JP4042179B2 - 薬液処理装置 - Google Patents
薬液処理装置 Download PDFInfo
- Publication number
- JP4042179B2 JP4042179B2 JP11825497A JP11825497A JP4042179B2 JP 4042179 B2 JP4042179 B2 JP 4042179B2 JP 11825497 A JP11825497 A JP 11825497A JP 11825497 A JP11825497 A JP 11825497A JP 4042179 B2 JP4042179 B2 JP 4042179B2
- Authority
- JP
- Japan
- Prior art keywords
- brush
- substrate
- chemical
- color filter
- tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000126 substance Substances 0.000 title claims description 14
- 239000000758 substrate Substances 0.000 claims description 56
- 238000000034 method Methods 0.000 claims description 36
- 238000012545 processing Methods 0.000 claims description 20
- 238000012993 chemical processing Methods 0.000 claims description 14
- 238000004140 cleaning Methods 0.000 claims description 10
- 239000000049 pigment Substances 0.000 claims description 7
- 239000008155 medical solution Substances 0.000 claims description 5
- 230000001680 brushing effect Effects 0.000 claims description 2
- 238000010129 solution processing Methods 0.000 claims description 2
- 238000011161 development Methods 0.000 description 14
- 239000007788 liquid Substances 0.000 description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- 239000011248 coating agent Substances 0.000 description 7
- 238000000576 coating method Methods 0.000 description 7
- 239000000243 solution Substances 0.000 description 7
- 239000011521 glass Substances 0.000 description 5
- 239000007864 aqueous solution Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- 239000003513 alkali Substances 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002985 plastic film Substances 0.000 description 2
- 241001465754 Metazoa Species 0.000 description 1
- 239000004677 Nylon Substances 0.000 description 1
- 229920002292 Nylon 6 Polymers 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
- DHKHKXVYLBGOIT-UHFFFAOYSA-N acetaldehyde Diethyl Acetal Natural products CCOC(C)OCC DHKHKXVYLBGOIT-UHFFFAOYSA-N 0.000 description 1
- 125000002777 acetyl group Chemical class [H]C([H])([H])C(*)=O 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 239000002657 fibrous material Substances 0.000 description 1
- 230000003695 hair diameter Effects 0.000 description 1
- 239000002563 ionic surfactant Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000002736 nonionic surfactant Substances 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 235000014593 oils and fats Nutrition 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 229920005575 poly(amic acid) Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229920002994 synthetic fiber Polymers 0.000 description 1
- 239000012209 synthetic fiber Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
Images
Landscapes
- Photosensitive Polymer And Photoresist Processing (AREA)
- Cleaning In General (AREA)
- Optical Filters (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11825497A JP4042179B2 (ja) | 1997-05-08 | 1997-05-08 | 薬液処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11825497A JP4042179B2 (ja) | 1997-05-08 | 1997-05-08 | 薬液処理装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH10307406A JPH10307406A (ja) | 1998-11-17 |
| JPH10307406A5 JPH10307406A5 (enExample) | 2005-04-07 |
| JP4042179B2 true JP4042179B2 (ja) | 2008-02-06 |
Family
ID=14732069
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11825497A Expired - Fee Related JP4042179B2 (ja) | 1997-05-08 | 1997-05-08 | 薬液処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4042179B2 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005249906A (ja) * | 2004-03-02 | 2005-09-15 | Toppan Printing Co Ltd | 液晶表示装置用カラーフィルタの洗浄装置及び洗浄方法 |
| JP2006231144A (ja) * | 2005-02-23 | 2006-09-07 | Toray Monofilament Co Ltd | 液晶画面洗浄用ブラシ毛材および液晶画面洗浄用ブラシ |
| CN103521491B (zh) * | 2013-09-25 | 2015-05-20 | 京东方科技集团股份有限公司 | 清洗液吸取装置和显影液冲洗设备 |
-
1997
- 1997-05-08 JP JP11825497A patent/JP4042179B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH10307406A (ja) | 1998-11-17 |
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