JP3973578B2 - Nozzle cleaning device - Google Patents

Nozzle cleaning device Download PDF

Info

Publication number
JP3973578B2
JP3973578B2 JP2003063560A JP2003063560A JP3973578B2 JP 3973578 B2 JP3973578 B2 JP 3973578B2 JP 2003063560 A JP2003063560 A JP 2003063560A JP 2003063560 A JP2003063560 A JP 2003063560A JP 3973578 B2 JP3973578 B2 JP 3973578B2
Authority
JP
Japan
Prior art keywords
cleaning
nozzle
slit
slit nozzle
brush
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2003063560A
Other languages
Japanese (ja)
Other versions
JP2004267935A (en
Inventor
泰一朗 青木
誠士 大石
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Ohka Kogyo Co Ltd
Original Assignee
Tokyo Ohka Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Ohka Kogyo Co Ltd filed Critical Tokyo Ohka Kogyo Co Ltd
Priority to JP2003063560A priority Critical patent/JP3973578B2/en
Priority to TW093105955A priority patent/TW200503839A/en
Priority to KR1020040015282A priority patent/KR20040081031A/en
Priority to US10/796,622 priority patent/US20040181885A1/en
Publication of JP2004267935A publication Critical patent/JP2004267935A/en
Application granted granted Critical
Publication of JP3973578B2 publication Critical patent/JP3973578B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0254—Coating heads with slot-shaped outlet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
    • B05B15/50—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter
    • B05B15/52—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter for removal of clogging particles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/10—Cleaning by methods involving the use of tools characterised by the type of cleaning tool
    • B08B1/12—Brushes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/30—Cleaning by methods involving the use of tools by movement of cleaning members over a surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/30—Cleaning by methods involving the use of tools by movement of cleaning members over a surface
    • B08B1/32—Cleaning by methods involving the use of tools by movement of cleaning members over a surface using rotary cleaning members

Landscapes

  • Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
  • Cleaning In General (AREA)
  • Coating Apparatus (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Nozzles (AREA)

