JP4085289B2 - 焦電性磁器組成物、及び焦電素子、並びに赤外線検出器 - Google Patents
焦電性磁器組成物、及び焦電素子、並びに赤外線検出器 Download PDFInfo
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- 239000000203 mixture Substances 0.000 title claims description 42
- 229910052573 porcelain Inorganic materials 0.000 title claims description 27
- 239000000463 material Substances 0.000 claims description 28
- 229910052759 nickel Inorganic materials 0.000 claims description 18
- 230000003287 optical effect Effects 0.000 claims description 14
- 238000007789 sealing Methods 0.000 claims description 4
- 238000009413 insulation Methods 0.000 description 19
- 238000010304 firing Methods 0.000 description 13
- 150000001875 compounds Chemical class 0.000 description 12
- 238000000034 method Methods 0.000 description 12
- 239000013078 crystal Substances 0.000 description 9
- 238000002156 mixing Methods 0.000 description 9
- 230000010287 polarization Effects 0.000 description 9
- 239000000919 ceramic Substances 0.000 description 8
- 230000007423 decrease Effects 0.000 description 6
- -1 lead titanate compound Chemical class 0.000 description 6
- ORQBXQOJMQIAOY-UHFFFAOYSA-N nobelium Chemical compound [No] ORQBXQOJMQIAOY-UHFFFAOYSA-N 0.000 description 6
- 238000012545 processing Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 239000011230 binding agent Substances 0.000 description 4
- 238000005204 segregation Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 229910002077 partially stabilized zirconia Inorganic materials 0.000 description 3
- 230000005616 pyroelectricity Effects 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 101100513612 Microdochium nivale MnCO gene Proteins 0.000 description 2
- 229910010413 TiO 2 Inorganic materials 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 238000013329 compounding Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
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- 229920002545 silicone oil Polymers 0.000 description 2
- 230000002269 spontaneous effect Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- 229910000906 Bronze Inorganic materials 0.000 description 1
- 229910018054 Ni-Cu Inorganic materials 0.000 description 1
- 229910018481 Ni—Cu Inorganic materials 0.000 description 1
- 229910018605 Ni—Zn Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000018044 dehydration Effects 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical group [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000002003 electrode paste Substances 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
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- 229920001225 polyester resin Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
