JP3853781B2 - 燃焼ヒータ及び排ガス燃焼装置 - Google Patents

燃焼ヒータ及び排ガス燃焼装置 Download PDF

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Publication number
JP3853781B2
JP3853781B2 JP2003394449A JP2003394449A JP3853781B2 JP 3853781 B2 JP3853781 B2 JP 3853781B2 JP 2003394449 A JP2003394449 A JP 2003394449A JP 2003394449 A JP2003394449 A JP 2003394449A JP 3853781 B2 JP3853781 B2 JP 3853781B2
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JP
Japan
Prior art keywords
heater
combustion
source
holder
combustible gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2003394449A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005156007A (ja
Inventor
信一 渡邊
將司 石原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Electric Semiconductor Service Inc
Original Assignee
Kokusai Electric Semiconductor Service Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Electric Semiconductor Service Inc filed Critical Kokusai Electric Semiconductor Service Inc
Priority to JP2003394449A priority Critical patent/JP3853781B2/ja
Priority to TW093135173A priority patent/TWI278590B/zh
Priority to KR1020040097040A priority patent/KR100682709B1/ko
Priority to CNB2004100962347A priority patent/CN100357664C/zh
Priority to CN2007101850840A priority patent/CN101220958B/zh
Publication of JP2005156007A publication Critical patent/JP2005156007A/ja
Priority to KR1020060105711A priority patent/KR100830029B1/ko
Application granted granted Critical
Publication of JP3853781B2 publication Critical patent/JP3853781B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23C—METHODS OR APPARATUS FOR COMBUSTION USING FLUID FUEL OR SOLID FUEL SUSPENDED IN  A CARRIER GAS OR AIR 
    • F23C3/00—Combustion apparatus characterised by the shape of the combustion chamber
    • F23C3/002—Combustion apparatus characterised by the shape of the combustion chamber the chamber having an elongated tubular form, e.g. for a radiant tube
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23C—METHODS OR APPARATUS FOR COMBUSTION USING FLUID FUEL OR SOLID FUEL SUSPENDED IN  A CARRIER GAS OR AIR 
    • F23C7/00—Combustion apparatus characterised by arrangements for air supply
    • F23C7/02—Disposition of air supply not passing through burner
    • F23C7/06—Disposition of air supply not passing through burner for heating the incoming air
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23Q—IGNITION; EXTINGUISHING-DEVICES
    • F23Q7/00—Incandescent ignition; Igniters using electrically-produced heat, e.g. lighters for cigarettes; Electrically-heated glowing plugs
    • F23Q7/06—Incandescent ignition; Igniters using electrically-produced heat, e.g. lighters for cigarettes; Electrically-heated glowing plugs structurally associated with fluid-fuel burners
    • F23Q7/10—Incandescent ignition; Igniters using electrically-produced heat, e.g. lighters for cigarettes; Electrically-heated glowing plugs structurally associated with fluid-fuel burners for gaseous fuel, e.g. in welding appliances
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Combustion & Propulsion (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Thermal Sciences (AREA)
  • Resistance Heating (AREA)
  • Incineration Of Waste (AREA)
  • Control Of Resistance Heating (AREA)
JP2003394449A 2003-11-25 2003-11-25 燃焼ヒータ及び排ガス燃焼装置 Expired - Lifetime JP3853781B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2003394449A JP3853781B2 (ja) 2003-11-25 2003-11-25 燃焼ヒータ及び排ガス燃焼装置
TW093135173A TWI278590B (en) 2003-11-25 2004-11-17 Combustion heater and exhaust gas combustion device
KR1020040097040A KR100682709B1 (ko) 2003-11-25 2004-11-24 연소 히터 및 배기가스 연소장치
CNB2004100962347A CN100357664C (zh) 2003-11-25 2004-11-25 燃烧加热器及排气燃烧装置
CN2007101850840A CN101220958B (zh) 2003-11-25 2004-11-25 燃烧加热器及排气燃烧装置
KR1020060105711A KR100830029B1 (ko) 2003-11-25 2006-10-30 배기가스 연소장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003394449A JP3853781B2 (ja) 2003-11-25 2003-11-25 燃焼ヒータ及び排ガス燃焼装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2006188441A Division JP4063852B2 (ja) 2006-07-07 2006-07-07 排ガス燃焼装置

