JP3962727B2 - 磁気ヘッドスライダ用材料、磁気ヘッドスライダ、及び磁気ヘッドスライダ用材料の製造方法 - Google Patents
磁気ヘッドスライダ用材料、磁気ヘッドスライダ、及び磁気ヘッドスライダ用材料の製造方法 Download PDFInfo
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- JP3962727B2 JP3962727B2 JP2004152471A JP2004152471A JP3962727B2 JP 3962727 B2 JP3962727 B2 JP 3962727B2 JP 2004152471 A JP2004152471 A JP 2004152471A JP 2004152471 A JP2004152471 A JP 2004152471A JP 3962727 B2 JP3962727 B2 JP 3962727B2
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/10—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on aluminium oxide
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- C04B35/5607—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on refractory metal carbides
- C04B35/5611—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on refractory metal carbides based on titanium carbides
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- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
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- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3217—Aluminum oxide or oxide forming salts thereof, e.g. bauxite, alpha-alumina
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- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
- C04B2235/3232—Titanium oxides or titanates, e.g. rutile or anatase
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- C—CHEMISTRY; METALLURGY
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- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/38—Non-oxide ceramic constituents or additives
- C04B2235/3817—Carbides
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/42—Non metallic elements added as constituents or additives, e.g. sulfur, phosphor, selenium or tellurium
- C04B2235/422—Carbon
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
- C04B2235/54—Particle size related information
- C04B2235/5418—Particle size related information expressed by the size of the particles or aggregates thereof
- C04B2235/5436—Particle size related information expressed by the size of the particles or aggregates thereof micrometer sized, i.e. from 1 to 100 micron
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
- C04B2235/54—Particle size related information
- C04B2235/5418—Particle size related information expressed by the size of the particles or aggregates thereof
- C04B2235/5445—Particle size related information expressed by the size of the particles or aggregates thereof submicron sized, i.e. from 0,1 to 1 micron
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/11—Magnetic recording head
- Y10T428/1157—Substrate composition
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- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Composite Materials (AREA)
- Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
- Compositions Of Oxide Ceramics (AREA)
Description
まず、本実施形態に係る磁気ヘッドスライダ用材料について説明する。本実施形態に係る磁気ヘッドスライダ用材料は、アルミナ(Al2O3)、炭化チタン(TiC)及び炭素(C)を含む焼結体である。ここで、焼結体において、アルミナや炭化チタンはそれぞれ結晶粒を形成している。また、焼結体において炭素はアルミナや炭化チタンとは化学的に結合していない遊離成分であり、主として、アルミナや炭化チタンの結晶粒界に存在する。
続いて、このような磁気ヘッドスライダ用材料の第一の製造方法について説明する。
次に、この磁気ヘッドスライダ用材料を用いた磁気ヘッドスライダについて図1を参照して説明する。
まず、アルミナ粉末(平均粒径0.5μm)、炭化チタン粉末(平均粒径0.5μm、炭素を0.1重量%含む)、チタニア粉末(平均粒径0.1μm)、炭素粉末(カーボンブラック、平均粒径35nm)を各々所定量秤量し、ボールミル中でIPA(イソプロピルアルコール;沸点82.4℃)と共に30分粉砕して混合し、その後窒素中で150℃でスプレー造粒し造粒物を得た。
比較例1では、炭素粉末を添加せず、炭素の重量を炭化チタン粉末に由来する重量、すなわち0.06重量部とした以外は実施例1と同じにした。また、比較例2では、炭素の重量を17重量部とする以外は実施例1と同じにした。これらの条件及び結果を、図6に表にして示す。なお、研磨速度は比較例1の研磨速度を100とし、各研磨速度を比較例1の研磨速度に対する比として表した。ここで、比較例1の研磨速度は、1.7μm/10minであった。
Claims (10)
- アルミナ、炭化チタン及び炭素を含むと共にアルミナの重量を100重量部とした時に炭化チタンを20〜120重量部、炭素を0.3〜2.0重量部含む焼結体である磁気ヘッドスライダ用材料。
- 前記焼結体は、アルミナの重量を100重量部とした時に炭素を0.5〜1.5重量部含む請求項1に記載の磁気ヘッドスライダ用材料。
- 前記焼結体は、アルミナの重量を100重量部とした時に、さらにチタニアを0.5〜10重量部含む請求項1又は2に記載の磁気ヘッドスライダ用材料。
- 焼結体から作られた基板と、前記基板上に形成された、薄膜磁気ヘッドを含む積層体と、を備え、
前記焼結体は、アルミナ、炭化チタン及び炭素を含むと共にアルミナの重量を100重量部とした時に炭化チタンを20〜120重量部、炭素を0.3〜2.0重量部含む磁気ヘッドスライダ。 - 前記焼結体は、アルミナの重量を100重量部とした時に炭素を0.5〜1.5重量部含む請求項4に記載の磁気ヘッドスライダ。
