200526903 九、發明說明： 【發明所屬之技術領域】 本發明為關於可使含在自半導體製造裝置等所排出之 排氣中的可燃性氣體燃燒之燃燒加熱器及排氣燃燒裝置， 特別是適用於可燃性氣體為氫氣H2時者。 【先前技術】 自半導體製造裝置或液晶製造裝置等之製造裝置所被 排出的排氣，其大部份均含有危險的可燃性氣體，因此不 能原樣地放出至大氣中。所以，使用排氣燃燒裝置，在放 出大氣之前對可燃性氣體以燃燒加熱器實施燃燒。先前， 在具有此一燃燒加熱器之排氣燃燒裝置中，為因應燃燒加 熱器之種類，而有以金屬製加熱器之點火•燃燒方式（例 如參照專利文獻1 )，及，以電火花（e 1 e c t r i c s p a r k )之點 火•燃燒方式（例如參照專利文獻2 )。 圖4表示採用以金屬製加熱器點火•燃燒方式之排氣燃 燒裝置。以金屬製加熱器之燃燒裝置其構成如次。在設有 可燃性氣體導入管8、排氣管道1 1及進氣口 1 2之燃燒室 14内，設有金屬製加熱器13。金屬製加熱器13為由：金屬 製可將熱傳達至全周的外殼（c a s e ) 1 5 ;及被配設在此外殼 1 5内可將電能變換成熱能之電熱材料之電熱加熱器16; 及，可檢測出金屬製加熱器1 3的溫度之熱電偶5 ;及，被 埋入於外殼1 5内的空間之絕緣物質1 7 ;如此所構成。藉 設在燃燒室1 4的外部之溫度控制器7，為維持使以熱電偶 5所檢測出之金屬製加熱器1 3的溫度在一定的溫度，而對 6 312XP/發明說明書(補件)/93-03/93135173 200526903 電熱加熱器1 6控制其電力。 藉由排氣管道1 1的吸入而吸自進氣口 1 2之大氣（ 被吸入至燃燒室1 4内，燃燒室1 4内的空氣則經常保 流動狀態。而自點火用燃氣配管2 4流入被控制流量的 (Η 2 )，藉金屬製加熱器1 3之熱能而和大氣中的氧氣 而使氫氣點火。點火後，自可燃性氣體導入管8使排 入燃燒室1 4内而和大氣中的氧氣混合，藉點火所發生 燒火焰 1 0及熱源之熱能而使含在排氣中的可燃性氣 燒，以實施排氣之燃燒處理。燃燒後的排氣自排氣管 而被排出。 圖 5 表示採用電火花之點火•燃燒方式的排氣燃 置。其基本的構成和圖2所示之金屬製加熱器的點火 燒方式相同。其不同點為，其不是以電熱加熱器點火 燒，而是以電火花實施點火•燃燒之點。電火花之構4 使電壓提高之升壓變電器2 9被接續至燃燒器電極2 8 而藉高電壓予以點火。 在空氣時常流動之燃燒室1 4内自點火用燃氣配管 氫氣（Η 2 )流入，藉電火花的能量而和大氣中之氧氣 使氫氣點火。點火後，自可燃性氣體導入管8使排氣 燃燒室1 4再和大氣中的氧氣混合，藉點火所發生的燃 焰 1 0使含在排氣中之可燃性氣體燃燒而實施排氣的 處理。燃燒後的排氣被自排氣管道1 1排出。 又，金屬製加熱方式及電火花方式之兩方式，為了 燃燒，如圖4及圖5所示，必須要有點火用的燃氣設 312ΧΡ/發明說明書(補件)/93-03/9313 5173 空氣） 持在 氫氣 ，反應 氣流 的燃 體燃 道1 1 燒裝 •燃 • 燃 〔為， 、28， 24使 反應 流入 燒火 燃燒 安全 備0 200526903 點火氣體通常為使用氫氣（Η 2 )。點火用燃氣設備之 為，在燃燒室1 4接續點火用燃氣配管2 4，使通過此 用燃氣配管 2 4的氫氣（Η 2 )供應至燃燒室1 4。因此 必須以過濾器1 9藉由手動閥1 8而除去含在於配管2 4 動的氫氣（Η 2 )之不純物，再以目視一面監視壓力計 另一方面以手動調節器2 0控制氫氣（Η 2 )壓力，再藉 閥 22而以質量控制器（mass flow controller)23控 量。 (專利文獻1 )日本專利特開平7 - 3 2 3 2 1 1號公報 (專利文獻2 )日本專利特開平6 - 1 2 9 6 2 7號公報 【發明内容】 (發明所欲解決之問題） 上述專利文獻1之金屬加熱器方式，因以高溫燃燒 金屬製加熱器的周壁發生劣化，或因高溫燃燒而反應 外殼内的電熱加熱器容易斷線，而有使用溫度範圍在 側受限的問題。又，由於外殼為金屬製因此電氣絕緣 佳。又，電熱加熱器因被埋入外殼内的絕緣物質，因 熱加熱器在發生斷線時，電熱加熱器的交換作業非 煩。又，在燃燒室，除了可燃性氣體導入管以外，其 氣密地接續對溫度控制器的電纜或點火用燃氣配管， 燃燒室的構造變成複雜。 又，專利文獻2之電火花方式，因燃燒器電極劣化 不能產生電火花而有不能點火之情形。又，由於在不 火時則必須反覆轉電火花至點火為止，因此，點火時 312XP/發明說明書(補件)/93-03/93135173 構成 點火 ，其 内流 2 1而 由氣 制流 而使 熱使 兩溫 性不 此電 常麻 必須 而使 時則 能點 可燃 200526903 性氣體濃度如達到異常高濃度時則會發生不方便之情 而有此問題。又，在燃燒室，除了可燃性氣體導入管以 必須氣密地接續對升壓變電器的電纜或點火用燃氣配 因此燃燒室的構造變成複雜。 又，對金屬製加熱器方式及電火花方式共同而言， 中的氧氣存在過剩時，低濃度的可燃性氣體之燃燒效 會惡劣。又，點火後，因排氣管道的吸引壓力變動而 火焰亦會搖晃不穩而使燃燒效率不安定。又，其必須 點火用的燃氣設備，因此有增高設備費的問題。 本發明之課題為，可解消如上述先前技術的問題， 供一種加熱器斷線少，使用範圍廣泛，可確實點火， 須要點火用燃氣設備之燃燒加熱器及排氣燃燒裝置。 又本發明之課題為，更提供一種可使燃燒效率安定 簡單保養之排氣燃燒裝置。 (解決問題之手段） 第1發明為，可使可燃性氣體點火·燃燒之燃燒加熱 其具備有：由陶兗製之筒狀的電熱線夾具（holder)和 繞於該電熱線夾具外周之電熱線所構成的加熱器源； 在前述加熱器源可裝卸自如地被覆的石英製之筒狀的 器罩（h e a t e r c a p );如此構成，藉前述加熱器源而被 之加熱器罩外側前述可燃性氣體可被點火•燃燒，如 特徵之加熱器。 由於以耐熱性的陶瓷或石英構成加熱器源之電熱 具及加熱器罩，因此，可在燃燒加熱器之高溫下使用 312XP/發明說明書(補件)/93-03/93135173 形， 外， 管， 空氣 率則 燃燒 要有 而提 且不 且可 器， 被捲 及， 加熱 加熱 此為 線夾 ，而 9 200526903 可確實地使可燃性氣體點火•燃燒。又由於可燃性氣體可 確實點火，因此其不須要點火設備。 又，由於其以陶瓷或石英構成加熱器源的電熱線夾具及 加熱器罩，因此可確保高的電氣絕緣性。 又，由於在陶瓷製的電熱線夾具上包覆有比陶瓷軟化溫 度更高的石英製之加熱器罩，因此，在可燃性氣體燃燒時 加熱器罩之劣化很小，而可有效地保護電熱線斷線，並使 電熱線之斷線減少。 又，由於在加熱器源可裝卸自如地包覆有加熱器罩，因 此，即使電熱線斷線時，只要自加熱器源卸下加熱器罩， 即可對電熱線夾具卸下或安裝電熱線，而可容易實施斷線 之交換作業。 第2發明為，在第1發明中，其具備有：可檢測出前述 加熱器源的溫度之溫度檢測感測器；及，可支持被覆加熱 器源之前述加熱器罩，同時，插通被接續各導線至前述電 熱線及溫度檢測器之筒狀的加熱器支座（s u ρ ρ 〇 r t );及，被 設在前述筒狀的加熱器支座和前述加熱器源之間，可直線 狀地連結前述加熱器源和前述加熱器支座之高絕緣性的筒 狀之加熱器夾架（h ο 1 d e r )，如此的燃燒加熱器。 藉由加熱器支座自加熱器源的電熱線可將導線拉出至 外部。又，藉由加熱器支座自溫度檢測感測器也可將導線 拉出至外部。 又，由於在加熱器源和加熱器支座之間介在有高絕緣性 之加熱器夾架，因此即使在加熱器源上連結加熱器支座 10 312XP/發明說明書(補件)/93-03/93135173 200526903 時，也可使加熱器源的電氣絕緣性提高。 又，使加熱器源和加熱器支座連結成直線狀，因此可使 燃燒加熱器容易操作。 第3發明為，在第2發明中，使前述加熱器罩和前述加 熱器夾架之口徑構成大致相等，前述加熱器源之至少下部 外徑使其和前述加熱器夾架的内徑大致相等，前述加熱器 支座之至少上部外徑和前述加熱器夾架的内徑大致相等， 使前述加熱器夾架的上部嵌合前述加熱器源的下部再以連 結具連結至前述加熱器夾架，在前述加熱器夾架的下部嵌 合前述加熱器支座的上部再以連結具連結至前述加熱器夾 架，被覆在前述加熱器源之前述加熱器罩以前述加熱器夾 架之上部開口端繫止，如此所成之燃燒加熱器。 在加熱器夾架上嵌合加熱器源，再將加熱器支座嵌合於 加熱器夾架，自加熱器源藉由加熱器夾架、加熱器支座被 拉出之導線由於在其間不會露出至外部，因此，導線可被 保護不受外部氣氛所影響。 又，以連結具在加熱器源連結加熱器夾架，而以連結具 在加熱器夾架上連結加熱器支座，因此，加熱器源可以加 熱器支座確實地支持。 又，由於加熱器罩僅被覆加熱器源而被繫止在加熱器夾 架，因此，其可容易對加熱器源卸下或安裝加熱器罩。 第4發明為一種排氣燃燒裝置，其具備有：可對包含在 排氣中的可燃性氣體點火•燃燒之燃燒室；及，被設在前 述燃燒室的下部之氣體導入口；及，可將空氣吸入至前述 312XP/發明說明書(補件)/93-03/93135173 11 200526903 燃燒室之進氣口；及，被設和前述燃燒室的上部之前述氣 體導入口對向的位置之可使前述燃燒室排氣的排氣口； 及，被彎曲成L字形的先端部而自前述氣體導入口被插入 至前述燃燒室内自基端部側可導入前述排氣之可燃性氣體 導入管；及，被連結至前述可燃性氣體導入管之先端部的 筒狀的加熱器外蓋；及，在前述加熱器外蓋内可確保氣體 流路且同軸被插入固定，可對自前述氣體流路所供給的可 燃性氣體加熱，同時，可使被加熱之可燃性氣體和自前述 進氣口吸入的空氣之混合氣體燃燒而發生燃燒火焰的申請 專利範圍第2或3項所記載之燃燒加熱器；及，構成前述 可燃性氣體導入管之L字形的隅角（c 〇 r n e r )部之T字形配 管，前述T字形配管的主管之一端被連結至前述可燃性氣 體導入管的先端部側，前述主管之另一端被開放，再將前 述Τ字形配管的分枝管連結至前述可燃性氣體導入管之基 端部側的Τ字形配管；及，和將自前述燃燒加熱器的加熱 器支座拉出至外部之電熱線及熱電偶的各導線接續，而可 對前述電熱線供給電力而控制使以溫度檢測器所檢測出之 溫度成為一定溫度之溫度控制器，如此所成，其特徵為， 前述燃燒加熱器的加熱器支座自可燃性氣體導入管的先端 部插入，使前述Τ字形配管之主管貫通，再使自前述主管 的開放另一端被拉出至外部的加熱器支座之下端氣密地固 定於前述主管的開放另一端，藉此而確保前述氣體流路而 插入固定前述燃燒加熱器於前述加熱器蓋内，如此之排氣 燃燒裝置。 12 312ΧΡ/發明說明書(補件)/93-03/93135 Π3 200526903 藉在加熱器外蓋確保氣體流路而插入燃燒加熱器，在流 通氣體流路之過程由於可燃性氣體藉加熱器源可充分被加 熱，因此，低濃度的可燃性氣體也可有效率地燃燒。又， 由於燃燒加熱器藉加熱器外蓋所覆蓋，因此在可燃性氣體 點火後，燃燒火焰不會因排氣管道的吸引壓力變動而搖晃 不穩，而可使燃燒效率安定。 又，可燃性氣體導入管之L字形的隅角部以T字形配管 構成，如使用此T字形配管安裝於燃燒加熱器時，可使電 熱線與溫度檢測感測器的導線取出，因此，對燃燒加熱器 之安裝或卸下容易而且保養也容易。 又，在可燃性氣體導入管的隅角部設有T字形配管，藉 在此T字形配管貫通燃燒加熱器的加熱器支座，自燃燒室 的氣體導入口則可取出導線，其比在燃燒室設置專用的導 線取出用開口 ，其保養較簡單。 又，由於在設於可燃性氣體導入管的L字形之隅角部同 軸地固定燃燒加熱器之加熱器支座於 T字形配管之主管 上，因此，在加熱器外蓋内插入固定燃燒加熱器則較容易。 又，在第4發明中，在前述燃燒加熱器與前述排氣口之 間設有筒狀的冷卻管，如使前述燃燒加熱器所燃燒之可燃 性氣體冷卻時，由於所冷卻之排氣被排出至大氣中，因此 其不會對環境賦予惡劣之影響。 第5發明為，在第4發明中，前述加熱器外蓋與被覆前 述加熱器源之加熱器罩的間隔為2〜2 0 mm，前述加熱器外 蓋或前述加熱器源之全長為3 0〜3 0 0 _，前述加熱器罩之 13 312XP/發明說明書(補件)/93-03/93135173 200526903 直徑為1 0〜2 0 mm，如此為特徵的排氣燃燒裝置。 如本發明將各元件設定為上述之尺寸時，則可更 燃燒含在排氣中的可燃性氣體。 第6發明為，在第4或第5發明中，前述加熱器 熱器夾架為陶究製，前述加熱器罩為石英製，以前 線所加熱的加熱器源的溫度為 6 5 0〜1 2 0 0 °C ，如此 之排氣燃燒裝置。 由於以耐熱性的陶瓷或石英構成電熱線夾具或 罩，而燃燒加熱器的温度被提高至 6 5 0〜1 2 0 0 °C ， 可更有效率地燃燒含在排氣中的可燃性氣體。 (發明效果） 根據本發明，加熱器斷線很少，使用溫度範圍廣 確實地點火•燃燒，進一步其不須要點火用之燃氣 可使燃燒加熱器及裝置簡單化。 又，根據本發明，可實現更有高效率且安定地燃 使保養簡單化。 【實施方式】 以下說明本發明之實施形態。 圖1表示實施形態之燃燒加熱器的分解組合圖。 熱器3 0為主要由：圓筒狀之加熱器源3 2 ;及，被覆 器源3 2呈有頭圓筒形的加熱器罩（h e a t e r c a p ) 3 1 ; 持被覆加熱器源3 2之加熱器罩3 1的圓筒狀的加熱 (heater support)46 ；及，被設在力口熱器源32和加 座4 6間，直線連結加熱器源3 2與加熱器支座4 6之 312XP/發明說明書(補件)/93-03/93135173 有效地 源及加 述電熱 為特徵 加熱器 因此， 泛，可 設備而 燒，並 燃燒加 在加熱 及，支 器支座 熱器支 圓筒狀 14 200526903 的加熱器夾架（heater holder)41;所構成。 上述加熱器源3 2為由：具有高電氣絕緣性之圓筒狀的電 熱線夾具（h ο 1 d e r ) 3 3 ;及，被捲繞在電熱線夾具3 3的外周 的電熱線3 4 ;如此所構成。在電熱線夾具3 3之外周壁切 開有螺旋狀的溝4 5，電熱線3 4被捲繞在電熱線夾具3 3的 外周而埋入於該溝4 5。電熱線夾具3 3之上部的開口端， 為了防止缺口而被構成倒角。在電熱線夾具3 3的下部的開 口端之内周，為了可插入加熱器夾架41内，在軸方向外方 設置具有和加熱器夾架 41的内徑大致相同外徑之大致呈 環狀的突起3 7。因此，在此環狀突起3 7的外周，形成段 差部 4 0。此段差部 4 0抵接於加熱器夾架 41的上部開口 端。在突起37之一部份，進一步設有朝轴方向外方之舌片 狀的延伸部3 8，在此延伸部3 8開設有為了和加熱器夾架 4 1連結之螺絲孔3 9。 在電熱線3 4接續有可供電之2根導線（圖2之4 8 )。又， 在電熱線夾具3 3的表面側設有為了檢測出加熱器源3 2的 溫度而作為溫度檢測感測器之熱電偶 3 5，此一熱電偶 3 5 亦接續有可傳送檢出信號之導線（圖2之4 9 )。 電熱線夾具 3 3為以例如耐熱性、高絕緣性的陶瓷所形 成，電熱線3 4為以例如錄鉻電熱線（N i c h r 〇 m e w i r e )所構 成。因此，加熱器源3 2為構成中空之陶瓷加熱器，藉中空 構成則可迅速地升溫、降溫。 上述加熱器罩 3 1被形成上部閉合下部開口之圓筒形， 其覆蓋加熱器源3 2且覆蓋包含加熱器源3 2的主管的外周。 15 312XP/發明說明書(補件)/93-03/9313 5173 200526903 上述加熱器支座4 6為構成支持覆蓋加熱器源3 2的加熱 器罩31之筒狀體。在加熱器支座4 6的上部側面，設有為 了和加熱器夾架4 1連結的螺絲孔4 7。加熱器支座4 6具有 支持加熱器源3 2之功能，同時，具有可一方面保護自加熱 器源 3 2延伸之導線一方面可為其拉出至外部之保護管的 功能。 加熱器夾架4 1被設在筒狀的加熱器支座4 6和加熱器源 3 2之間，以直線狀連結加熱器支座4 6和加熱器源3 2之高 絕緣性的筒狀體，如此所構成。在加熱器夾架4 1的側面設 有沿著軸方向之加熱器源安裝用螺絲孔4 2 ;及，加熱器支 座安裝用之螺絲孔4 3。加熱器夾架 4 1具有連結加熱器源 3 2和加熱器支座4 6之機能，同時，具有提高加熱器源3 2 的電氣絕緣性之機能。 上述加熱器罩3 1之内徑被設定為，加熱器罩3 1覆蓋加 熱器源3 2而和加熱器源3 2的外徑大致相同。加熱器罩3 1 和加熱器夾架4 1之口徑，使加熱器罩3 1可抵接而被繫止 於加熱器夾架41，而被設定成大致相同。又，圓筒狀的加 熱器源3 2之外徑被設定為比加熱器夾架4 1的内徑稍微更 大。又，加熱器支座4 6之外徑被設定成可插入加熱器夾架 41内而大致和加熱器夾架4 1的内徑相同。 在組裝此一燃燒加熱器時，將加熱器源 3 2之下部插入 加熱器夾架4 1，對準設在加熱器源3 2的延伸部3 8之螺絲 孔3 9，及，設在加熱器夾架41之上部的螺絲孔4 2，在此 等對準之螺絲孔4 2、3 9藉扭入螺絲4 4而繫緊，將加熱器 312XP/發明說明書(補件)/93-03/9313 5173 16 200526903 源3 2安裝於加熱器夾架4 1上。 又，將加熱器支座4 6的上部插入加熱器夾架41，對準 設在加熱器夾架 4 1的下部之螺絲孔4 3，及，設在加熱器 支座4 6的上部的螺絲孔4 7，在此等對準之螺絲孔4 3、4 7 藉扭入螺絲4 4而繫緊，將加熱器支座4 6安裝於加熱器夾 架41上。 如此在加熱器源3 2藉由加熱器夾架4 1將加熱器支座4 6 連結成直線狀後，在加熱器源3 2上覆蓋加熱器罩3 1。在 加熱器源3 2上覆蓋之加熱器罩3 1以本身的重量而沿著加 熱器源3 2下降，並被繫止在加熱器夾架4 1的上端開口部 上。由此包含加熱器源3 2的上部之外周被加熱器罩3 1所 覆蓋，而可保護電熱線34不受燃燒時所發生的水滴或燃燒 火焰時的熱源所影響。 圖2表示燃燒加熱器之組合完成圖。加熱器源3 2及熱 電偶的導線4 8及4 9自加熱器源3 2通過加熱器夾架4 1及 加熱器支座4 6内的空間而自加熱器支座4 6的下端開口拉 出。 圖3表示組裝入燃燒加熱器之排氣燃燒裝置，（a )為剖 面圖，（b )為重要部份擴大圖。排氣燃燒裝置主要為由： 形成可燃燒含有可燃性氣體的排氣之燃燒室 52 的燃燒容 器5 1 ;及，被設在燃燒室5 2内，可使可燃性氣體點火， 同時，可放出燃燒之熱能的燃燒加熱器3 0 ;及，依照檢測 溫度可控制燃燒加熱器3 0之控制部的溫度控制器6 5。 