Description

【０００１】
【発明の属する技術分野】
本発明は、半導体ウェーハやガラス基板等の板状被処理物表面に塗布液を一定幅で塗布するためのスリットノズルを洗浄する装置に関する。
【０００２】
【従来の技術】
従来にあって、半導体ウェーハやガラス基板等の板状被処理物表面にレジスト液等を塗布するには、スピンナー上に載置した被処理物の中心部にノズルから塗布液を滴下し、スピンナーによって被処理物を回転させることで発生する遠心力で塗布液を外方に向けて拡散せしめている。この方法では、被処理物表面に残る塗布液が僅かであり、殆どが飛散してしまうので無駄がある。
【０００３】
そこで、スピンナー塗布の代わりにノズル自体に所定幅の塗布液吐出口を開口せしめ、被処理物に対しノズルを相対的に移動することで被処理物表面に所定幅で塗布液を塗布するスリットノズルが知られている。
【０００４】
上述した所定幅の塗布液吐出口を有するスリットノズルを用いれば、塗布液の無駄をなくし且つ効率的に塗布を行えるのであるが、幅広となる分、ノズル吐出口及びその周辺部に塗布液の回り込み量も多く、これが乾燥すると大量の異物発生の原因となる。したがって、塗布後の洗浄によってノズル吐出口及びその周辺部の塗布液を除去しなければならない。
【０００５】
ノズルの先端を洗浄するにはいろいろな方法が用いられてきた。例えば、洗浄液の吐出穴を有する洗浄装置にてノズル先端全体を一度に洗浄する方法が用いられた。
【０００６】
しかしながら、洗浄液の吐出穴を有する装置を用いる洗浄は、全ての吐出穴に均一な圧力で洗浄液を供給することが困難であり、均一な洗浄ができなくなるおそれがあった。
【０００７】
そこで、洗浄液中に複数のこすり洗い器具を回転させながら、そのこすり洗い器具の表面をノズルの外面に沿って様々な個所で被清掃面に接触するように設けることで、ノズルを洗浄する方法が開示され、各こすり洗い器具は、剛毛からなるブラシであり、その軸は、様々なノズルに対応するように可動となっている。（特許文献１）
【０００８】
【特許文献１】
特表２００２−５０００９７号公報（第３８頁〜第４０頁、図９）
【０００９】
【発明が解決しようとする課題】
しかしながら、上記のようなブラシ洗い器具の軸は、洗浄中に移動することができないので、洗浄部位を変える度にブラシ洗い器具の軸位置を変更する手間がかかる問題がある。
【００１０】
本発明は、上記の問題に鑑みてなされたものであり、ブラシを回転させながら、そのブラシの軸が上下、左右に移動可能であるノズル洗浄装置を提供することを目的とする。
【００１１】
【課題を解決するための手段】
上記課題を解決すべく本願の第１発明のノズル洗浄装置は、下端部にスリット状吐出口を形成したスリットノズルを洗浄する装置において、この洗浄装置は洗浄液を満たした洗浄槽内にその軸が前記スリット状吐出口と平行となるように円筒状長尺ブラシを配置してなり、この長尺ブラシは長さがスリットノズルの長さと略等しく、スリットノズルのスリット状吐出口と平行な軸回りに回転可能で且つ前記軸と直交する水平方向及び上下方向に往復動可能とされることで、スリットノズルの下端部洗浄部位から離れることなく、スリットノズルの下端洗浄部位の一方の側面を洗浄してから、スリットノズルのノズル吐出口を洗浄し、更にスリットノズルの下端部洗浄部位の他方の側面を洗浄する構成とした。
【００１２】
このように、スリットノズルの下端部洗浄部位にあたって、長尺ブラシを回転させながら、上下、水平方向に動かすことによって、スリットノズルのスリット吐出口ばかりではなく、その吐出口の両側面も長尺ブラシを水平方向に移動させ、且つ上昇させれば、常にベストな位置に長尺ブラシを接触させて洗浄することができる。
【００１３】
また、前記長尺ブラシの植毛並び方向（即ち、植毛の向き）は、前記スリットノズルの下端部洗浄部位に対して斜め方向に当たるべくブラシ軸に対して斜めに植毛することで、植毛のノズル洗浄部位への接触面積が大きくなり、洗浄効果が向上する。
【００１６】
さらに、前記洗浄槽内には前記長尺ブラシ自身に付着した付着物を掻き落とすためのブラシ洗浄手段が設けられることで、長尺ブラシ自身も常に清浄な状態を保つことができる。
【００１７】
【発明の実施の形態】
以下に本発明の実施の形態を添付図面に基づいて説明する。ここで、図１（ａ）〜（ｃ）は、本願の第１発明に係るノズル洗浄装置の一実施例の動作図、図２（ａ）、（ｂ）は、図１における長尺ブラシの植毛の埋め込み角度のノズルに対する洗浄面積の模式図、図３は、本願の第１発明に係るノズル洗浄装置の具体的な構成例の断面図、図４（ａ）〜（ｃ）は、本願の第１発明に係るスリットノズル洗浄をするための長尺ブラシ動きの構造を断面から見た簡略図、図５は、本願の第２発明に係るノズル洗浄装置の一実施例の断面図である。
【００１８】
図１に示すように、洗浄液１を貯留する洗浄槽２内に円筒状長尺ブラシ３が回転自在に配置され、この長尺ブラシ３の上方にスリットノズル４が昇降自在に設けられている。なお、図１のａａ’は基準位置を示す仮想線である。
【００１９】
また、長尺ブラシ３は、その軸がスリットノズル４の下端部のスリット状吐出口と平行となり、軸回りに回転可能で且つ軸と直交する水平方向及び上下方向に往復動可能である。
【００２０】
また、長尺ブラシ３は、ステンレス、アルミ、チタン等で形成され、その寸法は、直径が３０〜１００ｍｍ、長さがスリットノズル４の長手方向の長さより若干大きく設定され、洗浄中にスリットノズル４のスリット吐出口との間隔は２５〜３００μｍとなる。
【００２１】
また、長尺ブラシ３は、図２（ｂ）に示すように、植毛の方向を斜めにすることで、スリットノズルの下端部洗浄部位（スリット吐出口及びその両側面）に対して垂直に当たる（図２（ａ）を参照）よりも洗浄面積が広くなり、同条件下でも洗浄効率が良くなる。更に、長尺ブラシ３の植毛３ａの流れ方向は、長尺ブラシ３の回転方向と同じように設定することが好ましい。
【００２２】
また、図１に示すように、洗浄槽２の底部には、長尺ブラシ３の植毛に付着している汚れを掻き落とすために、ブラシ洗浄手段として櫛５が３つ設けられている。なお、櫛５は、その数を、必要に応じて配置することが可能であり、その材質や形状が制限されることはない。
【００２３】
また、洗浄液１の液量は、自由に変えることができ、長尺ブラシ３全体を洗浄液１に漬けることも、長尺ブラシ３を半分ぐらい漬けることも可能である。つまり、洗浄具合に応じて任意に設定することができる。
【００２４】
図３には、長尺ノズル３が支持材に支持されて移動する構造を示す。具体的には、固定盤１０の上に設けたレール１１にスライダー１２を介してスライド板１３が係合し、図示しないシリンダー等を駆動することでスライド板１３が前後にスライドする。例えば、スライド板１３が手前側から後方側へ移動することで、長尺ブラシ３は、スリットノズル４の手前斜め側面から、スリットノズル４の先端をとおり、更に後方斜め側面に移動することになる。
【００２５】
また、スライド板１３の上に上下シリンダー１４が設けられており、この上下シリンダー１４が載置板１５を昇降動させる。この載置板１５によって、長尺ブラシ３は、スリットノズル４に対して上下動する。更にこの載置板１５の上にモータ１６と２本の支持材１７が固定されている。支持材１７は、長尺ブラシ３を支持しており、モータ１６は、プーリ１８とベアリング１９を介して長尺ブラシ３を方向任意に回転させる。
【００２６】
更に、図３に示すように、洗浄槽２の底部に二つの仕切り板２０が設けられ、これらの仕切り板２０に囲まれた部分を洗浄液貯め部２１とし、洗浄液を貯めて長尺ブラシ３を浸漬する。洗浄液貯め部２１の仕切り板２０を越えて溢れ出た洗浄液は、洗浄槽２の底部に設けられたドレイン口２２を介してドレインパイプ２３から排出される。なお、必要に応じてドレイン口２２を洗浄液貯め部の底板にも開口して洗浄液貯め部２１を清掃するようにしてもよい。
【００２７】
このように、長尺ブラシ３は、図１に示すように、時計方向に回転しながら、下方向、及び右方向に移動することで、スリットノズル４の下端部洗浄部位から離れることなく、スリットノズル４の下端洗浄部位左側面４ａを洗浄してから、スリットノズル４のノズル吐出口４ｂを洗浄し、更に上方向、及び左方向に移動することで、スリットノズル４の下端部洗浄部位右側面４ｃを洗浄する。この洗浄過程中、櫛５は、長尺ブラシ３の植毛３ａに付着している汚れを掻き落とすことになる。また、スリットノズル４の下端部洗浄部位右側面４ｃ―ノズル吐出口４ｂ−下端洗浄部位左側面４ａの順番で洗浄することも可能である。
【００２８】
即ち、図４（ａ）に示すように、最初から長尺ブラシ３を回転させてから、スライダーが右に移動し始めると同時に、上下シリンダーが長尺ブラシ３の植毛３ａ（図示せず）がスリットノズル４の下端洗浄部位左側面４ａに付着させるように下降して、スリットノズル４の下端洗浄部位左側面４ａを洗浄する。次ぎ、図４（ｂ）に示すように、スリットノズル４のノズル吐出口４ｂ部でスライダーが停止し、上下シリンダーも最下位置で停止して、長尺ブラシ３は、スリットノズル４のノズル吐出口４ｂを洗浄する。更に、図４（ｃ）に示すように、スライダーが再び右に移動し始めると同時に、上下シリンダーが長尺ブラシ３の植毛３ａ（図示せず）がスリットノズル４の下端洗浄部位右側面４ｃに付着させるように上昇して、スリットノズル４の下端洗浄部位右側面４ｃを洗浄する。なお、洗浄中、長尺ブラシ３は常に回転している。また、スリットノズル４の洗浄を始める位置（始点）は任意である。更に、上記の洗浄順番に拘る必要はない。例えば、スリットノズル４のノズル吐出口４ｂから洗浄を始め、左右に長尺ブラシ３を移動させてもよい。スリットノズル４の下端洗浄部位右側面４ｃから洗浄を始め、下端洗浄部位左側面４ａで終わりにしてもよい。また、長尺ブラシ３の動きは一回往復だけではなく、複数回往復してもよい。
【００２９】
