JP4156264B2 - コーティング装置用加工品支持体 - Google Patents

コーティング装置用加工品支持体 Download PDF

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Publication number
JP4156264B2
JP4156264B2 JP2002128608A JP2002128608A JP4156264B2 JP 4156264 B2 JP4156264 B2 JP 4156264B2 JP 2002128608 A JP2002128608 A JP 2002128608A JP 2002128608 A JP2002128608 A JP 2002128608A JP 4156264 B2 JP4156264 B2 JP 4156264B2
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JP
Japan
Prior art keywords
turntable
workpiece
workpiece support
support according
drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2002128608A
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English (en)
Japanese (ja)
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JP2003027233A (ja
Inventor
ロラン・ジャクリー
アントーン・クンツ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OC Oerlikon Balzers AG
Original Assignee
OC Oerlikon Balzers AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by OC Oerlikon Balzers AG filed Critical OC Oerlikon Balzers AG
Publication of JP2003027233A publication Critical patent/JP2003027233A/ja
Application granted granted Critical
Publication of JP4156264B2 publication Critical patent/JP4156264B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Vapour Deposition (AREA)
  • Coating Apparatus (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
  • Chemical Vapour Deposition (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
JP2002128608A 2001-05-08 2002-04-30 コーティング装置用加工品支持体 Expired - Lifetime JP4156264B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH20010830/01 2001-05-08
CH8302001 2001-05-08

Publications (2)

Publication Number Publication Date
JP2003027233A JP2003027233A (ja) 2003-01-29
JP4156264B2 true JP4156264B2 (ja) 2008-09-24

Family

ID=4540246

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002128608A Expired - Lifetime JP4156264B2 (ja) 2001-05-08 2002-04-30 コーティング装置用加工品支持体

Country Status (5)

Country Link
US (1) US6761772B2 (de)
EP (1) EP1256637B1 (de)
JP (1) JP4156264B2 (de)
AT (1) ATE311482T1 (de)
DE (1) DE50205082D1 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004027989B4 (de) * 2004-06-09 2007-05-10 Esser, Stefan, Dr.-Ing. Werkstückträgervorrichtung zum Halten von Werkstücken
SI1917380T1 (sl) * 2005-08-29 2009-10-31 Oerlikon Trading Ag Naprava nosilca obdelovanca
US7770336B2 (en) * 2006-08-10 2010-08-10 Martinrea International Inc. Multiple-level rotary work surface
US8361290B2 (en) * 2006-09-05 2013-01-29 Oerlikon Trading, Ag, Trubbach Coating removal installation and method of operating it
US7988787B2 (en) * 2007-08-27 2011-08-02 Caterpillar Inc. Workpiece support system and method
US20110083604A1 (en) * 2008-06-11 2011-04-14 Stefan Esser Workpiece carrier
CN101886248B (zh) * 2009-05-15 2013-08-21 鸿富锦精密工业（深圳）有限公司 溅镀式镀膜装置
US9088085B2 (en) * 2012-09-21 2015-07-21 Novellus Systems, Inc. High temperature electrode connections
CZ25582U1 (cs) 2013-03-14 2013-06-24 Hvm Plasma, Spol.S R.O. Rotacní stolek pro depozici tenkých povrchových vrstev na substráty
US10280505B2 (en) * 2014-11-17 2019-05-07 Integrated 3D Metallizing, Llc Integrated 3D metallizer
CN104609171B (zh) * 2015-01-26 2016-09-28 中核(天津)科技发展有限公司 用于电机定子发黑中的自动送料装置
CN104651795B (zh) * 2015-03-10 2017-01-11 丹阳市鼎新机械设备有限公司 一种镜片真空镀膜机用旋转台
CN105234028B (zh) * 2015-11-11 2017-12-15 中核(天津)科技发展有限公司 定子发黑装置的传动装置
US11028472B2 (en) * 2016-05-16 2021-06-08 Integrated 3D Metallizing, Llc Integrated 3D metallizer
US10648073B2 (en) * 2016-11-29 2020-05-12 National Kaohsiung University Of Science And Technology Method of preparing fiber sensing devices through low-temperature magnetic control sputtering
EP3508611B1 (de) 2018-01-04 2023-03-15 Raytheon Technologies Corporation Metallisches beschichtungsverfahren für brennkammerplatten unter verwendung einer tonnenkonfiguration
TW201946214A (zh) 2018-04-28 2019-12-01 美商應用材料股份有限公司 用於旋轉料架處理腔室的原位晶圓旋轉
CN109280896B (zh) * 2018-11-30 2023-08-18 深圳天成真空技术有限公司 真空镀膜机
DE102019135183A1 (de) 2019-12-19 2021-06-24 Oerlikon Surface Solutions Ag, Pfäffikon Haltesystem zum Halten von Substraten
CN112570216B (zh) * 2020-11-20 2022-07-26 陈勇 一种旋转式杯口边缘涂料加工装置
CN115121412A (zh) * 2022-07-27 2022-09-30 博众精工科技股份有限公司 一种涂油设备
CN118932308A (zh) * 2024-07-29 2024-11-12 广东华升纳米科技股份有限公司 一种载物台和镀膜设备

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0794711B2 (ja) * 1990-05-24 1995-10-11 ナノテック株式会社 イオンプレーティング装置用回転テーブル
JP2521257Y2 (ja) * 1990-08-08 1996-12-25 株式会社コパル 自公転治具付蒸着装置
JP3199516B2 (ja) * 1993-05-14 2001-08-20 株式会社神戸製鋼所 被処理物回転機構を有するイオンプレーティング装置
DE19803278C2 (de) * 1998-01-29 2001-02-01 Bosch Gmbh Robert Werkstückträger und dessen Verwendung zur Behandlung und Beschichtung von Werkstücken
WO2000036178A1 (de) * 1998-12-15 2000-06-22 Unaxis Balzers Aktiengesellschaft Planetensystem-werkstückträger und verfahren zur oberflächenbehandlung von werkstücken

Also Published As

Publication number Publication date
ATE311482T1 (de) 2005-12-15
DE50205082D1 (de) 2006-01-05
US20030015136A1 (en) 2003-01-23
JP2003027233A (ja) 2003-01-29
EP1256637A1 (de) 2002-11-13
US6761772B2 (en) 2004-07-13
EP1256637B1 (de) 2005-11-30

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