JP3905102B2 - コーティング基板の光学的特性を測定する測定装置 - Google Patents
コーティング基板の光学的特性を測定する測定装置 Download PDFInfo
- Publication number
- JP3905102B2 JP3905102B2 JP2004255185A JP2004255185A JP3905102B2 JP 3905102 B2 JP3905102 B2 JP 3905102B2 JP 2004255185 A JP2004255185 A JP 2004255185A JP 2004255185 A JP2004255185 A JP 2004255185A JP 3905102 B2 JP3905102 B2 JP 3905102B2
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- Prior art keywords
- coating
- coating apparatus
- chamber
- substrate
- measuring device
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Analytical Chemistry (AREA)
- Immunology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Physics & Mathematics (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Physical Vapour Deposition (AREA)
- Surface Treatment Of Glass Fibres Or Filaments (AREA)
Description
2、3、4、5、6 コーティングチャンバ
12 送り出し/巻取りチャンバ
18、19、20、21、22、23 隔壁
24 コーティングドラム
26 フィルム
46 反射測定器
47 光源
48 センサ
65 反射測定ヘッド
66 ケーブル
67 螺旋スプリング
Claims (12)
- 複数の順次連続的に配置されたコーティングチャンバと、
前記各コーティングチャンバはその間を共通の隔壁によって仕切られて構成されており、前記隔壁のそれぞれはその自由端が基板の上方に近接して配置され、該基板は1つのコーティングチャンバから次のコーティングチャンバへと次々に搬送されるようになっており、
前記基板の光学的特性を測定するための測定装置と、
を有するコーティング装置において、
前記測定装置が前記各々の隔壁の自由端に設けられていることを特徴とするコーティング装置。 - 前記測定装置は前記隔壁の自由端の壁内に組み込まれていることを特徴とする請求項1に記載のコーティング装置。
- 前記光学的特性は反射であることを特徴とする請求項1に記載のコーティング装置
- 前記測定装置は反射測定ヘッドを有することを特徴とする請求項1に記載のコーティング装置
- 前記反射測定ヘッドは2つの光ファイバーの束を含むケーブルのハーネスに接続されていることを特徴とする請求項4に記載のコーティング装置
- 前記ケーブルのハーネスは、隔壁に沿って案内されていることを特徴とする請求項5に記載のコーティング装置。
- 前記ケーブルのハーネスは、コーティングチャンバの外部に導かれ、かつ光電変換器を介して評価ユニットに接続されていることを特徴とする請求項6に記載のコーティング装置。
- 基板の送り出しと巻き取りのための送り出し/巻き取りチャンバと、複数のコーティングチャンバとを備えたことを特徴とする請求項1に記載のコーティング装置。
- 送り出し/巻き取りチャンバとコーティングチャンバとの間に配置されたコーティングドラムを有していることを特徴とする請求項1に記載のコーティング装置。
- 前記コーティングチャンバは、コーティングドラムの周囲に円弧状に配置されていることを特徴とする請求項9に記載のコーティング装置。
- 前記基板は可撓性フィルムであることを特徴とする請求項1に記載のコーティング装置。
- 前記送り出し/巻き取りチャンバ内には他の光学測定ユニットが設けられていることを特徴とする請求項1に記載のコーティング装置。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP04012165A EP1598660B1 (de) | 2004-05-22 | 2004-05-22 | Beschichtungsanlage mit einer Messvorrichtung für die Messung von optischen Eigenschaften von beschichteten Substraten |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005338047A JP2005338047A (ja) | 2005-12-08 |
JP3905102B2 true JP3905102B2 (ja) | 2007-04-18 |
Family
ID=34925089
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004255185A Expired - Fee Related JP3905102B2 (ja) | 2004-05-22 | 2004-09-02 | コーティング基板の光学的特性を測定する測定装置 |
Country Status (10)
Country | Link |
---|---|
US (1) | US7450233B2 (ja) |
EP (1) | EP1598660B1 (ja) |
JP (1) | JP3905102B2 (ja) |
KR (1) | KR100813572B1 (ja) |
CN (1) | CN1699964A (ja) |
AT (1) | ATE348331T1 (ja) |
DE (1) | DE502004002296D1 (ja) |
PL (1) | PL1598660T3 (ja) |
RU (1) | RU2285912C2 (ja) |
TW (1) | TWI257477B (ja) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ES2336870B1 (es) * | 2007-08-20 | 2011-02-18 | Novogenio, S.L. | Sistema y procedimiento para el recubrimiento en vacio y en continuo de un material en forma de banda. |