また、図５には、参考例の断面図を示しており、図１と同じ部分には、同じ符号を付け、その説明を省略する。図５に示すように、２本の長尺ブラシ３、３’を用いて、スリットノズル４を洗浄する。２本の長尺ブラシ３，３’は、時計方向に回転しながら、スリットノズル４の下端部洗浄部位から離れることなく、スリットノズル４の下端部全体を包み込むように、スリットノズル４のスリット吐出口４ｂを洗浄してから、徐々に上方向、及び左右方向に移動することで、下端部洗浄部位右側面４ａ、及び下端部洗浄部位左側面４ｃを洗浄する。もちろん、長尺ブラシ３，３’は、下方向、及び左右方向に移動しながら、先ず下端部洗浄部位右側面４ａ、及び下端部洗浄部位左側面４ｃを洗浄してから、スリットノズル４のスリット吐出口４ｂを洗浄しても良い。なお、図５のｂｂ’は基準位置を示す仮想線である。なお、上記例においては、２本の長尺ブラシの回転方向を時計方向としたが、長尺ブラシ３を時計方向、長尺ブラシ３′を反時計方向としてもよい。
【００３０】
【発明の効果】
以上に説明したように、本発明によれば、スリットノズルの下端部洗浄部位にあたって、長尺ブラシを回転させながら、上下、水平方向に動かすことによって、スリットノズルのスリット吐出口ばかりではなく、その吐出口の両側面も長尺ブラシを水平方向に移動させ、且つ上昇させれば、常にベストな位置に長尺ブラシを接触させて洗浄することができる。
【００３１】
また、長尺ブラシの植毛並び方向（即ち、植毛の向き）は、前記スリットノズルの下端部洗浄部位に対して斜め方向に当たることで、植毛のノズル洗浄部位への接触面積が大きくなり、洗浄効果が向上する。
【００３２】
また、２本の長尺ブラシでスリットノズルの下端部洗浄部位を挟み込むようにし、２本の長尺ブラシを回転させながら、同時に上下、水平方向に動かすことによって、スリットノズルのスリット吐出口ばかりではなく、その吐出口の両側面も長尺ブラシを水平方向に移動させ、且つ上昇させれば、常にベストな位置に長尺ブラシを接触させて、より効率的に洗浄することができる。
【００３３】
更に、洗浄槽内には長尺ブラシ自身に付着した付着物を掻き落とすためのブラシ洗浄手段が設けられることで、長尺ブラシ自身も常に清浄な状態を保つことができる。
【図面の簡単な説明】
【図１】本願の第１発明に係るノズル洗浄装置の一実施例の動作図
【図２】図１における長尺ブラシの植毛の埋め込み角度のノズルに対する洗浄面積の模式図、（ａ）植毛の方向が洗浄部位に垂直に当たる場合、（ｂ）植毛の方向が洗浄部位に斜めに当たる場合
【図３】スリットノズル洗浄をするための長尺ブラシ動きの構造を側面から見た簡略図
【図４】スリットノズル洗浄をするための長尺ブラシ動きの構造を断面から見た簡略図
【図５】本願の第２発明に係るノズル洗浄装置の一実施例の断面図
【符号の説明】
１…洗浄液、 ２…洗浄槽、 ３、３’…長尺ブラシ、 ４…スリットノズル、 ５…櫛、 １０…固定盤、 １１…レール、 １２…スライダー、 １３…スライド板、 １４…上下シリンダー、 １５…載置板、 １６…モータ、 １７…支持材、 １８…プーリ、 １９…ベアリング、 ２０…仕切り板、 ２１…洗浄液貯め部、 ２２…ドレイン口、 ２３…ドレインパイプ。[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an apparatus for cleaning a slit nozzle for applying a coating liquid to a surface of a plate-like workpiece such as a semiconductor wafer or a glass substrate with a certain width.
[0002]
[Prior art]
Conventionally, in order to apply a resist solution or the like to the surface of a plate-like object to be processed such as a semiconductor wafer or a glass substrate, the application liquid is dropped from a nozzle onto the center of the object to be processed placed on the spinner, and the spinner The coating liquid is diffused outward by centrifugal force generated by rotating the object to be processed. This method is wasteful because only a small amount of the coating liquid remains on the surface of the object to be processed and most of the liquid is scattered.
[0003]
Therefore, a slit nozzle that applies a coating liquid with a predetermined width to the surface of the object to be processed by opening a coating liquid discharge port with a predetermined width in the nozzle itself instead of spinner application and moving the nozzle relative to the object to be processed. It has been known.
[0004]
If the slit nozzle having the coating liquid discharge port having the predetermined width described above is used, it is possible to eliminate the waste of the coating liquid and perform the coating efficiently. However, as the width becomes wide, the coating liquid is applied to the nozzle discharge port and its peripheral portion. The amount of wraparound is large, and when this is dried, a large amount of foreign matter is generated. Therefore, it is necessary to remove the coating liquid at the nozzle outlet and its peripheral part by washing after application.
[0005]
Various methods have been used to clean the nozzle tip. For example, a method of cleaning the entire nozzle tip at once with a cleaning device having a cleaning liquid discharge hole was used.
[0006]
However, in the cleaning using the apparatus having the cleaning liquid discharge holes, it is difficult to supply the cleaning liquid to all the discharge holes with a uniform pressure, and there is a possibility that the uniform cleaning cannot be performed.
[0007]
Therefore, there is a method for cleaning the nozzle by rotating a plurality of scrubbing devices in the cleaning liquid and providing the surface of the scrubbing device so as to contact the surface to be cleaned at various points along the outer surface of the nozzle. Each scrubbing instrument disclosed is a brush made of bristles, the axis of which is movable to accommodate various nozzles. (Patent Document 1)
[0008]
[Patent Document 1]
Japanese translation of PCT publication No. 2002-500097 (pages 38 to 40, FIG. 9)
[0009]
[Problems to be solved by the invention]
However, since the shaft of the brush washing device cannot move during washing, there is a problem that it takes time to change the shaft position of the brush washing device every time the washing site is changed.
