JP4112615B2 - Ｃ４マイクロバンプ、ｔａｂマイクロバンプおよび超大規模相互接続の電解めっき用たわみ性連続カソード接点回路 - Google Patents

Ｃ４マイクロバンプ、ｔａｂマイクロバンプおよび超大規模相互接続の電解めっき用たわみ性連続カソード接点回路 Download PDF

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Publication number
JP4112615B2
JP4112615B2 JP51350197A JP51350197A JP4112615B2 JP 4112615 B2 JP4112615 B2 JP 4112615B2 JP 51350197 A JP51350197 A JP 51350197A JP 51350197 A JP51350197 A JP 51350197A JP 4112615 B2 JP4112615 B2 JP 4112615B2
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Japan
Prior art keywords
contact
wafer
cathode
flexible
conductive
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Expired - Fee Related
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JP51350197A
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Japanese (ja)
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JP2000500825A5 (OSRAM
JP2000500825A (ja
Inventor
クラフツ，ダグラス・イー
スウェイン，スティーブン・エム
健二 高橋
博文 石田
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Intel Corp
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Intel Corp
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    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/02—Electroplating of selected surface areas
    • C25D5/022—Electroplating of selected surface areas using masking means
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/005—Contacting devices
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00—Electroplating characterised by the article coated
    • C25D7/12—Semiconductors
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/001—Apparatus specially adapted for electrolytic coating of wafers, e.g. semiconductors or solar cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Electrodes Of Semiconductors (AREA)
JP51350197A 1995-09-27 1996-09-19 Ｃ４マイクロバンプ、ｔａｂマイクロバンプおよび超大規模相互接続の電解めっき用たわみ性連続カソード接点回路 Expired - Fee Related JP4112615B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/534,489 US5807469A (en) 1995-09-27 1995-09-27 Flexible continuous cathode contact circuit for electrolytic plating of C4, tab microbumps, and ultra large scale interconnects
US08/534,489 1995-09-27
PCT/US1996/015032 WO1997012079A1 (en) 1995-09-27 1996-09-19 Flexible continuous cathode contact circuit for electrolytic plating of c4, tab microbumps, and ultra large scale interconnects

Publications (3)

Publication Number Publication Date
JP2000500825A JP2000500825A (ja) 2000-01-25
JP2000500825A5 JP2000500825A5 (OSRAM) 2004-09-02
JP4112615B2 true JP4112615B2 (ja) 2008-07-02

Family

ID=24130274

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51350197A Expired - Fee Related JP4112615B2 (ja) 1995-09-27 1996-09-19 Ｃ４マイクロバンプ、ｔａｂマイクロバンプおよび超大規模相互接続の電解めっき用たわみ性連続カソード接点回路

Country Status (6)

Country Link
US (2) US5807469A (OSRAM)
EP (1) EP0859877B1 (OSRAM)
JP (1) JP4112615B2 (OSRAM)
AU (1) AU7076496A (OSRAM)
DE (1) DE69632591T2 (OSRAM)
WO (1) WO1997012079A1 (OSRAM)

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Also Published As

Publication number Publication date
EP0859877A4 (en) 1999-10-13
DE69632591T2 (de) 2005-06-09
US5807469A (en) 1998-09-15
WO1997012079A1 (en) 1997-04-03
DE69632591D1 (de) 2004-07-01
JP2000500825A (ja) 2000-01-25
AU7076496A (en) 1997-04-17
EP0859877B1 (en) 2004-05-26
US5871626A (en) 1999-02-16
EP0859877A1 (en) 1998-08-26

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