JP3891834B2 - ガス供給方法及び装置 - Google Patents

ガス供給方法及び装置 Download PDF

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Publication number
JP3891834B2
JP3891834B2 JP2001369905A JP2001369905A JP3891834B2 JP 3891834 B2 JP3891834 B2 JP 3891834B2 JP 2001369905 A JP2001369905 A JP 2001369905A JP 2001369905 A JP2001369905 A JP 2001369905A JP 3891834 B2 JP3891834 B2 JP 3891834B2
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JP
Japan
Prior art keywords
gas
useful component
exhaust gas
adsorption
exhaust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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JP2001369905A
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English (en)
Japanese (ja)
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JP2003164720A (ja
Inventor
良夫 石原
章寛 中村
忠弘 大見
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Sanso Holdings Corp
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Nippon Sanso Holdings Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=19179220&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JP3891834(B2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Nippon Sanso Holdings Corp filed Critical Nippon Sanso Holdings Corp
Priority to JP2001369905A priority Critical patent/JP3891834B2/ja
Priority to TW091134995A priority patent/TW200300699A/zh
Priority to KR1020020076554A priority patent/KR100878946B1/ko
Priority to US10/497,311 priority patent/US7258725B2/en
Priority to IL16227502A priority patent/IL162275A0/xx
Priority to CNB028241304A priority patent/CN100475315C/zh
Priority to EP02788714A priority patent/EP1452221A4/en
Priority to PCT/JP2002/012703 priority patent/WO2003047731A1/ja
Publication of JP2003164720A publication Critical patent/JP2003164720A/ja
Publication of JP3891834B2 publication Critical patent/JP3891834B2/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B23/00—Noble gases; Compounds thereof
    • C01B23/001—Purification or separation processes of noble gases
    • C01B23/0036—Physical processing only
    • C01B23/0052—Physical processing only by adsorption in solids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B01D53/70—Organic halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B23/00—Noble gases; Compounds thereof
    • C01B23/001—Purification or separation processes of noble gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/10—Single element gases other than halogens
    • B01D2257/11—Noble gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/206—Organic halogen compounds
    • B01D2257/2066—Fluorine
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0029—Obtaining noble gases
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0029—Obtaining noble gases
    • C01B2210/0035—Krypton
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0042—Making ultrapure specific gas
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P20/00—Technologies relating to chemical industry
    • Y02P20/151—Reduction of greenhouse gas [GHG] emissions, e.g. CO2

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Environmental & Geological Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Biomedical Technology (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Treating Waste Gases (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Chemical Vapour Deposition (AREA)
JP2001369905A 2001-12-04 2001-12-04 ガス供給方法及び装置 Expired - Lifetime JP3891834B2 (ja)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP2001369905A JP3891834B2 (ja) 2001-12-04 2001-12-04 ガス供給方法及び装置
TW091134995A TW200300699A (en) 2001-12-04 2002-12-03 Gas supply method and device
IL16227502A IL162275A0 (en) 2001-12-04 2002-12-04 Gas supplying method and system
US10/497,311 US7258725B2 (en) 2001-12-04 2002-12-04 Gas supplying method and system
KR1020020076554A KR100878946B1 (ko) 2001-12-04 2002-12-04 가스 공급 방법 및 장치
CNB028241304A CN100475315C (zh) 2001-12-04 2002-12-04 供气方法及其装置
EP02788714A EP1452221A4 (en) 2001-12-04 2002-12-04 GAS SUPPLY PROCESS AND SYSTEM
PCT/JP2002/012703 WO2003047731A1 (fr) 2001-12-04 2002-12-04 Procede et systeme d'alimentation en gaz

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001369905A JP3891834B2 (ja) 2001-12-04 2001-12-04 ガス供給方法及び装置

Publications (2)

Publication Number Publication Date
JP2003164720A JP2003164720A (ja) 2003-06-10
JP3891834B2 true JP3891834B2 (ja) 2007-03-14

Family

ID=19179220

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001369905A Expired - Lifetime JP3891834B2 (ja) 2001-12-04 2001-12-04 ガス供給方法及び装置

Country Status (8)

Country Link
US (1) US7258725B2 (OSRAM)
EP (1) EP1452221A4 (OSRAM)
JP (1) JP3891834B2 (OSRAM)
KR (1) KR100878946B1 (OSRAM)
CN (1) CN100475315C (OSRAM)
IL (1) IL162275A0 (OSRAM)
TW (1) TW200300699A (OSRAM)
WO (1) WO2003047731A1 (OSRAM)