[0010]
The present invention has been made in view of the above problems, and an object of the present invention is to provide a nozzle cleaning device in which the brush shaft can be moved vertically and horizontally while rotating the brush.
[0011]
[Means for Solving the Problems]
In order to solve the above-mentioned problem, the nozzle cleaning device according to the first invention of the present application is a device for cleaning a slit nozzle having a slit-like discharge port formed at the lower end, and this cleaning device has a shaft in a cleaning tank filled with a cleaning liquid. A cylindrical long brush is arranged so as to be parallel to the slit-shaped discharge port, and this long brush has a length substantially equal to the length of the slit nozzle and is around an axis parallel to the slit-shaped discharge port of the slit nozzle. and rotatable perpendicular to the axis that are able to reciprocate in the horizontal direction and the vertical direction, without departing from the lower end cleaning site of the slit nozzle, washed one side of the lower end cleaning site of the slit nozzle After that, the nozzle discharge port of the slit nozzle is cleaned, and the other side surface of the lower end cleaning portion of the slit nozzle is further cleaned .
[0012]
In this way, by rotating the long brush in the vertical and horizontal directions while cleaning the lower end portion of the slit nozzle, not only the slit discharge port of the slit nozzle but also both side surfaces of the discharge port are long brushes. If the brush is moved in the horizontal direction and raised, the long brush can always be brought into contact with the best position for cleaning.
[0013]
Further, the flocking direction of the long brush (that is, the direction of flocking) is flocked with respect to the brush axis so as to hit the slanted direction with respect to the lower end cleaning portion of the slit nozzle, so that the flocking nozzle cleaning The contact area to the part is increased, and the cleaning effect is improved.
[0016]
Furthermore, since the cleaning tank is provided with brush cleaning means for scraping off deposits adhering to the long brush itself, the long brush itself can always be kept clean.
[0017]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described below with reference to the accompanying drawings. Here, FIGS. 1A to 1C are operation diagrams of an embodiment of the nozzle cleaning device according to the first invention of the present application, and FIGS. 2A and 2B are views of the long brush in FIG. FIG. 3 is a cross-sectional view of a specific configuration example of the nozzle cleaning device according to the first invention of the present application, and FIGS. 4A to 4C are diagrams of the present application. FIG. 5 is a cross-sectional view of an embodiment of a nozzle cleaning apparatus according to the second invention of the present application, and FIG.
[0018]
As shown in FIG. 1, a cylindrical long brush 3 is rotatably arranged in a cleaning tank 2 storing a cleaning liquid 1, and a slit nozzle 4 is provided above the long brush 3 so as to be movable up and down. Note that aa ′ in FIG. 1 is a virtual line indicating the reference position.
[0019]
Further, the long brush 3 has an axis parallel to the slit-like discharge port at the lower end of the slit nozzle 4, can rotate about the axis, and can reciprocate in the horizontal direction and the vertical direction perpendicular to the axis.
[0020]
Further, the long brush 3 is made of stainless steel, aluminum, titanium or the like, and its dimensions are set such that the diameter is 30 to 100 mm and the length is slightly larger than the length of the slit nozzle 4 in the longitudinal direction. The distance from the slit outlet 4 is 25 to 300 μm.
[0021]
Moreover, as shown in FIG.2 (b), the elongate brush 3 strikes perpendicularly with respect to the lower end part washing | cleaning site | part (a slit discharge port and its both sides) of a slit nozzle by making the direction of flocking slant ( The cleaning area is larger than that in FIG. 2A, and the cleaning efficiency is improved even under the same conditions. Furthermore, it is preferable to set the flow direction of the flocks 3 a of the long brush 3 in the same manner as the rotation direction of the long brush 3.
