JP3828082B2 - Exhaust gas treatment equipment - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an exhaust gas treating apparatus of Ru by combusting combustible gas contained in exhaust gas discharged from a semiconductor manufacturing device or the like, is suitably used especially when the combustible gas is hydrogen (H ₂₎ .
[0002]
[Prior art]
Since exhaust gas discharged from a manufacturing apparatus such as a semiconductor manufacturing apparatus or a liquid crystal manufacturing apparatus often contains a dangerous combustible gas, it cannot be released into the atmosphere as it is. In view of this, combustible gas is burned by a heat source before being released into the atmosphere using an exhaust gas treatment device. Conventionally, according to the type of the heat source, the exhaust gas treatment apparatus has an ignition / combustion system (for example, see Patent Document 1) using a single heat source and an ignition / combustion system for an electric spark (for example, see Patent Document 2). is there.
[0003]
FIG. 2 shows an ignition and combustion system using a single heat source. The configuration of the combustion processing apparatus using a single heat source is as follows. A single heat source 13 is provided in the combustion chamber 14 provided with the combustible gas introduction pipe 8, the exhaust pipe 11, and the air intake port 12. The single heat source 13 is a case 15 made of metal that transmits heat to the entire circumference, an electric heater 16 that is arranged in the case 15 and converts electric energy into heat energy, and the temperature of the heat source 13. It comprises a thermocouple 5 to be detected and an insulating material 17 that fills the space in the case 15. Electric power to the electric heater 16 is controlled by the temperature controller 7 provided outside the combustion chamber 14 so that the temperature of the heat source 13 detected by the thermocouple 5 is maintained at a predetermined temperature.
[0004]
Air (air) is taken into the combustion chamber 14 from the air intake port 12 by suction from the exhaust pipe 11, and air is constantly flowing into the combustion chamber 14. A hydrogen (H ₂ ) gas having a controlled flow rate is supplied from the ignition gas pipe 24 and reacted with oxygen in the atmosphere by the thermal energy of the single heat source 13 to ignite hydrogen. After ignition, the exhaust gas flows from the combustible gas introduction pipe 8 into the combustion chamber 14 and is mixed with oxygen in the atmosphere. The combustible gas contained in the exhaust gas is burned by the flame 10 and the heat energy of the heat source by ignition, Perform exhaust gas combustion treatment. The exhaust gas after combustion is exhausted from the exhaust pipe 11.
[0005]
In such a single heat source method, when the mixing ratio of the combustible gas is high among the combustible gas and the non-combustible gas constituting the exhaust gas, the residual concentration of the combustible gas is sufficiently combusted. Shows a low value, but when the mixing ratio is low, it is almost unburned, so the residual concentration shows a high value, and the unburned gas is discharged from the exhaust pipe 11 as it is. Moreover, since it is a single heat source, when the electric heater 16 is disconnected, the heat supply to the heat source 13 is stopped, and ignition and combustion cannot be performed. Further, the peripheral wall of the heat source 13 due to high-temperature combustion and the electric heater 16 in the case 15 are easily disconnected due to reaction heat due to high-temperature combustion, and the operating temperature range is limited.
[0006]
FIG. 3 shows the ignition and combustion method of the electric spark. The basic configuration is the same as the ignition and combustion method using a single heat source shown in FIG. The difference is that ignition / combustion is performed not by an electric heater but by an electric spark. The configuration of the electric spark is such that the burner electrodes 28 and 28 are connected to a step-up transformer 29 for increasing the voltage, and a spark is generated by a high voltage.
[0007]
Hydrogen (H ₂ ) gas is caused to flow from the ignition gas pipe 24 into the combustion chamber 14 in which air is constantly flowing, and hydrogen is ignited by reacting with oxygen in the atmosphere by the electric spark energy. After ignition, the exhaust gas flows from the combustible gas introduction pipe 8 into the combustion chamber 14 and is mixed with oxygen in the atmosphere. The combustible gas contained in the exhaust gas is combusted by the flame 10 by ignition, and the exhaust gas is burned. Do.
[0008]
However, if the electric spark repeatedly sparks when ignition is not possible, and the concentration of the combustible gas reaches an abnormally high concentration when ignition occurs, a problem may occur. Further, the burner electrode 28 may not be ignited due to deterioration of the burner electrode 28 and may not ignite. Further, the flame 10 generated by the combustion fluctuates due to the pressure of the exhaust pipe 11, and the combustion efficiency becomes unstable. Further, in this case as well, as in the method using a single heat source, the combustion region is one of the outlets of the combustible gas introduction pipe, and when oxygen in the air is excessive, a low concentration combustible gas is used. There is a problem that the combustion treatment efficiency is poor.
[0009]
The single heat source method and the electric spark method require an ignition gas facility as shown in FIGS. 2 and 3 in order to perform safe combustion. Usually, hydrogen (H ₂ ) is used as the ignition gas. In the configuration of the ignition gas equipment, an ignition gas pipe 24 is connected to the combustion chamber 14, and hydrogen (H ₂ ) gas passing through the ignition gas pipe 24 is supplied to the combustion chamber 14. For this purpose, impurities contained in hydrogen (H ₂ ) gas flowing through the pipe 24 via the manual valve 18 are removed by a filter 19 and the pressure of the pressure gauge 21 is visually monitored to manually adjust the hydrogen (H ₂ ) gas pressure. It is necessary to control by the regulator 20 and to control the flow rate by the mass flow controller 23 via the air valve 22. Thus, in the single heat source method or the electric spark method, a gas facility for ignition is always required, so that the equipment cost is increased.
[0010]
[Patent Document 1]
Japanese Patent Laid-Open No. 7-323211
[Patent Document 2]
Japanese Patent Application Laid-Open No. 6-129627
[Problems to be solved by the invention]
The prior art described above has the following problems. The single heat source method has a problem that the heat supply is stopped due to disconnection and ignition and combustion cannot be performed. In addition, the electric spark system may not be able to ignite without being reliably sparked. Furthermore, although it is common to a single heat source and an electric spark, a gas facility for ignition is required, so that an equipment cost is required.
[0013]
The problem of the present invention is to solve the above-mentioned problems of the prior art while using an electrothermal material as a heat source, and can be ignited and burned even if a disconnection occurs, and can be ignited reliably. that do not require gas installations for ignition is to provide an exhaust gas treatment apparatus.
[0014]
[Means for Solving the Problems]
1st invention is equipped with two or more heat sources which have an electrical heating material, and ignites and burns the combustible gas contained in waste gas combining the energy of these heat sources, At least 1 heat source of these heat sources The exhaust gas treatment method is characterized in that the combustion of the combustible gas can be continued with the energy of. Since ignition and combustion can be shared by two or more heat sources, a dedicated ignition facility is not required, and since the heat sources are multiplexed, even if one heat source is disconnected, combustion can be continued with other heat sources. Furthermore, since air is supplied to the heat source from the outside, the combustion efficiency of the combustible gas can be increased.
[0015]
A second invention is a combustion chamber in which combustible gas contained in exhaust gas is burned by adding air, and two or more heat sources having an electric heating material provided in the combustion chamber, and the energy of these heat sources is In addition, a heat source that releases thermal energy for igniting and burning the combustible gas contained in the exhaust gas, a temperature detection unit that individually detects the temperatures of the two or more heat sources, and a detection temperature of the temperature detection unit And a control unit for individually controlling the electric power supplied to the electric heating materials of the two or more heat sources.
[0016]
Since ignition and combustion can be shared by two or more heat sources, a dedicated ignition facility is not required and the configuration can be simplified. In addition, since the heat source is multiplexed and the power supplied to the electric heating material is individually controlled by the control unit, even if one heat source is disconnected, combustion can be continued with another heat source.
[0017]
In a third aspect based on the second aspect, the combustion chamber takes in air into the combustion chamber, a combustible gas introduction tube for introducing exhaust gas containing a combustible gas into the combustion chamber, an exhaust tube for exhausting the combustion chamber, and the combustion chamber. An exhaust gas treatment device comprising an air intake port. The combustible gas is mixed with the air taken in from the air intake, ignited and burned in the combustion chamber by the heat of the heat source, and exhausted as exhaust gas from the exhaust pipe after combustion.
[0018]
In a fourth aspect based on the third aspect, the heat source is provided in a cylindrical first heat source section that communicates with the outlet port of the combustible gas introduction pipe, and in a first cylindrical heat source section. A second heat source part that is inserted into the electric heat material and the cylinder of the first heat source part to form a gas flow path between the cylindrical first heat source part and a second heat source part provided in the second heat source part Air that is provided in the first heat source section so as to communicate with the electric heating material and the gas flow path, and that introduces air taken into the combustion chamber from an air intake port provided in the combustion chamber into the gas flow path An exhaust gas treatment apparatus including a hole.
[0019]
The combustible gas given by combining the heat energy of the first heat source part and the second heat source part is mixed with air in the gas flow path and burned in the gas flow path. However, in the amount of air introduced from the air hole, The highly combustible gas that cannot be burned due to insufficient oxygen concentration burns above the first heat source part and the second heat source part in the combustion chamber having a higher oxygen concentration than in the gas flow path.
