JP4069435B2 - スピンドルシール装置 - Google Patents

スピンドルシール装置 Download PDF

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Publication number
JP4069435B2
JP4069435B2 JP2000050132A JP2000050132A JP4069435B2 JP 4069435 B2 JP4069435 B2 JP 4069435B2 JP 2000050132 A JP2000050132 A JP 2000050132A JP 2000050132 A JP2000050132 A JP 2000050132A JP 4069435 B2 JP4069435 B2 JP 4069435B2
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JP
Japan
Prior art keywords
bearing
gas
gas bearing
elastic member
spindle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2000050132A
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English (en)
Japanese (ja)
Other versions
JP2001221345A5 (enExample
JP2001221345A (ja
Inventor
浩志 相沢
淳 高橋
好史 稲垣
輝彦 藤崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NSK Ltd
Original Assignee
NSK Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NSK Ltd filed Critical NSK Ltd
Priority to JP2000050132A priority Critical patent/JP4069435B2/ja
Publication of JP2001221345A publication Critical patent/JP2001221345A/ja
Publication of JP2001221345A5 publication Critical patent/JP2001221345A5/ja
Application granted granted Critical
Publication of JP4069435B2 publication Critical patent/JP4069435B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/72—Sealings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C21/00—Combinations of sliding-contact bearings with ball or roller bearings, for exclusively rotary movement
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
JP2000050132A 1999-11-30 2000-02-25 スピンドルシール装置 Expired - Fee Related JP4069435B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000050132A JP4069435B2 (ja) 1999-11-30 2000-02-25 スピンドルシール装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP11-340814 1999-11-30
JP34081499 1999-11-30
JP2000050132A JP4069435B2 (ja) 1999-11-30 2000-02-25 スピンドルシール装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2006296691A Division JP2007113786A (ja) 1999-11-30 2006-10-31 スピンドルシール装置

Publications (3)

Publication Number Publication Date
JP2001221345A JP2001221345A (ja) 2001-08-17
JP2001221345A5 JP2001221345A5 (enExample) 2005-08-11
JP4069435B2 true JP4069435B2 (ja) 2008-04-02

Family

ID=26576803

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000050132A Expired - Fee Related JP4069435B2 (ja) 1999-11-30 2000-02-25 スピンドルシール装置

Country Status (1)

Country Link
JP (1) JP4069435B2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4831809B2 (ja) * 2005-11-16 2011-12-07 三菱重工業株式会社 濁水用回転装置の軸シール構造
KR100705118B1 (ko) * 2005-12-07 2007-04-09 현대자동차주식회사 기어박스의 절삭유 유입방지장치
JP5402002B2 (ja) * 2009-01-13 2014-01-29 株式会社ジェイテクト 回転軸のシール装置およびシール方法
JP5796645B2 (ja) * 2013-11-20 2015-10-21 日本精工株式会社 回転機構、工作機械及び半導体製造装置
CN105814347A (zh) 2014-01-14 2016-07-27 日本精工株式会社 旋转机构、机床以及半导体制造装置

Also Published As

Publication number Publication date
JP2001221345A (ja) 2001-08-17

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