[0022]
As shown in FIG. 1, three combs 5 are provided as brush cleaning means on the bottom of the cleaning tank 2 in order to scrape off dirt adhering to the flocks of the long brush 3. Note that the number of the combs 5 can be arranged as necessary, and the material and shape thereof are not limited.
[0023]
Further, the amount of the cleaning liquid 1 can be freely changed, and the entire long brush 3 can be immersed in the cleaning liquid 1 or about half of the long brush 3 can be immersed. That is, it can be arbitrarily set according to the cleaning condition.
[0024]
FIG. 3 shows a structure in which the long nozzle 3 moves while being supported by a support material. Specifically, the slide plate 13 is engaged with the rail 11 provided on the fixed platen 10 via the slider 12, and the slide plate 13 slides back and forth by driving a cylinder (not shown). For example, when the slide plate 13 moves from the front side to the rear side, the long brush 3 moves from the front oblique side surface of the slit nozzle 4 to the rear oblique side surface through the tip of the slit nozzle 4. .
[0025]
An upper and lower cylinder 14 is provided on the slide plate 13, and the upper and lower cylinder 14 moves the mounting plate 15 up and down. With this mounting plate 15, the long brush 3 moves up and down with respect to the slit nozzle 4. Further, a motor 16 and two support members 17 are fixed on the mounting plate 15. The support member 17 supports the long brush 3, and the motor 16 rotates the long brush 3 in any direction via a pulley 18 and a bearing 19.
[0026]
Further, as shown in FIG. 3, two partition plates 20 are provided at the bottom of the cleaning tank 2, and a portion surrounded by these partition plates 20 is used as a cleaning liquid storage portion 21, and the cleaning liquid is stored to form the long brush 3. Immerse. The cleaning liquid overflowing beyond the partition plate 20 of the cleaning liquid reservoir 21 is discharged from the drain pipe 23 through the drain port 22 provided at the bottom of the cleaning tank 2. Note that the cleaning liquid reservoir 21 may be cleaned by opening the drain port 22 in the bottom plate of the cleaning liquid reservoir as necessary.
[0027]
In this way, as shown in FIG. 1, the long brush 3 moves downward and rightward while rotating clockwise, so that the slit 3 is not separated from the lower end cleaning portion of the slit nozzle 4. After cleaning the left side cleaning surface 4a of the lower end of the nozzle 4, the nozzle discharge port 4b of the slit nozzle 4 is cleaned, and further moved upward and leftward so that the lower side cleaning site right side of the slit nozzle 4 is moved. Wash 4c. During this cleaning process, the comb 5 scrapes off the dirt adhering to the flocks 3a of the long brush 3. Further, it is also possible to perform cleaning in the order of the lower end cleaning portion right side surface 4c of the slit nozzle 4, nozzle discharge port 4b, and lower end cleaning portion left side surface 4a.
[0028]
That is, as shown in FIG. 4A, after the long brush 3 is rotated from the beginning, the slider begins to move to the right, and at the same time, the upper and lower cylinders have the flock 3a (not shown) of the long brush 3. The lower end cleaning part left side surface 4a of the slit nozzle 4 is cleaned by descending to adhere to the lower end cleaning part left side surface 4a of the slit nozzle 4. Next, as shown in FIG. 4B, the slider stops at the nozzle discharge port 4 b of the slit nozzle 4, the upper and lower cylinders also stop at the lowest position, and the long brush 3 is discharged from the slit nozzle 4. Wash the outlet 4b. Furthermore, as shown in FIG. 4C, at the same time as the slider starts to move to the right again, the upper and lower cylinders have the flocking 3a (not shown) of the long brush 3 on the right side surface 4c of the lower end cleaning portion of the slit nozzle 4. Ascend so as to adhere, and clean the right side surface 4c of the lower end cleaning portion of the slit nozzle 4. During the cleaning, the long brush 3 is always rotating. Further, the position (starting point) at which the slit nozzle 4 starts to be cleaned is arbitrary. Furthermore, it is not necessary to be concerned with the above-mentioned cleaning order. For example, cleaning may be started from the nozzle discharge port 4b of the slit nozzle 4, and the long brush 3 may be moved to the left and right. The cleaning may be started from the lower end cleaning portion right side surface 4c of the slit nozzle 4 and may be ended at the lower end cleaning portion left side surface 4a. In addition, the movement of the long brush 3 may be reciprocated not only once but also a plurality of times.
