JP4021435B2 - 垂直磁気記録媒体、その製造方法及び磁気記録再生装置 - Google Patents

垂直磁気記録媒体、その製造方法及び磁気記録再生装置 Download PDF

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JP4021435B2
JP4021435B2 JP2004309848A JP2004309848A JP4021435B2 JP 4021435 B2 JP4021435 B2 JP 4021435B2 JP 2004309848 A JP2004309848 A JP 2004309848A JP 2004309848 A JP2004309848 A JP 2004309848A JP 4021435 B2 JP4021435 B2 JP 4021435B2
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Japan
Prior art keywords
magnetic recording
layer
recording medium
intermediate layer
recording layer
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Japanese (ja)
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JP2006120290A5 (enExample
JP2006120290A (ja
Inventor
義幸 平山
一郎 玉井
育子 武隈
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ヒタチグローバルストレージテクノロジーズネザーランドビーブイ
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Priority to JP2004309848A priority Critical patent/JP4021435B2/ja
Priority to US11/258,532 priority patent/US20060088737A1/en
Publication of JP2006120290A publication Critical patent/JP2006120290A/ja
Publication of JP2006120290A5 publication Critical patent/JP2006120290A5/ja
Application granted granted Critical
Publication of JP4021435B2 publication Critical patent/JP4021435B2/ja
Priority to US12/061,518 priority patent/US20080186627A1/en
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3492—Variation of parameters during sputtering
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62—Record carriers characterised by the selection of the material
    • G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
    • G11B5/65—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition
    • G11B5/658—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition containing oxygen, e.g. molecular oxygen or magnetic oxide
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62—Record carriers characterised by the selection of the material
    • G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
    • G11B5/7368—Non-polymeric layer under the lowermost magnetic recording layer
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62—Record carriers characterised by the selection of the material
    • G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
    • G11B5/7368—Non-polymeric layer under the lowermost magnetic recording layer
    • G11B5/7369—Two or more non-magnetic underlayers, e.g. seed layers or barrier layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62—Record carriers characterised by the selection of the material
    • G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
    • G11B5/7368—Non-polymeric layer under the lowermost magnetic recording layer
    • G11B5/7369—Two or more non-magnetic underlayers, e.g. seed layers or barrier layers
    • G11B5/737—Physical structure of underlayer, e.g. texture
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/851—Coating a support with a magnetic layer by sputtering
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
    • Y02T50/00—Aeronautics or air transport
    • Y02T50/60—Efficient propulsion technologies, e.g. for aircraft

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Magnetic Record Carriers (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Thin Magnetic Films (AREA)
JP2004309848A 2004-10-25 2004-10-25 垂直磁気記録媒体、その製造方法及び磁気記録再生装置 Expired - Fee Related JP4021435B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2004309848A JP4021435B2 (ja) 2004-10-25 2004-10-25 垂直磁気記録媒体、その製造方法及び磁気記録再生装置
US11/258,532 US20060088737A1 (en) 2004-10-25 2005-10-24 Perpendicular magnetic recording medium with granular structured magnetic recording layer, method for producing the same, and magnetic recording apparatus
US12/061,518 US20080186627A1 (en) 2004-10-25 2008-04-02 Perpendicular magnetic recording medium with granular structured magnetic recording layer, method for producing the same, and magnetic recording apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004309848A JP4021435B2 (ja) 2004-10-25 2004-10-25 垂直磁気記録媒体、その製造方法及び磁気記録再生装置

Publications (3)

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JP2006120290A JP2006120290A (ja) 2006-05-11
JP2006120290A5 JP2006120290A5 (enExample) 2006-11-24
JP4021435B2 true JP4021435B2 (ja) 2007-12-12

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Country Status (2)

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US (2) US20060088737A1 (enExample)
JP (1) JP4021435B2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI713985B (zh) * 2018-03-28 2020-12-21 日商Ｊｘ金屬股份有限公司 垂直磁記錄介質

