JP2541740Y2 - Hydrogen combustion type steam generator - Google Patents

Description

[Detailed description of the invention]

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a hydrogen combustion type steam generator for generating steam introduced as an atmospheric gas into a process tube of a semiconductor heat treatment apparatus.

[0002]

2. Description of the Related Art As a hydrogen combustion type steam generating apparatus of this kind, the present applicant has previously described a horizontal combustion chamber made of quartz, an oxygen gas inlet pipe and a generated steam outlet pipe provided in the combustion chamber, and a flame outlet. Proposed a device provided with a hydrogen gas burner located in a combustion chamber, and a heating element for heating the ignition and generated steam disposed around the combustion chamber so as to cover the entire combustion chamber (see Japanese Utility Model Laid-Open No. 2-90627). ).

[0003]

However, in the above-described hydrogen combustion type steam generator, the temperature of the vicinity increases due to the combustion flame generated during the combustion of the hydrogen gas and becomes higher than the temperature of the heating element. Will be overheated. As a result, to automatically control the temperature of the heating element,
It turned out that there was a problem of lack of reliability. Therefore, the temperature control of the heating element has to be performed manually, and the operation is troublesome, and the temperature control may vary. Moreover, in order to prevent overheating of the heating element, it is necessary to reduce the amount of hydrogen gas burned, and there is a problem that the amount of generated steam is reduced.

[0004] An object of the present invention is to provide a hydrogen-combustion type steam generator which solves the above-mentioned problems.

[0005]

SUMMARY OF THE INVENTION A hydrogen combustion type steam generator according to the present invention comprises a combustion chamber, an oxygen gas inlet pipe and a generated steam outlet pipe provided in the combustion chamber, and hydrogen having a flame port located in the combustion chamber. A hydrogen-burning steam generator comprising a gas burner, wherein a water jacket is arranged around a predetermined length of the combustion chamber including a portion where a flame generated by the hydrogen gas burner exists, and a water around the combustion chamber is provided. Except for the portion where the jacket is disposed, a heating element for heating the ignition and generated steam is disposed.

In the above apparatus, it is preferable that a flame sensor for detecting the flame of the hydrogen gas burner in the combustion chamber is provided in a portion where the water jacket is arranged.

[0007]

When the water jacket is arranged around a predetermined length of the combustion chamber including the portion where the flame generated by the hydrogen gas burner exists, the temperature rise due to the combustion flame generated during the combustion of the hydrogen gas is suppressed. Moreover, if the heating element for igniting and generating steam is disposed in a portion around the combustion chamber other than the portion in which the water jacket is disposed, the heating element is heated by the combustion flame generated during the combustion of hydrogen gas. Unaffected by the rise. Therefore, overheating of the heating element is prevented.

[0008]

An embodiment of the present invention will be described below with reference to the drawings. In the following description, the left and right in FIG. 1 are referred to as left and right.

The drawing shows a hydrogen combustion type steam generator (1) connected to a semiconductor heat treatment apparatus (not shown).

The hydrogen-fired steam generator (1) is a quartz-made horizontal cylindrical combustion furnace (2) formed of a metal shell and a heat insulating material and disposed in a horizontal cylindrical furnace body (2) closed at both ends. Room (3). Combustion chamber (3) Right through hole
A cylindrical part (4) whose tip protrudes rightward from the furnace body (2) is integrally formed around (3a), and the opening of the cylindrical part (4) is a closing member.
It is closed at (5). Hydrogen gas burner for closing member (5)
(6) is fixed through, and the flame opening (6a) of the combustion chamber (3)
It is located slightly to the right from the left and right centers.
A hydrogen gas supply pipe (not shown) is connected to the right end of the hydrogen gas burner (6). An oxygen gas supply pipe (7) is connected to the closing member (5). Combustion chamber (3) Left through hole (3
A generated steam outlet pipe (8), whose tip protrudes leftward from the furnace body (2), is integrally formed around b). The generated steam outlet pipe (8) is connected to a steam inlet pipe provided in a process tube in which a semiconductor wafer is loaded in a semiconductor heat treatment apparatus (not shown).