[0029]
FIG. 5 shows a cross-sectional view of the reference example . The same parts as those in FIG. As shown in FIG. 5, the slit nozzle 4 is cleaned using two long brushes 3 and 3 ′. The two long brushes 3, 3 ′ rotate in the clockwise direction and wrap around the entire lower end of the slit nozzle 4 without leaving the cleaning portion of the lower end of the slit nozzle 4. After cleaning the outlet 4b, the lower end cleaning portion right side surface 4a and the lower end cleaning portion left side surface 4c are cleaned by moving gradually upward and to the left and right. Of course, the long brushes 3 and 3 ′ move in the downward direction and the left and right direction, and first clean the lower surface cleaning portion right side surface 4 a and the lower end cleaning region left side surface 4 c, and then slit the slit nozzle 4. The discharge port 4b may be cleaned. Note that bb ′ in FIG. 5 is a virtual line indicating the reference position. In the above example, the rotation direction of the two long brushes is clockwise, but the long brush 3 may be clockwise and the long brush 3 'may be counterclockwise.
[0030]
【The invention's effect】
As described above, according to the present invention, at the lower end cleaning portion of the slit nozzle, by moving the long brush in the vertical and horizontal directions while rotating, not only the slit discharge port of the slit nozzle, but also If the long brush is moved in the horizontal direction and raised on both side surfaces of the discharge port, the long brush can always be brought into contact with the best position for cleaning.
[0031]
Further, the arrangement direction of the flocking of the long brush (that is, the direction of flocking) is in an oblique direction with respect to the cleaning portion of the lower end portion of the slit nozzle, thereby increasing the contact area of the flocking to the nozzle cleaning portion, and the cleaning effect. Will improve.
[0032]
In addition, with the two long brushes, the lower end cleaning part of the slit nozzle is sandwiched, and the two long brushes are rotated and moved simultaneously in the vertical and horizontal directions. In addition, if the long brush is moved in the horizontal direction and lifted also on both side surfaces of the discharge port, the long brush can always be brought into contact with the best position for more efficient cleaning.
[0033]
Further, the cleaning brush is provided in the cleaning tank to scrape off the adhering matter adhering to the long brush itself, so that the long brush itself can always be kept clean.
[Brief description of the drawings]
FIG. 1 is an operation diagram of an embodiment of a nozzle cleaning device according to the first invention of the present application. FIG. 2 is a schematic diagram of a cleaning area for a nozzle having an embedding angle of a long brush in FIG. When the direction is perpendicular to the cleaning site, (b) When the direction of flocking is obliquely applied to the cleaning site [Fig. 3] Simplified view of the structure of the long brush for cleaning the slit nozzle from the side [Fig. 4] FIG. 5 is a simplified cross-sectional view of the structure of a long brush movement for cleaning a slit nozzle. FIG. 5 is a cross-sectional view of an embodiment of a nozzle cleaning apparatus according to the second invention of the present application.
DESCRIPTION OF SYMBOLS 1 ... Cleaning liquid, 2 ... Cleaning tank 3, 3 '... Long brush, 4 ... Slit nozzle, 5 ... Comb, 10 ... Fixed board, 11 ... Rail, 12 ... Slider, 13 ... Slide plate, 14 ... Top and bottom cylinder, DESCRIPTION OF SYMBOLS 15 ... Mounting plate, 16 ... Motor, 17 ... Support material, 18 ... Pulley, 19 ... Bearing, 20 ... Partition plate, 21 ... Cleaning liquid storage part, 22 ... Drain port, 23 ... Drain pipe.