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US7713389B2 (en) * 2005-12-21 2010-05-11 Hitachi Global Storage Technologies Netherlands B.V. Perpendicular magnetic recording disk with ultrathin nucleation film for improved corrosion resistance and method for making the disk
JP2008123626A (ja) 2006-11-14 2008-05-29 Hitachi Global Storage Technologies Netherlands Bv 垂直磁気記録媒体及びこれを用いた磁気記憶装置
US8309239B2 (en) * 2007-03-30 2012-11-13 Wd Media (Singapore) Pte. Ltd. Perpendicular magnetic recording medium and method of manufacturing the same
JP2008276833A (ja) * 2007-04-26 2008-11-13 Hitachi Global Storage Technologies Netherlands Bv 垂直磁気記録媒体およびその製造方法
JP2009059431A (ja) * 2007-08-31 2009-03-19 Showa Denko Kk 磁気記録媒体および磁気記録再生装置
JP2009064501A (ja) * 2007-09-05 2009-03-26 Showa Denko Kk 磁気記録媒体および磁気記録再生装置
JP2009146522A (ja) * 2007-12-14 2009-07-02 Fujitsu Ltd 垂直磁気記録媒体及びその製造方法
US9127365B2 (en) * 2008-02-16 2015-09-08 HGST Netherlands B.V. Generation of multilayer structures in a single sputtering module of a multi-station magnetic recording media fabrication tool
JP2009238274A (ja) * 2008-03-26 2009-10-15 Fujitsu Ltd 磁気記録媒体及び磁気記録装置
JP5519962B2 (ja) * 2008-10-03 2014-06-11 ダブリュディ・メディア・シンガポール・プライベートリミテッド 垂直磁気記録媒体及びその製造方法
JP5250838B2 (ja) * 2009-01-27 2013-07-31 昭和電工株式会社 磁気記録媒体の製造方法及び磁気記録媒体、並びに磁気記録再生装置
JP5360892B2 (ja) 2009-05-24 2013-12-04 ダブリュディ・メディア・シンガポール・プライベートリミテッド 垂直磁気記録媒体の製造方法
JP5448750B2 (ja) 2009-11-26 2014-03-19 エイチジーエスティーネザーランドビーブイ 磁気記録媒体
JP5426409B2 (ja) * 2010-01-18 2014-02-26 富士電機株式会社 垂直磁気記録媒体の製造方法
JP4892073B2 (ja) * 2010-03-30 2012-03-07 株式会社東芝 磁気記録媒体、その製造方法、及び磁気記録再生装置
JP5807944B2 (ja) * 2010-06-22 2015-11-10 ダブリュディ・メディア・シンガポール・プライベートリミテッド 垂直磁気記録媒体の製造方法
DE102011084145A1 (de) * 2011-10-07 2013-04-11 Evonik Degussa Gmbh Verfahren zur Herstellung von hochperformanten und elektrisch stabilen, halbleitenden Metalloxidschichten, nach dem Verfahren hergestellte Schichten und deren Verwendung
US8614862B1 (en) 2012-12-21 2013-12-24 HGST Netherlands B.V. Perpendicular magnetic recording media having a cap layer above a granular layer
JP6150038B2 (ja) * 2013-03-13 2017-06-21 セイコーエプソン株式会社 液体噴射ヘッド、液体噴射装置、圧電素子、超音波トランスデューサー及び超音波デバイス
JP2015130220A (ja) * 2013-12-06 2015-07-16 株式会社東芝 垂直磁気記録媒体および垂直磁気記録媒体の製造方法
CN104700850A (zh) * 2013-12-06 2015-06-10 株式会社东芝 垂直磁记录介质和垂直磁记录介质的制造方法
US20170154647A1 (en) * 2015-11-30 2017-06-01 WD Media, LLC Stacked intermediate layer for perpendicular magnetic recording media

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US5652054A (en) * 1994-07-11 1997-07-29 Kabushiki Kaisha Toshiba Magnetic recording media having a magnetic thin film made of magnetic metals grains and nonmagnetic matrix
US6656613B2 (en) * 2000-09-27 2003-12-02 Seagate Technology Llc Multilayer magnetic recording media with columnar microstructure for improved exchange decoupling
JP2003338019A (ja) * 2002-05-22 2003-11-28 Hitachi Ltd 磁気記録媒体、及びその製造方法
JP4416408B2 (ja) * 2002-08-26 2010-02-17 株式会社日立グローバルストレージテクノロジーズ 垂直磁気記録媒体
US7226674B2 (en) * 2003-02-07 2007-06-05 Hitachi Maxell, Ltd. Magnetic recording medium, method for producing the same, and magnetic recording apparatus
US7169488B2 (en) * 2003-06-03 2007-01-30 Seagate Technology Llc Granular perpendicular media with surface treatment for improved magnetic properties and corrosion resistance
JP2005190552A (ja) * 2003-12-25 2005-07-14 Hitachi Global Storage Technologies Netherlands Bv 磁気記録媒体

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI713985B (zh) * 2018-03-28 2020-12-21 日商Ｊｘ金屬股份有限公司 垂直磁記錄介質

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US20060088737A1 (en) 2006-04-27
US20080186627A1 (en) 2008-08-07
JP2006120290A (ja) 2006-05-11

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