JP4028891B2 - 多成分系硬質物層の製造法および複合体 - Google Patents
多成分系硬質物層の製造法および複合体 Download PDFInfo
- Publication number
- JP4028891B2 JP4028891B2 JP50881297A JP50881297A JP4028891B2 JP 4028891 B2 JP4028891 B2 JP 4028891B2 JP 50881297 A JP50881297 A JP 50881297A JP 50881297 A JP50881297 A JP 50881297A JP 4028891 B2 JP4028891 B2 JP 4028891B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- hard
- metal
- substrate
- cvd
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000002131 composite material Substances 0.000 title claims abstract description 11
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 229910052751 metal Inorganic materials 0.000 claims abstract description 33
- 239000002184 metal Substances 0.000 claims abstract description 33
- 229910052726 zirconium Inorganic materials 0.000 claims abstract description 30
- 238000000034 method Methods 0.000 claims abstract description 26
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 26
- 229910052735 hafnium Inorganic materials 0.000 claims abstract description 11
- 150000002739 metals Chemical class 0.000 claims abstract description 8
- 239000010410 layer Substances 0.000 claims description 91
- 229910052757 nitrogen Inorganic materials 0.000 claims description 43
- 229910052799 carbon Inorganic materials 0.000 claims description 34
- 239000007789 gas Substances 0.000 claims description 33
- 238000006243 chemical reaction Methods 0.000 claims description 32
- 239000000758 substrate Substances 0.000 claims description 30
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 26
- 239000000203 mixture Substances 0.000 claims description 24
- 238000005229 chemical vapour deposition Methods 0.000 claims description 22
- 239000000463 material Substances 0.000 claims description 22
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 11
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 10
- 229910052739 hydrogen Inorganic materials 0.000 claims description 10
- 229910052786 argon Inorganic materials 0.000 claims description 9
- 229910001510 metal chloride Inorganic materials 0.000 claims description 9
- 239000000126 substance Substances 0.000 claims description 7
- 229910000831 Steel Inorganic materials 0.000 claims description 5
- 229910052804 chromium Inorganic materials 0.000 claims description 5
- 239000001257 hydrogen Substances 0.000 claims description 5
- 229910052758 niobium Inorganic materials 0.000 claims description 5
- 239000010959 steel Substances 0.000 claims description 5
- 239000000919 ceramic Substances 0.000 claims description 4
- 239000011195 cermet Substances 0.000 claims description 4
- 229910052720 vanadium Inorganic materials 0.000 claims description 4
- 229910052715 tantalum Inorganic materials 0.000 claims description 3
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 claims description 2
- CKUAXEQHGKSLHN-UHFFFAOYSA-N [C].[N] Chemical compound [C].[N] CKUAXEQHGKSLHN-UHFFFAOYSA-N 0.000 claims description 2
- 150000001805 chlorine compounds Chemical class 0.000 claims description 2
- 229910052750 molybdenum Inorganic materials 0.000 claims description 2
- 229910052721 tungsten Inorganic materials 0.000 claims description 2
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims 1
- 239000002356 single layer Substances 0.000 claims 1
- 239000010936 titanium Substances 0.000 abstract description 45
- 238000005520 cutting process Methods 0.000 abstract description 34
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 abstract description 12
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 abstract description 6
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 abstract description 3
- 238000000576 coating method Methods 0.000 description 29
- WEVYAHXRMPXWCK-UHFFFAOYSA-N Acetonitrile Chemical compound CC#N WEVYAHXRMPXWCK-UHFFFAOYSA-N 0.000 description 27
- 239000011248 coating agent Substances 0.000 description 20
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 12
- 230000002441 reversible effect Effects 0.000 description 12