燃燒容器5 1為例如以不鏽鋼等之耐熱性構件所構成， 17 312XP/發明說明書(補件)/93-03/93135173 200526903 在内部形成之燃燒室5 2可對可燃性氣體點火•燃燒。在燃 燒室52之下部設有氣體導入口 53。自此氣體導入口 53可 燃性氣體導入管5 8被插入至燃燒室5 2内。可燃性氣體導 入管5 8其一端部在上方被折彎成L字形，先端部由氣體導 入口 5 3被插入於燃燒室5 2内，而可燃性氣體導入管 5 8 之另一端部則被連結至未圖示之半導體製造裝置的排氣 口 ，且自半導體製造裝置被排出之含有可燃性氣體的排氣 則被導入至燃燒室5 2内。此處，自半導體製造裝置被排出 之可燃性氣體例如可為H2氣體。 可燃性氣體導入管5 8之L字形的隅角部，為了可安裝 燃燒加熱器3 0，以具有主管5 9 a和分枝管5 9 b之T字形配 管5 9所構成。T字形配管5 9的主管5 9 a之一端被連結至 可燃性氣體導入管5 8的先端部側，主管5 9 a之另一端被開 放，而T字形配管5 9之分枝管5 9 b則連結至可燃性氣體導 入管5 8的基端部側。 在對應於燃燒室5 2的上部之氣體導入口 5 3的位置被設 有排氣管道55，其對大氣中可放出在燃燒室52内含有可 燃性氣體燃燒之排氣的氛圍氣。又，在插入可燃性氣體導 入管5 8之燃燒室5 2下部的氣體導入口 5 3的外周，被設有 複數個進氣口 5 4，自燃燒室5 2之外部可將大氣（空氣） 吸入至燃燒室5 2内。 在設於燃燒室5 2之底部的氣體導入口 5 3上，在軸方向 垂直安裝有上述燃燒加熱器3 0。其安裝方法為，使燃燒加 熱器3 0裝入燃燒室5 2，再將構成燃燒加熱器3 0之下部的 312XP/發明說明書(補件)/93-03/93135 Π3 18 200526903 加熱器支座4 6自可燃性氣體導入管5 8的先端部插入可燃 性氣體導入管5 8内，使T字形配管5 9的主管5 9 a貫通， 再自主管5 9 a之開放另一端取出加熱器支座4 6的下端。在 取出之此一加熱器支座4 6的下端設置凸緣6 8，將T字形 配管5 9之主管5 9 a之下端開口堵塞，再以0環61密閉於 T字形配管59内。 如此將燃燒加熱器3 0安裝於燃燒室5 2的底部中央後， 以圍繞燃燒加熱器3 0的加熱器源3 2般地以同軸安裝加熱 器外蓋（c 〇 v e r ) 5 6。此加熱器外蓋5 6為以陶瓷製之圓筒所 構成，其具有可防止燃燒火焰6 2的搖晃不穩，燃燒效率不 安定之機能。加熱器外蓋5 6為被接續至自燃燒室5 2的氣 體導入口 5 3所插入之可燃性氣體導入管8的導出口。可燃 性氣體導入管 5 8的接續口徑例如可為N W 2 5，在設於導出 口之分段溝4 5藉嵌合加熱器外蓋5 6之中空的導入口而接 續，嵌合部為以螺絲6 2 a所螺定，由此可使加熱器外蓋5 6 固定在可燃性氣體導入管8上。 在覆蓋加熱器外蓋5 6和加熱器罩3 1的燃燒加熱器30 之間隙形成可使可燃性氣體流動之氣體流路6 0。 又，在燃燒室5 2内的燃燒加熱器3 0和排氣管道5 5之 間之空間，設有覆蓋燃燒火焰6 2之圓筒狀的冷卻管5 7。 在此圓筒狀的冷卻管 57，設有未圖示之水冷套管 (j a c k e t)，在冷卻管5 7内可將燃燒之可燃性氣體冷卻成低 溫。如此冷卻後之氣體自排氣管道被放出至大氣中而不會 破壞大氣環境。 19 312XP/發明說明書(補件)/93-03/93135173 200526903 又，自加熱器支座46下端露出之2根導線48及49為 被接續至設於燃燒室5 2的外部之溫度控制器6 5。溫度控 制器6 5為依照熱電偶3 5之檢測溫度，而控制對電熱線3 4 之供給電力並將加熱器源3 2的溫度變成設定溫度。藉溫度 控制器6 5所控制之加熱器源3 2的適當設定溫度為6 5 0〜 1 2 0 0 °C之範圍。未滿 6 5 0 °C時，則會燃燒不完全，Η 2和0 2 不會反應。因此，650 °C為最低溫度。又，超過 1200 °C之 熱源或可耐此溫度的燃燒室構造則難以實現。因此，構造 上之最高使用溫度為1 2 0 0 °C 。 以下說明此排氣燃燒裝置之動作。 藉接續至排氣管道 5 5之未圖示的排氣設備，吸入通過 排氣管道 5 5之燃燒室5 2内的氛圍氣，自設於燃燒室5 2 的下部之進氣口 5 4將大氣吸入燃燒室5 2内，而使燃燒室 52内空氣時常可流動。 在加熱器源3 2的電熱線3 4使電流流入，藉溫度控制器 6 5控制將燃燒加熱器3 0之加熱器源3 2加熱至前述之設定 温度。加熱溫度為，和自可燃性氣體導入管5 8所導入之大 氣混合的可燃性氣體不須要氫氣等之點火氣體而可直接點 火之充分溫度。 燃燒加熱器3 0加熱後，打開可燃性氣體導入管5 8之閥 (未圖示），連通未圖示之半導體製造裝置的排氣口和可燃 性氣體導入管5 8，將自半導體製造裝置所排出之排氣導入 可燃性氣體導入管 5 8。包含通過設在加熱器源 3 2的外側 之氣體流路6 0的可燃性氣體之排氣，和設在燃燒室5 2的 20 312XP/發明說明書(補件)/93-03/93135173 200526903 底部之進氣口 54所引進的空氣，在氣體流路60之出口的 燃燒加熱器3 0的頂部混合，使其燃燒反應而點火燃燒。可 燃性氣體在通過氣體流路6 0時，藉溫度控制器6 5所控制 之燃燒加熱器3 0而接受熱能使燃燒溫度提高。因此，其不 須要另外獨立的點火裝置，可燃性氣體可在燃燒加熱器3 0 的頂部發生燃燒反應而點火燃燒。又，燃燒加熱器3 0為被 加熱器外蓋5 6所覆蓋，可燃性氣體在通過形成於其間之氣 體流路6 0時，由於可燃性氣體藉燃燒加熱器3 0而被充分 加熱，因此，即使燃燒室 5 2内的空氣中之氧氣存在過剩 時，含在排氣中之可燃性氣體即使在低濃度也可有效率地 燃燒。 特別是由於在燃燒加熱器 30的外周設有加熱器外蓋 5 6，因此，即使發生排氣管道5 5之吸引壓力變動時，燃燒 火焰也不會搖晃不穩，含在排氣中之可燃性氣體於低濃度 時也可使氣體燃燒效率安定，而在低濃度亦可有效率地燃 燒。 具體而言，圖6顯示使用實施形態之燃燒加熱器、先前 例之電火花、金屬製加熱器，可燃性氣體Η 2和不燃性氣體 Ν 2之混合氣體燃燒處理時的燃燒效率數據之比較，又為參 考起見也列出未燃燒處理時之未處理數據。橫軸表示自可 燃性導入管5 8流入可燃性氣體導入方向之氫氣（Η2 )和氮 氣（Ν 2 )的混合比（Η 2 / ( Η 2 + Ν 2 ) % )，而縱軸表示在排氣 管道5 5部測定之Η 2殘留濃度（p p m )。 此處，取得圖6之數據時的實施形態之條件為， 21 312XP/發明說明書(補件)/93-03/93135173 200526903 燃燒加熱器和加熱器外蓋之間隙：6 mm 燃燒加熱器之全長：1 5 0 _200526903 IX. Description of the invention: [Technical field to which the invention belongs] The present invention relates to a combustion heater and an exhaust combustion device which can burn a combustible gas contained in exhaust gas discharged from a semiconductor manufacturing device or the like, and is particularly applicable When the flammable gas is hydrogen H2. [Prior art] Most of the exhaust gas discharged from a manufacturing device such as a semiconductor manufacturing device or a liquid crystal manufacturing device contains dangerous flammable gas, so it cannot be released into the atmosphere as it is. Therefore, an exhaust combustion device is used to burn a flammable gas with a combustion heater before releasing the atmosphere. Conventionally, in an exhaust combustion device having such a combustion heater, in accordance with the type of the combustion heater, there are an ignition and combustion method using a metal heater (for example, refer to Patent Document 1), and an electric spark ( e 1 ectricspark) (for example, refer to Patent Document 2). Fig. 4 shows an exhaust combustion system using a metal heater for ignition and combustion. The combustion device using a metal heater has the following structure. In the combustion chamber 14 provided with the flammable gas introduction pipe 8, the exhaust pipe 11 and the air inlet 12, a metal heater 13 is provided. The metal heater 13 is made of: a metal case (case) 1 5 that can transmit heat to the entire periphery; and an electric heater 16 that is arranged in this case 15 and can convert electrical energy into thermal energy; And, a thermocouple 5 capable of detecting the temperature of the metal heater 13; and an insulating substance 17 embedded in a space inside the case 15; thus constituted. In order to maintain the temperature of the metal heater 13 detected by the thermocouple 5 at a constant temperature, a temperature controller 7 provided outside the combustion chamber 14 is added to the 6312XP / Invention Specification (Supplement) / 93-03 / 93135173 200526903 The electric heater 16 controls its power. The air sucked from the air inlet 12 through the suction of the exhaust pipe 11 (is sucked into the combustion chamber 14 and the air in the combustion chamber 14 is always kept flowing. The self-ignition gas pipe 2 4 (Η 2) flowing into the controlled flow, the hydrogen gas is ignited by the thermal energy of the metal heater 13 and the oxygen in the atmosphere. After ignition, the flammable gas introduction pipe 8 is discharged into the combustion chamber 14 and It is mixed with oxygen in the atmosphere, and the flammable gas contained in the exhaust gas is burned by burning the flame 10 and the heat energy of the heat source to perform the combustion treatment of the exhaust gas. The burned exhaust gas is discharged from the exhaust pipe. It is discharged. Fig. 5 shows the exhaust combustion using the electric spark ignition and combustion method. Its basic structure is the same as that of the metal heater shown in Fig. 2. The difference is that it is not heated by electric heating. The burner ignites and burns, but uses electric sparks to perform ignition and combustion. The structure of electric sparks 4 The booster transformer 2 9 that increases the voltage is connected to the burner electrode 2 8 and is ignited by the high voltage. It always flows in the air Self-ignition gas pipe hydrogen in combustion chamber 1 4 The gas (Η 2) flows in, and the hydrogen is ignited with the oxygen in the atmosphere by the energy of the electric spark. After ignition, the self-flammable gas introduction pipe 8 causes the exhaust combustion chamber 14 to mix with the oxygen in the atmosphere and uses the ignition The generated flame 10 burns the flammable gas contained in the exhaust gas and executes the exhaust gas treatment. The exhaust gas after combustion is discharged from the exhaust pipe 11. Also, the metal heating method and the electric spark method are two types. In order to burn, as shown in Figures 4 and 5, it is necessary to have a gas for ignition 312XP / Invention Manual (Supplement) / 93-03 / 9313 5173 Air) The combustion gas of the reaction gas stream is held in hydrogen. Road 1 1 Burning, Combustion and Combustion [Yes, 28, 24 make the reaction flow into the fire and burn safely. 20052005903 The ignition gas is usually hydrogen (Η 2). For the ignition gas device, the ignition gas pipe 24 is connected to the combustion chamber 14 and the hydrogen gas (Η 2) passing through the gas pipe 24 is supplied to the combustion chamber 14. Therefore, it is necessary to remove the impurities contained in the hydrogen (Η 2) moving in the pipe 2 4 with the filter 19 and the manual valve 18, and then monitor the pressure gauge visually while controlling the hydrogen (Η with the manual regulator 20). 