Claims (2)

下端部にスリット状吐出口を形成したスリットノズルを洗浄する装置において、この洗浄装置は洗浄液を満たした洗浄槽内にその軸が前記スリット状吐出口と平行となるように円筒状長尺ブラシを配置してなり、この長尺ブラシは長さがスリットノズルの長さと略等しく、スリットノズルのスリット状吐出口と平行な軸回りに回転可能で且つ前記軸と直交する水平方向及び上下方向に往復動可能とされることで、スリットノズルの下端部洗浄部位から離れることなく、スリットノズルの下端洗浄部位の一方の側面を洗浄してから、スリットノズルのノズル吐出口を洗浄し、更にスリットノズルの下端洗浄部位の他方の側面を洗浄することを特徴とするノズル洗浄装置。  In an apparatus for cleaning a slit nozzle having a slit-shaped discharge port formed at the lower end, the cleaning apparatus is provided with a cylindrical long brush in a cleaning tank filled with a cleaning liquid so that its axis is parallel to the slit-shaped discharge port. This long brush has a length substantially equal to the length of the slit nozzle, can rotate around an axis parallel to the slit-like discharge port of the slit nozzle, and reciprocates in the horizontal and vertical directions perpendicular to the axis. By making it possible to move, one side of the lower end cleaning portion of the slit nozzle is cleaned without leaving the lower end cleaning portion of the slit nozzle, and then the nozzle discharge port of the slit nozzle is further cleaned. A nozzle cleaning device for cleaning the other side surface of the lower end cleaning portion. 前記長尺ブラシの植毛並び方向は、前記スリットノズルのスリット状吐出口に対して斜め方向に当たるべくブラシ軸に対して斜めに植毛されていることを特徴とする請求項１に記載のノズル洗浄装置。 2. The nozzle cleaning device according to claim 1, wherein the long brush is arranged in an oblique direction with respect to the brush axis so as to be in an oblique direction with respect to a slit-like discharge port of the slit nozzle. .
JP2003063560A 2003-03-10 2003-03-10 Nozzle cleaning device Expired - Lifetime JP3973578B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2003063560A JP3973578B2 (en) 2003-03-10 2003-03-10 Nozzle cleaning device
TW093105955A TW200503839A (en) 2003-03-10 2004-03-05 Cleaning apparatus for nozzle
KR1020040015282A KR20040081031A (en) 2003-03-10 2004-03-06 Cleaning apparatus for nozzle
US10/796,622 US20040181885A1 (en) 2003-03-10 2004-03-09 Cleaning apparatus for nozzle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003063560A JP3973578B2 (en) 2003-03-10 2003-03-10 Nozzle cleaning device

