JP3941147B2 - 真空排気装置及びそのメンテナンス方法 - Google Patents

真空排気装置及びそのメンテナンス方法 Download PDF

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Publication number
JP3941147B2
JP3941147B2 JP04371197A JP4371197A JP3941147B2 JP 3941147 B2 JP3941147 B2 JP 3941147B2 JP 04371197 A JP04371197 A JP 04371197A JP 4371197 A JP4371197 A JP 4371197A JP 3941147 B2 JP3941147 B2 JP 3941147B2
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Japan
Prior art keywords
pump
vacuum pump
dry vacuum
exhaust
auxiliary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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JP04371197A
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English (en)
Japanese (ja)
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JPH10238462A5 (enExample
JPH10238462A (ja
Inventor
昌年 熊田
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Fujitsu Ltd
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Fujitsu Ltd
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Priority to JP04371197A priority Critical patent/JP3941147B2/ja
Publication of JPH10238462A publication Critical patent/JPH10238462A/ja
Publication of JPH10238462A5 publication Critical patent/JPH10238462A5/ja
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Publication of JP3941147B2 publication Critical patent/JP3941147B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
JP04371197A 1997-02-27 1997-02-27 真空排気装置及びそのメンテナンス方法 Expired - Lifetime JP3941147B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP04371197A JP3941147B2 (ja) 1997-02-27 1997-02-27 真空排気装置及びそのメンテナンス方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP04371197A JP3941147B2 (ja) 1997-02-27 1997-02-27 真空排気装置及びそのメンテナンス方法

Publications (3)

Publication Number Publication Date
JPH10238462A JPH10238462A (ja) 1998-09-08
JPH10238462A5 JPH10238462A5 (enExample) 2004-12-16
JP3941147B2 true JP3941147B2 (ja) 2007-07-04

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JP04371197A Expired - Lifetime JP3941147B2 (ja) 1997-02-27 1997-02-27 真空排気装置及びそのメンテナンス方法

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JP (1) JP3941147B2 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001089320A1 (en) * 2000-05-24 2001-11-29 Fruit Chips B.V. Method and device for frying products
JP2008008302A (ja) * 2001-09-06 2008-01-17 Ulvac Japan Ltd 多段式容積移送型ドライ真空ポンプの省エネ方法
CN104066989B (zh) 2011-12-14 2017-03-01 斯特林工业咨询有限公司 用于排空腔室并净化从所述腔室抽取的气体的装置和方法
JP6120469B1 (ja) * 2016-09-21 2017-04-26 株式会社テクノス 真空ポンプの寿命を延ばす運用方法
JP7306140B2 (ja) * 2019-07-30 2023-07-11 株式会社デンソーウェーブ ロボット用吸着ハンド
CN112032021B (zh) * 2020-09-10 2024-04-26 北京通嘉宏瑞科技有限公司 一种真空泵用温度调控装置及使用方法
GB2632398A (en) * 2023-07-25 2025-02-12 Leybold Gmbh Claw pump

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Publication number Publication date
JPH10238462A (ja) 1998-09-08

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