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- 239000010409 thin film Substances 0.000 description 1
- 230000036962 time dependent Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000001238 wet grinding Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/34—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using capacitors, e.g. pyroelectric capacitors
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- C04B35/46—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates
- C04B35/462—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates
- C04B35/472—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on lead titanates
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Description
2 焦電体
4 パッケージ
4a 開口部
5 光学フィルタ
ここで、Aサイト中のCaの含有モル比x、(Ni1/3Nb2/3)の含有モル比y、Aサイト成分とBサイト成分との配合モル比aは、下記数式(1)〜(3)を満足している。
0.01≦y≦0.06…(2)
0.001≦a≦0.02…(3)
また、本焦電性磁器組成物は、上記組成成分を有することにより、Ni、Ti及びMnを含む偏析物が、焼成された焼結体中で1.0vol%(0vol%を含む。)以下となるように構成されている。
Aサイト成分を構成するPbの一部をCaと置換することにより、比誘電率εr、及びキュリー温度Tcを赤外線検出器に適した値に制御することができる。しかしながら、Aサイト中のCaの含有モル比xが0.20未満になると、焼結性が低下し、緻密な焼結体が得られなくなる。一方、前記含有モル比xが0.27を超えるとキュリー温度Tcが260℃未満に低下してリフロー処理に耐えうるだけの耐熱性が得られなくなる。
Bサイト成分中のTiの一部を(Ni1/3Nb2/3)と置換することにより、焦電特性を向上させることができる。しかしながら、(Ni1/3Nb2/3)の含有モル比yが0.01未満の場合は、(Ni1/3Nb2/3)の含有量が少なすぎて実用化に足る焦電特性を得ることができない。一方、前記含有モル比yが0.06を超えると、(Ni1/3Nb2/3)の形態で結晶粒内に固溶しきれなくなったNi化合物やNb化合物が結晶粒界に析出し、このため緻密な焼結体を得ることができなくなる。
主成分中のAサイトとBサイトの配合モル比aを化学量論組成よりもAサイト過剰とすることにより、絶縁抵抗を低下させることができ、かつ、リフロー処理後でも良好な焦電特性を得ることができる。しかしながら、前記配合モル比aが0.001未満の場合は、Ni、Ti及びMnを含む偏析物が、焼成された焼結体中で1.0vol%を超えてしまい、絶縁抵抗を十分に低下させることができなくなるおそれがある。しかも、リフロー処理後の焦電特性も劣化する。一方、前記配合モル比aが0.02を超えると絶縁抵抗が過度に低下して分極処理が困難となる。
Mnの含有モル量が主成分100モルに対し0.3モル未満では焼結性が低下して緻密な焼結体を得ることができない。一方、Mnの含有モル量が主成分100モルに対し2.5モルを超えると、結晶粒内に固溶し切れなくなったMnの結晶粒界への偏析が顕著になり、焦電特性が劣化する。
加速電圧:15kV
照射電流:100nA
ピクセル数:250×250
ピクセルサイズ:0.3μm
すなわち、まず、Mnの濃度分布について、画像全体(250×250ピクセル中)の平均X線強度に対し2倍以上のX線強度を示すピクセルが存在するか否かを調べ、その結果が肯定的な場合、すなわち存在する場合はその画像位置にMnの偏析物が存在するとした。
ここで、Sは主面の面積(m2)であり、マイクロメータを使用して試料の直径を測定し、該直径から算出した。Δtは単位時間当たりの温度変化を示す。
Claims (6)
- 一般式(Pb1-xCax)(1+a){(Ni1/3Nb2/3)yTi(1-y)}O3(ただし、x、y、aはそれぞれ0.20≦x≦0.27、0.01≦y≦0.06、0.001≦a≦0.02)で表される化合物を主成分とし、該主成分100モルに対しMnが0.3〜2.5モル含有されていることを特徴とする焦電性磁器組成物。
- Ni、Ti及びMnを含む偏析物が、焼成された焼結体中で1.0vol%以下(0vol%を含む。)であることを特徴とする請求項1記載の焦電性磁器組成物。
- 焦電体と、前記焦電体の両主面に形成される電極とを有する焦電素子であって、
前記焦電体が、請求項1又は請求項2記載の焦電性磁器組成物で形成されていることを特徴とする焦電素子。 - 請求項3記載の焦電素子を具備していることを特徴とする赤外線検出器。
- 請求項3記載の焦電素子と、該焦電素子が収納されるパッケージと、所定波長の赤外線が透過する光学フィルタとを備えた表面実装型の赤外線検出器であって、
前記パッケージは1つの面が開口部を有する箱型形状に形成されると共に、前記パッケージの内部には前記焦電素子と電気的に接続される配線パターンが配設され、
前記光学フィルタは、前記赤外線を前記焦電素子に受光させる機能と、前記開口部を封止する蓋体としての機能とを有し、前記パッケージの前記開口部全域を覆うように配設されていることを特徴とする赤外線検出器。 - 前記焦電素子と並列には負荷抵抗が設けられていないことを特徴とする請求項4又は請求項5記載の赤外線検出器。
