CN1699964A - 用于测量镀覆的衬底的光学性质的测量装置 - Google Patents

用于测量镀覆的衬底的光学性质的测量装置 Download PDF

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CN1699964A
CN1699964A CNA2004100751952A CN200410075195A CN1699964A CN 1699964 A CN1699964 A CN 1699964A CN A2004100751952 A CNA2004100751952 A CN A2004100751952A CN 200410075195 A CN200410075195 A CN 200410075195A CN 1699964 A CN1699964 A CN 1699964A
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汉斯－格奥尔格·洛茨
彼得·索尔
斯特凡·海因
彼得·斯库克
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Applied Materials GmbH and Co KG
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    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
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    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
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Abstract

本发明涉及一种测量装置，其包括几个依次设置的镀覆腔，用于测量镀覆的衬底的光学性质。这些镀覆腔相互之间被隔离壁隔开，隔离壁的自由端安装在靠近衬底的上方。衬底最好是连续的薄膜。通过在各个镀覆腔之间测量衬底的反射、透射等，使得在仅仅部分完成的层系统中实现测量成为可能。这就实现了对镀覆过程的技术操作进行控制的优点。

Description

用于测量镀覆的衬底的光学性质的测量装置
镀覆的衬底，例如镀覆的建筑玻璃或镀覆的合成薄膜，在其镀覆以后具有改变了的光学性质。这些光学性质是否符合人们所期望的性质，可以通过相应的测量来确定。在衬底上已经沉积一层或几层以后，即对其光学性质的后续确定此时只能起到将优质镀层与劣质镀层分开的作用。因此，本发明的目的是如果可能的话，在镀覆过程中就已经获得其光学性质，以便在必要时干预镀覆过程本身。
人们已经知道的是，当采用单一的测量和评估系统来保持测量精度时，相对较多数量的测量对象可以在封闭腔(DE 34 06 645 C2)内通过分光光度计装置加以探测。其中，设置在封闭腔中的几个测量点，通过几根纤维光缆连接到光分辨系统中。事实上，通过相关的可动光阑，任何所期望数量的测量点或测量对象都可以通过此单一的光分辨系统得以探测，而且这里所得到的测量结果能够被评估。
然而，对于即将镀覆的、途经几个腔的衬底的在线测量，上述光度计并不适用。
因此，本发明着手解决这样一个问题，即，在包括几个腔的镀覆装置中，即使在镀覆过程本身中也可对镀覆的衬底的光学性质进行测量的问题。
该问题可按照本发明权利要求1所述的特征来解决。
因此，本发明涉及一种测量装置，其包括几个依次布置的镀覆腔，用于测量镀覆的衬底的光学性质。这些镀覆腔相互之间被隔离壁隔开，该隔离壁的自由端都设置在靠近衬底的上方。衬底最好是连续的薄膜。通过在各个镀覆腔之间测量衬底的反射、透射等，就可能在仅仅部分完成的层系统内实现测量。这就实现了对镀覆过程的技术操作进行控制的优点。
通过本发明可获得的优点包括特别地改善了过程控制。在复杂的光学层系统中，对第一层、第二层、第三层等以后的部分层系统的反射进行测量是可能的。这就使得能对于直至测量时的所完成层的层厚质量给出直接的结论。
附图显示了本发明的实施例，下面进一步对实施例进行具体的描述。附图中：
图1是用于薄片或薄膜的镀覆装置的侧视截面图；
图2是经过内设有测量头的隔离壁的截面图；
图3是设置在隔离壁内的光学波导管。
图1所示的是薄片或薄膜的镀覆装置1，该镀覆装置1包括几个镀覆腔2、3、4、5和6，每个腔内设置有溅射装置7、8、9、10、11。除了镀覆腔2-6以外，镀覆装置1还包括送料和卷绕腔12。每个镀覆腔2-6分别设有用于使镀覆腔2-6内成为真空的泵13-17。在各个镀覆腔2-6之间，朝着送料和卷绕腔12的方向设有隔离壁18-23，这些隔离壁在靠近镀覆鼓24的前面终止。镀覆鼓24的旋转轴线垂直于图纸平面，即，送料和卷绕腔设置在上面，而镀覆腔2-6设置在下面。
送料和卷绕腔12里面设有辊25，将要镀覆的薄膜26从该辊传送出来。该薄膜由几个小的张力和引导滚筒27-35引导至镀覆鼓24的表面。当薄膜26环绕镀覆鼓24之后，它经由几个滚筒36-44被卷绕到卷绕辊45上。在接近滚筒40处设有反射测量仪器46，其包括光源47和传感器48。
隔离壁18-23设在镀覆鼓24的附近，分别有加宽出去的支脚49-54，支脚的外轮廓形状与镀覆鼓24的圆形轮廓相一致。每个支脚49-54上都装有反射测量头(图1中未示)。
当薄膜26绕镀覆鼓24移动时，它可以在每个镀覆腔2-6中提供不同的层，最好是通过溅射提供。因此，未镀覆的或镀覆的薄膜26的光学性质就可以在其从一个腔到下一个腔的每一次传送时进行测量。
图2具体地显示了隔离壁22的支脚53。显而易见，支脚53上有几个孔60-63，冷却介质可以从这些孔中流过。此外，在支脚53的中心有一个孔64，该孔内设有反射测量头65。该反射测量头65包括反射测量仪器，该测量仪器在本质上相当于图1的反射测量仪器46，然而，该测量仪器上连接有线缆束66，接近该线缆束的下部绕有螺旋状的弹簧67。隔离壁22内设有侧部凹陷68，线缆束66从该凹陷中穿过。所述线缆束66包括两个光纤束，其中一个光纤束用于将光照到镀覆的衬底上，而另一个则收集反射光。收集到的反射光被投射到设在镀覆装置外面的接收器上，该接收器产生电信号且该信号被传导至中央评估点。
与倾斜面71相邻接的是垂直面72。密封件70将隔离壁22的下部封闭。
图3描述的是沿着垂直于图1和2绘图方向上的视图。
镀覆鼓24或其旋转轴线沿着水平方向延伸。在镀覆鼓24的上方安装着支脚53，其具有沿垂直方向延伸的侧部73及其倾斜延伸的邻接部74。支脚53上支撑着反射测量头65的外壳69。线缆束66从凹陷68内开始，然后被平行地引导向密封件70，随后穿透外腔壁80伸到外面。在外腔壁内有冷却水的进口和出口。线缆束66靠隔离壁22上部的固定器83、84和85来固定。

