JP3986597B2 - 三フッ化窒素含有ガスの処理方法及びそのための処理剤 - Google Patents

三フッ化窒素含有ガスの処理方法及びそのための処理剤 Download PDF

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Publication number
JP3986597B2
JP3986597B2 JP27235396A JP27235396A JP3986597B2 JP 3986597 B2 JP3986597 B2 JP 3986597B2 JP 27235396 A JP27235396 A JP 27235396A JP 27235396 A JP27235396 A JP 27235396A JP 3986597 B2 JP3986597 B2 JP 3986597B2
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JP
Japan
Prior art keywords
gas
alloy
ribbon
vol
exhaust gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP27235396A
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English (en)
Japanese (ja)
Other versions
JPH10113536A (ja
JPH10113536A5 (enExample
Inventor
逸雄 折原
守之 福島
栄作 茂木
史朗 山下
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kanto Denka Kogyo Co Ltd
Original Assignee
Kanto Denka Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Kanto Denka Kogyo Co Ltd filed Critical Kanto Denka Kogyo Co Ltd
Priority to JP27235396A priority Critical patent/JP3986597B2/ja
Priority to US08/771,834 priority patent/US5879646A/en
Priority to US09/037,029 priority patent/US5906797A/en
Publication of JPH10113536A publication Critical patent/JPH10113536A/ja
Publication of JPH10113536A5 publication Critical patent/JPH10113536A5/ja
Application granted granted Critical
Publication of JP3986597B2 publication Critical patent/JP3986597B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B01D53/685—Halogens or halogen compounds by treating the gases with solids

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Environmental & Geological Engineering (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Treating Waste Gases (AREA)
  • Fire-Extinguishing Compositions (AREA)
JP27235396A 1996-10-15 1996-10-15 三フッ化窒素含有ガスの処理方法及びそのための処理剤 Expired - Lifetime JP3986597B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP27235396A JP3986597B2 (ja) 1996-10-15 1996-10-15 三フッ化窒素含有ガスの処理方法及びそのための処理剤
US08/771,834 US5879646A (en) 1996-10-15 1996-12-23 Treatment of NH3 -containing gases
US09/037,029 US5906797A (en) 1996-10-15 1998-03-09 Treatment of NF3 -containing gases

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27235396A JP3986597B2 (ja) 1996-10-15 1996-10-15 三フッ化窒素含有ガスの処理方法及びそのための処理剤

Publications (3)

Publication Number Publication Date
JPH10113536A JPH10113536A (ja) 1998-05-06
JPH10113536A5 JPH10113536A5 (enExample) 2004-10-21
JP3986597B2 true JP3986597B2 (ja) 2007-10-03

Family

ID=17512703

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27235396A Expired - Lifetime JP3986597B2 (ja) 1996-10-15 1996-10-15 三フッ化窒素含有ガスの処理方法及びそのための処理剤

Country Status (2)

Country Link
US (2) US5879646A (enExample)
JP (1) JP3986597B2 (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6146606A (en) * 1999-02-09 2000-11-14 Showa Denko Kabushiki Kaisha Reactive agent and process for decomposing nitrogen fluoride
US6352676B1 (en) * 1999-02-16 2002-03-05 Air Products And Chemicals, Inc. Abatement of F2 using small particle fluidized bed
GB0101769D0 (en) 2001-01-24 2001-03-07 Ineos Fluor Ltd Decomposition of fluorine compounds
US8641715B2 (en) 2002-05-31 2014-02-04 Vidacare Corporation Manual intraosseous device
US10973532B2 (en) 2002-05-31 2021-04-13 Teleflex Life Sciences Limited Powered drivers, intraosseous devices and methods to access bone marrow
US10973545B2 (en) 2002-05-31 2021-04-13 Teleflex Life Sciences Limited Powered drivers, intraosseous devices and methods to access bone marrow
DE60327625D1 (de) 2002-05-31 2009-06-25 Vidacare Corp Gerät für den zugang zu knochenmark
US8668698B2 (en) 2002-05-31 2014-03-11 Vidacare Corporation Assembly for coupling powered driver with intraosseous device
US9072543B2 (en) 2002-05-31 2015-07-07 Vidacare LLC Vascular access kits and methods
US11337728B2 (en) 2002-05-31 2022-05-24 Teleflex Life Sciences Limited Powered drivers, intraosseous devices and methods to access bone marrow
US9504477B2 (en) 2003-05-30 2016-11-29 Vidacare LLC Powered driver
US8944069B2 (en) 2006-09-12 2015-02-03 Vidacare Corporation Assemblies for coupling intraosseous (IO) devices to powered drivers
US8206488B2 (en) * 2008-10-31 2012-06-26 General Electric Company Fluoride ion cleaning method
US20130115395A1 (en) * 2011-11-07 2013-05-09 Diane Fujii JOHNSON Article of ornamented textile with adhesive-laminated particles and method of producing the same
WO2016172740A2 (en) * 2015-11-10 2016-10-27 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Etching reactants and plasma-free oxide etching processes using the same

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4193976A (en) * 1978-04-06 1980-03-18 Air Products & Chemicals, Inc. Removal of dinitrogen difluoride from nitrogen trifluoride
DE3766263D1 (de) * 1986-01-30 1991-01-03 Nippon Steel Corp Rostfreies band als katalysatortraeger fuer kraftfahrzeugabgase und verfahren zu seiner herstellung.
CA1318108C (en) * 1988-04-11 1993-05-25 Isao Harada Process for purifying nitrogen trifluoride gas
JPH01261208A (ja) * 1988-04-11 1989-10-18 Mitsui Toatsu Chem Inc 三弗化窒素ガスの精製方法
JPH0760914B2 (ja) * 1989-01-30 1995-06-28 セントラル硝子株式会社 エキシマーレーザーガスの精製法並びにその装置
FR2651150B1 (fr) * 1989-08-30 1994-01-14 Onera Element pour la filtration et/ou l'epuration de gaz chauds, et son procede de fabrication.
US5176889A (en) * 1990-07-09 1993-01-05 Daidousanso Co., Ltd. Method and apparatus for treatment of NF3 gas
JP3027626B2 (ja) * 1991-07-22 2000-04-04 株式会社クボタ 遠心鋳造用金型
US5417948A (en) * 1992-11-09 1995-05-23 Japan Pionics Co., Ltd. Process for cleaning harmful gas
TW369434B (en) * 1994-02-03 1999-09-11 Mitsui Chemicals Inc Exhaust gas treating agent and a method of treating exhaust gas using the agent

Also Published As

Publication number Publication date
US5906797A (en) 1999-05-25
US5879646A (en) 1999-03-09
JPH10113536A (ja) 1998-05-06

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