JP3929675B2 - 圧電振動子 - Google Patents
圧電振動子 Download PDFInfo
- Publication number
- JP3929675B2 JP3929675B2 JP2000106774A JP2000106774A JP3929675B2 JP 3929675 B2 JP3929675 B2 JP 3929675B2 JP 2000106774 A JP2000106774 A JP 2000106774A JP 2000106774 A JP2000106774 A JP 2000106774A JP 3929675 B2 JP3929675 B2 JP 3929675B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- metal thin
- piezoelectric vibrator
- electrode
- lead
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010409 thin film Substances 0.000 claims description 77
- 229910052751 metal Inorganic materials 0.000 claims description 58
- 239000002184 metal Substances 0.000 claims description 58
- 229910000679 solder Inorganic materials 0.000 claims description 35
- 239000010953 base metal Substances 0.000 claims description 19
- 239000010408 film Substances 0.000 claims description 16
- 238000009792 diffusion process Methods 0.000 claims description 13
- 238000005304 joining Methods 0.000 claims description 2
- 238000007789 sealing Methods 0.000 claims description 2
- 239000013078 crystal Substances 0.000 description 23
- 239000000463 material Substances 0.000 description 20
- 238000000034 method Methods 0.000 description 19
- 239000011651 chromium Substances 0.000 description 13
- 238000010586 diagram Methods 0.000 description 13
- 239000010931 gold Substances 0.000 description 13
- 238000007747 plating Methods 0.000 description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 9
- 239000010949 copper Substances 0.000 description 8
- 239000000470 constituent Substances 0.000 description 7
- 239000010453 quartz Substances 0.000 description 6
- 229910052804 chromium Inorganic materials 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- 238000005530 etching Methods 0.000 description 5
- 229910052718 tin Inorganic materials 0.000 description 5
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 239000002344 surface layer Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- 238000009736 wetting Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- -1 for example Substances 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
Images
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000106774A JP3929675B2 (ja) | 2000-02-17 | 2000-04-07 | 圧電振動子 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000-40029 | 2000-02-17 | ||
| JP2000040029 | 2000-02-17 | ||
| JP2000106774A JP3929675B2 (ja) | 2000-02-17 | 2000-04-07 | 圧電振動子 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001308673A JP2001308673A (ja) | 2001-11-02 |
| JP2001308673A5 JP2001308673A5 (https=) | 2005-05-19 |
| JP3929675B2 true JP3929675B2 (ja) | 2007-06-13 |
Family
ID=26585595
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000106774A Expired - Lifetime JP3929675B2 (ja) | 2000-02-17 | 2000-04-07 | 圧電振動子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3929675B2 (https=) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007037003A (ja) * | 2005-07-29 | 2007-02-08 | Citizen Miyota Co Ltd | 圧電振動子 |
| JP4552916B2 (ja) * | 2005-12-21 | 2010-09-29 | 株式会社大真空 | 圧電振動デバイス |
| JP4933849B2 (ja) * | 2006-06-30 | 2012-05-16 | シチズンファインテックミヨタ株式会社 | 圧入型シリンダータイプ圧電振動子の気密端子、圧入型シリンダータイプ圧電振動子及び気密端子の製造方法 |
| JP5155620B2 (ja) * | 2006-08-31 | 2013-03-06 | セイコーインスツル株式会社 | 厚み滑り振動片の製造方法 |
| JP5263529B2 (ja) * | 2009-02-13 | 2013-08-14 | セイコーインスツル株式会社 | 圧電振動子の製造方法 |
| JP5341685B2 (ja) * | 2009-09-09 | 2013-11-13 | 日本電波工業株式会社 | 圧電デバイス |
| JP5573514B2 (ja) * | 2010-09-03 | 2014-08-20 | 株式会社大真空 | 音叉型圧電振動子 |
| JP2012054893A (ja) * | 2010-09-03 | 2012-03-15 | Nippon Dempa Kogyo Co Ltd | 音叉型水晶振動片及び水晶デバイス |
| JP6175743B2 (ja) | 2012-06-06 | 2017-08-09 | セイコーエプソン株式会社 | 振動素子の製造方法 |
| JP6627902B2 (ja) * | 2018-03-19 | 2020-01-08 | セイコーエプソン株式会社 | 振動素子、振動子、電子デバイス、電子機器、移動体および振動素子の製造方法 |
-
2000
- 2000-04-07 JP JP2000106774A patent/JP3929675B2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JP2001308673A (ja) | 2001-11-02 |
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