JPH10307406A5 - - Google Patents

Info

Publication number
JPH10307406A5
JPH10307406A5 JP1997118254A JP11825497A JPH10307406A5 JP H10307406 A5 JPH10307406 A5 JP H10307406A5 JP 1997118254 A JP1997118254 A JP 1997118254A JP 11825497 A JP11825497 A JP 11825497A JP H10307406 A5 JPH10307406 A5 JP H10307406A5
Authority
JP
Japan
Prior art keywords
chemical
brush
treatment
treatment tank
treatment device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997118254A
Other languages
English (en)
Japanese (ja)
Other versions
JP4042179B2 (ja
JPH10307406A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP11825497A priority Critical patent/JP4042179B2/ja
Priority claimed from JP11825497A external-priority patent/JP4042179B2/ja
Publication of JPH10307406A publication Critical patent/JPH10307406A/ja
Publication of JPH10307406A5 publication Critical patent/JPH10307406A5/ja
Application granted granted Critical
Publication of JP4042179B2 publication Critical patent/JP4042179B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP11825497A 1997-05-08 1997-05-08 薬液処理装置 Expired - Fee Related JP4042179B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11825497A JP4042179B2 (ja) 1997-05-08 1997-05-08 薬液処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11825497A JP4042179B2 (ja) 1997-05-08 1997-05-08 薬液処理装置

Publications (3)

Publication Number Publication Date
JPH10307406A JPH10307406A (ja) 1998-11-17
JPH10307406A5 true JPH10307406A5 (enExample) 2005-04-07
JP4042179B2 JP4042179B2 (ja) 2008-02-06

Family

ID=14732069

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11825497A Expired - Fee Related JP4042179B2 (ja) 1997-05-08 1997-05-08 薬液処理装置

Country Status (1)

Country Link
JP (1) JP4042179B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005249906A (ja) * 2004-03-02 2005-09-15 Toppan Printing Co Ltd 液晶表示装置用カラーフィルタの洗浄装置及び洗浄方法
JP2006231144A (ja) * 2005-02-23 2006-09-07 Toray Monofilament Co Ltd 液晶画面洗浄用ブラシ毛材および液晶画面洗浄用ブラシ
CN103521491B (zh) * 2013-09-25 2015-05-20 京东方科技集团股份有限公司 清洗液吸取装置和显影液冲洗设备

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