Families Citing this family (66)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2863404B1 (fr) * 2003-12-09 2006-04-21 Cit Alcatel Dispositif pour la generation et la commande du flux d'agents de nettoyage dans une chambre de procedes
US7819981B2 (en) * 2004-10-26 2010-10-26 Advanced Technology Materials, Inc. Methods for cleaning ion implanter components
US7727305B2 (en) * 2006-04-20 2010-06-01 Lummus Technology Inc. Method and system for atmosphere recycling
US20080000497A1 (en) * 2006-06-30 2008-01-03 Applied Materials, Inc. Removal of organic-containing layers from large surface areas
WO2008004278A1 (fr) * 2006-07-04 2008-01-10 Toshiba Mitsubishi-Electric Industrial Systems Corporation Procédé et dispositif de concentration / dilution de gaz spécifique
EP2094584A1 (en) * 2006-11-02 2009-09-02 Kbig Limited Product dispensing systems
MY154251A (en) * 2007-11-12 2015-05-29 Exxonmobil Upstream Res Co Methods of generating and utility gas
US7862645B2 (en) * 2008-02-01 2011-01-04 Air Products And Chemicals, Inc. Removal of gaseous contaminants from argon
KR101822779B1 (ko) * 2008-02-11 2018-01-26 엔테그리스, 아이엔씨. 반도체 가공 시스템에서의 이온 공급원 세정법
BRPI0911224A2 (pt) * 2008-04-30 2015-09-29 Exxonmobil Upstream Res Co sistema e método para tratar uma corrente de alimentação gasosa, e, contactador adsorvente estruturado
US8518165B2 (en) * 2009-03-16 2013-08-27 J—Power Entech, Inc. Dry exhaust-gas treating apparatus
JP5291794B2 (ja) * 2009-03-16 2013-09-18 ジェイパワー・エンテック株式会社 再生塔及び乾式排ガス処理装置
JP6096513B2 (ja) * 2009-12-17 2017-03-15 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． プラズマポンプ及び膜による酸素分離方法並びにシステム
US8591634B2 (en) * 2010-01-28 2013-11-26 Air Products And Chemicals, Inc. Method and equipment for selectively collecting process effluent
US8858819B2 (en) 2010-02-15 2014-10-14 Air Products And Chemicals, Inc. Method for chemical mechanical planarization of a tungsten-containing substrate
CN102917767B (zh) 2010-05-28 2015-11-25 埃克森美孚上游研究公司 整合吸附器头以及与其相关的阀设计和变化吸附法
TWI495501B (zh) 2010-11-15 2015-08-11 Exxonmobil Upstream Res Co 動力分餾器及用於氣體混合物之分餾的循環法
US8795411B2 (en) 2011-02-07 2014-08-05 Air Products And Chemicals, Inc. Method for recovering high-value components from waste gas streams
US9352269B2 (en) 2011-03-01 2016-05-31 Exxonmobil Upstream Research Company Apparatus and systems having a rotary valve assembly and swing adsorption processes related thereto
US9162175B2 (en) 2011-03-01 2015-10-20 Exxonmobil Upstream Research Company Apparatus and systems having compact configuration multiple swing adsorption beds and methods related thereto
US9017457B2 (en) 2011-03-01 2015-04-28 Exxonmobil Upstream Research Company Apparatus and systems having a reciprocating valve head assembly and swing adsorption processes related thereto
WO2012118759A2 (en) 2011-03-01 2012-09-07 Exxonmobil Upstream Research Company Apparatus and systems having a rotary valve assembly and swing adsorption processes related thereto
AU2012223485B2 (en) 2011-03-01 2016-06-23 Exxonmobil Upstream Research Company Methods of removing contaminants from a hydrocarbon stream by swing adsorption and related apparatus and systems
US9168485B2 (en) 2011-03-01 2015-10-27 Exxonmobil Upstream Research Company Methods of removing contaminants from a hydrocarbon stream by swing adsorption and related apparatus and systems
BR112013018597A2 (pt) 2011-03-01 2019-01-08 Exxonmobil Upstream Res Co aparelho e sistemas tendo um contator adsorvente encaixado e processos de adsorção oscilante
JP5039861B1 (ja) * 2012-01-30 2012-10-03 住友精化株式会社 製品ガス供給方法、および製品ガス供給システム
US9034078B2 (en) 2012-09-05 2015-05-19 Exxonmobil Upstream Research Company Apparatus and systems having an adsorbent contactor and swing adsorption processes related thereto
US9072921B2 (en) * 2012-10-24 2015-07-07 Hamilton Sundstrand Corporation Thermodynamically-optimized advanced fire suppression system
KR101244426B1 (ko) * 2012-12-03 2013-03-18 (유)성문 화재예방 및 억제장치
FR3008166B1 (fr) * 2013-07-05 2015-06-26 Air Liquide Station et procede de remplissage de reservoirs de gaz
US10443127B2 (en) * 2013-11-05 2019-10-15 Taiwan Semiconductor Manufacturing Company Limited System and method for supplying a precursor for an atomic layer deposition (ALD) process
WO2016014232A1 (en) 2014-07-25 2016-01-28 Exxonmobil Upstream Research Company Apparatus and system having a valve assembly and swing adsorption processes related thereto
SG10201912669TA (en) 2014-11-11 2020-02-27 Exxonmobil Upstream Res Co High capacity structures and monoliths via paste imprinting
SG11201703809RA (en) 2014-12-10 2017-06-29 Exxonmobil Res & Eng Co Adsorbent-incorporated polymer fibers in packed bed and fabric contactors, and methods and devices using same
CN107635644A (zh) 2014-12-23 2018-01-26 埃克森美孚上游研究公司 结构化吸附床，其生产方法及其用途
WO2016186725A1 (en) 2015-05-15 2016-11-24 Exxonmobil Upstream Research Company Apparatus and system for swing adsorption processes related thereto comprising mid-bed purge systems
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WO2017039991A1 (en) 2015-09-02 2017-03-09 Exxonmobil Upstream Research Company Process and system for swing adsorption using an overhead stream of a demethanizer as purge gas
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US10328382B2 (en) 2016-09-29 2019-06-25 Exxonmobil Upstream Research Company Apparatus and system for testing swing adsorption processes
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US11331620B2 (en) 2018-01-24 2022-05-17 Exxonmobil Upstream Research Company Apparatus and system for swing adsorption processes
JP7020951B2 (ja) * 2018-02-09 2022-02-16 東京エレクトロン株式会社 プラズマ処理システムおよびプラズマ処理方法
US11413567B2 (en) 2018-02-28 2022-08-16 Exxonmobil Upstream Research Company Apparatus and system for swing adsorption processes
US11318410B2 (en) 2018-12-21 2022-05-03 Exxonmobil Upstream Research Company Flow modulation systems, apparatus, and methods for cyclical swing adsorption
JP7198676B2 (ja) * 2019-01-21 2023-01-04 株式会社荏原製作所 希ガス回収システムおよび希ガス回収方法
US11557462B2 (en) * 2019-03-13 2023-01-17 Kla Corporation Collecting and recycling rare gases in semiconductor processing equipment
EP3962641A1 (en) 2019-04-30 2022-03-09 Exxonmobil Upstream Research Company (EMHC-N1-4A-607) Rapid cycle adsorbent bed
WO2021071755A1 (en) 2019-10-07 2021-04-15 Exxonmobil Upstream Research Company Adsorption processes and systems utilizing step lift control of hydraulically actuated poppet valves
US11433346B2 (en) 2019-10-16 2022-09-06 Exxonmobil Upstream Research Company Dehydration processes utilizing cationic zeolite RHO
JP7310031B2 (ja) * 2020-09-28 2023-07-18 大陽日酸株式会社 ガス分離方法、およびガス分離装置
US12131962B2 (en) * 2021-05-13 2024-10-29 Taiwan Semiconductor Manufacturing Company, Ltd. Semiconductor processing tool and methods of operation
JP7604328B2 (ja) * 2021-06-14 2024-12-23 株式会社日本製鋼所 発泡成形用の射出成形機
EP4265322A1 (en) 2022-04-22 2023-10-25 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Helium recovery process
CN116603354B (zh) * 2023-05-25 2025-08-19 派瑞科技有限公司 用于制备氘代试剂的尾气回收设备