CN102197159B (zh) * | 2008-11-05 | 2013-07-10 | 株式会社爱发科 | 卷绕式真空处理装置 |
EP2402481A1 (en) * | 2010-06-29 | 2012-01-04 | Applied Materials, Inc. | Method and system for manufacturing a transparent body for use in a touch panel |
JP5604525B2 (ja) * | 2010-10-06 | 2014-10-08 | 株式会社アルバック | 真空処理装置 |
JP5694023B2 (ja) * | 2011-03-23 | 2015-04-01 | 小島プレス工業株式会社 | 積層構造体の製造装置 |
JP5868309B2 (ja) | 2012-12-21 | 2016-02-24 | 株式会社神戸製鋼所 | 基材搬送ロール |
DE102013100809A1 (de) | 2013-01-28 | 2014-07-31 | Von Ardenne Anlagentechnik Gmbh | Verfahren zur Messung von optischen Eigenschaften an transparenten flexiblen Substraten |
EP2784176B1 (en) | 2013-03-28 | 2018-10-03 | Applied Materials, Inc. | Deposition platform for flexible substrates |
DE102013106225A1 (de) | 2013-06-14 | 2014-12-18 | Von Ardenne Gmbh | Verfahren und Vorrichtung zur Messung optischer Schichteigenschaften an flexiblen Substraten |
EP2883980B1 (en) * | 2013-12-10 | 2017-02-08 | Applied Materials, Inc. | Vacuum processing apparatus with substrate spreading device and method for operating same |
JP2018532122A (ja) * | 2015-10-28 | 2018-11-01 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 基板上で材料を処理するための装置、処理装置のための冷却構成、及び基板上で処理される材料の特性を測定するための方法 |
CN105239052A (zh) * | 2015-11-17 | 2016-01-13 | 广东腾胜真空技术工程有限公司 | 双放双收卷绕镀膜装置及方法 |
US20230137506A1 (en) * | 2020-08-21 | 2023-05-04 | Applied Materials, Inc. | Processing system for processing a flexible substrate and method of measuring at least one of a property of a flexible substrate and a property of one or more coatings on the flexible substrate |
US11677511B2 (en) | 2021-11-10 | 2023-06-13 | Qualcomm Incorporated | Mechanism to recover receiver radio link control after multiple unsuccessful automatic repeat query attempts |
Family Cites Families (18)
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FR1074710A (fr) * | 1951-12-29 | 1954-10-07 | Western Electric Co | Procédé et appareil pour la fabrication de conducteurs multiples |
US2810663A (en) | 1951-12-29 | 1957-10-22 | Bell Telephone Labor Inc | Fabrication of laminated transmission lines |
US2773412A (en) * | 1953-04-16 | 1956-12-11 | Huck Company | Electro-optical device for measuring thicknesses of coatings on materials |
US3496359A (en) * | 1966-02-09 | 1970-02-17 | Unit Process Assemblies | Portable beta backscatter type measuring instrument |
DE2225946C3 (de) * | 1972-05-27 | 1980-12-04 | Klaus 4803 Steinhagen Kalwar | Vorrichtung zur Oberflächenbehandlung von folienartigen Werkstoffen mit Koronaentladungen |
SU952373A2 (ru) * | 1981-03-31 | 1982-08-23 | Специальное Конструкторско-Технологическое Бюро Химико-Фотографической Промышленности | Многощелева головка дл нанесени фотоэмульсии на подложку |
DE3406645A1 (de) | 1984-02-24 | 1985-08-29 | Leybold-Heraeus GmbH, 5000 Köln | Spektralfotometeranordnung |
GB8408023D0 (en) * | 1984-03-28 | 1984-05-10 | Gen Eng Radcliffe Ltd | Vacuum coating apparatus |
US5154810A (en) * | 1991-01-29 | 1992-10-13 | Optical Coating Laboratory, Inc. | Thin film coating and method |
US5277928A (en) * | 1991-07-05 | 1994-01-11 | Strandberg John A | Method and apparatus for controlling yarn coatings |
JP3073327B2 (ja) * | 1992-06-30 | 2000-08-07 | キヤノン株式会社 | 堆積膜形成方法 |
RU2087861C1 (ru) * | 1995-07-13 | 1997-08-20 | Товарищество с ограниченной ответственностью "Фрактал" | Способ контроля параметров пленочного покрытия в процессе изменения толщины пленки на подложке и устройство для его осуществления |
US5772861A (en) * | 1995-10-16 | 1998-06-30 | Viratec Thin Films, Inc. | System for evaluating thin film coatings |
JPH09136323A (ja) * | 1995-11-15 | 1997-05-27 | Toray Ind Inc | 樹脂塗布シートの製造装置及び製造方法 |
US6231732B1 (en) * | 1997-08-26 | 2001-05-15 | Scivac | Cylindrical carriage sputtering system |
DE19928171B4 (de) * | 1999-06-19 | 2011-01-05 | Leybold Optics Gmbh | Verfahren zur kontinuierlichen Bestimmung der optischen Schichtdicke von Beschichtungen |
DE10019258C1 (de) * | 2000-04-13 | 2001-11-22 | Fraunhofer Ges Forschung | Verfahren zur Vakuumbeschichtung bandförmiger transparenter Substrate |
WO2002063064A1 (fr) * | 2001-02-07 | 2002-08-15 | Asahi Glass Company, Limited | Dispositif de projection et procede pour realiser un film de projection |
-
2004
- 2004-05-22 PL PL04012165T patent/PL1598660T3/pl unknown
- 2004-05-22 AT AT04012165T patent/ATE348331T1/de not_active IP Right Cessation
- 2004-05-22 EP EP04012165A patent/EP1598660B1/de not_active Expired - Lifetime
- 2004-05-22 DE DE502004002296T patent/DE502004002296D1/de not_active Expired - Lifetime
- 2004-07-28 TW TW093122486A patent/TWI257477B/zh not_active IP Right Cessation
- 2004-08-16 KR KR1020040064334A patent/KR100813572B1/ko not_active IP Right Cessation
- 2004-09-02 CN CNA2004100751952A patent/CN1699964A/zh active Pending
- 2004-09-02 JP JP2004255185A patent/JP3905102B2/ja not_active Expired - Fee Related
- 2004-11-24 US US10/996,808 patent/US7450233B2/en not_active Expired - Fee Related
- 2004-12-27 RU RU2004137999/28A patent/RU2285912C2/ru not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP1598660B1 (de) | 2006-12-13 |
EP1598660A1 (de) | 2005-11-23 |
TW200538714A (en) | 2005-12-01 |
CN1699964A (zh) | 2005-11-23 |
JP2005338047A (ja) | 2005-12-08 |
KR100813572B1 (ko) | 2008-03-17 |
TWI257477B (en) | 2006-07-01 |
US7450233B2 (en) | 2008-11-11 |
US20060192964A1 (en) | 2006-08-31 |
DE502004002296D1 (de) | 2007-01-25 |
ATE348331T1 (de) | 2007-01-15 |
PL1598660T3 (pl) | 2007-04-30 |
RU2004137999A (ru) | 2006-06-10 |
KR20050111513A (ko) | 2005-11-25 |
RU2285912C2 (ru) | 2006-10-20 |
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