DE59507969D1 - Auflicht-Phasengitter - Google Patents

Auflicht-Phasengitter

Info

Publication number
DE59507969D1
DE59507969D1 DE59507969T DE59507969T DE59507969D1 DE 59507969 D1 DE59507969 D1 DE 59507969D1 DE 59507969 T DE59507969 T DE 59507969T DE 59507969 T DE59507969 T DE 59507969T DE 59507969 D1 DE59507969 D1 DE 59507969D1
Authority
DE
Germany
Prior art keywords
layer
incident light
phase grating
layers
light phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE59507969T
Other languages
German (de)
English (en)
Inventor
Dr Franz
Erwin Spanner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
Original Assignee
Dr Johannes Heidenhain GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Application granted granted Critical
Publication of DE59507969D1 publication Critical patent/DE59507969D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1861—Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1814—Diffraction gratings structurally combined with one or more further optical elements, e.g. lenses, mirrors, prisms or other diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Optical Filters (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Holo Graphy (AREA)
DE59507969T 1995-11-11 1995-11-11 Auflicht-Phasengitter Expired - Lifetime DE59507969D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP95117778A EP0773458B1 (de) 1995-11-11 1995-11-11 Auflicht-Phasengitter

Publications (1)

Publication Number Publication Date
DE59507969D1 true DE59507969D1 (de) 2000-04-13

Family

ID=8219805

Family Applications (1)

Application Number Title Priority Date Filing Date
DE59507969T Expired - Lifetime DE59507969D1 (de) 1995-11-11 1995-11-11 Auflicht-Phasengitter

Country Status (4)

Country Link
EP (1) EP0773458B1 (enExample)
JP (1) JP4073509B2 (enExample)
AT (1) ATE190408T1 (enExample)
DE (1) DE59507969D1 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10011872A1 (de) * 2000-03-10 2001-09-27 Heidenhain Gmbh Dr Johannes Reflexions-Messteilung und Verfahren zur Herstellung derselben
DE10150099A1 (de) 2001-10-11 2003-04-17 Heidenhain Gmbh Dr Johannes Verfahren zur Herstellung eines Maßstabes, sowie derart hergestellter Maßstab und eine Positionsmesseinrichtung
DE102006027047A1 (de) * 2006-06-10 2007-12-13 Dr. Johannes Heidenhain Gmbh Maßstab mit einem reflektierenden Phasengitter
FR2933782B1 (fr) * 2008-07-11 2010-08-13 Thales Sa Dispositif de correction des defauts optiques d'un miroir de telescope
DE102016201068A1 (de) * 2016-01-26 2017-07-27 Dr. Johannes Heidenhain Gmbh Maßverkörperung und Positionsmesseinrichtung mit dieser Maßverkörperung
JP7060370B2 (ja) 2017-12-18 2022-04-26 株式会社ミツトヨ スケールおよびその製造方法
DE102019206937A1 (de) * 2019-05-14 2020-11-19 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3412980A1 (de) * 1984-04-06 1985-10-17 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Auflichtphasengitter und verfahren zur herstellung eines auflichtphasengitters
DE3905730C2 (de) * 1989-02-24 1995-06-14 Heidenhain Gmbh Dr Johannes Positionsmeßeinrichtung

Also Published As

Publication number Publication date
EP0773458B1 (de) 2000-03-08
JP4073509B2 (ja) 2008-04-09
ATE190408T1 (de) 2000-03-15
JPH09171104A (ja) 1997-06-30
EP0773458A1 (de) 1997-05-14

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition