JP4026376B2 - 現像液の供給装置 - Google Patents

現像液の供給装置 Download PDF

Info

Publication number
JP4026376B2
JP4026376B2 JP2002050841A JP2002050841A JP4026376B2 JP 4026376 B2 JP4026376 B2 JP 4026376B2 JP 2002050841 A JP2002050841 A JP 2002050841A JP 2002050841 A JP2002050841 A JP 2002050841A JP 4026376 B2 JP4026376 B2 JP 4026376B2
Authority
JP
Japan
Prior art keywords
developer
concentration
supply
storage tank
densitometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2002050841A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003248326A (ja
Inventor
嘉文 板東
崇弘 柴田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Chemical Engineering Corp
Original Assignee
Mitsubishi Chemical Engineering Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Chemical Engineering Corp filed Critical Mitsubishi Chemical Engineering Corp
Priority to JP2002050841A priority Critical patent/JP4026376B2/ja
Priority to TW91109164A priority patent/TWI310121B/zh
Priority to CN 02120200 priority patent/CN1441321A/zh
Publication of JP2003248326A publication Critical patent/JP2003248326A/ja
Application granted granted Critical
Publication of JP4026376B2 publication Critical patent/JP4026376B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Photographic Processing Devices Using Wet Methods (AREA)
JP2002050841A 2002-02-27 2002-02-27 現像液の供給装置 Expired - Fee Related JP4026376B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2002050841A JP4026376B2 (ja) 2002-02-27 2002-02-27 現像液の供給装置
TW91109164A TWI310121B (enExample) 2002-02-27 2002-05-02
CN 02120200 CN1441321A (zh) 2002-02-27 2002-05-24 显影液供给装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002050841A JP4026376B2 (ja) 2002-02-27 2002-02-27 現像液の供給装置

Publications (2)

Publication Number Publication Date
JP2003248326A JP2003248326A (ja) 2003-09-05
JP4026376B2 true JP4026376B2 (ja) 2007-12-26

Family

ID=27784573

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002050841A Expired - Fee Related JP4026376B2 (ja) 2002-02-27 2002-02-27 現像液の供給装置

Country Status (3)

Country Link
JP (1) JP4026376B2 (enExample)
CN (1) CN1441321A (enExample)
TW (1) TWI310121B (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4664818B2 (ja) * 2004-01-29 2011-04-06 有限会社Ｎａｓ技研 基板検査装置と基板検査方法と回収治具
KR101144643B1 (ko) * 2004-06-30 2012-05-08 엘지디스플레이 주식회사 칼라 필터 기판 제조 방법 및 포토 장비
US7467939B2 (en) * 2006-05-03 2008-12-23 3D Systems, Inc. Material delivery tension and tracking system for use in solid imaging
KR101446619B1 (ko) * 2006-11-30 2014-10-01 미츠비시 가가쿠 엔지니어링 가부시키가이샤 현상액의 농도 조절 방법과 제조 장치 및 현상액
CN101639633B (zh) * 2008-07-29 2012-02-29 和舰科技(苏州)有限公司 一种显影液供给管路
US7854558B2 (en) * 2009-02-16 2010-12-21 Eastman Kodak Company Developer waste reuse
CN102662311B (zh) * 2012-04-13 2015-12-02 京东方科技集团股份有限公司 一种化学品输送装置、显影设备和显影系统
CN105954983B (zh) * 2016-07-18 2019-11-08 京东方科技集团股份有限公司 显影方法及系统
JP2018120895A (ja) * 2017-01-23 2018-08-02 株式会社平間理化研究所 現像装置
CN107300838A (zh) * 2017-08-08 2017-10-27 武汉华星光电技术有限公司 显影液稀释系统
CN108803258B (zh) * 2018-05-31 2021-04-27 深圳市华星光电半导体显示技术有限公司 显影控制系统及显影控制方法
JP7202229B2 (ja) * 2019-03-20 2023-01-11 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法

Also Published As

Publication number Publication date
TWI310121B (enExample) 2009-05-21
CN1441321A (zh) 2003-09-10
JP2003248326A (ja) 2003-09-05

Similar Documents

Publication Publication Date Title
JP5604770B2 (ja) 現像液の濃度調節方法および調製装置
JP4026376B2 (ja) 現像液の供給装置
KR0119116B1 (ko) 현상액 관리장치
TWI278898B (en) Processing solution preparation and supply method and apparatus
US6623183B2 (en) Developer producing equipment and method
JP2011128455A (ja) 炭酸系塩類濃度測定装置、アルカリ現像液管理システム、及び、炭酸系塩類濃度測定方法
TWI695236B (zh) 顯影液之管理方法及裝置
JP4281439B2 (ja) 現像液の供給装置
JP4366490B2 (ja) 現像液供給方法及び装置
JP6713658B2 (ja) 現像液の成分濃度測定装置、成分濃度測定方法、現像液管理装置、及び現像液管理方法
JP2004101999A (ja) 現像液のリサイクル供給装置
JP4839820B2 (ja) 現像液の供給装置
KR100270946B1 (ko) 현상액 제조장치 및 현상액 제조방법
JP3610044B2 (ja) 現像液製造装置及び現像液製造方法
JP3610045B2 (ja) 精製現像液製造装置及び精製現像液製造方法
CN108345183A (zh) 显影液管理装置
CN108344662A (zh) 显影液的二氧化碳浓度显示装置及显影液管理装置
JPH08262739A (ja) 現像液調合装置及び現像液の調合方法
CN108345169A (zh) 显影装置
JPH0724289A (ja) 現像液調合装置及び現像液の調合方法
JPH07110580A (ja) 基板現像装置
CN108345185A (zh) 显影液的浓度监视装置及显影液管理装置
TW201827949A (zh) 顯影裝置
KR20180021527A (ko) 현상액 공급시스템

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20050126

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20070910

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Effective date: 20070918

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Effective date: 20071001

Free format text: JAPANESE INTERMEDIATE CODE: A61

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20101019

Year of fee payment: 3

R150 Certificate of patent (=grant) or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

LAPS Cancellation because of no payment of annual fees
S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

R370 Written measure of declining of transfer procedure

Free format text: JAPANESE INTERMEDIATE CODE: R370