2) The pressure is controlled by a mass flow controller 23 by means of a valve 22. (Patent Document 1) Japanese Patent Laid-Open Publication No. 7-3 2 3 2 1 (Patent Document 2) Japanese Patent Laid-Open Publication No. 6-1 2 9 6 2 7 [Summary of Invention] (Problems to be Solved by the Invention) The metal heater method of the aforementioned Patent Document 1 has a problem that the peripheral wall of the metal heater is burned at a high temperature, or the electric heating heater in the housing is easily disconnected due to high temperature combustion, and the use temperature range is limited on the side. . In addition, since the case is made of metal, it has good electrical insulation. In addition, since the electric heating heater is embedded with an insulating material in the housing, the electric heating heater exchange operation is not troublesome when the heating heater is disconnected. Further, in the combustion chamber, in addition to the flammable gas introduction pipe, a cable to a temperature controller or a gas pipe for ignition are connected in an airtight manner, and the structure of the combustion chamber becomes complicated. Further, the electric spark method of Patent Document 2 may fail to ignite due to the deterioration of the burner electrode and the occurrence of electric spark. In addition, when the fire is not required, the electric spark must be turned repeatedly until ignition. Therefore, at the time of ignition, 312XP / Invention Manual (Supplement) / 93-03 / 93135173 constitutes ignition, and the internal flow 21 is caused by the gas flow. Heat makes the two-temperature nature not as necessary as electric anaesthesia, but it can be flammable. 200526903 If the concentration of the sexual gas reaches an abnormally high concentration, it will cause inconvenience and cause this problem. In addition, in the combustion chamber, in addition to the flammable gas introduction pipe, cables for the booster transformer or gas distribution for ignition must be connected in a gas-tight manner, so that the structure of the combustion chamber becomes complicated. In addition, for both the metal heater method and the electric spark method, when there is an excess of oxygen in the medium, the combustion efficiency of a low concentration of flammable gas is poor. In addition, after the ignition, the flame fluctuates due to the change in the suction pressure of the exhaust pipe, which makes the combustion efficiency unstable. In addition, since it requires gas equipment for ignition, there is a problem that the equipment cost is increased. The object of the present invention is to solve the problems of the prior art as described above, and to provide a heater with few disconnections, a wide range of use, and reliable ignition, which requires a combustion heater and an exhaust combustion device of a gas equipment for ignition. Another object of the present invention is to provide an exhaust combustion device which can stabilize combustion efficiency and maintain maintenance easily. (Means for Solving the Problem) The first invention is a combustion heater capable of igniting and igniting a combustible gas. The invention includes a tubular electric wire holder made of ceramics and a wire wound around the outer periphery of the electric wire holder. A heater source composed of a hot wire; a cylindrical cap made of quartz which is detachably covered by the heater source; a heater cap constructed by the heater source; Can be ignited and burned, such as a characteristic heater. Since heat-resistant ceramics or quartz are used as the heater and heater cover of the heater source, it can be used at the high temperature of the combustion heater 312XP / Invention Manual (Supplement) / 93-03 / 93135173 The air rate must be mentioned for the combustion, and it is not necessary. It is rolled up, and the heating is a wire clamp, and 9 200526903 can definitely ignite and burn the combustible gas. And because the flammable gas can be ignited, it does not require ignition equipment. Furthermore, since the heating wire fixture and the heater cover of the heater source are made of ceramic or quartz, high electrical insulation can be ensured. In addition, the ceramic electric heating wire fixture is covered with a quartz heater cover which has a higher softening temperature than the ceramic. Therefore, the deterioration of the heater cover is small when the flammable gas is burned, which can effectively protect the electricity. The hot wire is disconnected, and the disconnection of the electric hot line is reduced. In addition, since the heater source is detachably covered with a heater cover, even if the heating wire is disconnected, the heating wire fixture can be removed or installed by simply removing the heater cover from the heater source. , And can easily implement the exchange operation of disconnection. The second invention is the first invention, comprising: a temperature detection sensor capable of detecting the temperature of the heater source; and a heater cover capable of supporting the heater source while covering the heater source. Connect each lead wire to the cylindrical heater support (su ρ ρ rt) of the electric heating wire and the temperature detector; and be provided between the cylindrical heater support and the heater source, and can be straight A highly-heated tubular heater clamp (h ο 1 der) that connects the heater source and the heater support in such a manner, such a combustion heater. The heater wire can be pulled out to the outside by the heater wire from the heater source. In addition, the wire can be pulled out to the outside through the temperature detection sensor of the heater support. In addition, since a heater holder having a high insulation is interposed between the heater source and the heater support, the heater support 10 is connected to the heater source 10 312XP / Invention Specification (Supplement) / 93-03 / 93135173 200526903, can also improve the electrical insulation of the heater source. Further, since the heater source and the heater support are connected in a straight line, the combustion heater can be easily operated. According to a third invention, in the second invention, the diameters of the heater cover and the heater holder are made substantially equal, and at least the outer diameter of the lower portion of the heater source is made substantially equal to the inside diameter of the heater holder. The outer diameter of at least the upper part of the heater support and the inner diameter of the heater holder are substantially equal, so that the upper part of the heater holder is fitted into the lower part of the heater source and then connected to the heater holder with a connector. The upper part of the heater holder is fitted into the lower part of the heater holder, and then connected to the heater holder with a connecting device. The heater cover covering the heater source is opened at the upper part of the heater holder. The end is closed, so the combustion heater is completed. Fit the heater source on the heater holder, and then fit the heater support to the heater holder. The wires drawn from the heater source through the heater holder and the heater holder are not used in the meantime. They are exposed to the outside, so the wires can be protected from the outside atmosphere. In addition, since the heater holder is connected to the heater source by the connection device, and the heater holder is connected to the heater holder by the connection device, the heater source can be reliably supported by the heater holder. In addition, since the heater cover is only covered by the heater source and is locked to the heater holder, it can be easily removed or attached to the heater source. The fourth invention is an exhaust gas combustion device including a combustion chamber capable of igniting and combusting a combustible gas contained in the exhaust gas, and a gas