JPH10238462A5 - - Google Patents

Info

Publication number
JPH10238462A5
JPH10238462A5 JP1997043711A JP4371197A JPH10238462A5 JP H10238462 A5 JPH10238462 A5 JP H10238462A5 JP 1997043711 A JP1997043711 A JP 1997043711A JP 4371197 A JP4371197 A JP 4371197A JP H10238462 A5 JPH10238462 A5 JP H10238462A5
Authority
JP
Japan
Prior art keywords
pump
vacuum pump
dry vacuum
exhaust
auxiliary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997043711A
Other languages
English (en)
Japanese (ja)
Other versions
JP3941147B2 (ja
JPH10238462A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP04371197A priority Critical patent/JP3941147B2/ja
Priority claimed from JP04371197A external-priority patent/JP3941147B2/ja
Publication of JPH10238462A publication Critical patent/JPH10238462A/ja
Publication of JPH10238462A5 publication Critical patent/JPH10238462A5/ja
Application granted granted Critical
Publication of JP3941147B2 publication Critical patent/JP3941147B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP04371197A 1997-02-27 1997-02-27 真空排気装置及びそのメンテナンス方法 Expired - Lifetime JP3941147B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP04371197A JP3941147B2 (ja) 1997-02-27 1997-02-27 真空排気装置及びそのメンテナンス方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP04371197A JP3941147B2 (ja) 1997-02-27 1997-02-27 真空排気装置及びそのメンテナンス方法

Publications (3)

Publication Number Publication Date
JPH10238462A JPH10238462A (ja) 1998-09-08
JPH10238462A5 true JPH10238462A5 (enExample) 2004-12-16
JP3941147B2 JP3941147B2 (ja) 2007-07-04

Family

ID=12671397

Family Applications (1)

Application Number Title Priority Date Filing Date
JP04371197A Expired - Lifetime JP3941147B2 (ja) 1997-02-27 1997-02-27 真空排気装置及びそのメンテナンス方法

Country Status (1)

Country Link
JP (1) JP3941147B2 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001089320A1 (en) * 2000-05-24 2001-11-29 Fruit Chips B.V. Method and device for frying products
JP2008008302A (ja) * 2001-09-06 2008-01-17 Ulvac Japan Ltd 多段式容積移送型ドライ真空ポンプの省エネ方法
CN104066989B (zh) 2011-12-14 2017-03-01 斯特林工业咨询有限公司 用于排空腔室并净化从所述腔室抽取的气体的装置和方法
JP6120469B1 (ja) * 2016-09-21 2017-04-26 株式会社テクノス 真空ポンプの寿命を延ばす運用方法
JP7306140B2 (ja) * 2019-07-30 2023-07-11 株式会社デンソーウェーブ ロボット用吸着ハンド
CN112032021B (zh) * 2020-09-10 2024-04-26 北京通嘉宏瑞科技有限公司 一种真空泵用温度调控装置及使用方法
GB2632398A (en) * 2023-07-25 2025-02-12 Leybold Gmbh Claw pump

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