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS503480B2 (OSRAM) * 1972-02-25 1975-02-05
DE3039604A1 (de) * 1980-10-21 1982-05-19 Kernforschungszentrum Karlsruhe Gmbh, 7500 Karlsruhe Verfahren zum abtrennen der spaltedelgase xenon und krypton aus abgasen kerntechnischer anlagen
JPS6274430A (ja) * 1985-09-28 1987-04-06 Central Glass Co Ltd 希ガスハライドエキシマ−レ−ザ−ガスの精製法
JPH06295870A (ja) * 1993-04-08 1994-10-21 Nippon Steel Corp 化学的気相成長装置
US5557951A (en) * 1995-03-24 1996-09-24 Praxair Technology, Inc. Process and apparatus for recovery and purification of argon from a cryogenic air separation unit
JPH09251981A (ja) * 1996-03-14 1997-09-22 Toshiba Corp 半導体製造装置
US5759237A (en) * 1996-06-14 1998-06-02 L'air Liquide Societe Anonyme Pour L'etude Et, L'exploitation Des Procedes Georges Claude Process and system for selective abatement of reactive gases and recovery of perfluorocompound gases
JP3545914B2 (ja) * 1997-08-22 2004-07-21 株式会社神戸製鋼所 アルゴンの回収方法および同装置
JPH11114360A (ja) 1997-10-09 1999-04-27 Sony Corp 排ガス処理装置
JP4112659B2 (ja) 1997-12-01 2008-07-02 大陽日酸株式会社 希ガスの回収方法及び装置
KR20000015813U (ko) * 1999-01-18 2000-08-16 김영환 반도체 웨이퍼 증착장비의 배기가스 재공급장치
US7285154B2 (en) * 2004-11-24 2007-10-23 Air Products And Chemicals, Inc. Xenon recovery system

Also Published As

Publication number Publication date
CN100475315C (zh) 2009-04-08
TW200300699A (en) 2003-06-16
CN1599638A (zh) 2005-03-23
US20050109419A1 (en) 2005-05-26
EP1452221A1 (en) 2004-09-01
KR100878946B1 (ko) 2009-01-19
WO2003047731A1 (fr) 2003-06-12
EP1452221A4 (en) 2006-02-01
IL162275A0 (en) 2005-11-20
JP2003164720A (ja) 2003-06-10
US7258725B2 (en) 2007-08-21
KR20030045656A (ko) 2003-06-11
TWI307639B (OSRAM) 2009-03-21

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