introduction port provided at a lower portion of the combustion chamber; and Inhale air to the aforementioned 312XP / Invention (Supplement) / 93-03 / 93135173 11 200526903 Combustion chamber air inlet; and the position where the gas inlet facing the upper part of the combustion chamber is opposite to An exhaust port for exhausting the combustion chamber; and a flammable gas introduction pipe that is bent into an L-shaped tip end and inserted from the gas introduction port into the combustion chamber and can introduce the exhaust gas from a base end portion side; and A cylindrical heater cover connected to the tip of the flammable gas introduction pipe; and a gas flow path can be secured in the heater cover and coaxially inserted and fixed. The supplied flammable gas is heated, and at the same time, the mixed gas of the heated flammable gas and the air taken in from the air inlet can be burned to generate a combustion flame. A heater; and a T-shaped pipe constituting an L-shaped corner portion of the flammable gas introduction pipe, and one end of the main pipe of the T-shaped pipe is connected to a front end side of the flammable gas introduction pipe The other end of the main pipe is opened, and then the branch pipe of the T-shaped pipe is connected to the T-shaped pipe on the base end side of the flammable gas introduction pipe; and, the heater branch The temperature controller that is pulled out to the outside by the electric wire and the thermocouple is connected, and can supply power to the electric wire to control the temperature detected by the temperature detector to a certain temperature. The heater support of the combustion heater is inserted from the front end of the flammable gas introduction pipe, so that the main pipe of the T-shaped pipe is penetrated, and then the other end from the opening of the main pipe is pulled out to the external heater support. The lower end is hermetically fixed to the open other end of the main pipe, thereby securing the gas flow path and inserting and fixing the combustion heater in the heater cover. So the exhaust gas combustion device. 12 312XP / Invention Manual (Supplement) / 93-03 / 93135 Π3 200526903 The combustion heater is inserted by ensuring the gas flow path in the heater cover. In the process of circulating the gas flow path, the flammable gas can be fully used by the heater source Because it is heated, a low concentration of flammable gas can be efficiently burned. In addition, since the combustion heater is covered by the heater cover, after the flammable gas is ignited, the combustion flame is not shaken and unstable due to the change in the suction pressure of the exhaust pipe, and the combustion efficiency can be stabilized. In addition, the L-shaped corner portion of the flammable gas introduction pipe is constituted by a T-shaped pipe. If the T-shaped pipe is used for mounting on a combustion heater, the electric wires and the wires of the temperature detection sensor can be taken out. The combustion heater is easy to install or remove and easy to maintain. In addition, a T-shaped pipe is provided at the corner of the flammable gas introduction pipe, and the T-shaped pipe is used to penetrate the heater support of the combustion heater. The chamber is provided with a special lead-out opening for simple maintenance. In addition, since the heater support of the combustion heater is coaxially fixed to the main pipe of the T-shaped pipe at the corner of the L-shaped corner provided in the flammable gas introduction pipe, the combustion heater is inserted and fixed in the heater cover. It's easier. In the fourth invention, a cylindrical cooling pipe is provided between the combustion heater and the exhaust port. When the combustible gas burned by the combustion heater is cooled, the cooled exhaust gas is blocked by It is discharged into the atmosphere, so it does not have a bad impact on the environment. According to a fifth invention, in the fourth invention, a distance between the heater cover and the heater cover covering the heater source is 2 to 20 mm, and a total length of the heater cover or the heater source is 30. ~ 3 0 0 _, the aforementioned heater cover 13 312XP / Invention Specification (Supplement) / 93-03 / 93135173 200526903 Exhaust combustion device with a diameter of 10 ~ 20 mm. According to the present invention, when the components are set to the sizes described above, the flammable gas contained in the exhaust gas can be burned more. According to a sixth invention, in the fourth or fifth invention, the heater heater holder is made of ceramics, the heater cover is made of quartz, and the temperature of the heater source heated by the previous wire is 6 50 to 1 2 0 0 ° C, so the exhaust combustion device. Because the heating wire fixture or cover is made of heat-resistant ceramic or quartz, the temperature of the combustion heater is raised to 6500 ~ 120 ° C, which can more efficiently burn the flammable gas contained in the exhaust gas. . (Effects of the Invention) According to the present invention, the heater is rarely disconnected, and the use temperature range is wide, and the ignition and combustion are surely performed. Further, it does not require a gas for ignition, which simplifies the combustion heater and the device. Furthermore, according to the present invention, it is possible to achieve more efficient and stable combustion and simplify maintenance. [Embodiment] An embodiment of the present invention will be described below. FIG. 1 shows an exploded combination view of a combustion heater according to the embodiment. The heater 30 is mainly composed of: a cylindrical heater source 3 2; and the coater source 32 is a cylindrical heater cap (heatercap) 3 1; the heater holding the covered heater source 32 is heated The cylindrical heater (heater support) 46 of the heater cover 31 is installed between the heater heater source 32 and the additional seat 46, and connects the heater source 32 and the heater support 4 6 to 312XP in a straight line. / Invention Manual (Supplements) / 93-03 / 93135173 The source is effectively heated and the electric heater is featured. Therefore, the pan can be burned by equipment and burned. The heater is supported by the heater and the support is cylindrical. 14 200526903 heater holder 41 ;. The heater source 32 is made of: a cylindrical electric heating wire clamp (h ο 1 der) 3 3 having high electrical insulation; and, a heating wire 3 4 wound around the outer periphery of the electric heating wire clamp 3 3; So constituted. A spiral groove 45 is cut in the outer peripheral wall of the heating wire clamp 3 3, and the heating wire 3 4 is wound around the periphery of the heating wire clamp 3 3 and buried in the groove 45. The open end of the upper part of the heating wire clamp 33 is chamfered to prevent a notch. On the inner periphery of the open end of the lower part of the electric heating wire clamp 33, in order to be inserted into the heater holder 41, a substantially annular shape having an outer diameter substantially the same as the inside diameter of the heater holder 41 is provided outside the axial direction. The protrusions 3 7. Therefore, a stepped portion 40 is formed on the outer periphery of this annular protrusion 37. This step portion 40 abuts on the upper open end of the heater holder 41. A part of the protrusion 37 is further provided with a tongue-like extension portion 38 extending outward in the axial direction, and the extension portion 38 is provided with a screw hole 39 for connection with the heater holder 41. There are two wires (4 8 in Figure 2) connected to the heating wire 3 4 for power supply. In addition, a thermocouple 35, which is a temperature detection sensor for detecting the temperature of the heater source 32, is provided on the surface side of the heating wire clamp 3 3, and this thermocouple 3 5 is also connected to a detection signal that can be transmitted. Wire (Figure 4-9). The heating wire clamp 33 is formed of, for example, a heat-resistant and highly insulating ceramic, and the heating wire 34 is formed of, for example, a chrome recording heating wire (N i c h r om m w i r e). Therefore, the heater source 32 is a hollow ceramic heater. With the hollow configuration, the temperature can be raised and lowered quickly. The heater cover 31 is formed in a cylindrical shape with an upper portion closed and a lower opening, which covers the heater source 32 and the outer periphery of the main pipe including the heater source 32. 