JP3999863B2 - 被測定基板の検査装置 - Google Patents

被測定基板の検査装置 Download PDF

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Publication number
JP3999863B2
JP3999863B2 JP36477297A JP36477297A JP3999863B2 JP 3999863 B2 JP3999863 B2 JP 3999863B2 JP 36477297 A JP36477297 A JP 36477297A JP 36477297 A JP36477297 A JP 36477297A JP 3999863 B2 JP3999863 B2 JP 3999863B2
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JP
Japan
Prior art keywords
measured
substrate
unit
measurement
relay
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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JP36477297A
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English (en)
Japanese (ja)
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JPH11183864A (ja
JPH11183864A5 (https=
Inventor
慎治 藤原
順一 古川
裕 小坂
上人 尾石
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Micronics Japan Co Ltd
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Micronics Japan Co Ltd
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Priority to JP36477297A priority Critical patent/JP3999863B2/ja
Publication of JPH11183864A publication Critical patent/JPH11183864A/ja
Publication of JPH11183864A5 publication Critical patent/JPH11183864A5/ja
Application granted granted Critical
Publication of JP3999863B2 publication Critical patent/JP3999863B2/ja
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Expired - Lifetime legal-status Critical Current

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  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Liquid Crystal (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
JP36477297A 1997-12-22 1997-12-22 被測定基板の検査装置 Expired - Lifetime JP3999863B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP36477297A JP3999863B2 (ja) 1997-12-22 1997-12-22 被測定基板の検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP36477297A JP3999863B2 (ja) 1997-12-22 1997-12-22 被測定基板の検査装置

Publications (3)

Publication Number Publication Date
JPH11183864A JPH11183864A (ja) 1999-07-09
JPH11183864A5 JPH11183864A5 (https=) 2005-07-07
JP3999863B2 true JP3999863B2 (ja) 2007-10-31

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ID=18482629

Family Applications (1)

Application Number Title Priority Date Filing Date
JP36477297A Expired - Lifetime JP3999863B2 (ja) 1997-12-22 1997-12-22 被測定基板の検査装置

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JP (1) JP3999863B2 (https=)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3958852B2 (ja) * 1997-12-22 2007-08-15 株式会社日本マイクロニクス 被測定基板の検査装置
JP2001050858A (ja) * 1999-08-04 2001-02-23 Micronics Japan Co Ltd 表示用パネル基板の検査装置
KR100685308B1 (ko) * 1999-12-04 2007-02-22 엘지.필립스 엘시디 주식회사 액정표시소자의 검사장치
JP4108263B2 (ja) * 2000-10-03 2008-06-25 株式会社日本マイクロニクス 液晶基板の支持装置
NL1017272C2 (nl) * 2001-01-16 2002-07-17 Fico Bv Inrichting en werkwijze voor het testen van elektronische componenten.
US6774958B2 (en) * 2002-02-26 2004-08-10 Lg.Philips Lcd Co., Ltd. Liquid crystal panel, apparatus for inspecting the same, and method of fabricating liquid crystal display thereof
KR20040045173A (ko) * 2002-11-22 2004-06-01 갈란트 프리시젼 머시닝 캄파니, 리미티드 교대 팰릿을 갖춘 검사 시스템
JP3745750B2 (ja) 2003-06-27 2006-02-15 東芝テリー株式会社 表示パネルの検査装置および検査方法
KR20050112231A (ko) * 2004-05-25 2005-11-30 삼성전자주식회사 평면표시장치의 생산장비 및 제조공정
TWI393875B (zh) * 2004-09-27 2013-04-21 Olympus Corp 基板檢測裝置之固持器及基板檢測裝置
KR100741290B1 (ko) 2005-05-17 2007-07-23 에버테크노 주식회사 패널 검사장치
KR100733276B1 (ko) * 2005-07-29 2007-06-28 주식회사 파이컴 디스플레이 패널의 검사 장비와 이를 이용한 디스플레이패널 검사 방법
JP2009168601A (ja) * 2008-01-16 2009-07-30 Hioki Ee Corp 回路基板検査装置
DE102017102700A1 (de) 2017-02-10 2018-09-13 Atg Luther & Maelzer Gmbh Prüfvorrichtung und Verfahren zum Prüfen von Leiterplatten

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08102476A (ja) * 1994-08-05 1996-04-16 Tokyo Electron Ltd 板状の被検査体の検査装置
JPH08152587A (ja) * 1994-11-29 1996-06-11 Nikon Corp 基板保持装置
JPH0986655A (ja) * 1995-09-20 1997-03-31 Olympus Optical Co Ltd 試料搬送装置
JPH09138256A (ja) * 1995-11-14 1997-05-27 Nippon Maikuronikusu:Kk 被検査基板のアライメント方法
JPH09281001A (ja) * 1996-04-08 1997-10-31 Nippon Maikuronikusu:Kk 液晶表示パネルの検査装置

Also Published As

Publication number Publication date
JPH11183864A (ja) 1999-07-09

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