A hydrogen gas burner on the peripheral wall of the furnace body (2)
Combustion chamber including the part where flame (F) generated by (6) exists
An annular water jacket (9) is arranged at a predetermined length (2A) in the center of (3). The cooling water is supplied from the inlet pipe (9a) to the water jacket (9), circulates through the inside thereof, and is discharged from the outlet pipe (9b). At this part (2A), a flame sensor (10) for detecting the flame (F) of the hydrogen gas burner (6) in the combustion chamber (3) is attached so as to penetrate the peripheral wall of the furnace body (2). With the combustion chamber
(3) A visual sight glass (11) for viewing inside is attached. As the flame sensor (10), for example, an optical sensor is used. Water jacket (9) in furnace body (2)
On both the left and right sides of the part (2A) where
An annular groove (12) is formed on the inner peripheral surface of the peripheral wall of (2), and the annular groove (12) is formed.
An LGO heater (13) (heating element) for heating the steam that is ignited and generated is disposed therein.

In such a configuration, if the inside of the combustion chamber (3) is heated to the combustion temperature of hydrogen gas by the heater (13), the combustion chamber (3) passes through the flame port (6a) of the hydrogen gas burner (6). )
The hydrogen gas blown into the inside burns, and a flame (F) is generated in the flame outlet (6a) and water vapor is generated. At this time, flame
Although the temperature in the vicinity increases due to the occurrence of (F), the temperature increase is suppressed because the water jacket (9) is arranged around the temperature. Moreover, since the heater (13) does not exist in the portion where the flame (F) is generated, the heater (13)
Are not affected by the above temperature rise. Therefore, the heater
(13) is prevented from being overheated, and even when the temperature of the heater (13) is automatically controlled, its reliability can be improved, and a large amount of hydrogen gas is burned to burn a large amount of hydrogen gas. Water vapor can be generated. In addition, the flame sensor (1
0) is not affected by the light generated from the heater (13), so that ignition and digestion can be reliably detected, and the ignition and extinguishing conditions can be confirmed through the sight glass (11).

The steam generated in the combustion chamber (3) is
It is heated in (13) and sent into the process tube of the semiconductor heat treatment apparatus via the steam outlet pipe (8) at a high temperature. Then, a heat treatment for oxidizing the surface of the wafer is performed using high-temperature steam.

[0014]

According to the hydrogen combustion type steam generator of the present invention, as described above, the overheating of the heating element can be prevented, so that the temperature control of the heating element can be performed automatically and with high accuracy. Can be. In addition, a large amount of hydrogen gas can be burned to generate a large amount of water vapor.

[Brief description of the drawings]

FIG. 1 is a vertical sectional view showing an embodiment of the present invention.

FIG. 2 is a sectional view taken along line II-II of FIG.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Hydrogen combustion type steam generator 3 Combustion chamber 6 Hydrogen gas burner 6a Flame port 7 Oxygen gas inlet pipe 8 Generated steam outlet pipe 9 Water jacket 13 LGO heater (heating element) for ignition and generated steam heating

Claims (2)

(57) [Scope of request for utility model registration] 1. A hydrogen combustion type steam generator comprising a combustion chamber, an oxygen gas inlet pipe and a generated steam outlet pipe provided in the combustion chamber, and a hydrogen gas burner having a flame port located in the combustion chamber. A water jacket is arranged around a predetermined length portion of the combustion chamber including a portion where a flame generated by the hydrogen gas burner exists, and ignition and generation occur in portions around the combustion chamber except for a portion where the water jacket is arranged. A hydrogen combustion type steam generator in which a heating element for steam heating is arranged. 2. The hydrogen combustion type steam generator according to claim 1, wherein a flame sensor for detecting a flame of the hydrogen gas burner in the combustion chamber is provided at a portion where the water jacket is disposed.