15 312XP / Invention Manual (Supplement) / 93-03 / 9313 5173 200526903 The heater support 46 is a cylindrical body that constitutes a heater cover 31 supporting a heater source 32. On the upper side of the heater holder 46, there are provided screw holes 47 for connecting with the heater holder 41. The heater support 46 has the function of supporting the heater source 32, and at the same time, it has the function of protecting the wire extending from the heater source 32 on the one hand and the protection tube for pulling it out to the outside. The heater holder 41 is provided between the cylindrical heater support 46 and the heater source 32, and connects the heater support 46 and the heater source 32 in a linear shape with a high insulation property. Body, so constituted. On the side of the heater holder 41, there are provided screw holes 4 2 for heater source installation along the axial direction; and screw holes 43 for heater holder installation. The heater holder 41 has the function of connecting the heater source 32 and the heater support 46, and also has the function of improving the electrical insulation of the heater source 32. The inside diameter of the heater cover 31 is set so that the heater cover 31 covers the heater source 32 and is approximately the same as the outside diameter of the heater source 32. The calibers of the heater cover 3 1 and the heater holder 41 are set so that the heater cover 31 can be brought into contact with the heater holder 41 while being substantially the same. The outer diameter of the cylindrical heater source 32 is set to be slightly larger than the inner diameter of the heater holder 41. The outer diameter of the heater holder 46 is set so as to be inserted into the heater holder 41 and is substantially the same as the inner diameter of the heater holder 41. When assembling this combustion heater, insert the lower portion of the heater source 32 into the heater holder 41, and align the screw holes 39 provided in the extension portion 38 of the heater source 32, and set the heater Screw holes 4 2 on the upper part of the holder holder 41, and the aligned screw holes 4 2, 3 9 are fastened by screwing in the screws 4 4, and the heater 312XP / Invention Manual (Supplement) / 93-03 / 9313 5173 16 200526903 The source 3 2 is mounted on the heater holder 41. Insert the upper part of the heater holder 46 into the heater holder 41, and align the screw holes 43 provided in the lower part of the heater holder 41, and the screws provided on the upper part of the heater holder 46. The holes 4 7 and the aligned screw holes 4 3 and 4 7 are fastened by twisting the screws 4 4, and the heater holder 4 6 is mounted on the heater holder 41. In this manner, the heater source 32 is connected to the heater support 4 6 in a linear shape by the heater holder 4 1, and then the heater source 3 2 is covered with the heater cover 31. The heater cover 31 covered on the heater source 32 is lowered along the heater source 32 by its own weight, and is fastened to the upper end opening of the heater holder 41. Accordingly, the outer periphery of the upper portion including the heater source 32 is covered by the heater cover 31, and the electric heating wire 34 can be protected from water droplets generated during combustion or a heat source during combustion flame. Fig. 2 shows a combined completion diagram of the combustion heater. The heater source 3 2 and the thermocouple wires 4 8 and 4 9 are drawn from the heater source 3 2 through the space in the heater holder 4 1 and the heater support 4 6 and open from the lower end of the heater support 4 6 Out. Fig. 3 shows an exhaust combustion device incorporated in a combustion heater, (a) is a sectional view, and (b) is an enlarged view of an important part. The exhaust combustion device is mainly composed of: a combustion container 5 1 forming a combustion chamber 52 capable of combusting exhaust gas containing a flammable gas; and, provided in the combustion chamber 5 2, the flammable gas can be ignited and simultaneously released. The combustion heater 30 for the thermal energy of the combustion; and a temperature controller 65 that can control the control section of the combustion heater 30 according to the detected temperature. The combustion container 51 is made of, for example, a heat-resistant member such as stainless steel. 17 312XP / Invention Manual (Supplement) / 93-03 / 93135173 200526903 A combustion chamber 51 formed inside can ignite and burn a combustible gas. A gas introduction port 53 is provided below the combustion chamber 52. From this gas introduction port 53, a flammable gas introduction pipe 5 8 is inserted into the combustion chamber 5 2. One end of the flammable gas introduction pipe 5 8 is bent into an L-shape at the top, the tip end is inserted into the combustion chamber 5 2 through the gas introduction port 5 3, and the other end of the flammable gas introduction pipe 5 8 is The exhaust gas containing the combustible gas discharged from the semiconductor manufacturing apparatus is connected to an exhaust port of a semiconductor manufacturing apparatus (not shown), and is introduced into the combustion chamber 52. Here, the flammable gas discharged from the semiconductor manufacturing apparatus may be, for example, H2 gas. The L-shaped corner portion of the flammable gas introduction pipe 58 is composed of a T-shaped pipe 59 having a main pipe 5 9 a and a branch pipe 5 9 b so that the combustion heater 30 can be installed. One end of the main pipe 5 9 a of the T-shaped pipe 5 9 is connected to the leading end side of the flammable gas introduction pipe 5 8, the other end of the main pipe 5 9 a is opened, and the branch pipe 5 9 b of the T-shaped pipe 5 9 b Then, it is connected to the base end portion side of the flammable gas introduction pipe 58. An exhaust duct 55 is provided at a position corresponding to the gas introduction port 53 in the upper part of the combustion chamber 52, and it can release to the atmosphere an atmosphere containing exhaust gas combusted by the combustible gas in the combustion chamber 52. In addition, a plurality of air inlets 5 4 are provided on the outer periphery of the gas introduction port 5 3 below the combustion chamber 5 2 inserted into the flammable gas introduction pipe 5 8, and the atmosphere (air) can be released from the outside of the combustion chamber 5 2. Suction into the combustion chamber 5 2. The above-mentioned combustion heater 30 is vertically installed in the gas introduction port 53 provided at the bottom of the combustion chamber 52. The installation method is that the combustion heater 30 is installed in the combustion chamber 5 2 and then the 312XP / Invention Manual (Supplement) / 93-03 / 93135 Π3 18 200526903 heater support constituting the lower part of the combustion heater 30 is installed. 4 6 The flammable gas introduction pipe 5 8 is inserted into the flammable gas introduction pipe 5 8 at the leading end, so that the main pipe 5 9 a of the T-shaped pipe 5 9 is penetrated, and then the heater pipe is removed from the other end of the main pipe 5 9 a. The lower end of the seat 4 6. A flange 6 8 is provided at the lower end of the heater support 4 6 that has been taken out, and the lower end of the main pipe 5 9 a of the T-shaped pipe 5 9 is blocked, and then sealed in the T-shaped pipe 59 with a 0 ring 61. After the combustion heater 30 is mounted in the center of the bottom of the combustion chamber 52 in this manner, the heater cover 32 (co.v.r.e.) is mounted coaxially around the heater source 32 of the combustion heater 30. The heater cover 5 6 is formed of a ceramic cylinder, and has a function of preventing the combustion flame 62 from being shaken and unstable, and the combustion efficiency is unstable. The heater cover 5 6 is a lead-out port of the flammable gas introduction pipe 8 inserted into the gas introduction port 53 of the combustion chamber 52. The connection diameter of the flammable gas introduction pipe 5 8 may be, for example, NW 2 5. The segmented groove 4 5 provided at the guide outlet is connected by the hollow inlet of the fitting heater cover 5 6. The fitting portion is formed by The screw 6 2 a is screwed, so that the heater cover 5 6 can be fixed to the flammable gas introduction pipe 8. A gas flow path 60 is formed in the gap between the combustion heater 30 covering the heater cover 5 6 and the heater cover 31 to allow the flammable gas to flow. Further, a space between the combustion heater 30 and the exhaust duct 55 in the combustion chamber 52 is provided with a cylindrical cooling pipe 57 covering the combustion flame 62. The cylindrical cooling pipe 57 is provided with a water cooling jacket (j a c k e t) (not shown), and the combustible gas can be cooled to a low temperature in the cooling pipe 57. The gas thus cooled is released from the exhaust pipe to the atmosphere without damaging the atmospheric environment. 19 312XP / Invention Manual (Supplement) / 93-03 / 93135173 200526903 In addition, the two wires 48 and 49 exposed from the lower end of the heater support 46 are connected to the temperature controller 6 provided outside the combustion chamber 5 2 5. The temperature controller 65 controls the supply of electric power to the heating wire 3 4 in accordance with the detected temperature of the thermocouple 35 and changes the temperature of the heater source 32 to a set temperature. The proper setting temperature of the heater source 3 2 controlled by the temperature controller 65 is in the range of 6 500 to 12 0 ° C. Below 6 0 0 ° C, combustion will be incomplete, and 完全 2 and 0 2 will not react. Therefore, 650 ° C is the minimum temperature. In addition, a heat source exceeding 1200 ° C or a combustion chamber structure that can withstand this temperature is difficult to achieve. Therefore, the maximum operating temperature on the structure is 12 0 ° C. The operation of this exhaust combustion device will be described below. By using an exhaust device (not shown) connected to the exhaust duct 55, the atmosphere in the combustion chamber 5 2 passing through the exhaust duct 5 5 is sucked in, and the air inlet 5 4 provided at the lower part of the combustion chamber 5 2 The atmosphere is sucked into the combustion chamber 52, so that the air in the combustion chamber 52 can always flow. A current is supplied to the electric heating wire 34 of the heater source 32, and the heater source 32 of the combustion heater 30 is controlled to be heated to the aforementioned set temperature by the temperature controller 65. The heating temperature is a sufficient temperature that the flammable gas mixed with the atmosphere introduced from the flammable gas introduction pipe 58 can be directly ignited without using an ignition gas such as hydrogen. After the combustion heater 30 is heated, the valve (not shown) of the flammable gas introduction pipe 58 is opened, and the exhaust port of the semiconductor manufacturing apparatus (not shown) and the flammable gas introduction pipe 58 are communicated, and the semiconductor manufacturing apparatus The discharged exhaust gas is introduced into a flammable gas introduction pipe 58. Exhaust containing flammable gas through gas flow path 60 provided outside heater source 32, and 20 312XP / Invention Specification (Supplement) / 93-03 / 93135173 200526903 provided in combustion chamber 5 2 The air introduced from the air inlet 54 is mixed at the top of the combustion heater 30 at the outlet of the gas flow path 60, and the combustion reaction is started to ignite and burn. When the flammable gas passes through the gas flow path 60, the combustion heater 30 controlled by the temperature controller 65 receives heat energy to increase the combustion temperature. Therefore, it does not require an additional separate ignition device, and the flammable gas can be ignited and combusted by a combustion reaction on the top of the combustion heater 30. The combustion heater 30 is covered by the heater cover 56. When the flammable gas passes through the gas flow path 60 formed therebetween, the flammable gas is sufficiently heated by the combustion heater 30, so that Even when there is an excess of oxygen in the air in the combustion chamber 52, the flammable gas contained in the exhaust gas can be efficiently burned even at a low concentration. In particular, since the heater cover 5 6 is provided on the outer periphery of the combustion heater 30, even if the suction pressure of the exhaust duct 55 is changed, the combustion flame does not shake and is unstable, and the combustible gas contained in the exhaust gas is combustible. The sex gas can stabilize the combustion efficiency of the gas at a low concentration, and can also efficiently burn at a low concentration. Specifically, FIG. 6 shows a comparison of the combustion efficiency data during the combustion treatment of the mixed gas using the combustion heater of the embodiment, the electric spark of the previous example, the metal heater, the combustible gas Η 2 and the non-combustible gas N 2, For reference, unprocessed data when unburned are also listed. The horizontal axis represents the mixing ratio of hydrogen (Η2) and nitrogen (N 2) flowing from the flammable introduction pipe 58 into the direction of introduction of the flammable gas (Η 2 / (Η 2 + Ν 2)%), and the vertical axis represents the row残留 2 residual concentration (ppm) measured in 5 parts of the gas pipe. Here, the conditions of the embodiment when obtaining the data of FIG. 6 are: 21 312XP / Invention Specification (Supplement) / 93-03 / 93135173 200526903 Clearance between the combustion heater and the heater cover: 6 mm full length of the combustion heater : 1 5 0 _
設定溫度：9 0 0 °C 排氣之可燃性氣體 Η 2和不燃性氣體 Ν 2之混合氣體流 量：9 0 L / m i η 〇 又，電火花、金屬加熱器之熱源之溫度為9 0 0 °C 。 在使用電火花時，Η 2殘留濃度，雖混合比2 5 %以上之混 合氣體則可充分燃燒因此表示低值，但未滿2 5 %時之低混 合比時，由於未燃燒之比例增高，因此Η2殘留濃度則表示 高值，未燃燒氣體就原樣地自排氣管道5 5被排出。因此， 低濃度Η2的燃燒效率不佳而有安全性之問題。 又，使用金屬製加熱器時，Η 2殘留濃度，當混合比為2 0 %以上之混合氣體時可充分燃燒因此表示低值，但未滿2 0 %時之低混合比時，由於未燃燒之比例增高，則表示 Η 2 殘留濃度為高值，未燃燒氣體就原樣地自排氣管道5 5被排 出。因此，低濃度Η2的燃燒效率不佳而有安全性之問題。 相對的，使用本實施形態之燃燒加熱器時，Η 2殘留濃度 之高峰為在混合比1 0 %附近，可以高效率地燃燒。Η 2殘留 濃度之高峰點，在電火花方式為 lOOOppm，而在金屬製加 熱器為7 0 0 p p m，但燃燒加熱器為4 0 0 p p m，其比先前的熱源 明顯降低2 / 5〜4 / 7，而可顯著提高燃燒效率。因此，低濃 度H2之燃燒效率良好且可解消安全性之問題。 根據上述之實施形態，由於在加熱器源 3 2以高溫被加 熱之氣體流路6 0内加熱可燃性氣體，在氣體流路6 0之出 22 312XP/發明說明書(補件)/93-03/93135173 200526903 口和空氣混合而燃燒，因此其不須要使用氫氣等的助燃 體的點火設備，而可直接點火•燃燒含在排氣中之可燃 氣體。因此其不必大氣以外的助燃氣體或點火設備，而 大幅度簡化裝置之構成。 又，由於在電熱線夾具3 3的外周捲繞電熱線3 4，因 比起在電熱線夾具3 3的内周捲繞電熱線3 4之構成，其 使燃燒加熱器3 0小型化。又，由於在電熱線夾具3 3的 周捲繞電熱線34，因此捲回作業容易。又，由於設在電 線夾具3 3外周之螺絲溝4 5捲繞電熱線3 4，因此可將電 線34構成不會露出電熱線夾具33的外周。又，由於以 熱器罩3 1覆蓋電熱線夾具3 3之外周，因此可更保護電 線3 4，也可以電熱線3 4有效地保溫被加熱之電熱線夾 33。又，由於在電熱線夾具33和加熱器外蓋56之間之 體流路6 0可將可燃性氣體提高至點火溫度，因此被加熱 可燃性氣體可和空氣或氧氣合流之加熱器罩3 1的頂部， 可確實地使可燃性氣體點火·燃燒。 又，在本貫施形態5由於加熱裔源3 2之電熱線失具 用陶瓷構成，因此可實現高電氣絕緣性，而可有效地防 漏電。又，由於使用比陶瓷軟化性更高的石英作為覆蓋 熱器源3 2之加熱器外蓋5 6，因此加熱器罩較不會發生 裂或裂痕，電熱線可更有效地保護其不受水滴或燃燒火 之侵害。 又，構成加熱器罩31及電熱線夾具3 3之材料，如為 用石英或陶瓷，則加熱器罩3 1及電熱線夾具3 3的内外 312XP/發明說明書(補件)/93-03/93135173 氣 性 可 可 外 熱 熱 加 熱 具 氣 之 而 使 止 加 龜 焰 使 周 23 200526903 壁因為燃燒所致之劣化減少，且由於電熱線3 4不會直接 出至燃燒火焰6 2或内部氛圍氣中，因此，即使在燃燒之 應熱中其亦可有效地保護電熱線3 4。 又，被燃燒之可燃性氣體藉冷卻管 5 7冷卻而變成水 汽狀，其接觸到冷卻管5 7的内壁面再變成水滴，由於排 壓力之搖晃不穩其會飛散，水滴則會落下而接觸到加熱 罩3 1上。即使此水滴之接觸而使加熱器罩3 1表面的溫 急遽變化，則由於加熱器罩3 1的材質為石英製，因此其 防止其不會如使用陶瓷時所發生之龜裂或裂痕等，而有 保護加熱器罩3 1内部的電熱線3 4因水滴所發生之斷線 漏電的情形。 又，由於其容易自加熱器源3 2卸下加熱器罩31，因 其可容易保養。特別是電熱線6在斷線時不必將燃燒加 器3 0全體作交換，只要自加熱器源3 2卸下加熱器罩3 ： 將新的電熱線3 4重新捲在電熱線央具3 3之外周即可容 保養。Set temperature: 9 0 0 ° C The mixed gas flow rate of the combustible gas Η 2 and the non-combustible gas N 2 of the exhaust gas: 90 L / mi η 〇 In addition, the temperature of the heat source of the electric spark and the metal heater is 9 0 0 ° C. When using electric spark, the residual concentration of Η 2 is low, although a mixed gas with a mixture ratio of 25% or more can be fully burned, which indicates a low value. However, when the mixture ratio is less than 25%, the unburned ratio increases. Therefore, the residual concentration of Η2 indicates a high value, and unburned gas is discharged from the exhaust pipe 55 as it is. Therefore, the low-concentration radon 2 has poor combustion efficiency and has a safety problem. When a metal heater is used, the residual concentration of krypton 2 indicates a low value because it can be fully burned when the mixture ratio is 20% or more. However, when the mixture ratio is less than 20%, it is not burned. Increasing the ratio indicates that the residual concentration of Η 2 is high, and unburned gas is discharged from the exhaust pipe 55 as it is. Therefore, the low-concentration plutonium 2 has poor combustion efficiency and has a safety problem. In contrast, when the combustion heater of this embodiment is used, the peak value of the residual concentration of krypton 2 is around 10% of the mixing ratio, and combustion can be performed efficiently.高峰 2 The peak point of the residual concentration is 1000 ppm in the electric spark method and 700 ppm in the metal heater, but 400 ppm in the combustion heater, which is significantly lower than the previous heat source by 2/5 ~ 4 / 7, and can significantly improve combustion efficiency. Therefore, the combustion efficiency of the low-concentration H2 is good and the safety problem can be eliminated. According to the above embodiment, since the flammable gas is heated in the gas flow path 60 heated by the heater source 32 at a high temperature, 22 out of the gas flow path 22 312XP / Invention Manual (Supplement) / 93-03 / 93135173 200526903 Mouth mixes with air and burns. Therefore, it does not require the use of ignition equipment such as hydrogen, but can directly ignite and burn the combustible gas contained in the exhaust gas. Therefore, it does not require a combustion-supporting gas or an ignition device other than the atmosphere, and greatly simplifies the structure of the device. In addition, since the electric heating wire 34 is wound around the outer periphery of the electric heating wire clamp 33, the combustion heater 30 can be miniaturized as compared with the configuration in which the electric heating wire 34 is wound around the inner periphery of the electric heating wire clamp 33. Further, since the electric heating wire 34 is wound around the periphery of the electric heating wire clamp 33, the winding operation is easy. In addition, since the screw grooves 45 provided on the outer periphery of the wire clamp 33 are wound around the electric wire 34, the electric wire 34 can be configured so that the outer periphery of the electric wire clamp 33 is not exposed. In addition, since the outer periphery of the electric heating wire clamp 33 is covered with the heater cover 31, the electric wire 34 can be more protected, and the electric heating wire clamp 33 can be effectively held by the electric heating wire clamp 33. In addition, since the body flow path 60 between the heating wire clamp 33 and the heater cover 56 can raise the flammable gas to the ignition temperature, the heated flammable gas can be combined with air or oxygen by the heater cover 3 1 On the top, the flammable gas can be reliably ignited and burned. In addition, in the fifth embodiment, since the heating wire of the heating source 32 is made of ceramics, high electrical insulation can be achieved, and electric leakage can be effectively prevented. In addition, since quartz, which is more flexible than ceramic, is used as the heater cover 5 6 covering the heater source 3 2, the heater cover is less likely to crack or crack, and the electric heating wire can more effectively protect it from water droplets. Or burning fire. In addition, if the material constituting the heater cover 31 and the heating wire clamp 33 is quartz or ceramic, the inside and outside of the heater cover 31 and the heating wire clamp 33 are 312XP / Invention Manual (Supplement) / 93-03 / 93135173 Gas cocoa heats the gas with external heat to stop adding tortoise flames to make the week 23 200526903 The deterioration of the wall due to combustion is reduced, and because the heating line 3 4 does not directly go out into the combustion flame 6 2 or the internal atmosphere Therefore, it can effectively protect the electric heating wire 34 even in the heat of combustion. In addition, the burned combustible gas is cooled by the cooling pipe 57 to become water vapor. When it contacts the inner wall surface of the cooling pipe 57, it turns into water droplets. It will fly away due to the instability of the exhaust pressure. Onto the heating mantle 31. Even if the temperature of the surface of the heater cover 31 changes abruptly due to the contact of this water droplet, since the material of the heater cover 31 is made of quartz, it prevents it from cracking or cracking that would occur when using ceramics. In addition, there is a case where the electric heating wire 34 inside the protective heater cover 31 is disconnected due to water droplets and the electric leakage occurs. Moreover, since it is easy to remove the heater cover 31 from the heater source 32, maintenance can be easily performed. In particular, when the electric heating wire 6 is disconnected, it is not necessary to exchange the whole burner 30, as long as the heater cover 3 is removed from the heater source 3: a new electric heating wire 3 4 is re-rolled in the electric heating wire center 3 3 Maintenance is available in the outer periphery.
具體而言，在處理電熱線 3 4斷線時，可將可燃性氣 導入管5 8的T字形配管5 9卸下以凸緣6 8固定之燃燒加 器3 0。然後，將加熱器罩3 1沿著加熱器源3 2的上方移 而自加熱器源3 2卸下，自加熱器源3 2的螺絲溝4 5拆除 線之電熱線3 4，將新的電熱線3 4捲在加熱器源3 2的螺 溝4 5上，再自加熱器源3 2之上安裝覆蓋之加熱器罩3 ] 在加熱器源3 2上覆蓋加熱器罩3 1而形成燃燒加熱器 後，將其安裝在可燃性氣體導入管5 8的T字形配管5 9 J 312XP/發明說明書(補件)/93-03/93135173 露 反 蒸 氣 器 度 可 效 及 此 熱 I， 易 體 熱 動 斷 絲 〇 30 24 200526903 如此只要一按壓（◦ n e t o u c h )即可自可燃性氣體導入管 5 8 卸下或安裝燃燒加熱器3 0，又，自加熱器源3 2可卸下或 安裝加熱器罩3 1，因此可容易實施電熱線3 4之斷線交換 作業且容易保養。 又，使用此一中空的陶瓷加熱器之燃燒加熱器，為了維 持斷熱性可使加熱器形狀縮小。設有熱電偶3 5之圓筒形陶 瓷材料的厚度也因為在外周捲繞電熱線3 4，因此不會變成 很厚。因此其可迴避燃燒裝置之大型化，其設置空間很小 即足夠，而可防止半導體製造裝置設置清潔室之成本增高。 又，由於使燃燒加熱器3 0安裝在可燃性氣體導入管5 8 的内部，而自可燃性氣體導入管5 8將導線4 8、4 9取出至 外部，因此，比起在燃燒室5 2設置專用的導線取出用開口 時，其可容易實施保養。 又，只要將陶瓷加熱器安裝在燃燒室 5 2内，再以凸緣 6 8將筒狀加熱器源3 2的加熱器支座4 6固定於安裝在可燃 性氣體導入管58之T字形配管59上即可，其安裝容易。 又，只要變更加熱器源3 2的溝4 5之深度或溝數，則藉 由電熱線3 4的線徑或捲繞數，即其可適用於不同條件之各 種排氣的燃燒。 此處，說明構成燃燒加熱器之各零件的尺寸例，在燃燒 加熱器3 0之構造上，可製作的最低直徑尺寸為1 0關，使 用本實施形態之燃燒加熱器 3 0時的構成上之最大直徑尺 寸為2 0 mm，而燃燒加熱器3 0之直徑為1 0〜2 0 _。又，由 可燃性氣體最大流量和燃燒加熱器的直徑尺寸之關係而 25 312XP/發明說明書(補件)/93-03/93135173 200526903 言，燃燒加熱器之全長在3 0〜3 0 0 _時則可發揮最具 之燃燒效率。 由可燃性氣體最大流量和燃燒加熱器的直徑尺寸 係而言，加熱器外蓋5 6和燃燒加熱器3 0的間隔（氣 路60的寬度）在2〜20 _，加熱器外蓋之全長在30' _時則可發揮最具效果之燃燒效率。可燃性氣體和不 氣體之混合流量為使用5〜2 0 0 L / m i η。 又，藉溫度控制器6 5所控制之溫度被設定在6 5 0〜 V。 又，在本發明之實施形態，雖然使加熱器源 3 2形 筒形，但其並不限於此一形狀，例如也可構成六角形 角形等多角形亦可。又，在本實施形態，雖然使進氣 設在燃燒室5 2的底部，但也可設在燃燒室5 2的外周 燃燒室1的底部及外周部雙方。在外周也設置時，則 外周部之進氣口將其設在對應於燃燒加熱器頂部之位 vp 〇 又，在本實施形態，雖然在加熱器外蓋未設有空氣 但也可在加熱器外蓋設置空氣孔。藉設置空氣孔，則 體流路内可使可燃性氣體和空氣混合而燃燒。自空氣 導入之空氣量，因氧濃度不充分而未燃燒的高氫氣濃 可燃性氣體，與其在氣體流路内燃燒則可在高氧氣濃 燃燒室内的燃燒加熱器之頂部使其燃燒。 【圖式簡單說明】 圖1為本實施形態之燃燒加熱器的分解•組合圖。 312XP/發明說明書(補件)/93-03/93135173 效果 之關 體流 、300 燃性 1000 成圓 或八 π 5 4 部或 設在 置則 孔， 在氣 孔所 度的 度之 26 200526903 圖 2 為 本 實 施 形 態 之 燃 燒 加 熱 器 的 組 合 完 成 圖 〇 圖 3 為 本 實 施 形 態 之 排 氣 燃 燒 裝 置 的 說 明 圖 ， (ί i) 為 縱 剖 面 圖 5 (b ) 為 燃 燒 加 熱 器 之 重 要 部 份 剖 面 圖 0 圖 4 為 先 前 例 之 而于 軌 4 性 金 屬 的 圓 筒 形 之 實 施 例 圖 的 部 份 剖 面 圖 〇 圖 5 為 先 前 例 之 電 火 花 的 點 火 • 燃 燒 方 式 之 實 施 例 圖 的 部 份 剖 面 圖 (a ) 為 正 面 實 施 例 圖 的 部 份 剖 面 圖 (b ) 為 側 面 實 施 例 圖 的 部 份 剖 面 圖 0 圖 6 為 比 較 實 施 形 態 和 先 前 例 之 燃 燒 效 率 圖 〇 [ 主 要 元 件 符 號 說 明 ] 30 燃 燒 加 熱 器 31 加 熱 器 罩 32 加 熱 器 源 33 電 熱 線 夾 具 34 電 熱 線 35 電 熱 偶 37 突 起 38 延 伸 部 39 螺 絲 孔 40 段 差 部 41 加 熱 器 夾 架 42 \ 43 44 % 47 螺 絲 孔 45 溝 46 加 熱 器 支 座 312XP/發明說明書(補件)/93-03/93135173 27Specifically, when the electric heating wire 34 is disconnected, the T-shaped pipe 5 9 of the flammable gas introduction pipe 5 8 can be removed and the combustion adder 30 fixed by the flange 6 8 can be removed. Then, remove the heater cover 3 1 along the heater source 3 2 and remove it from the heater source 3 2, and remove the electric heating wire 3 4 of the wire from the screw groove 4 5 of the heater source 3 2. The electric heating wire 3 4 is wound on the spiral groove 4 5 of the heater source 32, and a covered heater cover 3 is installed from the heater source 3 2]. The heater source 3 2 is covered with the heater cover 31 and formed. After burning the heater, install it in the T-shaped pipe 5 8 of the flammable gas introduction pipe 5 9 J 312XP / Invention Manual (Supplement) / 93-03 / 93135173 The degree of exposure to the anti-steam device is effective and this heat I, easy Body thermal break wire 〇30 24 200526903 In this way, the combustion heater 30 can be removed or installed from the flammable gas introduction tube with only one press (◦ netouch), and it can be removed or installed from the heater source 3 2 The heater cover 31 makes it easy to perform the disconnection operation of the heating wire 34 and maintains it easily. Further, the combustion heater using this hollow ceramic heater can reduce the shape of the heater in order to maintain the thermal insulation property. The thickness of the cylindrical ceramic material provided with the thermocouple 35 is also not so thick because the heating wire 34 is wound around the periphery. Therefore, it can avoid the increase in the size of the combustion device, and its installation space is small, which is sufficient, and it can prevent the cost of installing a clean room in the semiconductor manufacturing device from increasing. Moreover, since the combustion heater 30 is installed inside the flammable gas introduction pipe 5 8, and the wires 4 8 and 4 9 are taken out from the flammable gas introduction pipe 5 8, it is more effective than the combustion chamber 5 2 When a dedicated lead-out opening is provided, maintenance can be easily performed. Moreover, as long as the ceramic heater is installed in the combustion chamber 5 2, the heater support 4 6 of the cylindrical heater source 3 2 is fixed to the T-shaped pipe installed in the flammable gas introduction pipe 58 by the flange 6 8. 59 can be installed, and its installation is easy. Furthermore, as long as the depth or number of grooves 45 of the heater source 32 is changed, the wire diameter or winding number of the heating wire 34 can be applied to the combustion of various exhaust gases under different conditions. Here, an example of the dimensions of each component constituting the combustion heater will be described. In the structure of the combustion heater 30, the minimum diameter size that can be produced is 10, and the configuration when the combustion heater 30 of this embodiment is used The maximum diameter dimension is 20 mm, and the diameter of the combustion heater 30 is 10 to 20 mm. In addition, the relationship between the maximum flow rate of combustible gas and the diameter of the combustion heater is 25 312XP / Invention Specification (Supplement) / 93-03 / 93135173 200526903. The total length of the combustion heater is 30 to 3 0 0 It can make the most of the combustion efficiency. In terms of the maximum flow rate of combustible gas and the diameter of the combustion heater, the distance between the heater cover 5 6 and the combustion heater 30 (the width of the gas path 60) is 2 to 20 mm. The total length of the heater cover At 30 '_, the most effective combustion efficiency can be exerted. The mixed flow rate of flammable gas and non-gas is 5 ~ 200 L / m i η. In addition, the temperature controlled by the temperature controller 65 is set to 650 to V. In the embodiment of the present invention, although the heater source 32 is formed into a cylindrical shape, it is not limited to this shape. For example, a polygonal shape such as a hexagonal shape may be formed. In this embodiment, although the intake air is provided at the bottom of the combustion chamber 52, it may be provided at both the bottom of the combustion chamber 1 and the outer periphery of the combustion chamber 52. When it is also installed on the outer periphery, the air inlet of the outer periphery is set at a position corresponding to the top of the combustion heater vp. In this embodiment, although no air is provided on the heater cover, the heater may be installed on the heater. The outer cover is provided with air holes. By providing air holes, combustible gas and air can be mixed and burned in the body flow path. The amount of air introduced from the air is unburned high-hydrogen-rich flammable gas due to insufficient oxygen concentration. Instead of burning in the gas flow path, it can be burned on the top of a combustion heater in a high-oxygen-rich combustion chamber. [Brief Description of the Drawings] FIG. 1 is an exploded and assembled view of the combustion heater of this embodiment. 312XP / Invention Manual (Supplements) / 93-03 / 93135173 Effect of body flow, 300 flammability 1000 round or eight π 5 4 parts or set in the set hole, in the degree of pores 26 200526903 Figure 2 Fig. 3 is an explanatory diagram of an exhaust combustion device according to this embodiment. (Ί i) is a longitudinal sectional view. 5 (b) is an essential part sectional view of the combustion heater. 0 Fig. 4 is a partial cross-sectional view of the previous example of a cylindrical metal shape of a rail 4 metal. Fig. 5 is a partial cross-sectional view of an example of the ignition / combustion method of the electric spark of the previous example. a) Partial cross-sectional view of the front example (b) Partial cross-sectional view of the side example 0 Fig. 6 is a comparison of the combustion efficiency of the embodiment and the previous example. [Description of the main component symbols] 30 Combustion heater31 Heater cover 32 Heater source 33 Heating wire clamp 34 Heating wire 35 Thermocouple 37 Protrusion 38 Extension 39 Screw hole 40 Step difference 41 Heater holder 42 \ 43 44% 47 Screw hole 45 groove 46 Heater support 312XP / Invention Specification (Supplement) / 93-03 / 93135173 27
200526903 48 ^ 4 9 導 線 5 1 燃 燒 容 器 52 燃 燒 室 53 氣 體 導 入 π 54 進 氣 口 55 排 氣 管 道 56 加 熱 器 外 蓋 57 冷 卻 管 58 可 燃 性 氣 體導入管 59 T 字: 形] 配 管 5 9a 主 管 59b 分 枝 管 60 氣 體 流 路 6 1 0環 62 燃 燒 火 焰 62a 螺 旋 65 溫 度 控 制 器 66 凸 緣200526903 48 ^ 4 9 Wire 5 1 Combustion vessel 52 Combustion chamber 53 Gas introduction π 54 Air inlet 55 Exhaust pipe 56 Heater cover 57 Cooling pipe 58 Flammable gas introduction pipe 59 T-shaped: Pipe 5 9a Main pipe 59b Branch pipe 60 gas flow path 6 1 0 ring 62 combustion flame 62a spiral 65 temperature controller 66 flange
312XP/發明說明書(補件)/93-03/93135173 28312XP / Invention Manual (Supplement) / 93-03 / 93135173 28