BRPI0814680A2 - dispositivo óptico mems e respectivo método de fabrico - Google Patents

dispositivo óptico mems e respectivo método de fabrico

Info

Publication number
BRPI0814680A2
BRPI0814680A2 BRPI0814680A BRPI0814680A BRPI0814680A2 BR PI0814680 A2 BRPI0814680 A2 BR PI0814680A2 BR PI0814680 A BRPI0814680 A BR PI0814680A BR PI0814680 A BRPI0814680 A BR PI0814680A BR PI0814680 A2 BRPI0814680 A2 BR PI0814680A2
Authority
BR
Brazil
Prior art keywords
manufacturing
optical device
mems optical
mems
optical
Prior art date
Application number
BRPI0814680A
Other languages
English (en)
Inventor
Daniel Chang
Jan Bos
Manish Kothari
Suryaprakash Ganti
Original Assignee
Qualcomm Mems Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qualcomm Mems Technologies Inc filed Critical Qualcomm Mems Technologies Inc
Publication of BRPI0814680A2 publication Critical patent/BRPI0814680A2/pt

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
BRPI0814680A 2007-07-25 2008-07-23 dispositivo óptico mems e respectivo método de fabrico BRPI0814680A2 (pt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US95193007P 2007-07-25 2007-07-25
PCT/US2008/070928 WO2009015231A1 (en) 2007-07-25 2008-07-23 Mems display devices and methods of fabricating the same

Publications (1)

Publication Number Publication Date
BRPI0814680A2 true BRPI0814680A2 (pt) 2016-10-04

Family

ID=39764739

Family Applications (1)

Application Number Title Priority Date Filing Date
BRPI0814680A BRPI0814680A2 (pt) 2007-07-25 2008-07-23 dispositivo óptico mems e respectivo método de fabrico

Country Status (10)

Country Link
US (2) US7903316B2 (pt)
EP (1) EP2181355A1 (pt)
JP (1) JP2010534865A (pt)
KR (1) KR101597348B1 (pt)
CN (1) CN101755232A (pt)
BR (1) BRPI0814680A2 (pt)
CA (1) CA2694044C (pt)
RU (1) RU2471210C2 (pt)
TW (1) TWI480223B (pt)
WO (1) WO2009015231A1 (pt)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8928967B2 (en) 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
KR100703140B1 (ko) 1998-04-08 2007-04-05 이리다임 디스플레이 코포레이션 간섭 변조기 및 그 제조 방법
US7944599B2 (en) 2004-09-27 2011-05-17 Qualcomm Mems Technologies, Inc. Electromechanical device with optical function separated from mechanical and electrical function
US7372613B2 (en) 2004-09-27 2008-05-13 Idc, Llc Method and device for multistate interferometric light modulation
US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
EP2104948A2 (en) * 2007-02-20 2009-09-30 Qualcomm Mems Technologies, Inc. Equipment and methods for etching of mems
US7719752B2 (en) 2007-05-11 2010-05-18 Qualcomm Mems Technologies, Inc. MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same
BRPI0814680A2 (pt) * 2007-07-25 2016-10-04 Qualcomm Mems Technologies Inc dispositivo óptico mems e respectivo método de fabrico
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US8023191B2 (en) * 2008-05-07 2011-09-20 Qualcomm Mems Technologies, Inc. Printable static interferometric images
US7782522B2 (en) * 2008-07-17 2010-08-24 Qualcomm Mems Technologies, Inc. Encapsulation methods for interferometric modulator and MEMS devices
CN101710586B (zh) * 2009-01-09 2011-12-28 深超光电（深圳）有限公司 提高开口率的储存电容及其制作方法
US20110169724A1 (en) * 2010-01-08 2011-07-14 Qualcomm Mems Technologies, Inc. Interferometric pixel with patterned mechanical layer
US8547626B2 (en) * 2010-03-25 2013-10-01 Qualcomm Mems Technologies, Inc. Mechanical layer and methods of shaping the same
US20120194897A1 (en) * 2011-01-27 2012-08-02 Qualcomm Mems Technologies, Inc. Backside patterning to form support posts in an electromechanical device
US8988440B2 (en) * 2011-03-15 2015-03-24 Qualcomm Mems Technologies, Inc. Inactive dummy pixels
US8780104B2 (en) 2011-03-15 2014-07-15 Qualcomm Mems Technologies, Inc. System and method of updating drive scheme voltages
KR20120106263A (ko) 2011-03-18 2012-09-26 삼성디스플레이 주식회사 표시 기판, 이를 포함하는 표시 장치 및 이의 제조 방법
US8659816B2 (en) * 2011-04-25 2014-02-25 Qualcomm Mems Technologies, Inc. Mechanical layer and methods of making the same
US9213181B2 (en) * 2011-05-20 2015-12-15 Pixtronix, Inc. MEMS anchor and spacer structure
US20130016037A1 (en) * 2011-07-11 2013-01-17 Qualcomm Mems Technologies, Inc. Reducing or eliminating the black mask in an optical stack
US9065358B2 (en) 2011-07-11 2015-06-23 Taiwan Semiconductor Manufacturing Company, Ltd. MEMS structure and method of forming same
US20130057557A1 (en) * 2011-09-07 2013-03-07 Qualcomm Mems Technologies, Inc. High area stacked layered metallic structures and related methods
US9678329B2 (en) 2011-12-22 2017-06-13 Qualcomm Inc. Angled facets for display devices
US9085456B2 (en) 2012-01-16 2015-07-21 Taiwan Semiconductor Manufacturing Company, Ltd. Support structure for TSV in MEMS structure
CN108511328B (zh) * 2018-05-10 2020-10-02 河南科技大学 一种双层钼薄膜及其制备方法、薄膜太阳能电池
US20220252866A1 (en) * 2021-02-05 2022-08-11 Silicon Light Machines Corporation MEMs Based Spatial Light Modulators With Improved Thermal Control
CN113377132A (zh) * 2021-05-07 2021-09-10 青岛科技大学 用于追踪聚光的mems微镜阵列智能玻璃板

