | Wafer scale production of optical elements |
JP3963313B2 (ja) * | 2001-09-05 | 2007-08-22 | 日本碍子株式会社 | 光導波路デバイス、光変調器および光変調器の実装構造 |
WO2003058337A1 (en) * | 2002-01-06 | 2003-07-17 | Raicol Crystals Ltd. | Multiple wavelength laser source |
US7295742B2 (en) | 2002-05-31 | 2007-11-13 | Matsushita Electric Industrial Co., Ltd. | Optical element and method for producing the same |
JP4174377B2 (ja) * | 2002-05-31 | 2008-10-29 | 松下電器産業株式会社 | 光学素子 |
JP2004219751A (ja) * | 2003-01-15 | 2004-08-05 | Matsushita Electric Ind Co Ltd | 光導波路デバイスならびにそれを用いた光導波路レーザおよびそれを備えた光学装置 |
JP2005257985A (ja) * | 2004-03-11 | 2005-09-22 | Matsushita Electric Ind Co Ltd | 光導波路および光変調素子および光通信システム |
JP2005274793A (ja) * | 2004-03-23 | 2005-10-06 | Ngk Insulators Ltd | 光導波路および光導波路デバイス |
EP1801625B1 (de) * | 2004-10-12 | 2019-11-20 | NGK Insulators, Ltd. | Optisches wellenleitersubstrat und einrichtung zur erzeugung von oberwellen |
-
2007
- 2007-06-26 EP EP07252595A patent/EP1873583B1/de not_active Expired - Fee Related
- 2007-06-26 DE DE602007003053T patent/DE602007003053D1/de active Active
- 2007-06-27 US US11/769,070 patent/US7512303B2/en not_active Expired - Fee Related
- 2007-06-27 JP JP2007169503A patent/JP5117126B2/ja not_active Expired - Fee Related
- 2007-06-28 CN CN2007101230778A patent/CN101097275B/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2008040482A (ja) | 2008-02-21 |
EP1873583A3 (de) | 2008-02-27 |
CN101097275B (zh) | 2010-12-01 |
EP1873583A2 (de) | 2008-01-02 |
CN101097275A (zh) | 2008-01-02 |
JP5117126B2 (ja) | 2013-01-09 |
US7512303B2 (en) | 2009-03-31 |
EP1873583B1 (de) | 2009-11-04 |
US20080085089A1 (en) | 2008-04-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |