1278590 九、發明說明： 【發明所屬之技術領域】 本發明為關於可使含在自半導體製造裝置等所排出之 排氣中的可燃性氣體燃燒之燃燒加熱器及排氣燃燒裝置， 特別是適用於可燃性氣體為氫氣H2時者。 【先前技術】 自半導體製造裝置或液晶製造裝置等之製造裝置所被 排出的排氣，其大部份均含有危險的可燃性氣體，因此不 能原樣地放出至大氣中。所以，使用排氣燃燒裝置，在放 出大氣之前對可燃性氣體以燃燒加熱器實施燃燒。先前， 在具有此一燃燒加熱器之排氣燃燒裝置中，為因應燃燒加 熱器之種類，而有以金屬製加熱器之點火•燃燒方式（例 如參照專利文獻1 )’及，以電火花（electric spark)之點 火•燃燒方式（例如參照專利文獻2 )。 圖4表示採用以金屬製加熱器點火•燃燒方式之排氣燃 燒裝置。以金屬製加熱器之燃燒裝置其構成如次。在設有 可燃性氣體導入管8、排氣管道1 1及進氣口 1 2之燃燒室 14内，設有金屬製加熱器13。金屬製加熱器13為由：金屬 製可將熱傳達至全周的外殼（c a s e ) 1 5 ;及被配設在此外殼 1 5内可將電能變換成熱能之電熱材料之電熱加熱器16; 及，可檢測出金屬製加熱器1 3的溫度之熱電偶5 ;及，被 埋入於外殼 1 5内的空間之絕緣物質1 7 ;如此所構成。藉 設在燃燒室1 4的外部之溫度控制器7，為維持使以熱電偶 5所檢測出之金屬製加熱器1 3的溫度在一定的溫度，而對 6 312XP/發明說明書(補件)/93-03/9313 5173 1278590 電熱加熱器1 6控制其電力。 藉由排氣管道11的吸入而吸自進氣口 12之大氣（： 被吸入至燃燒室1 4内，燃燒室1 4内的空氣則經常保 流動狀態。而自點火用燃氣配管2 4流入被控制流量的 (H2 )，藉金屬製加熱器1 3之熱能而和大氣中的氧氣 而使氫氣點火。點火後，自可燃性氣體導入管8使排 入燃燒室1 4内而和大氣中的氧氣混合，藉點火所發生 燒火焰 1 0及熱源之熱能而使含在排氣中的可燃性氣 燒，以實施排氣之燃燒處理。燃燒後的排氣自排氣管 而被排出。 圖 5 表示採用電火花之點火•燃燒方式的排氣燃 置。其基本的構成和圖2所示之金屬製加熱器的點火 燒方式相同。其不同點為，其不是以電熱加熱器點火 燒，而是以電火花實施點火•燃燒之點。電火花之構居 使電壓提高之升壓變電器2 9被接續至燃燒器電極2 8 而藉高電壓予以點火。 在空氣時常流動之燃燒室1 4内自點火用燃氣配管 氫氣（Η 2 )流入，藉電火花的能量而和大氣中之氧氣 使氫氣點火。點火後，自可燃性氣體導入管8使排氣 燃燒室1 4再和大氣中的氧氣混合，藉點火所發生的燃 焰 1 0使含在排氣中之可燃性氣體燃燒而實施排氣的 處理。燃燒後的排氣被自排氣管道1 1排出。 又，金屬製加熱方式及電火花方式之兩方式，為了 燃燒，如圖4及圖5所示，必須要有點火用的燃氣設 312ΧΡ/發明說明書(補件)/93-03/93135173 芝氣） 持在 氫氣 反應 氣流 的燃 體燃 道11 燒裝 •燃 •燃 ί為， ' 28， 24使 反應 流入 燒火 燃燒 安全 備0 7 1278590 點火氣體通常為使用氫氣（Η 2 )。點火用燃氣設備之構成 為，在燃燒室1 4接續點火用燃氣配管2 4，使通過此點火 用燃氣配管2 4的氫氣（Η 2 )供應至燃燒室1 4。因此，其 必須以過濾器1 9藉由手動閥1 8而除去含在於配管2 4内流 動的氫氣（Η 2 )之不純物，再以目視一面監視壓力計21而 另一方面以手動調節器2 0控制氫氣（Η 2 )壓力，再藉由氣 閥 2 2而以質量控制器（m a s s f 1 〇 w c ο n t r ο 1 1 e r ) 2 3控制流 量。 (專利文獻1 )日本專利特開平7 - 3 2 3 2 1 1號公報 (專利文獻2 )日本專利特開平6 - 1 2 9 6 2 7號公報 【發明内容】 (發明所欲解決之問題） 上述專利文獻1之金屬加熱器方式，因以高溫燃燒而使 金屬製加熱器的周壁發生劣化，或因高溫燃燒而反應熱使 外殼内的電熱加熱器容易斷線，而有使用溫度範圍在高溫 側受限的問題。又，由於外殼為金屬製因此電氣絕緣性不 佳。又，電熱加熱器因被埋入外殼内的絕緣物質，因此電 熱加熱器在發生斷線時，電熱加熱器的交換作業非常麻 煩。又，在燃燒室，除了可燃性氣體導入管以外，其必須 氣密地接續對溫度控制器的電纜或點火用燃氣配管，而使 燃燒室的構造變成複雜。 又，專利文獻2之電火花方式，因燃燒器電極劣化時則 不能產生電火花而有不能點火之情形。又，由於在不能點 火時則必須反覆轉電火花至點火為止，因此，點火時可燃 8 312XP/發明說明書(補件)/93-03/93135173 1278590 性氣體濃度如達到異常高濃度時則會發生不方便之情形， 而有此問題。又，在燃燒室，除了可燃性氣體導入管以外， 必須氣密地接續對升壓變電器的電纜或點火用燃氣配管， 因此燃燒室的構造變成複雜。 又，對金屬製加熱器方式及電火花方式共同而言，空氣 中的氧氣存在過剩時，低濃度的可燃性氣體之燃燒效率則 會惡劣。又，點火後，因排氣管道的吸引壓力變動而燃燒 火焰亦會搖晃不穩而使燃燒效率不安定。又，其必須要有 點火用的燃氣設備，因此有增高設備費的問題。 本發明之課題為，可解消如上述先前技術的問題，而提 供一種加熱器斷線少，使用範圍廣泛，可確實點火，且不 須要點火用燃氣設備之燃燒加熱器及排氣燃燒裝置。 又本發明之課題為，更提供一種可使燃燒效率安定且可 簡單保養之排氣燃燒裝置。 (解決問題之手段） 第1發明為，可使可燃性氣體點火·燃燒之燃燒加熱器， 其具備有：由陶瓷製之筒狀的電熱線夾具（holder)和被捲 繞於該電熱線夾具外周之電熱線所構成的加熱器源；及， 在前述加熱器源可裝卸自如地被覆的石英製之筒狀的加熱 器罩（h e a t e r c a p );如此構成，藉前述加熱器源而被加熱 之加熱器罩外側前述可燃性氣體可被點火•燃燒，如此為 特徵之加熱器。 由於以耐熱性的陶瓷或石英構成加熱器源之電熱線夾 具及加熱器罩，因此，可在燃燒加熱器之高溫下使用，而 9[Technical Field] The present invention relates to a combustion heater and an exhaust gas combustion apparatus which can burn a combustible gas contained in exhaust gas discharged from a semiconductor manufacturing apparatus or the like, and is particularly suitable for use. When the flammable gas is hydrogen H2. [Prior Art] Since most of the exhaust gas discharged from a manufacturing apparatus such as a semiconductor manufacturing apparatus or a liquid crystal manufacturing apparatus contains a dangerous flammable gas, it cannot be released to the atmosphere as it is. Therefore, the exhaust gas combustion device is used to burn the combustible gas with the combustion heater before the atmosphere is released. In the exhaust gas combustion apparatus having such a combustion heater, in order to respond to the type of the combustion heater, there is a method of igniting and burning a metal heater (for example, refer to Patent Document 1) and electrosparking ( Ignition and combustion method of electric spark (for example, refer to Patent Document 2). Fig. 4 shows an exhaust gas burning device which is ignited and burned by a metal heater. The combustion device with a metal heater is constructed as follows. A metal heater 13 is provided in the combustion chamber 14 in which the combustible gas introduction pipe 8, the exhaust pipe 1 1 and the intake port 1 are provided. The metal heater 13 is: an electric heating heater 16 which is made of metal and can transfer heat to the whole circumference; and an electrothermal heater 16 which is disposed in the outer casing 15 and can convert electric energy into thermal energy; And a thermocouple 5 capable of detecting the temperature of the metal heater 13; and an insulating material 1 7 buried in the space inside the casing 15; The temperature controller 7 provided outside the combustion chamber 14 maintains the temperature of the metal heater 13 detected by the thermocouple 5 at a constant temperature, and the 6 312XP/invention specification (supplement) /93-03/9313 5173 1278590 The electric heater 16 controls its power. The atmosphere sucked from the intake port 12 by the suction of the exhaust duct 11 is sucked into the combustion chamber 14 and the air in the combustion chamber 14 is constantly kept flowing. The self-ignition gas piping 2 4 Flowing into the controlled flow (H2), the hydrogen is ignited by the heat of the metal heater 13 and the oxygen in the atmosphere. After the ignition, the self-combustible gas is introduced into the combustion chamber 14 to be discharged into the combustion chamber 14 and the atmosphere. In the oxygen mixing, the flammable gas contained in the exhaust gas is burned by the burning of the flame 10 and the heat energy of the heat source to perform the combustion treatment of the exhaust gas. The exhaust gas after the combustion is discharged from the exhaust pipe. Figure 5 shows the exhaust ignition using the spark ignition and combustion method of the electric spark. The basic structure is the same as that of the metal heater shown in Fig. 2. The difference is that it is not the electric heater. The fire is fired, but the point of ignition and combustion is performed by electric spark. The electric spark is constructed so that the booster transformer of the voltage increase is connected to the burner electrode 2 8 and is ignited by the high voltage. Self-ignition gas piping in chamber 14 The gas (Η 2 ) flows in, and the hydrogen in the atmosphere is ignited by the energy of the spark and the oxygen in the atmosphere. After the ignition, the exhaust gas combustion chamber 14 is mixed with the oxygen in the atmosphere by the ignition chamber. The generated flame 10 burns the combustible gas contained in the exhaust gas to perform the exhaust gas treatment. The exhaust gas after the combustion is discharged from the exhaust pipe 1 1. Further, the metal heating method and the electric spark method In order to burn, as shown in Fig. 4 and Fig. 5, it is necessary to have a gas for ignition 312 ΧΡ / invention manual (supplement) / 93-03/93135173 芝 gas) 11 Burning • Burning • Burning, ' 28, 24 Let the reaction flow into the fire and burn safely. 0 7 1278590 The ignition gas is usually hydrogen (Η 2 ). The ignition gas equipment is configured such that the ignition gas pipe 24 is connected to the combustion chamber 14 and the hydrogen gas (? 2) passing through the ignition gas pipe 24 is supplied to the combustion chamber 14. Therefore, it is necessary to remove the impurities containing hydrogen (Η 2 ) flowing in the pipe 24 by the manual valve 18 by the filter 19, and then monitor the pressure gauge 21 visually while on the other hand with the manual regulator 2 0 controls the pressure of hydrogen (Η 2 ), and then controls the flow rate with a mass controller (massf 1 〇wc ο ntr ο 1 1 er ) 2 3 by means of a gas valve 2 2 . (Patent Document 1) Japanese Patent Laid-Open No. Hei 7- 3 2 3 2 1 1 (Patent Document 2) Japanese Patent Laid-Open No. Hei 6- 1 2 9 6 2 7 [Invention] (Problems to be Solved by the Invention) In the metal heater method of Patent Document 1, the peripheral wall of the metal heater is deteriorated by high-temperature combustion, or the reaction heat due to high-temperature combustion causes the electric heater in the casing to be easily broken, and the use temperature range is high. Side limited problem. Further, since the outer casing is made of metal, electrical insulation is not good. Further, since the electric heater is buried in the insulating material in the outer casing, the electric heater is extremely troublesome when the electric heater is disconnected. Further, in addition to the combustible gas introduction pipe, the combustion chamber must be connected to the cable of the temperature controller or the gas pipe for ignition in a gastight manner, and the structure of the combustion chamber becomes complicated. Further, in the sparking method of Patent Document 2, when the burner electrode is deteriorated, the electric spark cannot be generated and the ignition cannot be performed. Moreover, since it is necessary to repeatedly turn the electric spark to the ignition when the ignition is impossible, the ignition can be ignited. 8 312XP/Invention Manual (Supplement)/93-03/93135173 1278590 When the gas concentration reaches an abnormally high concentration, it occurs. Inconvenient, but have this problem. Further, in the combustion chamber, in addition to the combustible gas introduction pipe, the cable for the booster transformer or the gas pipe for ignition must be connected in an airtight manner, so that the structure of the combustion chamber becomes complicated. Further, when the metal heater method and the sparking method are combined, when the oxygen in the air is excessive, the combustion efficiency of the low-concentration combustible gas is bad. Further, after the ignition, the combustion flame is shaken due to the fluctuation of the suction pressure of the exhaust pipe, and the combustion efficiency is unstable. Moreover, it is necessary to have a gas appliance for ignition, and thus there is a problem of an increase in equipment costs. SUMMARY OF THE INVENTION An object of the present invention is to solve the problems of the prior art described above, and to provide a combustion heater and an exhaust gas combustion apparatus which are less broken in a heater, have a wide range of use, can be surely ignited, and do not require an ignition gas apparatus. Still another object of the present invention is to provide an exhaust gas combustion apparatus which can stabilize combustion efficiency and can be easily maintained. (Means for Solving the Problem) The first invention is a combustion heater that ignites and burns a combustible gas, and includes a tubular electric heating wire holder (holder) made of ceramic and wound around the electric heating wire clamp. a heater source formed by a heating wire of the outer circumference; and a heater cap made of quartz which is detachably covered by the heater source; and configured to be heated by the heater source The aforementioned flammable gas on the outside of the hood can be ignited and burned, thus featuring a heater. Since the heater wire and the heater cover are made of heat-resistant ceramic or quartz, they can be used at high temperatures of the combustion heater, and 9
312XP/發明說明書(補件)/93-03/93135173 1278590312XP/Invention Manual (supplement)/93-03/93135173 1278590
' I 可確實地使可燃性氣體點火•燃燒。又由於可燃性氣體可 確實點火，因此其不須要點火設備。 又，由於其以陶瓷或石英構成加熱器源的電熱線夾具及 加熱器罩，因此可確保高的電氣絕緣性。 又，由於在陶瓷製的電熱線夾具上包覆有比陶究軟化溫 度更高的石英製之加熱器罩，因此，在可燃性氣體燃燒時 加熱器罩之劣化很小，而可有效地保護電熱線斷線，並使 電熱線之斷線減少。 又，由於在加熱器源可裝卸自如地包覆有加熱器罩，因 此，即使電熱線斷線時，只要自加熱器源卸下加熱器罩， 即可對電熱線夾具卸下或安裝電熱線，而可容易實施斷線 之交換作業。 第2發明為，在第1發明中，其具備有：可檢測出前述 加熱器源的溫度之溫度檢測感測器；及，可支持被覆加熱 器源之前述加熱器罩，同時，插通被接續各導線至前述電 熱線及溫度檢測器之筒狀的加熱器支座（s u ρ ρ 〇 r t );及，被 設在前述筒狀的加熱器支座和前述加熱器源之間，可直線 狀地連結前述加熱器源和前述加熱器支座之高絕緣性的筒 狀之加熱器夾架（h ο 1 d e r )，如此的燃燒加熱器。 藉由加熱器支座自加熱器源的電熱線可將導線拉出至 外部。又，藉由加熱器支座自溫度檢測感測器也可將導線 拉出至外部。 又，由於在加熱器源和加熱器支座之間介在有高絕緣性 之加熱器夾架，因此即使在加熱器源上連結加熱器支座 10 312XP/發明說明書(補件)/93-03/93135 ] 73 1278590 時，也可使加熱器源的電氣絕緣性提高。 又，使加熱器源和加熱器支座連結成直線狀，因此可使 燃燒加熱器容易操作。 第3發明為，在第2發明中，使前述加熱器罩和前述加 熱器夾架之口徑構成大致相等，前述加熱器源之至少下部 外徑使其和前述加熱器夾架的内徑大致相等，前述加熱器 支座之至少上部外徑和前述加熱器夾架的内徑大致相等， 使前述加熱器夾架的上部嵌合前述加熱器源的下部再以連 結具連結至前述加熱器夾架，在前述加熱器夾架的下部嵌 合前述加熱器支座的上部再以連結具連結至前述加熱器夾 架，被覆在前述加熱器源之前述加熱器罩以前述加熱器夾 架之上部開口端繫止，如此所成之燃燒加熱器。 在加熱器夾架上嵌合加熱器源，再將加熱器支座嵌合於 加熱器夾架，自加熱器源藉由加熱器夾架、加熱器支座被 拉出之導線由於在其間不會露出至外部，因此，導線可被 保護不受外部氣氛所影響。 又，以連結具在加熱器源連結加熱器夾架，而以連結具 在加熱器夾架上連結加熱器支座，因此，加熱器源可以加 熱器支座確實地支持。 又，由於加熱器罩僅被覆加熱器源而被繫止在加熱器夾 架，因此，其可容易對加熱器源卸下或安裝加熱器罩。 第4發明為一種排氣燃燒裝置，其具備有：可對包含在 排氣中的可燃性氣體點火•燃燒之燃燒室；及，被設在前 述燃燒室的下部之氣體導入口；及，可將空氣吸入至前述 312XP/發明說明書(補件)/93-03/9313 5173 11 1278590 燃燒室之進氣口；及，被設和前述燃燒室的上部之前述氣 體導入口對向的位置之可使前述燃燒室排氣的排氣口； 及，被彎曲成L字形的先端部而自前述氣體導入口被插入 至前述燃燒室内自基端部側可導入前述排氣之可燃性氣體 導入管；及，被連結至前述可燃性氣體導入管之先端部的 筒狀的加熱器外蓋；及，在前述加熱器外蓋内可確保氣體 流路且同軸被插入固定，可對自前述氣體流路所供給的可 燃性氣體加熱，同時，可使被加熱之可燃性氣體和自前述 進氣口吸入的空氣之混合氣體燃燒而發生燃燒火焰的申請 專利範圍第2或3項所記載之燃燒加熱器；及，構成前述 可燃性氣體導入管之L字形的隅角（c 〇 r n e r )部之T字形配 管，前述T字形配管的主管之一端被連結至前述可燃性氣 體導入管的先端部側，前述主管之另一端被開放，再將前 述Τ字形配管的分枝管連結至前述可燃性氣體導入管之基 端部側的Τ字形配管；及，和將自前述燃燒加熱器的加熱 器支座拉出至外部之電熱線及熱電偶的各導線接續，而可 對前述電熱線供給電力而控制使以溫度檢測器所檢測出之 溫度成為一定溫度之溫度控制器，如此所成，其特徵為， 前述燃燒加熱器的加熱器支座自可燃性氣體導入管的先端 部插入，使前述Τ字形配管之主管貫通，再使自前述主管 的開放另一端被拉出至外部的加熱器支座之下端氣密地固 定於前述主管的開放另一端，藉此而確保前述氣體流路而 插入固定前述燃燒加熱器於前述加熱器蓋内，如此之排氣 燃燒裝置。 12 312ΧΡ/發明說明書(補件)/93-03/93135173 1278590 藉在加熱器外蓋確保氣體流路而插入燃燒加熱器，在流 通氣體流路之過程由於可燃性氣體藉加熱器源可充分被加 熱，因此，低濃度的可燃性氣體也可有效率地燃燒。又， 由於燃燒加熱器藉加熱器外蓋所覆蓋，因此在可燃性氣體 點火後，燃燒火焰不會因排氣管道的吸引壓力變動而搖晃 不穩，而可使燃燒效率安定。 又，可燃性氣體導入管之L字形的隅角部以T字形配管 構成，如使用此T字形配管安裝於燃燒加熱器時，可使電 熱線與溫度檢測感測器的導線取出，因此，對燃燒加熱器 之安裝或卸下容易而且保養也容易。 又，在可燃性氣體導入管的隅角部設有T字形配管，藉 在此T字形配管貫通燃燒加熱器的加熱器支座，自燃燒室 的氣體導入口則可取出導線，其比在燃燒室設置專用的導 線取出用開口 ，其保養較簡單。 又，由於在設於可燃性氣體導入管的L字形之隅角部同 軸地固定燃燒加熱器之加熱器支座於 T字形配管之主管 上，因此，在加熱器外蓋内插入固定燃燒加熱器則較容易。 又，在第4發明中，在前述燃燒加熱器與前述排氣口之 間設有筒狀的冷卻管，如使前述燃燒加熱器所燃燒之可燃 性氣體冷卻時，由於所冷卻之排氣被排出至大氣中，因此 其不會對環境賦予惡劣之影響。 第5發明為，在第4發明中，前述加熱器外蓋與被覆前 述加熱器源之加熱器罩的間隔為2〜2 0 mm，前述加熱器外 蓋或前述加熱器源之全長為3 0〜3 0 0 mm，前述加熱器罩之 13 312XP/發明說明書(補件)/93-03/93135173 1278590 直徑為1 0〜2 0 mm，如此為特徵的排氣燃燒裝置。 如本發明將各元件設定為上述之尺寸時，則可更 燃燒含在排氣中的可燃性氣體。 第6發明為，在第4或第5發明中，前述加熱器 熱器夾架為陶曼製，前述加熱器罩為石英製，以前 線所加熱的加熱器源的溫度為 6 5 0〜1 2 0 0 °C ，如此 之排氣燃燒裝置。 由於以耐熱性的陶瓷或石英構成電熱線夾具或 罩，而燃燒加熱器的溫度被提高至 6 5 0〜1 2 0 0 °C ， 可更有效率地燃燒含在排氣中的可燃性氣體。 (發明效果） 根據本發明，加熱器斷線很少，使用溫度範圍廣 確實地點火•燃燒，進一步其不須要點火用之燃氣 可使燃燒加熱器及裝置簡單化。 又，根據本發明，可實現更有高效率且安定地燃 使保養簡單化。 【實施方式】 以下說明本發明之實施形態。 圖1表示實施形態之燃燒加熱器的分解組合圖。 熱器3 0為主要由：圓筒狀之加熱器源3 2 ;及，被覆 器源3 2呈有頭圓筒形的加熱器罩（h e a t e r c a p ) 3 1 ; 持被覆加熱器源3 2之加熱器罩3 1的圓筒狀的加熱 (heatersupport)46;及，被設在加熱器源32和加 座4 6間，直線連結加熱器源3 2與加熱器支座4 6之 312XP/發明說明書(補件)/93-03/9313 5173 有效地 源及加 述電熱 為特徵 加熱器 因此， 泛，可 設備而 燒，並 燃燒加 在加熱 及，支 器支座 熱器支 圓筒狀 14 1278590 的加熱器夾架（heater holder)41;所構成。 上述加熱器源3 2為由：具有高電氣絕緣性之 熱線夾具（holder)33;及，被捲繞在電熱線夾：! 的電熱線3 4 ;如此所構成。在電熱線夾具3 3 開有螺旋狀的溝4 5，電熱線3 4被捲繞在電熱I 外周而埋入於該溝4 5。電熱線夾具3 3之上部 為了防止缺口而被構成倒角。在電熱線夾具3 3 口端之内周，為了可插入加熱器夾架41内，在 設置具有和加熱器夾架 4 1的内徑大致相同外 環狀的突起3 7。因此，在此環狀突起3 7的外 差部 4 0。此段差部 4 0抵接於加熱器夾架 41 端。在突起37之一部份，進一步設有朝軸方向 狀的延伸部38，在此延伸部38開設有為了和 4 1連結之螺絲孔3 9。 在電熱線34接續有可供電之2根導線（圖2 在電熱線夾具3 3的表面側設有為了檢測出加奏 溫度而作為溫度檢測感測器之熱電偶 3 5，此-亦接續有可傳送檢出信號之導線（圖2之4 9 ) 電熱線夾具 3 3為以例如耐熱性、高絕緣性 成，電熱線3 4為以例如鎳鉻電熱線（N i c h r 〇 m e 成。因此，加熱器源3 2為構成中空之陶瓷加熱 構成則可迅速地升溫、降溫。 上述加熱器罩 3 1被形成上部閉合下部開口 其覆蓋加熱器源3 2且覆蓋包含加熱器源3 2的注 312XP/發明說明書(補件)/93-03/9313 5173 圓筒狀的電 It 33的外周 之外周壁切 良夾具3 3的 的開口端， 的下部的開 軸方向外方 徑之大致呈 周，形成段 的上部開口 外方之舌片 加熱器夾架 之4 8 )。又， &器源3 2的 -熱電偶 35 〇 的陶瓷所形 w i r e )所構 器，藉中空 之圓筒形， .管的外周。 15 1278590 上述加熱器支座4 6為構成支持覆蓋加熱器源3 2的加熱 器罩31之筒狀體。在加熱器支座4 6的上部側面，設有為 了和加熱器夾架4 1連結的螺絲孔4 7。加熱器支座4 6具有 支持加熱器源3 2之功能，同時，具有可一方面保護自加熱 器源 3 2延伸之導線一方面可為其拉出至外部之保護管的 功能。 加熱器夾架4 1被設在筒狀的加熱器支座4 6和加熱器源 3 2之間，以直線狀連結加熱器支座4 6和加熱器源3 2之高 絕緣性的筒狀體，如此所構成。在加熱器夾架4 1的側面設 有沿著軸方向之加熱器源安裝用螺絲孔4 2 ;及，加熱器支 座安裝用之螺絲孔4 3。加熱器夾架4 1具有連結加熱器源 3 2和加熱器支座4 6之機能，同時，具有提高加熱器源3 2 的電氣絕緣性之機能。 上述加熱器罩3 1之内徑被設定為，加熱器罩3 1覆蓋加 熱器源3 2而和加熱器源3 2的外徑大致相同。加熱器罩3 1 和加熱器夾架4 1之口徑，使加熱器罩31可抵接而被繫止 於加熱器夾架41，而被設定成大致相同。又，圓筒狀的加 熱器源3 2之外徑被設定為比加熱器夾架4 1的内徑稍微更 大。又，加熱器支座4 6之外徑被設定成可插入加熱器夾架 41内而大致和加熱器夾架41的内徑相同。 在組裝此一燃燒加熱器時，將加熱器源 3 2之下部插入 加熱器夾架4 1，對準設在加熱器源3 2的延伸部3 8之螺絲 孔3 9，及，設在加熱器夾架41之上部的螺絲孔4 2，在此 等對準之螺絲孔4 2、3 9藉扭入螺絲4 4而繫緊，將加熱器 16 312XP/發明說明書(補件)/93-03/9313 5173 1278590 源32安裝於加熱器夹架41上。 又，將加熱器支座4 6的上部插入加熱器夾架41，對準 設在加熱器夾架41的下部之螺絲孔4 3，及，設在加熱器 支座4 6的上部的螺絲孔4 7，在此等對準之螺絲孔4 3、4 7 藉扭入螺絲4 4而繫緊，將加熱器支座4 6安裝於加熱器夾 架41上。 如此在加熱器源3 2藉由加熱器夾架4 1將加熱器支座4 6 連結成直線狀後，在加熱器源3 2上覆蓋加熱器罩3 1。在 加熱器源3 2上覆蓋之加熱器罩3 1以本身的重量而沿著加 熱器源3 2下降，並被繫止在加熱器夾架4 1的上端開口部 上。由此包含加熱器源3 2的上部之外周被加熱器罩3 1所 覆蓋，而可保護電熱線34不受燃燒時所發生的水滴或燃燒 火焰時的熱源所影響。 圖2表示燃燒加熱器之組合完成圖。加熱器源3 2及熱 電偶的導線4 8及4 9自加熱器源3 2通過加熱器夾架41及 加熱器支座4 6内的空間而自加熱器支座4 6的下端開口拉 出。 圖3表示組裝入燃燒加熱器之排氣燃燒裝置，（a )為剖 面圖，（b )為重要部份擴大圖。排氣燃燒裝置主要為由： 形成可燃燒含有可燃性氣體的排氣之燃燒室 52的燃燒容 器51 ;及，被設在燃燒室5 2内，可使可燃性氣體點火， 同時，可放出燃燒之熱能的燃燒加熱器3 0 ;及，依照檢測 溫度可控制燃燒加熱器3 0之控制部的溫度控制器6 5。 燃燒容器5 1為例如以不鑛鋼等之而ί熱性構件所構成， 17 312ΧΡ/發明說明書(補件)/93-03/93135173 1278590 在内部形成之燃燒室5 2可對可燃性氣體點火•燃燒。在 燒室52之下部設有氣體導入口 53。自此氣體導入口 53 燃性氣體導入管5 8被插入至燃燒室5 2内。可燃性氣體 入管5 8其一端部在上方被折彎成L字形，先端部由氣體 入口 5 3被插入於燃燒室5 2内，而可燃性氣體導入管 之另一端部則被連結至未圖示之半導體製造裝置的排 口 ，且自半導體製造裝置被排出之含有可燃性氣體的排 則被導入至燃燒室5 2内。此處，自半導體製造裝置被排 之可燃性氣體例如可為H2氣體。 可燃性氣體導入管5 8之L字形的隅角部，為了可安 燃燒加熱器3 0，以具有主管5 9 a和分枝管5 9 b之T字形 管5 9所構成。T字形配管5 9的主管5 9 a之一端被連結 可燃性氣體導入管5 8的先端部側，主管5 9 a之另一端被 放，而T字形配管5 9之分枝管5 9 b則連結至可燃性氣體 入管5 8的基端部側。 在對應於燃燒室5 2的上部之氣體導入口 5 3的位置被 有排氣管道5 5，其對大氣中可放出在燃燒室5 2内含有 燃性氣體燃燒之排氣的氛圍氣。又，在插入可燃性氣體 入管5 8之燃燒室5 2下部的氣體導入口 5 3的外周，被設 複數個進氣口 5 4，自燃燒室5 2之外部可將大氣（空氣 吸入至燃燒室5 2内。 在設於燃燒室5 2之底部的氣體導入口 5 3上，在軸方 垂直安裝有上述燃燒加熱器3 0。其安裝方法為，使燃燒 熱器3 0裝入燃燒室5 2，再將構成燃燒加熱器3 0之下部 312XP/發明說明書(補件)/93-03/93135173 燃 可 導 導 58 氣 氣 出 裝 配 至 開 導 設 可 導 有 ) 向 加 的 18 1278590 加熱器支座4 6自可燃性氣體導入管5 8的先端部插入可燃 性氣體導入管58内，使T字形配管59的主管59a貫通， 再自主管59a之開放另一端取出加熱器支座46的下端。在 取出之此一加熱器支座4 6的下端設置凸緣6 8，將T字形 配管5 9之主管5 9 a之下端開口堵塞，再以0環61密閉於 丁字形配管59内。 如此將燃燒加熱器3 0安裝於燃燒室5 2的底部中央後， 以圍繞燃燒加熱器3 0的加熱器源3 2般地以同軸安裝加熱 器外蓋（c 〇 v e r ) 5 6。此加熱器外蓋5 6為以陶瓷製之圓筒所 構成，其具有可防止燃燒火焰6 2的搖晃不穩，燃燒效率不 安定之機能。加熱器外蓋5 6為被接續至自燃燒室5 2的氣 體導入口 5 3所插入之可燃性氣體導入管8的導出口。可燃 性氣體導入管5 8的接續口徑例如可為NW 2 5，在設於導出 口之分段溝4 5藉嵌合加熱器外蓋5 6之中空的導入口而接 續，嵌合部為以螺絲6 2 a所螺定，由此可使加熱器外蓋5 6 固定在可燃性氣體導入管8上。 在覆蓋加熱器外蓋5 6和加熱器罩3 1的燃燒加熱器30 之間隙形成可使可燃性氣體流動之氣體流路6 0。 又，在燃燒室5 2内的燃燒加熱器3 0和排氣管道5 5之 間之空間，設有覆蓋燃燒火焰6 2之圓筒狀的冷卻管5 7。 在此圓筒狀的冷卻管 57，設有未圖示之水冷套管 (j a c k e t)，在冷卻管5 7内可將燃燒之可燃性氣體冷卻成低 溫。如此冷卻後之氣體自排氣管道被放出至大氣中而不會 破壞大氣環境。 19 312XP/發明說明書(補件)/93-03/93135173 1278590 又，自加熱器支座46下端露出之2根導線48及49為 被接續至設於燃燒室5 2的外部之溫度控制器6 5。溫度控 制器6 5為依照熱電偶3 5之檢測溫度，而控制對電熱線3 4 之供給電力並將加熱器源3 2的溫度變成設定溫度。藉溫度 控制器6 5所控制之加熱器源3 2的適當設定溫度為6 5 0〜 1 2 0 0 °C之範圍。未滿6 5 0 °C時，則會燃燒不完全，Η 2和0 2 不會反應。因此，650 °C為最低溫度。又，超過 1200 °C之 熱源或可耐此溫度的燃燒室構造則難以實現。因此，構造 上之最高使用溫度為1 2 0 0 °C 。 以下說明此排氣燃燒裝置之動作。 藉接續至排氣管道 5 5之未圖示的排氣設備，吸入通過 排氣管道 5 5之燃燒室5 2内的氛圍氣，自設於燃燒室5 2 的下部之進氣口 5 4將大氣吸入燃燒室5 2内，而使燃燒室 5 2内空氣時常可流動。 在加熱器源3 2的電熱線3 4使電流流入，藉溫度控制器 6 5控制將燃燒加熱器3 0之加熱器源3 2加熱至前述之設定 溫度。加熱溫度為，和自可燃性氣體導入管5 8所導入之大 氣混合的可燃性氣體不須要氫氣等之點火氣體而可直接點 火之充分溫度。 燃燒加熱器3 0加熱後，打開可燃性氣體導入管5 8之閥 (未圖示），連通未圖示之半導體製造裝置的排氣口和可燃 性氣體導入管5 8，將自半導體製造裝置所排出之排氣導入 可燃性氣體導入管5 8。包含通過設在加熱器源3 2的外側 之氣體流路6 0的可燃性氣體之排氣，和設在燃燒室5 2的 20 312XP/發明說明書(補件)/93-03/93135173 1278590 底部之進氣口 5 4所引進的空氣，在氣體流路6 0之出口的 燃燒加熱器3 0的頂部混合，使其燃燒反應而點火燃燒。可 燃性氣體在通過氣體流路6 0時，藉溫度控制器6 5所控制 之燃燒加熱器3 0而接受熱能使燃燒溫度提高。因此，其不 須要另外獨立的點火裝置，可燃性氣體可在燃燒加熱器3 0 的頂部發生燃燒反應而點火燃燒。又，燃燒加熱器3 0為被 加熱器外蓋5 6所覆蓋，可燃性氣體在通過形成於其間之氣 體流路6 0時，由於可燃性氣體藉燃燒加熱器3 0而被充分 加熱，因此，即使燃燒室 5 2内的空氣中之氧氣存在過剩 時，含在排氣中之可燃性氣體即使在低濃度也可有效率地 燃燒。 特別是由於在燃燒加熱器 3 0的外周設有加熱器外蓋 5 6，因此，即使發生排氣管道5 5之吸引壓力變動時，燃燒 火焰也不會搖晃不穩，含在排氣中之可燃性氣體於低濃度 時也可使氣體燃燒效率安定，而在低濃度亦可有效率地燃 燒。 具體而言，圖6顯示使用實施形態之燃燒加熱器、先前 例之電火花、金屬製加熱器，可燃性氣體Η 2和不燃性氣體 Ν 2之混合氣體燃燒處理時的燃燒效率數據之比較，又為參 考起見也列出未燃燒處理時之未處理數據。橫軸表示自可 燃性導入管5 8流入可燃性氣體導入方向之氫氣（Η2 )和氮 氣（Ν 2 )的混合比（Η 2 / ( Η 2 + Ν 2 ) % )，而縱軸表示在排氣 管道5 5部測定之Η 2殘留濃度（p p m )。 此處，取得圖6之數據時的實施形態之條件為， 21 312XP/發明說明書(補件)/93-03/9313 5173 1278590 燃燒加熱器和加熱器外蓋之間隙：6 mm' I can ignite and burn flammable gases. Since the flammable gas can be ignited, it does not require ignition equipment. Further, since the heater wire holder and the heater cover which constitute the heater source are made of ceramic or quartz, high electrical insulation can be ensured. Moreover, since the ceramic heating wire jig is coated with a quartz heater cover having a softening temperature higher than that of the ceramics, the heater cover is less deteriorated when the combustible gas is burned, and can be effectively protected. The heating wire is broken and the wire breaking is reduced. Moreover, since the heater cover is detachably covered by the heater source, even if the heater wire is disconnected, the heater cover can be removed or installed on the heater wire clamp as long as the heater cover is removed from the heater source. , and the exchange operation of disconnection can be easily performed. According to a second aspect of the invention, there is provided a temperature detecting sensor capable of detecting a temperature of the heater source; and a heater cover capable of supporting a heater source, and being inserted a tubular heater holder (su ρ ρ 〇rt ) connecting the wires to the heating wire and the temperature detector; and being disposed between the cylindrical heater holder and the heater source A high-insulation cylindrical heater holder (h ο 1 der ) that connects the heater source and the heater holder to the combustion heater. The wire can be pulled out to the outside by a heater wire from the heater source. Also, the wire can be pulled out to the outside by the heater holder from the temperature detecting sensor. Moreover, since the heater holder with high insulation is interposed between the heater source and the heater holder, even if the heater holder is connected to the heater source 10 312XP / invention manual (supplement) / 93-03 /93135 ] 73 1278590 can also improve the electrical insulation of the heater source. Further, since the heater source and the heater holder are connected in a straight line, the combustion heater can be easily operated. According to a third aspect of the invention, the heater cover and the heater holder are substantially equal in size, and at least a lower outer diameter of the heater source is substantially equal to an inner diameter of the heater holder. The upper outer diameter of the heater holder is substantially equal to the inner diameter of the heater holder, and the upper portion of the heater holder is fitted to the lower portion of the heater source and then coupled to the heater holder by a coupling. Inserting an upper portion of the heater holder at a lower portion of the heater holder and connecting the heater holder to the heater holder, and the heater cover covered by the heater source is opened at an upper portion of the heater holder The end is stopped, so that the combustion heater is formed. The heater source is fitted on the heater holder, and the heater holder is fitted to the heater holder. The wire pulled out from the heater source by the heater holder and the heater holder is not in between It will be exposed to the outside, so the wires can be protected from the outside atmosphere. Further, the heater holder is coupled to the heater holder by the coupling source, and the heater holder is coupled to the heater holder by the coupling member. Therefore, the heater source can be reliably supported by the heater holder. Further, since the heater cover is only covered by the heater source and is held in the heater holder, it is easy to remove or install the heater cover to the heater source. According to a fourth aspect of the invention, there is provided an exhaust gas combustion apparatus comprising: a combustion chamber that ignites and combusts a combustible gas contained in the exhaust gas; and a gas introduction port provided in a lower portion of the combustion chamber; Inhaling air to the intake port of the combustion chamber of the aforementioned 312XP/invention specification (supplement)/93-03/9313 5173 11 1278590; and being disposed opposite to the gas inlet port of the upper portion of the combustion chamber An exhaust port for exhausting the combustion chamber; and a flammable gas introduction pipe into which the exhaust gas is introduced from the base end side into the combustion chamber from a tip end portion bent into an L-shaped shape; And a tubular heater cover connected to the tip end portion of the flammable gas introduction pipe; and a gas flow path is secured in the heater cover and coaxially inserted and fixed, and the gas flow path can be The combustion of the combustible gas supplied, and the combustion of the mixed gas of the heated combustible gas and the air sucked from the intake port to generate a combustion flame, the combustion described in the second or third aspect of the patent application a heater, and a T-shaped pipe constituting an L-shaped corner portion of the flammable gas introduction pipe, wherein one end of the main pipe of the T-shaped pipe is coupled to the tip end side of the flammable gas introduction pipe The other end of the main pipe is opened, and the branch pipe of the U-shaped pipe is connected to the U-shaped pipe on the base end side of the combustible gas introduction pipe; and, and the heater branch from the combustion heater The temperature controller that pulls out the external heating wire and the thermocouple wires, and supplies power to the heating wire to control the temperature detected by the temperature detector to a certain temperature, is thus characterized. The heater holder of the combustion heater is inserted from the tip end portion of the combustible gas introduction pipe, and the main pipe of the U-shaped pipe is penetrated, and the other end of the main pipe is pulled out to the external heater holder. The lower end is airtightly fixed to the other open end of the main pipe, thereby ensuring the gas flow path and inserting and fixing the combustion heater in the heater cover. Such an exhaust combustion device. 12 312 ΧΡ / invention manual (supplement) / 93-03/93135173 1278590 By inserting the combustion heater in the heater cover to ensure the gas flow path, the flammable gas can be fully utilized by the heater source during the flow of the gas flow. Heating, therefore, a low concentration of combustible gas can also be efficiently burned. Further, since the combustion heater is covered by the heater cover, after the flammable gas is ignited, the combustion flame is not shaken by the suction pressure fluctuation of the exhaust pipe, and the combustion efficiency can be stabilized. Further, the L-shaped corner portion of the flammable gas introduction pipe is formed of a T-shaped pipe, and when the T-shaped pipe is attached to the combustion heater, the wire of the heating wire and the temperature detecting sensor can be taken out, and therefore, The installation or removal of the combustion heater is easy and maintenance is easy. Further, a T-shaped pipe is provided at a corner portion of the flammable gas introduction pipe, and the T-shaped pipe passes through the heater holder of the combustion heater, and the wire is taken out from the gas introduction port of the combustion chamber, and the ratio is burned. The room is provided with a dedicated opening for wire removal, which is relatively simple to maintain. Further, since the heater holder of the combustion heater is coaxially fixed to the main pipe of the T-shaped pipe at the corner portion of the L-shaped portion of the flammable gas introduction pipe, the fixed combustion heater is inserted into the heater cover. It is easier. Further, in the fourth aspect of the invention, a cylindrical cooling pipe is provided between the combustion heater and the exhaust port, and when the combustible gas burned by the combustion heater is cooled, the cooled exhaust gas is It is discharged into the atmosphere, so it does not adversely affect the environment. According to a fourth aspect of the invention, the heater cover and the heater cover covering the heater source are spaced apart from each other by 2 to 20 mm, and the heater cover or the heater source has a total length of 30. ~3 0 0 mm, the aforementioned heater cover 13 312XP / invention manual (supplement) / 93-03/93135173 1278590 diameter of 10 0 ~ 2 0 mm, such an exhaust combustion device. When the respective elements are set to the above-described sizes as in the present invention, the combustible gas contained in the exhaust gas can be more burned. According to a sixth aspect of the present invention, in the fourth or fifth aspect of the invention, the heater holder is made of Taman, and the heater cover is made of quartz, and the temperature of the heater source heated by the front line is 6 5 0 1 2 0 0 °C, such an exhaust combustion device. Since the heat wire clamp or cover is made of heat-resistant ceramic or quartz, and the temperature of the combustion heater is raised to 650 to 1 200 ° C, the flammable gas contained in the exhaust gas can be more efficiently burned. . (Effect of the Invention) According to the present invention, the heater has few wire breakages, and the use temperature range is surely ignited and burned, and further, the gas for ignition is not required, and the combustion heater and the device can be simplified. Further, according to the present invention, it is possible to achieve more efficient and stable combustion and simplification of maintenance. [Embodiment] Hereinafter, embodiments of the present invention will be described. Fig. 1 is a sectional view showing the exploded combination of the combustion heater of the embodiment. The heat exchanger 30 is mainly composed of: a cylindrical heater source 3 2 ; and the cover source 3 2 has a head cylindrical heater cover 3 1 ; the heating of the coated heater source 3 2 The cylindrical heater 46 of the cover 3 1; and is disposed between the heater source 32 and the add-on 46, linearly connecting the heater source 3 2 and the heater holder 46 to the 312XP/invention specification (Supplement) /93-03/9313 5173 Effective source and description of electric heating as characteristic heaters, therefore, can be burned by equipment, and burned in heating and, the support holder heats the cylindrical shape 14 1278590 The heater holder 41 is constructed. The heater source 32 is composed of a heat wire holder 33 having high electrical insulation and a heating wire 3 4 wound around the electric wire clamp: ! A spiral groove 45 is formed in the heating wire clamp 3 3, and the heating wire 34 is wound around the outer circumference of the electric heating I to be buried in the groove 45. The upper portion of the heating wire clamp 3 3 is chamfered to prevent the gap. In the inner circumference of the electric wire clamp 3 end, in order to be insertable into the heater holder 41, a projection 3 7 having an outer annular shape substantially the same as the inner diameter of the heater holder 41 is provided. Therefore, the heterodyne portion 40 of the annular projection 37 is here. The step portion 40 is abutted on the end of the heater holder 41. Further, in one portion of the projection 37, there is further provided an extension portion 38 in the axial direction, and the extension portion 38 is provided with a screw hole 39 for coupling with the joint 41. Two wires that can be powered are connected to the heating wire 34 (Fig. 2, a thermocouple 3 5 as a temperature detecting sensor for detecting the temperature of the addition is provided on the surface side of the heating wire clamp 33, and this is also continued A wire capable of transmitting a detection signal (49 of Fig. 2) The heater wire clamp 3 3 is made of, for example, heat resistance and high insulation, and the heating wire 34 is made of, for example, a nickel-chromium heating wire (Nichr 〇me). The heater source 3 2 can rapidly raise and lower the temperature of the hollow ceramic heating structure. The heater cover 31 is formed with an upper closed lower opening that covers the heater source 32 and covers the 312XP including the heater source 32. /Inventive Manual (Supplement)/93-03/9313 5173 The outer circumference of the outer wall of the cylindrical electric It 33 is substantially the circumference of the opening end of the lower end of the cutting fixture 3 3 , and the outer diameter of the lower portion in the direction of the opening. Forming the tongue heater holder of the outer opening of the segment 4 8 ). Moreover, the device of the source of the thermocouple 35 〇 of the ceramic source is formed by a hollow cylindrical shape. The outer circumference of the tube. 15 1278590 The heater holder 46 is a cylindrical body constituting a heater cover 31 that covers the heater source 32. On the upper side surface of the heater holder 46, a screw hole 47 for coupling to the heater holder 41 is provided. The heater holder 46 has the function of supporting the heater source 32, and at the same time has the function of protecting the wire extending from the heater source 32 on the one hand and pulling it out to the outside. The heater holder 4 1 is disposed between the cylindrical heater holder 46 and the heater source 3 2 and linearly connects the heater holder 46 and the heater source 32 to a highly insulating cylindrical shape. Body, so constituted. A heater source mounting screw hole 4 2 along the axial direction and a screw hole 43 for mounting the heater holder are provided on the side surface of the heater holder 4 1 . The heater holder 4 1 has a function of connecting the heater source 32 and the heater holder 46, and at the same time has the function of improving the electrical insulation of the heater source 32. The inner diameter of the heater cover 31 is set such that the heater cover 31 covers the heater source 32 and is substantially the same as the outer diameter of the heater source 32. The diameters of the heater cover 3 1 and the heater holder 4 1 are such that the heater cover 31 can be abutted against the heater holder 41 and set to be substantially the same. Further, the outer diameter of the cylindrical heater source 32 is set to be slightly larger than the inner diameter of the heater holder 4 1 . Further, the outer diameter of the heater holder 46 is set to be insertable into the heater holder 41 to be substantially the same as the inner diameter of the heater holder 41. When assembling the combustion heater, insert the lower portion of the heater source 3 2 into the heater holder 4 1, align with the screw hole 3 9 provided at the extension portion 38 of the heater source 32, and set it on the heating. The screw hole 4 2 on the upper part of the clamp frame 41, and the screw holes 4 2, 3 9 aligned therein are fastened by twisting the screw 4 4 , and the heater 16 312XP / invention manual (supplement) / 93- 03/9313 5173 1278590 Source 32 is mounted on heater holder 41. Further, the upper portion of the heater holder 46 is inserted into the heater holder 41, the screw hole 43 provided at the lower portion of the heater holder 41, and the screw hole provided at the upper portion of the heater holder 46 are aligned. 4, the screw holes 4 3, 4 7 of the alignment are fastened by twisting the screws 4 4 , and the heater holders 46 are attached to the heater holder 41 . Thus, after the heater holders 4 are connected in a straight line by the heater holders 4 1 by the heater holders 4 1 , the heater cover 3 1 is covered on the heater source 3 2 . The heater cover 31 covered on the heater source 3 2 descends along the heater source 32 by its own weight and is restrained on the upper end opening of the heater holder 4 1 . Thereby, the outer periphery of the upper portion including the heater source 32 is covered by the heater cover 31, and the heating wire 34 can be protected from the water droplets generated during combustion or the heat source at the time of burning the flame. Figure 2 shows a combined completion of the combustion heater. The heater source 3 2 and the thermocouple wires 4 8 and 49 are pulled out from the heater source 32 through the space in the heater holder 41 and the heater holder 46 from the lower end opening of the heater holder 46. . Fig. 3 shows an exhaust gas combustion apparatus incorporated in a combustion heater, (a) being a cross-sectional view, and (b) being an enlarged view of an important portion. The exhaust gas combustion device is mainly composed of: a combustion vessel 51 forming a combustion chamber 52 capable of burning exhaust gas containing a combustible gas; and being disposed in the combustion chamber 52 to ignite the combustible gas and simultaneously releasing the combustion The combustion heater 30 of the thermal energy; and the temperature controller 65 of the control unit of the combustion heater 30 can be controlled according to the detected temperature. The combustion vessel 51 is composed of, for example, a non-mineral steel or the like, and the combustion chamber 52 formed inside is ignited by a combustion member, which is formed by a heat-reducing member, etc., 17 312 ΧΡ / invention specification (supplement) / 93-03/93135173 1278590 combustion. A gas introduction port 53 is provided at a lower portion of the firing chamber 52. From this, the gas introduction port 53 is introduced into the combustion chamber 52 by the flammable gas introduction pipe 58. One end portion of the flammable gas inlet pipe 58 is bent into an L shape at the upper end, the tip end portion is inserted into the combustion chamber 52 by the gas inlet port 53, and the other end portion of the flammable gas introduction pipe is connected to the unillustrated portion. The discharge port of the semiconductor manufacturing apparatus shown and the flammable gas discharged from the semiconductor manufacturing apparatus are introduced into the combustion chamber 52. Here, the flammable gas discharged from the semiconductor manufacturing apparatus may be, for example, H2 gas. The L-shaped corner portion of the flammable gas introduction pipe 58 is composed of a T-shaped tube 5 9 having a main pipe 59a and a branch pipe 5 9b for igniting the combustion heater 30. One end of the main pipe 5 9 a of the T-shaped pipe 5 9 is connected to the tip end side of the combustible gas introduction pipe 58 , the other end of the main pipe 5 9 a is placed, and the branch pipe 5 9 b of the T-shaped pipe 5 9 is It is connected to the base end side of the flammable gas inlet pipe 58. At a position corresponding to the gas introduction port 53 of the upper portion of the combustion chamber 52, an exhaust pipe 5 5 is provided which discharges an atmosphere containing exhaust gas which is combusted by the flammable gas in the combustion chamber 52. Further, a plurality of intake ports 54 are provided on the outer circumference of the gas introduction port 53 which is inserted into the lower portion of the combustion chamber 5 of the combustible gas inlet pipe 58, and the atmosphere (the air is sucked into the combustion from the outside of the combustion chamber 52). In the chamber 5 2 , the combustion heater 30 is vertically mounted on the gas inlet port 5 3 provided at the bottom of the combustion chamber 52. The installation method is such that the burner 30 is charged into the combustion chamber. 5 2, and then constitute the combustion heater 30 lower part 312XP / invention manual (supplement) / 93-03 / 93135173 fuel can be guided 58 gas out of the assembly to the opening guide can be introduced) to the addition of 18 1278590 heater The holder 46 is inserted into the flammable gas introduction pipe 58 from the tip end portion of the flammable gas introduction pipe 58 to pass through the main pipe 59a of the T-shaped pipe 59, and the lower end of the heater holder 46 is taken out from the other end of the main pipe 59a. . A flange 6 is provided at the lower end of the heater holder 46 which is taken out, and the lower end opening of the main pipe 5 9 a of the T-shaped pipe 5 9 is closed, and is sealed in the T-shaped pipe 59 by the 0 ring 61. After the combustion heater 30 is installed in the center of the bottom of the combustion chamber 52, the heater cover (c 〇 v e r ) 5 6 is coaxially mounted around the heater source 32 of the combustion heater 30. The heater cover 56 is made of a ceramic cylinder and has a function of preventing the vibration of the combustion flame 62 from being unstable and the combustion efficiency to be unstable. The heater cover 56 is a discharge port of the combustible gas introduction pipe 8 that is connected to the gas introduction port 5 3 of the combustion chamber 52. The connection diameter of the flammable gas introduction pipe 58 can be, for example, NW 2 5, and the segmented groove 45 provided at the outlet port is connected by the hollow inlet port of the fitting heater cover 56, and the fitting portion is The screw 6 2 a is screwed, whereby the heater cover 5 6 can be fixed to the flammable gas introduction pipe 8. A gas flow path 60 through which the combustible gas flows can be formed in the gap between the heater cover 30 covering the heater cover 56 and the heater cover 31. Further, a space between the combustion heater 30 and the exhaust duct 5 5 in the combustion chamber 5 2 is provided with a cylindrical cooling pipe 57 that covers the combustion flame 62. The cylindrical cooling pipe 57 is provided with a water-cooling jacket (not shown), and the combustible gas can be cooled to a low temperature in the cooling pipe 57. The thus cooled gas is released from the exhaust pipe to the atmosphere without damaging the atmosphere. 19 312XP/Invention Manual (Supplement)/93-03/93135173 1278590 Further, the two wires 48 and 49 exposed from the lower end of the heater holder 46 are connected to the temperature controller 6 provided outside the combustion chamber 52. 5. The temperature controller 65 controls the supply of electric power to the heating wire 34 in accordance with the detected temperature of the thermocouple 35, and changes the temperature of the heater source 32 to a set temperature. The appropriate set temperature of the heater source 3 2 controlled by the temperature controller 65 is in the range of 650 to 1 2 0 0 °C. At less than 65 ° C, the combustion will be incomplete and Η 2 and 0 2 will not react. Therefore, 650 °C is the lowest temperature. Also, a heat source exceeding 1200 °C or a combustion chamber structure resistant to this temperature is difficult to achieve. Therefore, the maximum operating temperature for construction is 1 2 0 0 °C. The operation of this exhaust gas combustion apparatus will be described below. The exhaust gas (not shown), which is connected to the exhaust duct 5 5 , is sucked into the atmosphere in the combustion chamber 5 2 passing through the exhaust duct 5 5 , and the intake port 5 4 provided in the lower portion of the combustion chamber 5 2 will The atmosphere is drawn into the combustion chamber 52, so that the air in the combustion chamber 52 can always flow. The electric current line 34 of the heater source 3 2 causes a current to flow in, and the temperature controller 65 controls the heater source 3 2 of the combustion heater 30 to be heated to the aforementioned set temperature. The heating temperature is a sufficient temperature at which the combustible gas mixed with the atmosphere introduced from the combustible gas introduction pipe 58 does not require an ignition gas such as hydrogen gas. After the combustion heater 30 is heated, a valve (not shown) of the flammable gas introduction pipe 58 is opened, and an exhaust port and a flammable gas introduction pipe 5 of a semiconductor manufacturing device (not shown) are connected to the semiconductor manufacturing device. The discharged exhaust gas is introduced into the combustible gas introduction pipe 58. An exhaust gas containing a flammable gas passing through a gas flow path 60 provided outside the heater source 32, and a bottom portion of the combustion chamber 52, 20 312XP/invention specification (supplement)/93-03/93135173 1278590 The air introduced by the intake port 54 is mixed at the top of the combustion heater 30 at the outlet of the gas flow path 60, and is combusted and ignited and burned. When the flammable gas passes through the gas flow path 60, the heat is received by the combustion heater 30 controlled by the temperature controller 65 to increase the combustion temperature. Therefore, it does not require an additional independent ignition device, and the combustible gas can be ignited and burned by a combustion reaction at the top of the combustion heater 30. Further, the combustion heater 30 is covered by the heater cover 56, and when the combustible gas passes through the gas passage 60 formed therebetween, the combustible gas is sufficiently heated by the combustion heater 30, Even if there is an excess of oxygen in the air in the combustion chamber 52, the combustible gas contained in the exhaust gas can be efficiently burned even at a low concentration. In particular, since the heater cover 5 6 is provided on the outer circumference of the combustion heater 30, even if the suction pressure of the exhaust duct 5 fluctuates, the combustion flame does not wobble and is unstable, and is contained in the exhaust gas. The flammable gas can also stabilize the gas combustion efficiency at a low concentration, and can also efficiently burn at a low concentration. Specifically, FIG. 6 shows a comparison of combustion efficiency data when a combustion gas of the embodiment, a spark of the prior art, a metal heater, and a mixed gas of the combustible gas Η 2 and the non-combustible gas Ν 2 are used, For the sake of reference, the unprocessed data at the time of unburning treatment is also listed. The horizontal axis represents the mixing ratio (Η 2 / ( Η 2 + Ν 2 ) % ) of hydrogen (Η 2 ) and nitrogen (Ν 2 ) flowing from the flammability introduction pipe 58 into the flammable gas introduction direction, and the vertical axis indicates the row Gas pipeline 5 Measured Η 2 residual concentration (ppm). Here, the condition of the embodiment when the data of Fig. 6 is obtained is 21 312XP/invention specification (supplement)/93-03/9313 5173 1278590 gap between the combustion heater and the heater cover: 6 mm
燃燒加熱器之全長：1 5 0 mm 設定溫度：9 0 0 °C 排氣之可燃性氣體 H2和不燃性氣體 N2之混合氣體流 量：9 0 L / m i η 〇 又，電火花、金屬加熱器之熱源之溫度為9 0 0 °C 。 在使用電火花時，Η 2殘留濃度，雖混合比2 5 %以上之混 合氣體則可充分燃燒因此表示低值，但未滿2 5 %時之低混 合比時，由於未燃燒之比例增高，因此Η2殘留濃度則表示 高值，未燃燒氣體就原樣地自排氣管道5 5被排出。因此， 低濃度Η2的燃燒效率不佳而有安全性之問題。 又，使用金屬製加熱器時，Η 2殘留濃度，當混合比為2 0 %以上之混合氣體時可充分燃燒因此表示低值，但未滿2 0 %時之低混合比時，由於未燃燒之比例增高，則表示 Η 2 殘留濃度為高值，未燃燒氣體就原樣地自排氣管道5 5被排 出。因此，低浪度Η2的燃燒效率不佳而有安全性之問題。 相對的，使用本實施形態之燃燒加熱器時，Η2殘留濃度 之高峰為在混合比1 0 %附近，可以高效率地燃燒。Η 2殘留 濃度之高峰點，在電火花方式為 lOOOppm，而在金屬製加 熱器為7 0 0 p p m，但燃燒加熱器為4 0 0 p p m，其比先前的熱源 明顯降低2 / 5〜4 / 7，而可顯著提高燃燒效率。因此，低濃 度H2之燃燒效率良好且可解消安全性之問題。 根據上述之實施形態，由於在加熱器源 3 2以高溫被加 熱之氣體流路6 0内加熱可燃性氣體，在氣體流路6 0之出 22 312XP/發明說明書(補件)/93-03/93135173 1278590 口和空氣混合而燃燒，因此其不須要使用氫氣等的助燃氣 體的點火設備，而可直接點火•燃燒含在排氣中之可燃性 氣體。因此其不必大氣以外的助燃氣體或點火設備，而可 大幅度簡化裝置之構成。 又，由於在電熱線夾具3 3的外周捲繞電熱線3 4，因此， 比起在電熱線夾具3 3的内周捲繞電熱線3 4之構成，其可 使燃燒加熱器3 0小型化。又，由於在電熱線夾具3 3的外 周捲繞電熱線34，因此捲回作業容易。又，由於設在電熱 線夾具3 3外周之螺絲溝4 5捲繞電熱線3 4，因此可將電熱 線3 4構成不會露出電熱線夾具3 3的外周。又，由於以加 熱器罩3 1覆蓋電熱線夾具3 3之外周，因此可更保護電熱 線3 4，也可以電熱線3 4有效地保溫被加熱之電熱線夾具 3 3。又，由於在電熱線夾具3 3和加熱器外蓋5 6之間之氣 體流路6 0可將可燃性氣體提高至點火溫度，因此被加熱之 可燃性氣體可和空氣或氧氣合流之加熱器罩3 1的頂部，而 可確實地使可燃性氣體點火·燃燒。 又，在本實施形態，由於加熱器源 3 2之電熱線夾具使 用陶瓷構成，因此可實現高電氣絕緣性，而可有效地防止 漏電。又，由於使用比陶瓷軟化性更高的石英作為覆蓋加 熱器源3 2之加熱器外蓋5 6，因此加熱器罩較不會發生龜 裂或裂痕，電熱線可更有效地保護其不受水滴或燃燒火焰 之侵害。 又，構成加熱器罩31及電熱線夾具3 3之材料，如為使 用石英或陶瓷，則加熱器罩3 1及電熱線夾具3 3的内外周 23 312XP/發明說明書(補件)/93-03/93135173 1278590 壁因為燃燒所致之劣化減少，且由於電熱線3 4不會 出至燃燒火焰6 2或内部氛圍氣中，因此，即使在燃 應熱中其亦可有效地保護電熱線3 4。 又，被燃燒之可燃性氣體藉冷卻管5 7冷卻而變 汽狀，其接觸到冷卻管5 7的内壁面再變成水滴，由 壓力之搖晃不穩其會飛散，水滴則會落下而接觸到 罩3 1上。即使此水滴之接觸而使加熱器罩3 1表面 急遽變化，則由於加熱器罩3 1的材質為石英製，因 防止其不會如使用陶瓷時所發生之龜裂或裂痕等， 保護加熱器罩3 1内部的電熱線3 4因水滴所發生之 漏電的情形。 又，由於其容易自加熱器源32卸下加熱器罩31 其可容易保養。特別是電熱線6在斷線時不必將燃 器3 0全體作交換，只要自加熱器源3 2卸下加熱器 將新的電熱線3 4重新捲在電熱線夾具.3 3之外周即 保養。 具體而言，在處理電熱線 3 4斷線時，可將可燃 導入管5 8的T字形配管5 9卸下以凸緣6 8固定之燃 器3 0。然後，將加熱器罩3 1沿著加熱器源3 2的上 而自加熱器源32卸下，自加熱器源32的螺絲溝45 線之電熱線3 4，將新的電熱線3 4捲在加熱器源3 2 溝45上，再自加熱器源32之上安裝覆蓋之加熱器 在加熱器源3 2上覆蓋加熱器罩3 1而形成燃燒加g 後，將其安裝在可燃性氣體導入管5 8的T字形配管 312XP/發明說明書(補件)/93-03/93135173 直接露 燒之反 成水蒸 於排氣 加熱器 的溫度 此其可 而有效 斷線及 ，因此 燒加熱 罩31， 可容易 性氣體 燒加熱 方移動 拆除斷 的螺絲 罩31。 〜器3 0 5 9上0 24 1278590 如此只要一按壓（ο n e t 〇 u c h )即可自可燃性氣體導入管 5 8 卸下或安裝燃燒加熱器3 Ο，又，自加熱器源3 2可卸下或 安裝加熱器罩3 1，因此可容易實施電熱線3 4之斷線交換 作業且容易保養。 又，使用此一中空的陶兗加熱器之燃燒加熱器，為了維 持斷熱性可使加熱器形狀縮小。設有熱電偶3 5之圓筒形陶 瓷材料的厚度也因為在外周捲繞電熱線3 4，因此不會變成 很厚。因此其可迴避燃燒裝置之大型化，其設置空間很小 即足夠，而可防止半導體製造裝置設置清潔室之成本增高。 又，由於使燃燒加熱器3 0安裝在可燃性氣體導入管5 8 的内部，而自可燃性氣體導入管5 8將導線4 8、4 9取出至 外部，因此，比起在燃燒室5 2設置專用的導線取出用開口 時，其可容易實施保養。 又，只要將陶瓷加熱器安裝在燃燒室 5 2内，再以凸緣 6 8將筒狀加熱器源3 2的加熱器支座4 6固定於安裝在可燃 性氣體導入管5 8之Τ字形配管5 9上即可，其安裝容易。 又，只要變更加熱器源3 2的溝4 5之深度或溝數，則藉 由電熱線3 4的線徑或捲繞數，即其可適用於不同條件之各 種排氣的燃燒。 此處，說明構成燃燒加熱器之各零件的尺寸例，在燃燒 加熱器3 0之構造上，可製作的最低直徑尺寸為1 0 mm，使 用本實施形態之燃燒加熱器 3 0時的構成上之最大直徑尺 寸為2 0 mm，而燃燒加熱器3 0之直徑為1 0〜2 0 _。又，由 可燃性氣體最大流量和燃燒加熱器的直徑尺寸之關係而 25 312XP/發明說明書(補件)/93-03/93135173 1278590 言，燃燒加熱器之全長在3 0〜3 0 0刪時則可發揮最具 之燃燒效率。 由可燃性氣體最大流量和燃燒加熱器的直徑尺寸 係而言，加熱器外蓋5 6和燃燒加熱器3 0的間隔（氣 路60的寬度）在2〜20 mm，加熱器外蓋之全長在30' mm時則可發揮最具效果之燃燒效率。可燃性氣體和不 氣體之混合流量為使用5〜2 0 0 L / m i η。 又，藉溫度控制器6 5所控制之溫度被設定在6 5 0〜 〇C。 又，在本發明之實施形態，雖然使加熱器源 3 2形 筒形，但其並不限於此一形狀，例如也可構成六角形 角形等多角形亦可。又，在本實施形態，雖然使進氣 設在燃燒室5 2的底部，但也可設在燃燒室5 2的外周 燃燒室1的底部及外周部雙方。在外周也設置時，則 外周部之進氣口將其設在對應於燃燒加熱器頂部之位 "yj* 〇 又，在本實施形態，雖然在加熱器外蓋未設有空氣 但也可在加熱器外蓋設置空氣孔。藉設置空氣孔，則 體流路内可使可燃性氣體和空氣混合而燃燒。自空氣 導入之空氣量，因氧濃度不充分而未燃燒的高氫氣濃 可燃性氣體，與其在氣體流路内燃燒則可在高氧氣濃 燃燒室内的燃燒加熱器之頂部使其燃燒。 【圖式簡單說明】 圖1為本實施形態之燃燒加熱器的分解•組合圖。 效果 之關 體流 V 300 燃性 1000Full length of combustion heater: 1 50 mm Setting temperature: 9 0 0 °C Mixed gas flow of flammable gas H2 and non-combustible gas N2 of exhaust gas: 9 0 L / mi η 〇, electric spark, metal heater The temperature of the heat source is 900 °C. When the electric spark is used, the residual concentration of Η 2 is sufficient to be mixed when the mixed gas is more than 25%, so that it is low, but when the mixing ratio is less than 25%, the proportion of unburned increases. Therefore, the residual concentration of Η2 indicates a high value, and the unburned gas is discharged from the exhaust pipe 55 as it is. Therefore, the combustion efficiency of the low concentration Η2 is poor and there is a problem of safety. Further, when a metal heater is used, the residual concentration of Η 2 is sufficient when the mixing ratio is 20% or more of the mixed gas, so that it is low, but when it is less than 20%, the mixture ratio is low. When the ratio is increased, it means that the residual concentration of Η 2 is a high value, and the unburned gas is discharged from the exhaust pipe 55 as it is. Therefore, the low-wavelength Η2 has a poor combustion efficiency and has a problem of safety. On the other hand, when the combustion heater of the present embodiment is used, the peak of the residual concentration of ruthenium 2 is approximately 10% of the mixture ratio, and can be efficiently burned.高峰 2 The peak of the residual concentration is 1000 ppm in the EDM mode, and 700 ppm in the metal heater, but the combustion heater is 4000 ppm, which is significantly lower than the previous heat source 2 / 5~4 / 7, can significantly improve the efficiency of combustion. Therefore, the low-concentration H2 has a good combustion efficiency and can solve the problem of safety. According to the above embodiment, since the combustible gas is heated in the gas flow path 60 heated by the heater source 32 at a high temperature, the gas flow path 60 is out of the 22 312XP/invention specification (supplement)/93-03 /93135173 1278590 The mouth and air are mixed and burned, so it is not necessary to use an ignition device for a combustion-supporting gas such as hydrogen, but can directly ignite and burn a combustible gas contained in the exhaust gas. Therefore, it is not necessary to use a combustion-supporting gas or an ignition device other than the atmosphere, and the configuration of the device can be greatly simplified. Further, since the heating wire 34 is wound around the outer circumference of the heating wire jig 33, the combustion heater 30 can be miniaturized as compared with the configuration in which the heating wire 34 is wound around the inner circumference of the heating wire holder 33. . Further, since the heating wire 34 is wound around the outer circumference of the heating wire clamp 3 3, the winding back operation is easy. Further, since the heating wire 34 is wound around the screw groove 45 provided on the outer circumference of the heating wire holder 3 3, the heating wire 34 can be formed so as not to expose the outer circumference of the heating wire holder 33. Further, since the outer circumference of the heating wire holder 3 3 is covered by the heater cover 31, the heating wire 34 can be further protected, and the heating wire holder 3 3 can be effectively insulated by the heating wire 34. Moreover, since the gas flow path 60 between the heating wire clamp 3 3 and the heater cover 56 can raise the flammable gas to the ignition temperature, the heated flammable gas can be combined with air or oxygen. The top of the cover 3 1 can surely ignite and burn the combustible gas. Further, in the present embodiment, since the heater wire holder of the heater source 32 is made of ceramics, high electrical insulation can be achieved, and leakage can be effectively prevented. Further, since quartz having a higher softening property than ceramic is used as the heater cover 5 6 covering the heater source 32, the heater cover is less likely to be cracked or cracked, and the heating wire can protect it more effectively. Water droplets or burning flames. Further, the materials constituting the heater cover 31 and the heating wire clamp 33 are, for example, quartz or ceramic, and the inner and outer circumferences 23 312XP of the heater cover 3 1 and the heating wire clamp 3 3 / invention manual (supplement) / 93- 03/93135173 1278590 The wall is degraded by combustion, and since the heating wire 34 does not escape to the combustion flame 62 or the internal atmosphere, it can effectively protect the heating wire even in the heat of combustion. . Further, the combustible flammable gas is cooled by the cooling pipe 57 and becomes vaporous. When it comes into contact with the inner wall surface of the cooling pipe 57, it becomes water droplets. When the pressure is unstable, it will scatter, and the water droplets will fall and come into contact. Cover 3 1 . Even if the surface of the heater cover 31 is rapidly changed by the contact of the water droplets, since the material of the heater cover 31 is made of quartz, the heater is prevented from being cracked or cracked when the ceramic is used. The electric heating wire 34 inside the cover 3 1 is leaky due to water droplets. Moreover, since it is easy to remove the heater cover 31 from the heater source 32, it can be easily maintained. In particular, the heating wire 6 does not have to exchange the entire burner 30 when the wire is broken, as long as the heater is removed from the heater source 32, the new heating wire 3 4 is re-rolled in the heating wire clamp. . Specifically, when the treatment heating wire 34 is disconnected, the T-shaped pipe 59 of the flammable introduction pipe 58 can be removed by the burner 30 fixed by the flange 6.8. Then, the heater cover 31 is removed from the heater source 32 along the heater source 32, and the new heating wire 34 is rolled from the heating wire 34 of the screw groove 45 of the heater source 32. On the heater source 3 2 groove 45, a heater that is covered by the heater source 32 is covered with a heater cover 31 on the heater source 3 to form a combustion g, and then mounted on a flammable gas. The T-shaped pipe 312XP of the introduction pipe 58 8 / invention specification (supplement) / 93-03/93135173 The direct detoxification of the water is steamed at the temperature of the exhaust heater, which can effectively break the wire and thus heat the heating cover 31, the easy-to-use gas burning heating moves to remove the broken screw cover 31. ~3 3 5 9上0 24 1278590 So as soon as you press (ο net 〇uch), you can remove or install the combustion heater 3 自 from the flammable gas inlet pipe 5, and, again, from the heater source 3 2 The heater cover 3 1 is installed or installed, so that the wire exchange operation of the heating wire 34 can be easily performed and it is easy to maintain. Further, the combustion heater using this hollow ceramic heater can reduce the shape of the heater in order to maintain heat resistance. The thickness of the cylindrical ceramic material provided with the thermocouple 35 is also because the electric heating wire 34 is wound around the periphery, so that it does not become very thick. Therefore, it is possible to avoid the enlargement of the combustion apparatus, and the installation space is small enough to prevent the cost of installing the clean room in the semiconductor manufacturing apparatus. Further, since the combustion heater 30 is installed inside the flammable gas introduction pipe 58, the wires 48, 49 are taken out from the flammable gas introduction pipe 58, and therefore, compared with the combustion chamber 5 2 When a dedicated wire take-out opening is provided, it can be easily maintained. Further, as long as the ceramic heater is installed in the combustion chamber 52, the heater holder 46 of the cylindrical heater source 3 2 is fixed to the U-shaped portion of the combustible gas introduction pipe 58 by the flange 68. It can be placed on the pipe 5 9 and it is easy to install. Further, if the depth or the number of grooves of the heater source 3 2 is changed, the wire diameter or the number of windings of the heating wire 34 can be applied to the combustion of various exhaust gases under different conditions. Here, an example of the size of each component constituting the combustion heater will be described. The lowest diameter dimension that can be produced in the structure of the combustion heater 30 is 10 mm, and the configuration of the combustion heater 30 of the present embodiment is used. The maximum diameter dimension is 20 mm, and the diameter of the combustion heater 30 is 10 to 2 0 _. Moreover, the relationship between the maximum flow rate of the flammable gas and the diameter of the combustion heater is 25 312XP / invention manual (supplement) / 93-03/93135173 1278590, the total length of the combustion heater is deleted at 30 to 300 It can give the most combustion efficiency. From the maximum flow rate of the combustible gas and the diameter of the combustion heater, the interval between the heater cover 56 and the combustion heater 30 (the width of the gas path 60) is 2 to 20 mm, and the total length of the heater cover is At 30' mm, the most effective combustion efficiency is achieved. The mixed flow rate of the combustible gas and the non-gas is 5 to 2 0 L / m i η. Further, the temperature controlled by the temperature controller 65 is set to 6 5 0 to 〇C. Further, in the embodiment of the present invention, the heater source 32 is formed in a cylindrical shape, but the shape is not limited to this shape. For example, a polygonal shape such as a hexagonal shape may be formed. Further, in the present embodiment, the intake air is provided at the bottom of the combustion chamber 52, but may be provided at both the bottom portion and the outer peripheral portion of the outer peripheral combustion chamber 1 of the combustion chamber 52. When the outer circumference is also set, the air inlet of the outer peripheral portion is disposed at a position corresponding to the top of the combustion heater. In this embodiment, although the heater cover is not provided with air, it is also possible. Install an air hole in the heater cover. By providing an air hole, the combustible gas and air can be mixed and burned in the body flow path. The amount of air introduced from the air, which is not combusted due to insufficient oxygen concentration, is combusted in the gas flow path to burn it on top of the combustion heater in the high oxygen rich combustion chamber. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is an exploded and assembled view of a combustion heater of the embodiment. Effect of the body flow V 300 flammability 1000
成圓 或八 口 54 部或 設在 置則Round or eight or 54 or set in
孔， 在氣 孔所 度的 度之 312XP/發明說明書(補件)/93-03/93135173 26 1278590 圖2為本實施形態之燃燒加熱器的組合完成圖。 圖3為本實施形態之排氣燃燒裝置的說明圖，（a )為縱 剖面圖，（b )為燃燒加熱器之重要部份剖面圖。 圖4為先前例之耐熱性金屬的圓筒形之實施例圖的部份 剖面圖。 圖5為先前例之電火花的點火•燃燒方式之實施例圖的 部份剖面圖，（a )為正面實施例圖的部份剖面圖，（b )為 側面實施例圖的部份剖面圖。 圖6為比較實施形態和先前例之燃燒效率圖。 【主要元件符號說明】 30 燃燒加熱器 3 1 加熱器罩 32 加熱器源 33 電熱線夾具 34 電熱線 35 電熱偶 37 突起 38 延伸部 39 螺絲孔 40 段差部 41 加熱器爽架 42 、 43 、 44 、 47 螺絲孔 45 溝 4 6 加熱器支座 27 312XP/發明說明書(補件)/93-03/93135173 1278590 48、4 9 導 線 51 燃 燒 容 器 52 燃 燒 室 53 氣 體 導 入 口 54 進 氣 Ό 55 排 氣 管 道 56 加 熱 器 外 蓋 57 冷 卻 管 58 可 燃 性 氣 體導入管 59 T 字 形1 配 管 59a 主 管 59b 分 枝 管 60 氣 體 流 路 61 0 環 62 燃 燒 火 焰 62a 螺 旋 65 溫 度 控 制 器 66 凸 緣Hole, degree of porosity 312XP/Invention Manual (supplement)/93-03/93135173 26 1278590 FIG. 2 is a combined completion view of the combustion heater of the present embodiment. Fig. 3 is an explanatory view of the exhaust gas combustion apparatus of the embodiment, wherein (a) is a longitudinal sectional view, and (b) is a cross-sectional view of an important part of the combustion heater. Fig. 4 is a partial cross-sectional view showing the embodiment of the cylindrical shape of the heat-resistant metal of the prior art. Figure 5 is a partial cross-sectional view showing an embodiment of an ignition and combustion mode of the prior art, (a) is a partial cross-sectional view of the front embodiment, and (b) is a partial cross-sectional view of the side embodiment . Fig. 6 is a graph showing the combustion efficiency of the comparative embodiment and the prior art. [Main component symbol description] 30 Burning heater 3 1 Heater cover 32 Heater source 33 Heating wire clamp 34 Heating wire 35 Thermocouple 37 Protrusion 38 Extension 39 Screw hole 40 Segment 41 Heater cooling 42 , 43 , 44 , 47 Screw hole 45 Groove 4 6 Heater holder 27 312XP/Invention manual (supplement)/93-03/93135173 1278590 48, 4 9 Conductor 51 Combustion vessel 52 Combustion chamber 53 Gas inlet 54 Intake Ό 55 Exhaust Pipe 56 Heater cover 57 Cooling pipe 58 Flammable gas inlet pipe 59 T-shaped 1 Pipe 59a Main pipe 59b Branch pipe 60 Gas flow path 61 0 Ring 62 Combustion flame 62a Spiral 65 Temperature controller 66 Flange
312XP/發明說明書(補件)/93-03/93135173 28312XP/Invention Manual (supplement)/93-03/93135173 28