- DUNKXUFBGCUVQW-UHFFFAOYSA-J zirconium tetrachloride Chemical compound Cl[Zr](Cl)(Cl)Cl DUNKXUFBGCUVQW-UHFFFAOYSA-J 0.000 description 12
- 150000001875 compounds Chemical class 0.000 description 11
- 150000004767 nitrides Chemical class 0.000 description 10
- 229910007926 ZrCl Inorganic materials 0.000 description 9
- BAVYZALUXZFZLV-UHFFFAOYSA-N Methylamine Chemical compound NC BAVYZALUXZFZLV-UHFFFAOYSA-N 0.000 description 8
- 238000000151 deposition Methods 0.000 description 7
- 238000005240 physical vapour deposition Methods 0.000 description 7
- 150000001247 metal acetylides Chemical class 0.000 description 6
- 229910026551 ZrC Inorganic materials 0.000 description 5
- OTCHGXYCWNXDOA-UHFFFAOYSA-N [C].[Zr] Chemical compound [C].[Zr] OTCHGXYCWNXDOA-UHFFFAOYSA-N 0.000 description 5
- 230000008021 deposition Effects 0.000 description 5
- 239000012634 fragment Substances 0.000 description 5
- 238000003801 milling Methods 0.000 description 5
- 150000002825 nitriles Chemical group 0.000 description 5
- XJDNKRIXUMDJCW-UHFFFAOYSA-J titanium tetrachloride Chemical compound Cl[Ti](Cl)(Cl)Cl XJDNKRIXUMDJCW-UHFFFAOYSA-J 0.000 description 5
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 4
- 239000011651 chromium Substances 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 239000010955 niobium Substances 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- -1 zirconium carbides Chemical class 0.000 description 4
- 238000002441 X-ray diffraction Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000012159 carrier gas Substances 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- PDPJQWYGJJBYLF-UHFFFAOYSA-J hafnium tetrachloride Chemical compound Cl[Hf](Cl)(Cl)Cl PDPJQWYGJJBYLF-UHFFFAOYSA-J 0.000 description 3
- 239000002244 precipitate Substances 0.000 description 3
- 229910052845 zircon Inorganic materials 0.000 description 3
- GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- XZMCDFZZKTWFGF-UHFFFAOYSA-N Cyanamide Chemical compound NC#N XZMCDFZZKTWFGF-UHFFFAOYSA-N 0.000 description 2
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 2
- 229910000997 High-speed steel Inorganic materials 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- LELOWRISYMNNSU-UHFFFAOYSA-N Hydrocyanic acid Natural products N#C LELOWRISYMNNSU-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 230000014759 maintenance of location Effects 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 238000004452 microanalysis Methods 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 2
- JMANVNJQNLATNU-UHFFFAOYSA-N oxalonitrile Chemical compound N#CC#N JMANVNJQNLATNU-UHFFFAOYSA-N 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 229910002059 quaternary alloy Inorganic materials 0.000 description 2
- 229910052723 transition metal Inorganic materials 0.000 description 2
- 150000003624 transition metals Chemical class 0.000 description 2
- GPPXJZIENCGNKB-UHFFFAOYSA-N vanadium Chemical compound [V]#[V] GPPXJZIENCGNKB-UHFFFAOYSA-N 0.000 description 2
- KPZGRMZPZLOPBS-UHFFFAOYSA-N 1,3-dichloro-2,2-bis(chloromethyl)propane Chemical compound ClCC(CCl)(CCl)CCl KPZGRMZPZLOPBS-UHFFFAOYSA-N 0.000 description 1
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910000851 Alloy steel Inorganic materials 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910001208 Crucible steel Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910009043 WC-Co Inorganic materials 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- LNDJVIYUJOJFSO-UHFFFAOYSA-N cyanoacetylene Chemical group C#CC#N LNDJVIYUJOJFSO-UHFFFAOYSA-N 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010494 dissociation reaction Methods 0.000 description 1
- 230000005593 dissociations Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- NKCCODPFBDGPRJ-UHFFFAOYSA-N nitridocarbon(1+) Chemical compound N#[C+] NKCCODPFBDGPRJ-UHFFFAOYSA-N 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000000678 plasma activation Methods 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 150000003254 radicals Chemical class 0.000 description 1