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PCT/JP2007/052349 WO2007125664A1 (ja) | 2006-04-28 | 2007-02-09 | 焦電性磁器組成物、及び焦電素子、並びに赤外線検出器 |
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JP2012122785A (ja) * | 2010-12-07 | 2012-06-28 | Sony Corp | 赤外線検出素子、赤外線撮像装置 |
EP2555266B1 (en) * | 2011-02-24 | 2014-03-19 | NGK Insulators, Ltd. | Pyroelectric element |
WO2013139553A2 (en) * | 2012-03-20 | 2013-09-26 | Asml Netherlands B.V. | Lithographic apparatus, sensor and method |
US8324783B1 (en) | 2012-04-24 | 2012-12-04 | UltraSolar Technology, Inc. | Non-decaying electric power generation from pyroelectric materials |
JP5465288B2 (ja) | 2012-08-08 | 2014-04-09 | Necトーキン株式会社 | 赤外線センサ |
JP6202245B2 (ja) * | 2013-03-22 | 2017-09-27 | セイコーエプソン株式会社 | 赤外線センサー及び熱電変換素子 |
JP2016076591A (ja) * | 2014-10-06 | 2016-05-12 | セイコーエプソン株式会社 | 焦電体、焦電体の製造方法、焦電素子、焦電素子の製造方法、熱電変換素子、熱電変換素子の製造方法、熱型光検出器、熱型光検出器の製造方法および電子機器 |
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JPS6023513B2 (ja) * | 1980-02-18 | 1985-06-07 | 株式会社東芝 | 酸化物圧電材料 |
JPS60191054A (ja) * | 1984-03-08 | 1985-09-28 | 東芝ライテック株式会社 | 焦電形赤外線検出素子 |
JPS63319241A (ja) | 1987-06-23 | 1988-12-27 | Toshiba Corp | 高誘電率磁器組成物 |
JPH01261876A (ja) * | 1988-04-12 | 1989-10-18 | Murata Mfg Co Ltd | 焦電性磁器組成物 |
JPH0821731B2 (ja) * | 1989-03-20 | 1996-03-04 | 浜松ホトニクス株式会社 | 赤外線検出装置 |
DE4115949A1 (de) * | 1991-05-16 | 1992-11-19 | Philips Patentverwaltung | Pyroelektrisches keramikmaterial und dessen verwendung |
JPH0558645A (ja) | 1991-09-03 | 1993-03-09 | Hitachi Metals Ltd | 圧電磁器組成物 |
JP3309479B2 (ja) | 1993-02-26 | 2002-07-29 | 株式会社村田製作所 | 圧電磁器 |
JPH09159524A (ja) * | 1995-12-07 | 1997-06-20 | Matsushita Electric Ind Co Ltd | 焦電体磁器組成物及びそれを用いた赤外線センサー |
JP4030190B2 (ja) * | 1998-06-18 | 2008-01-09 | 株式会社日本自動車部品総合研究所 | 圧電磁器組成物および圧電トランス |
JP2000077833A (ja) * | 1998-08-31 | 2000-03-14 | Matsushita Electric Ind Co Ltd | 電極形成方法及びそれを用いた焦電型赤外線センサ |
GB2347416B (en) * | 1999-02-22 | 2001-02-14 | Infrared Integrated Syst Ltd | Ferroelectric ceramics |
JP2003119075A (ja) | 2001-10-11 | 2003-04-23 | Murata Mfg Co Ltd | 焦電体磁器組成物の製造方法、焦電体磁器組成物および焦電型赤外線センサ |
JP3912098B2 (ja) * | 2001-12-14 | 2007-05-09 | 株式会社村田製作所 | 圧電磁器組成物およびそれを用いた圧電セラミック素子 |
JP4423850B2 (ja) * | 2002-11-12 | 2010-03-03 | 株式会社村田製作所 | 圧電磁器組成物およびそれを用いた圧電素子 |
JP2005154238A (ja) * | 2003-11-28 | 2005-06-16 | Matsushita Electric Ind Co Ltd | 圧電磁器組成物の製造方法 |
JP4926389B2 (ja) * | 2004-06-17 | 2012-05-09 | 株式会社豊田中央研究所 | 結晶配向セラミックス、及びその製造方法 |
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CN101437777B (zh) | 2013-09-11 |
US20100044568A1 (en) | 2010-02-25 |
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US7897921B2 (en) | 2011-03-01 |
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