Publications (2)

Publication Number Publication Date
JP2004267935A JP2004267935A (en) 2004-09-30
JP3973578B2 true JP3973578B2 (en) 2007-09-12

Family

ID=32984434

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003063560A Expired - Lifetime JP3973578B2 (en) 2003-03-10 2003-03-10 Nozzle cleaning device

Country Status (4)

Country Link
US (1) US20040181885A1 (en)
JP (1) JP3973578B2 (en)
KR (1) KR20040081031A (en)
TW (1) TW200503839A (en)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100824996B1 (en) * 2006-12-27 2008-04-24 주식회사 하이닉스반도체 Post cleaning method in chemical mechanical polishing
JP4648348B2 (en) * 2007-03-01 2011-03-09 本田技研工業株式会社 Nozzle deposit removal device
JP4857193B2 (en) * 2007-05-28 2012-01-18 大日本スクリーン製造株式会社 Nozzle cleaning device
JP2011072949A (en) * 2009-09-30 2011-04-14 Dainippon Printing Co Ltd Apparatus for cleaning die head for coating
TWI426579B (en) * 2010-02-01 2014-02-11 Hermes Epitek Corp Semiconductor equipment and method for cleaning semiconductor equipment
KR100996557B1 (en) * 2010-04-30 2010-11-24 이구환 Nozzle cleaning apparatus of zet valve for dispensing
JP5298083B2 (en) * 2010-08-02 2013-09-25 東京エレクトロン株式会社 Coating device and nozzle priming method
KR101289501B1 (en) 2011-02-08 2013-07-24 이구환 Nozzle cleaning blade of zet valve for dispensing
JP5892821B2 (en) * 2012-03-22 2016-03-23 富士機械製造株式会社 Nozzle cleaning device
JP5641123B2 (en) * 2013-11-14 2014-12-17 三菱電機株式会社 Air conditioner indoor unit
CN104148304A (en) * 2014-07-18 2014-11-19 合肥京东方光电科技有限公司 Cleaning device for coating needles, method for cleaning coating needles and glue dispenser
CN104307672A (en) * 2014-09-29 2015-01-28 合肥鑫晟光电科技有限公司 Cleaning device and frame sealing glue coating equipment
CN106733463A (en) * 2016-12-29 2017-05-31 成都国珈星际固态锂电科技有限公司 Coating die head Wiping mechanism and coating machine and the method for wiping coating die head
US10906058B2 (en) * 2017-01-27 2021-02-02 Nordson Corporation Systems and methods for inspecting and cleaning a nozzle of a dispenser
KR101864755B1 (en) * 2017-05-10 2018-06-07 주식회사 신행 Nozzle cleaning apparatus of sealer applying machine for car body
FR3087669A1 (en) * 2018-10-25 2020-05-01 Fillon Technologies DEVICE FOR STORING AND DISPENSING LIQUID PRODUCTS
DE102019103273A1 (en) * 2019-02-11 2020-08-13 Brillux Gmbh & Co. Kg Method for avoiding microbial contamination of a cleaning device for a dosing system
US10934079B2 (en) * 2019-03-12 2021-03-02 Derek S. Jancisin Cleaning mechanism for spray and aerosol nozzles
IT201900009714A1 (en) * 2019-06-21 2020-12-21 Cefla Soc Cooperativa APPARATUS FOR THE APPLICATION OF PAINTS ON PREVALENTLY FLAT EXTENSION PRODUCTS
CN112076947A (en) * 2020-08-31 2020-12-15 博众精工科技股份有限公司 Bonding equipment
CN114178101B (en) * 2021-10-26 2023-04-07 武汉天空蓝环保科技有限公司 Online self-cleaning spray gun and desulfurization wastewater zero discharge system
KR102622870B1 (en) * 2022-10-06 2024-01-10 송기봉 A painting nozzle cleaning device and control method thereof

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2164443A (en) * 1937-08-26 1939-07-04 Nelson A Batchelder Textile drafting means
CA1300366C (en) * 1986-11-10 1992-05-12 Kiyohiro Ichinose Method of and apparatus for cleaning paint spray guns
SE9702837D0 (en) * 1997-07-31 1997-07-31 Alfa Laval Agri Ab Teat cleaning device and method
US6241827B1 (en) * 1998-02-17 2001-06-05 Tokyo Electron Limited Method for cleaning a workpiece
JP2002304097A (en) * 2001-04-04 2002-10-18 Fuji Xerox Co Ltd Cleaning device and image forming apparatus using the same
US20030127046A1 (en) * 2002-01-09 2003-07-10 Harley-Davidson Motor Company Group, Inc. Paint spray gun cleaner

Also Published As

Publication number Publication date
US20040181885A1 (en) 2004-09-23
JP2004267935A (en) 2004-09-30
TW200503839A (en) 2005-02-01
KR20040081031A (en) 2004-09-20

Similar Documents

Publication Publication Date Title
JP3973578B2 (en) Nozzle cleaning device
TWI284567B (en) A pre-discharging apparatus for a slit coater
JP4089058B2 (en) Cleaning device and cleaning method for printing screen
JP3278590B2 (en) Ultrasonic cleaning device and ultrasonic cleaning method
JP4986490B2 (en) Pre-discharge device
TW200535993A (en) Adjusting apparatus and method for tip end of slit nozzle
TWI337901B (en)
JP3679904B2 (en) NOZZLE CLEANING DEVICE AND COATING DEVICE HAVING THE NOZZLE CLEANING DEVICE
EP1920931B1 (en) Wiping apparatus for print head
US6488041B1 (en) System and method for clean and priming extrusion head
JPH0722993B2 (en) Cleaning machine for printing machine cylinder
US7160389B2 (en) System and method for cleaning and priming an extrusion head
CN108568372B (en) Nozzle cleaning device and nozzle cleaning method
KR101676360B1 (en) for leather automatic painting apparatus
JPH1190359A (en) Overflow type scrub washing and apparatus therefor
TW201323099A (en) Nozzle maintenance apparatus and coating treatment apparatus using same
JP3604987B2 (en) Coating device and coating method
KR101234216B1 (en) Slit coater
JPH05177177A (en) Method for cleaning coating roll
JPH10211691A (en) Printer-cleaning device for rotary printing machine
KR20050047147A (en) Apparatus for cleaning a wafer
JP3779302B2 (en) Coating apparatus and coating method
JP2005066402A (en) Blade cleaning device
JP2005310941A (en) Spin coater and method of cleaning cup thereof, and brush jig for cleaning cup
JP2004130159A (en) Preparatory discharge apparatus and preparatory discharge method

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20040622

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20061030

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20061107

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20070109

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20070306

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20070507

A911 Transfer to examiner for re-examination before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A911

Effective date: 20070510

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20070612

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20070612

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

Ref document number: 3973578

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100622

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100622

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110622

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120622

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120622

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130622

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140622

Year of fee payment: 7

EXPY Cancellation because of completion of term
S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313111

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350