- 239000011541 reaction mixture Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- FOZHTJJTSSSURD-UHFFFAOYSA-J titanium(4+);dicarbonate Chemical compound [Ti+4].[O-]C([O-])=O.[O-]C([O-])=O FOZHTJJTSSSURD-UHFFFAOYSA-J 0.000 description 1
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 1
- ZVWKZXLXHLZXLS-UHFFFAOYSA-N zirconium nitride Chemical compound [Zr]#N ZVWKZXLXHLZXLS-UHFFFAOYSA-N 0.000 description 1
- XJUNLJFOHNHSAR-UHFFFAOYSA-J zirconium(4+);dicarbonate Chemical compound [Zr+4].[O-]C([O-])=O.[O-]C([O-])=O XJUNLJFOHNHSAR-UHFFFAOYSA-J 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/36—Carbonitrides
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T407/00—Cutters, for shaping
- Y10T407/27—Cutters, for shaping comprising tool of specific chemical composition
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31678—Of metal
Landscapes
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Manufacture Of Alloys Or Alloy Compounds (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19530518.3 | 1995-08-19 | ||
| DE1995130517 DE19530517A1 (de) | 1995-08-19 | 1995-08-19 | Verbundkörper und Verfahren zu dessen Herstellung |
| DE1995130518 DE19530518A1 (de) | 1995-08-19 | 1995-08-19 | Verfahren zur Herstellung von Multikomponenten-Carbonitrid-Hartstoffschichten und Verbundkörper |
| DE19530517.5 | 1995-08-19 | ||
| PCT/DE1996/001425 WO1997007260A1 (de) | 1995-08-19 | 1996-07-27 | Verbundkörper und verfahren zu dessen herstellung |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH11510856A JPH11510856A (ja) | 1999-09-21 |
| JPH11510856A5 JPH11510856A5 (https=) | 2004-08-12 |
| JP4028891B2 true JP4028891B2 (ja) | 2007-12-26 |
Family
ID=26017834
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50881297A Expired - Fee Related JP4028891B2 (ja) | 1995-08-19 | 1996-07-27 | 多成分系硬質物層の製造法および複合体 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US5981078A (https=) |
| EP (1) | EP0845053B1 (https=) |
| JP (1) | JP4028891B2 (https=) |
| AT (1) | ATE206772T1 (https=) |
| DE (1) | DE59607891D1 (https=) |
| WO (1) | WO1997007260A1 (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11623893B2 (en) | 2018-10-11 | 2023-04-11 | Mitsubishi Materials Corporation | Surface-coated cutting tool in which hard coating layer exhibits exceptional welding resistance, plastic deformation resistance, and anomalous damage resistance |
| WO2023189595A1 (ja) | 2022-03-30 | 2023-10-05 | 三菱マテリアル株式会社 | 表面被覆切削工具 |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1998031846A1 (de) * | 1997-01-21 | 1998-07-23 | Widia Gmbh | Verbundkörper und verfahren zu seiner herstellung |
| DE19719195A1 (de) * | 1997-05-09 | 1998-11-12 | Widia Gmbh | Schneideinsatz zum Zerspanen und Verfahren zur Herstellung dieses Schneideinsatzes |
| WO2000024947A1 (en) * | 1998-10-23 | 2000-05-04 | Ebara Corporation | Sliding member and manufacturing method therefor |
| DE10016958A1 (de) * | 2000-04-06 | 2001-10-18 | Widia Gmbh | Verfahren zur Herstellung von Multilagenschichten auf Substratkörpern und Verbundwerkstoff, bestehend aus einem beschichteten Substratkörper |
| SE0004203D0 (sv) * | 2000-11-16 | 2000-11-16 | Haakan Hugosson | A surface coating |
| SE527349C2 (sv) * | 2003-04-24 | 2006-02-14 | Seco Tools Ab | Skär med beläggning av skikt av MTCVD-Ti (C,N) med styrd kornstorlek och morfologi och metod för att belägga skäret |
| SE527346C2 (sv) * | 2003-04-24 | 2006-02-14 | Seco Tools Ab | Skär med beläggning av skikt av MTCVD-Ti (C,N) med styrd kornstorlek och morfologi och metod för att belägga skäret |
| DE10322871A1 (de) * | 2003-05-21 | 2004-12-16 | Kennametal Widia Gmbh & Co.Kg | Sinterkörper und Verfahren zu seiner Herstellung |
| US7803464B2 (en) * | 2004-12-27 | 2010-09-28 | Sumitomo Electric Hardmetal Corp. | Surface-coated cutting tool |
| JP4824989B2 (ja) * | 2005-11-02 | 2011-11-30 | 株式会社神戸製鋼所 | 硬質皮膜 |
| JP5138892B2 (ja) | 2006-01-20 | 2013-02-06 | 株式会社神戸製鋼所 | 硬質皮膜 |