Claims (12)

1.一种用于测量在镀覆装置内的镀覆的衬底的光学性质的测量装置，所述镀覆装置包括几个依次设置的镀覆腔，这些镀覆腔之间设有隔离壁，隔离壁的自由端安装在靠近衬底的上方，衬底从一个腔传送到另一个腔，其特征在于，测量装置(65，66，67)安装在隔离壁(18-23)的自由端(49-54)上。
2.如权利要求1所述的测量装置，其特征在于，它与隔离壁(18-23)的自由端(49-54)结合为一体。
3.如权利要求1所述的测量装置，其特征在于，所述光学性质为反射特性。
4.如权利要求1所述的测量装置，其特征在于，其包括反射测量头(65)。
5.如权利要求4所述的测量装置，其特征在于，所述反射测量头与线缆束(66)相连接，所述线缆束包括两个光纤束。
6.如权利要求5所述的测量装置，其特征在于，所述线缆束(66)被沿着隔离壁(80)引导。
7.如权利要求6所述的测量装置，其特征在于，所述线缆束(66)从镀覆腔(2-6)引出，经由光电转换器供给到评估单元。
8.如权利要求1所述的测量装置，其特征在于，所述镀覆装置包括卷绕和送料腔(12)和几个镀覆腔(2-6)。
9.如权利要求1所述的测量装置，其特征在于，所述镀覆装置包括镀覆鼓(24)，其设在卷绕和送料腔(12)和镀覆腔(2-6)之间。
10.如权利要求9所述的测量装置，其特征在于，所述镀覆腔(2-6)环绕设置在镀覆鼓(24)周围。
11.如权利要求1所述的测量装置，其特征在于，所述衬底为柔性薄膜。
12.如权利要求1所述的测量装置，其特征在于，所述卷绕和送料腔(12)中进一步设有光学测量单元(47，48)。
CNA2004100751952A 2004-05-22 2004-09-02 用于测量镀覆的衬底的光学性质的测量装置 Pending CN1699964A (zh)

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