Publications (2)

Publication Number Publication Date
JP2005156007A JP2005156007A (ja) 2005-06-16
JP3853781B2 true JP3853781B2 (ja) 2006-12-06

Family

ID=34720513

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003394449A Expired - Lifetime JP3853781B2 (ja) 2003-11-25 2003-11-25 燃焼ヒータ及び排ガス燃焼装置

Country Status (4)

Country Link
JP (1) JP3853781B2 (ko)
KR (2) KR100682709B1 (ko)
CN (2) CN101220958B (ko)
TW (1) TWI278590B (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103075725A (zh) * 2013-02-01 2013-05-01 浙江特富锅炉有限公司 燃用化工废气锅炉炉膛

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102914617B (zh) * 2012-10-16 2015-01-07 上海天科化工检测有限公司 一种便携式固液物料燃烧危险性的筛选装置
CN103591592B (zh) * 2013-10-25 2016-04-27 包秀敏 基于氢气和氧气的废气焚烧装置
KR102368562B1 (ko) * 2020-02-11 2022-02-28 주식회사 포스코 가스 검사 장치 및 방법
CN115007085B (zh) * 2022-08-04 2022-12-02 江苏铧德氢能源科技有限公司 制氢装置中的气体分布器

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5657855A (en) * 1979-10-16 1981-05-20 Aisin Chem Co Ltd Thick coating paint
FR2591509B1 (fr) * 1985-12-17 1989-10-27 Labo Electronique Physique Dispositif antipollution pour l'elimination des gaz toxiques utilises dans l'elaboration des materiaux semiconducteurs du groupe iii-v.
EP0410151A1 (de) * 1989-07-28 1991-01-30 Heraeus Quarzglas GmbH Infrarot-Strahler mmit elektrischer Heizwendel
JPH05240028A (ja) * 1992-02-28 1993-09-17 Asahi Glass Co Ltd 電気シースヒータおよびこれが組み込まれたディーゼル機関用パティキュレートトラップ
JP3016690B2 (ja) * 1994-05-30 2000-03-06 カンケンテクノ株式会社 半導体製造排ガス除害方法とその装置
DE4436908A1 (de) * 1994-10-15 1996-04-18 Philips Patentverwaltung Düse für eine Verbrennungsvorrichtung
JPH10162850A (ja) * 1996-11-27 1998-06-19 Sanyo Electric Co Ltd 燃料電池の未反応ガス燃焼処理装置
GB9719512D0 (en) * 1997-09-12 1997-11-19 Boc Group Plc Treatment of a combustible gas stream
JP2002162296A (ja) * 2000-11-27 2002-06-07 Nippon Dennetsu Co Ltd 温度感知センサー付きヒータ
KR100399793B1 (ko) * 2001-11-22 2003-09-29 (주) 윈테크 수소 가스 연소 방법 및 이를 수행하기 위한 시스템
JP4810227B2 (ja) * 2005-12-28 2011-11-09 シャープ株式会社 電子機器のキャビネットをインサート成形する方法及び布製カバーによって覆われたキャビネットを有する電子機器

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103075725A (zh) * 2013-02-01 2013-05-01 浙江特富锅炉有限公司 燃用化工废气锅炉炉膛
CN103075725B (zh) * 2013-02-01 2015-02-25 浙江特富锅炉有限公司 燃用化工废气锅炉炉膛

Also Published As

Publication number Publication date
KR20050050576A (ko) 2005-05-31
TWI278590B (en) 2007-04-11
KR100682709B1 (ko) 2007-02-15
CN101220958A (zh) 2008-07-16
CN1641265A (zh) 2005-07-20
TW200526903A (en) 2005-08-16
JP2005156007A (ja) 2005-06-16
CN100357664C (zh) 2007-12-26
KR20060127821A (ko) 2006-12-13
KR100830029B1 (ko) 2008-05-15
CN101220958B (zh) 2011-06-01

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