| CN101557896B (zh) * | 2006-12-25 | 2010-09-29 | 京瓷株式会社 | 表面被覆工具及被切削物的加工方法 |
| AT505221B1 (de) * | 2007-05-08 | 2009-09-15 | Bihler Edelstahl Gmbh | Werkzeug mit beschichtung |
| DE102011087715A1 (de) * | 2011-12-05 | 2013-07-25 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Hartstoffbeschichtete körper aus metall, hartmetall, cermet oder keramik sowie verfahren zur herstellung derartiger körper |
| US8420237B1 (en) | 2012-02-20 | 2013-04-16 | Wenping Jiang | Adherent coating on carbide and ceramic substrates |
| EP3074619B1 (en) | 2013-11-26 | 2024-04-10 | RTX Corporation | Method of providing a self-healing coating |
| US11299807B2 (en) * | 2017-09-29 | 2022-04-12 | Mitsubishi Materials Corporation | Surface-coated cutting tool in which hard coating layer exhibits exceptional adhesion resistance and anomalous damage resistance |
| JP7425990B2 (ja) * | 2020-03-19 | 2024-02-01 | 三菱マテリアル株式会社 | 表面被覆切削工具の製造方法 |
| CN115124348B (zh) * | 2022-05-31 | 2023-07-11 | 西北工业大学 | 一种单相(HfxZr1-x)N固溶体超高温抗烧蚀陶瓷涂层及制备方法 |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE795014A (fr) * | 1972-02-11 | 1973-05-29 | Gen Electric | Produits du type carbure agglomere revetu |
| AT316160B (de) * | 1972-03-10 | 1974-06-25 | Plansee Metallwerk | Verfahren zur Herstellung von verschleißfesten Überzügen auf Verschleißteilen aller Art |
| US4169913A (en) * | 1978-03-01 | 1979-10-02 | Sumitomo Electric Industries, Ltd. | Coated tool steel and machining tool formed therefrom |
| JPS55120936A (en) * | 1979-02-27 | 1980-09-17 | Hitachi Metals Ltd | Covered tool |
| DE2917348C2 (de) * | 1979-04-28 | 1984-07-12 | Fried. Krupp Gmbh, 4300 Essen | Verschleißfester Verbundkörper |
| JPS55154565A (en) * | 1979-05-22 | 1980-12-02 | Hitachi Metals Ltd | Surface-covered sintered hard alloy member |
| JPS6199678A (ja) * | 1984-10-22 | 1986-05-17 | Sumitomo Electric Ind Ltd | 表面被覆焼結硬質合金の製造法 |
| JPS6256564A (ja) * | 1985-09-06 | 1987-03-12 | Mitsubishi Metal Corp | 耐摩耗性のすぐれた表面被覆硬質部材 |
| JPS6436760A (en) * | 1987-07-31 | 1989-02-07 | Sumitomo Electric Industries | Coated hard alloy and its production |
| JPH01129971A (ja) * | 1987-11-13 | 1989-05-23 | Sumitomo Electric Ind Ltd | 被覆切削工具製造法 |
| JPH0364469A (ja) * | 1989-08-01 | 1991-03-19 | Hitachi Tool Eng Ltd | 被覆超硬質合金工具 |
| US5325747A (en) * | 1990-09-17 | 1994-07-05 | Kennametal Inc. | Method of machining using coated cutting tools |
| JPH05306461A (ja) * | 1992-04-28 | 1993-11-19 | Riken Corp | 内燃機関の耐摩耗性摺動部材 |
| JP3198636B2 (ja) * | 1992-06-30 | 2001-08-13 | 三菱マテリアル株式会社 | 傾斜硬質層被覆超硬合金製切削工具 |
| DE4239234A1 (de) * | 1992-11-21 | 1994-06-09 | Krupp Widia Gmbh | Werkzeug und Verfahren zur Beschichtung eines Werkzeuggrundkörpers |
| DE4313305C2 (de) * | 1993-04-23 | 1995-06-01 | Cerasiv Gmbh | Schneidwerkzeug |
| KR0170453B1 (ko) * | 1993-08-16 | 1999-02-18 | 쿠라우찌 노리타카 | 절삭공구용초경합금 및 피복초경합금 |
-
1996
- 1996-07-27 AT AT96924786T patent/ATE206772T1/de not_active IP Right Cessation
- 1996-07-27 WO PCT/DE1996/001425 patent/WO1997007260A1/de not_active Ceased
- 1996-07-27 JP JP50881297A patent/JP4028891B2/ja not_active Expired - Fee Related
- 1996-07-27 EP EP96924786A patent/EP0845053B1/de not_active Revoked
- 1996-07-27 US US08/983,427 patent/US5981078A/en not_active Expired - Lifetime
- 1996-07-27 DE DE59607891T patent/DE59607891D1/de not_active Revoked
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11623893B2 (en) | 2018-10-11 | 2023-04-11 | Mitsubishi Materials Corporation | Surface-coated cutting tool in which hard coating layer exhibits exceptional welding resistance, plastic deformation resistance, and anomalous damage resistance |
| WO2023189595A1 (ja) | 2022-03-30 | 2023-10-05 | 三菱マテリアル株式会社 | 表面被覆切削工具 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH11510856A (ja) | 1999-09-21 |
| EP0845053A1 (de) | 1998-06-03 |
| EP0845053B1 (de) | 2001-10-10 |
| WO1997007260A1 (de) | 1997-02-27 |
| DE59607891D1 (de) | 2001-11-15 |
| US5981078A (en) | 1999-11-09 |
| ATE206772T1 (de) | 2001-10-15 |
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