- 前記焼結体は、アルミナの重量を100重量部とした時に、さらにチタニアを0.5〜10重量部含む請求項4又は5に記載の磁気ヘッドスライダ。
- アルミナ、炭化チタン及び炭素を含むと共にアルミナの重量を100重量部とした時に炭化チタンを20〜120重量部、炭素を0.3〜2.0重量部含む成形体を用意する工程と、
前記成形体を非酸化性雰囲気中で焼結させる工程と、
を備える磁気ヘッドスライダ用材料の製造方法。 - 前記成形体を用意する工程では、アルミナを含む粉末、炭化チタンを含む粉末及び炭素を含む粉末を混合して混合粉末を得、前記混合粉末を成形する請求項7に記載の磁気ヘッドスライダ用材料の製造方法。
- 前記成形体を用意する工程では、アルミナを含む粉末、炭化チタンを含む粉末及び有機物を混合して混合物を得、前記混合物を非酸化性雰囲気中で熱処理することにより前記混合物中の有機物を炭化して混合粉末を得、前記混合粉末を成形する請求項7に記載の磁気ヘッドスライダ用材料の製造方法。
- 前記成形体を用意する工程では、アルミナを含む粉末、炭化チタンを含む粉末及び有機物を混合して混合物を得、前記混合物を成形し、成形された混合物を非酸化性雰囲気中で熱処理することにより前記混合物中の有機物を炭化する請求項7に記載の磁気ヘッドスライダ用材料の製造方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
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JP2004152471A JP3962727B2 (ja) | 2004-05-21 | 2004-05-21 | 磁気ヘッドスライダ用材料、磁気ヘッドスライダ、及び磁気ヘッドスライダ用材料の製造方法 |
US11/130,210 US7446978B2 (en) | 2004-05-21 | 2005-05-17 | Magnetic slider and method of manufacturing magnetic head slider |
CNB2005100718342A CN1304324C (zh) | 2004-05-21 | 2005-05-20 | 磁头滑块用材料、磁头滑块及磁头滑块用材料的制造方法 |
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JP2004152471A JP3962727B2 (ja) | 2004-05-21 | 2004-05-21 | 磁気ヘッドスライダ用材料、磁気ヘッドスライダ、及び磁気ヘッドスライダ用材料の製造方法 |
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JP2005332542A JP2005332542A (ja) | 2005-12-02 |
JP3962727B2 true JP3962727B2 (ja) | 2007-08-22 |
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JP2004152471A Expired - Fee Related JP3962727B2 (ja) | 2004-05-21 | 2004-05-21 | 磁気ヘッドスライダ用材料、磁気ヘッドスライダ、及び磁気ヘッドスライダ用材料の製造方法 |
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US (1) | US7446978B2 (ja) |
JP (1) | JP3962727B2 (ja) |
CN (1) | CN1304324C (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JP4765719B2 (ja) * | 2005-06-27 | 2011-09-07 | Tdk株式会社 | 焼結体、磁気ヘッドスライダ、及び焼結体の製造方法 |
JP4025791B2 (ja) * | 2005-06-27 | 2007-12-26 | Tdk株式会社 | 磁気ヘッドスライダ用材料、磁気ヘッドスライダ、及び磁気ヘッドスライダ用材料の製造方法 |
JP2007153653A (ja) * | 2005-12-02 | 2007-06-21 | Tdk Corp | 磁気ヘッドスライダ用焼結体、磁気ヘッドスライダ、及び磁気ヘッドスライダ用焼結体の製造方法 |
CN101689374B (zh) * | 2007-06-27 | 2012-03-28 | 京瓷株式会社 | 磁头用基板、磁头以及记录介质驱动装置 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5782172A (en) | 1980-11-12 | 1982-05-22 | Matsushita Electric Ind Co Ltd | Substrate ceramic for thin film magnetic head |
DE3307908A1 (de) * | 1983-03-05 | 1984-09-06 | Bayer Ag, 5090 Leverkusen | Aromatische polyester, verfahren zu ihrer herstellung und ihre verwendung zur herstellung von spritzgussartikeln, folien und ueberzuege |
JPS6059713A (ja) * | 1983-09-13 | 1985-04-06 | Hitachi Metals Ltd | 薄膜磁気ヘッド用セラミックス基板 |
JPS63134566A (ja) * | 1986-11-25 | 1988-06-07 | ティーディーケイ株式会社 | Al↓2O↓3−TiC焼結体の製造方法 |
US5246893A (en) * | 1988-02-29 | 1993-09-21 | Kyocera Corporation | Ceramic sintered body and process for preparation thereof |
JPH01294571A (ja) * | 1988-05-20 | 1989-11-28 | Hitachi Metals Ltd | 薄膜磁気ヘッド・スライダ材料 |
JP2625505B2 (ja) | 1988-06-22 | 1997-07-02 | 花王株式会社 | セラミックス―炭素系複合材料の製造方法 |
JPH062617A (ja) | 1992-06-19 | 1994-01-11 | Kubota Corp | エンジンの気化器のエアーベント装置 |
JP2531438B2 (ja) * | 1993-06-17 | 1996-09-04 | 日本電気株式会社 | 磁気ヘッドおよびその製造方法 |
JPH08152020A (ja) * | 1994-11-30 | 1996-06-11 | Kyocera Corp | セラミック製動圧軸受 |
JP3196837B2 (ja) * | 1998-09-11 | 2001-08-06 | 日本電気株式会社 | 磁気ヘッドスライダの製造方法 |
-
2004
- 2004-05-21 JP JP2004152471A patent/JP3962727B2/ja not_active Expired - Fee Related
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2005
- 2005-05-17 US US11/130,210 patent/US7446978B2/en not_active Expired - Fee Related
- 2005-05-20 CN CNB2005100718342A patent/CN1304324C/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
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US20050259363A1 (en) | 2005-11-24 |
CN1699268A (zh) | 2005-11-23 |
JP2005332542A (ja) | 2005-12-02 |
US7446978B2 (en) | 2008-11-04 |
CN1304324C (zh) | 2007-03-14 |
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