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Also Published As

Publication number Publication date
TW200916405A (en) 2009-04-16
RU2010101627A (ru) 2011-08-27
RU2471210C2 (ru) 2012-12-27
US7903316B2 (en) 2011-03-08
US20090086306A1 (en) 2009-04-02
KR101597348B1 (ko) 2016-03-07
CN101755232A (zh) 2010-06-23
KR20100075431A (ko) 2010-07-02
WO2009015231A1 (en) 2009-01-29
JP2010534865A (ja) 2010-11-11
US20110157010A1 (en) 2011-06-30
CA2694044C (en) 2017-02-28
EP2181355A1 (en) 2010-05-05
TWI480223B (zh) 2015-04-11
CA2694044A1 (en) 2009-01-29

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Legal Events

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B15I Others concerning applications: loss of priority

Free format text: OBSERVA-SE QUE A PRIORIDADE REQUERIDA US 60/951,930 DE 25/07/2007 POSSUI DEPOSITANTE DIFERENTE DO INFORMADO NA ENTRADA NA FASE NACIONAL E SUA RESPECTIVA CESSAO FOI APRESENTADA EM 29/09/2010 APOS O PRAZO REGULAR DE 60 DIAS DA ENTRADA NA FASE NACIONAL QUE SE ENCERRAVA EM 13/03/2010, MOTIVO PELO QUAL SERA DADA PERDA DESTA PRIORIDADE, CONFORME AS DISPOSICOES PREVISTAS NA LEI 9.279 DE 14/05/1996 (LPI) ART. 16 7O.

B12F Other appeals [chapter 12.6 patent gazette]
B06A Patent application procedure suspended [chapter 6.1 patent gazette]
B11B Dismissal acc. art. 36, par 1 of ipl - no reply within 90 days to fullfil the necessary requirements
B350 Update of information on the portal [chapter 15.35 patent gazette]