JP4000611B2 - 真空排気システム - Google Patents

真空排気システム Download PDF

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Publication number
JP4000611B2
JP4000611B2 JP34725996A JP34725996A JP4000611B2 JP 4000611 B2 JP4000611 B2 JP 4000611B2 JP 34725996 A JP34725996 A JP 34725996A JP 34725996 A JP34725996 A JP 34725996A JP 4000611 B2 JP4000611 B2 JP 4000611B2
Authority
JP
Japan
Prior art keywords
pump
vacuum
exhaust
rotor
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP34725996A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10184576A (ja
JPH10184576A5 (https=
Inventor
照雄 丸山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to JP34725996A priority Critical patent/JP4000611B2/ja
Publication of JPH10184576A publication Critical patent/JPH10184576A/ja
Publication of JPH10184576A5 publication Critical patent/JPH10184576A5/ja
Application granted granted Critical
Publication of JP4000611B2 publication Critical patent/JP4000611B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0092—Removing solid or liquid contaminants from the gas under pumping, e.g. by filtering or deposition; Purging; Scrubbing; Cleaning

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP34725996A 1996-12-26 1996-12-26 真空排気システム Expired - Fee Related JP4000611B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP34725996A JP4000611B2 (ja) 1996-12-26 1996-12-26 真空排気システム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP34725996A JP4000611B2 (ja) 1996-12-26 1996-12-26 真空排気システム

Publications (3)

Publication Number Publication Date
JPH10184576A JPH10184576A (ja) 1998-07-14
JPH10184576A5 JPH10184576A5 (https=) 2005-10-20
JP4000611B2 true JP4000611B2 (ja) 2007-10-31

Family

ID=18389010

Family Applications (1)

Application Number Title Priority Date Filing Date
JP34725996A Expired - Fee Related JP4000611B2 (ja) 1996-12-26 1996-12-26 真空排気システム

Country Status (1)

Country Link
JP (1) JP4000611B2 (https=)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6238514B1 (en) * 1999-02-18 2001-05-29 Mks Instruments, Inc. Apparatus and method for removing condensable aluminum vapor from aluminum etch effluent
JP2007298043A (ja) * 1999-11-17 2007-11-15 Nabtesco Corp 真空排気装置
JP2007263122A (ja) * 1999-11-17 2007-10-11 Nabtesco Corp 真空排気装置
JP2001207984A (ja) * 1999-11-17 2001-08-03 Teijin Seiki Co Ltd 真空排気装置
JP2003343469A (ja) 2002-03-20 2003-12-03 Toyota Industries Corp 真空ポンプ
JP3991918B2 (ja) 2003-05-19 2007-10-17 株式会社豊田自動織機 ルーツポンプ
JP5009634B2 (ja) * 2006-01-31 2012-08-22 株式会社荏原製作所 真空ポンプユニット
JP2008088912A (ja) * 2006-10-03 2008-04-17 Tohoku Univ メカニカルポンプおよびその製造方法
JP2008144766A (ja) * 2008-02-04 2008-06-26 Tadahiro Omi 真空装置
JP5823808B2 (ja) * 2011-10-11 2015-11-25 株式会社荏原製作所 真空ポンプ及び真空ポンプユニット
DE202014005279U1 (de) * 2014-06-26 2015-10-05 Oerlikon Leybold Vacuum Gmbh Vakuumpumpen-System
JP2017031892A (ja) * 2015-08-03 2017-02-09 アルバック機工株式会社 真空排気装置及びその運転方法
CN105952645A (zh) * 2016-04-08 2016-09-21 山东伯仲真空设备股份有限公司 用于螺杆真空泵的圆弧型线螺杆转子
JP7600855B2 (ja) * 2021-05-17 2024-12-17 株式会社島津製作所 真空ポンプシステム、及び、真空ポンプ
KR102588398B1 (ko) * 2023-08-03 2023-10-12 한국표준과학연구원 수증기 정량 주입 시스템 및 방법

Also Published As

Publication number Publication date
JPH10184576A (ja) 1998-07-14

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