JP4073509B2 - 反射型位相格子 - Google Patents

反射型位相格子 Download PDF

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Publication number
JP4073509B2
JP4073509B2 JP29416196A JP29416196A JP4073509B2 JP 4073509 B2 JP4073509 B2 JP 4073509B2 JP 29416196 A JP29416196 A JP 29416196A JP 29416196 A JP29416196 A JP 29416196A JP 4073509 B2 JP4073509 B2 JP 4073509B2
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JP
Japan
Prior art keywords
layer
refractive index
phase grating
layers
partial
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP29416196A
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English (en)
Japanese (ja)
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JPH09171104A5 (enExample
JPH09171104A (ja
Inventor
アンドレアス・フランツ
エルヴイン・シユパンナー
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
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Dr Johannes Heidenhain GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Publication of JPH09171104A publication Critical patent/JPH09171104A/ja
Publication of JPH09171104A5 publication Critical patent/JPH09171104A5/ja
Application granted granted Critical
Publication of JP4073509B2 publication Critical patent/JP4073509B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1861—Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1814—Diffraction gratings structurally combined with one or more further optical elements, e.g. lenses, mirrors, prisms or other diffraction gratings

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Optical Filters (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Holo Graphy (AREA)
JP29416196A 1995-11-11 1996-11-06 反射型位相格子 Expired - Fee Related JP4073509B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE95117778:1 1995-11-11
EP95117778A EP0773458B1 (de) 1995-11-11 1995-11-11 Auflicht-Phasengitter

Publications (3)

Publication Number Publication Date
JPH09171104A JPH09171104A (ja) 1997-06-30
JPH09171104A5 JPH09171104A5 (enExample) 2004-11-04
JP4073509B2 true JP4073509B2 (ja) 2008-04-09

Family

ID=8219805

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29416196A Expired - Fee Related JP4073509B2 (ja) 1995-11-11 1996-11-06 反射型位相格子

Country Status (4)

Country Link
EP (1) EP0773458B1 (enExample)
JP (1) JP4073509B2 (enExample)
AT (1) ATE190408T1 (enExample)
DE (1) DE59507969D1 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10011872A1 (de) * 2000-03-10 2001-09-27 Heidenhain Gmbh Dr Johannes Reflexions-Messteilung und Verfahren zur Herstellung derselben
DE10150099A1 (de) 2001-10-11 2003-04-17 Heidenhain Gmbh Dr Johannes Verfahren zur Herstellung eines Maßstabes, sowie derart hergestellter Maßstab und eine Positionsmesseinrichtung
DE102006027047A1 (de) * 2006-06-10 2007-12-13 Dr. Johannes Heidenhain Gmbh Maßstab mit einem reflektierenden Phasengitter
FR2933782B1 (fr) * 2008-07-11 2010-08-13 Thales Sa Dispositif de correction des defauts optiques d'un miroir de telescope
DE102016201068A1 (de) * 2016-01-26 2017-07-27 Dr. Johannes Heidenhain Gmbh Maßverkörperung und Positionsmesseinrichtung mit dieser Maßverkörperung
JP7060370B2 (ja) 2017-12-18 2022-04-26 株式会社ミツトヨ スケールおよびその製造方法
DE102019206937A1 (de) * 2019-05-14 2020-11-19 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3412980A1 (de) * 1984-04-06 1985-10-17 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Auflichtphasengitter und verfahren zur herstellung eines auflichtphasengitters
DE3905730C2 (de) * 1989-02-24 1995-06-14 Heidenhain Gmbh Dr Johannes Positionsmeßeinrichtung

Also Published As

Publication number Publication date
DE59507969D1 (de) 2000-04-13
EP0773458B1 (de) 2000-03-08
ATE190408T1 (de) 2000-03-15
JPH09171104A (ja) 1997-06-30
EP0773458A1 (de) 1997-05-14

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