CN104651795B - 一种镜片真空镀膜机用旋转台 - Google Patents
一种镜片真空镀膜机用旋转台 Download PDFInfo
- Publication number
- CN104651795B CN104651795B CN201510103738.5A CN201510103738A CN104651795B CN 104651795 B CN104651795 B CN 104651795B CN 201510103738 A CN201510103738 A CN 201510103738A CN 104651795 B CN104651795 B CN 104651795B
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- CN
- China
- Prior art keywords
- turntable
- sprocket wheel
- coating machine
- rotary shaft
- chain
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
Abstract
Description
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201510103738.5A CN104651795B (zh) | 2015-03-10 | 2015-03-10 | 一种镜片真空镀膜机用旋转台 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510103738.5A CN104651795B (zh) | 2015-03-10 | 2015-03-10 | 一种镜片真空镀膜机用旋转台 |
Publications (2)
Publication Number | Publication Date |
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CN104651795A CN104651795A (zh) | 2015-05-27 |
CN104651795B true CN104651795B (zh) | 2017-01-11 |
Family
ID=53243428
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201510103738.5A Active CN104651795B (zh) | 2015-03-10 | 2015-03-10 | 一种镜片真空镀膜机用旋转台 |
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CN (1) | CN104651795B (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104858094B (zh) * | 2015-06-09 | 2019-06-18 | 临海市劳尔机械有限公司 | 一种全自动树脂镜片镀膜喷涂机 |
CN105970173A (zh) * | 2016-06-14 | 2016-09-28 | 肇庆市大力真空设备有限公司 | 一种真空磁控溅射镀膜设备 |
CN106048551A (zh) * | 2016-07-19 | 2016-10-26 | 沈阳大学 | 真空镀膜机工件托架 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1256637B1 (de) * | 2001-05-08 | 2005-11-30 | Unaxis Balzers Aktiengesellschaft | Werkstückträger |
CN203284456U (zh) * | 2013-03-06 | 2013-11-13 | 黄玉春 | 可平移及旋转工作台定位系统 |
CN103834926A (zh) * | 2012-11-22 | 2014-06-04 | 上海法德机械设备有限公司 | 真空镀膜工件转台 |
CN204529968U (zh) * | 2015-03-10 | 2015-08-05 | 丹阳市鼎新机械设备有限公司 | 一种镜片真空镀膜机用旋转台 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4002959B2 (ja) * | 2004-06-25 | 2007-11-07 | 株式会社昭和真空 | 基板ドーム回転機構 |
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2015
- 2015-03-10 CN CN201510103738.5A patent/CN104651795B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1256637B1 (de) * | 2001-05-08 | 2005-11-30 | Unaxis Balzers Aktiengesellschaft | Werkstückträger |
CN103834926A (zh) * | 2012-11-22 | 2014-06-04 | 上海法德机械设备有限公司 | 真空镀膜工件转台 |
CN203284456U (zh) * | 2013-03-06 | 2013-11-13 | 黄玉春 | 可平移及旋转工作台定位系统 |
CN204529968U (zh) * | 2015-03-10 | 2015-08-05 | 丹阳市鼎新机械设备有限公司 | 一种镜片真空镀膜机用旋转台 |
Also Published As
Publication number | Publication date |
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CN104651795A (zh) | 2015-05-27 |
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Legal Events
Date | Code | Title | Description |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Rotary table for lens vacuum coating machine Effective date of registration: 20210708 Granted publication date: 20170111 Pledgee: China Construction Bank Danyang sub branch Pledgor: DANYANG DINGXIN MACHINERY EQUIPMENT Co.,Ltd. Registration number: Y2021980005875 |
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PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20220808 Granted publication date: 20170111 Pledgee: China Construction Bank Danyang sub branch Pledgor: DANYANG DINGXIN MACHINERY EQUIPMENT CO.,LTD. Registration number: Y2021980005875 |