JPH09171104A5 - - Google Patents

Info

Publication number
JPH09171104A5
JPH09171104A5 JP1996294161A JP29416196A JPH09171104A5 JP H09171104 A5 JPH09171104 A5 JP H09171104A5 JP 1996294161 A JP1996294161 A JP 1996294161A JP 29416196 A JP29416196 A JP 29416196A JP H09171104 A5 JPH09171104 A5 JP H09171104A5
Authority
JP
Japan
Prior art keywords
layer
phase grating
refractive index
reflective phase
grating according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1996294161A
Other languages
English (en)
Japanese (ja)
Other versions
JPH09171104A (ja
JP4073509B2 (ja
Filing date
Publication date
Priority claimed from EP95117778A external-priority patent/EP0773458B1/de
Application filed filed Critical
Publication of JPH09171104A publication Critical patent/JPH09171104A/ja
Publication of JPH09171104A5 publication Critical patent/JPH09171104A5/ja
Application granted granted Critical
Publication of JP4073509B2 publication Critical patent/JP4073509B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP29416196A 1995-11-11 1996-11-06 反射型位相格子 Expired - Fee Related JP4073509B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE95117778:1 1995-11-11
EP95117778A EP0773458B1 (de) 1995-11-11 1995-11-11 Auflicht-Phasengitter

Publications (3)

Publication Number Publication Date
JPH09171104A JPH09171104A (ja) 1997-06-30
JPH09171104A5 true JPH09171104A5 (enExample) 2004-11-04
JP4073509B2 JP4073509B2 (ja) 2008-04-09

Family

ID=8219805

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29416196A Expired - Fee Related JP4073509B2 (ja) 1995-11-11 1996-11-06 反射型位相格子

Country Status (4)

Country Link
EP (1) EP0773458B1 (enExample)
JP (1) JP4073509B2 (enExample)
AT (1) ATE190408T1 (enExample)
DE (1) DE59507969D1 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10011872A1 (de) 2000-03-10 2001-09-27 Heidenhain Gmbh Dr Johannes Reflexions-Messteilung und Verfahren zur Herstellung derselben
DE10150099A1 (de) 2001-10-11 2003-04-17 Heidenhain Gmbh Dr Johannes Verfahren zur Herstellung eines Maßstabes, sowie derart hergestellter Maßstab und eine Positionsmesseinrichtung
DE102006027047A1 (de) * 2006-06-10 2007-12-13 Dr. Johannes Heidenhain Gmbh Maßstab mit einem reflektierenden Phasengitter
FR2933782B1 (fr) * 2008-07-11 2010-08-13 Thales Sa Dispositif de correction des defauts optiques d'un miroir de telescope
DE102016201068A1 (de) 2016-01-26 2017-07-27 Dr. Johannes Heidenhain Gmbh Maßverkörperung und Positionsmesseinrichtung mit dieser Maßverkörperung
JP7060370B2 (ja) 2017-12-18 2022-04-26 株式会社ミツトヨ スケールおよびその製造方法
DE102019206937A1 (de) * 2019-05-14 2020-11-19 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3412980A1 (de) * 1984-04-06 1985-10-17 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Auflichtphasengitter und verfahren zur herstellung eines auflichtphasengitters
DE3905730C2 (de) * 1989-02-24 1995-06-14 Heidenhain Gmbh Dr Johannes Positionsmeßeinrichtung

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