[0020]
In a fifth aspect based on the fourth aspect, the temperature detecting means includes a first temperature detector for detecting a temperature of the first heat source part and a second temperature detector for detecting a temperature of the second heat source part. An exhaust gas treatment apparatus comprising: The temperature of the first heat source unit and the second heat source unit can be individually detected.
[0021]
In a sixth aspect based on the fifth aspect, the controller is based on the detected temperatures of the first temperature detector and the second temperature detector so that the first heat source portion and the second heat source portion are set to a set temperature. The exhaust gas treatment device is for controlling the power supplied to the first electric heating material and the second electric heating material. Since the electric power supplied to the first electric heating material and the second electric heating material is controlled based on the detected temperatures of the first temperature detector and the second temperature detector, the set temperature can be maintained.
[0022]
In the fourth to sixth aspects of the invention, the gap between the cylindrical first heat source part and the second heat source part is 2 to 20 mm, the overall length of the cylindrical first heat source part is 30 to 300 mm, the first It is preferable that the set temperature of the heat source unit and the second heat source unit is 650 to 1000 ° C., and the mixed gas flow rate of the combustible gas and the non-combustible gas of the exhaust gas is 5 to 200 L / min. If it does in this way, combustible gas contained in exhaust gas can be burned efficiently.
[0023]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described below.
[0024]
FIG. 1 shows an exhaust gas treatment apparatus of the present invention. The exhaust gas treatment apparatus includes a combustion chamber 1 that combusts a combustible gas contained in exhaust gas, and two or more heat chambers that are provided in the combustion chamber 1 to ignite the combustible gas and to release thermal energy for combustion. 30, temperature detection means (not shown) for detecting the temperature of the heat source 30, and a temperature controller 7 as a control unit for controlling the heat source 30 based on the detected temperature.
[0025]
The combustion chamber 1 is made of a heat-resistant member such as stainless steel and burns combustible gas inside. A combustible gas introduction pipe 8 is inserted into the combustion chamber 1 from the lower part of the combustion chamber 1 to introduce exhaust gas containing a combustible gas into the combustion chamber 1. In the illustrated example, the combustible gas introduction pipe 8 has a vertical portion 8a and a horizontal portion 8b. The upper portion of the vertical portion 8a is inserted into the combustion chamber 1, and the horizontal portion 8b is an exhaust port of a semiconductor manufacturing apparatus (not shown). The exhaust gas containing the combustible gas discharged from the semiconductor manufacturing apparatus is introduced into the combustion chamber 1. Here, as the combustible gas discharged from a semiconductor manufacturing device, eg, H ₂ gas.
[0026]
An exhaust pipe 11 is provided in the upper part of the combustion chamber 1, and exhaust gas after burning combustible gas is released from the exhaust pipe 11 into the atmosphere.
[0027]
A plurality of air intakes 12 are provided on the outer periphery of the lower part of the combustion chamber 1 in which the combustible gas introduction pipe 8 is inserted, and the atmosphere (air) as a combustion-supporting gas is introduced into the combustion chamber 1 from the outside of the combustion chamber 1. ) Can be imported.
[0028]
A cooling unit 9 is provided on the upper inner side wall where the flame 10 of the combustion chamber 1 is generated so as to cool the side wall exposed to the flame 10 and heated by combustion. The cooling unit 9 may be configured by a cooling jacket that cools the wall surface by circulating a coolant such as water, or may be configured by simply coating the inner wall with a heat insulating material. The cooling unit 9 may be provided on the entire inner wall or outer wall of the combustion chamber 1.
[0029]
The multiple heat source 30 includes two or more heat source parts 2 and 3 made of a heat resistant member such as ceramics. Here, the first heat source unit 2 and the second heat source unit 3 are used, and a double heat source structure is arranged coaxially.
[0030]
The first heat source section 2 disposed on the outside has a cylindrical shape having the same diameter as the combustible gas introduction pipe 8, and is provided immediately above the combustible gas introduction pipe 8, and the outlet 8c (with a horizontal line drawn). Communicated with). A first electric heater (not shown) as an electric heating material is provided in the cylindrical first heat source unit 2 so that the first heat source unit 2 can be heated. In order to provide the first electric heater inside the cylinder, the electric heater is embedded in the cylinder, or a cavity is formed in the first heat source section 2, and the electric heater is arranged in the cavity. Good. The electric heater can control the temperature of the first heat source unit 2 by the amount of electric power supplied thereto. Here, the electric heater is composed of, for example, a Kanthal wire.
[0031]
The second heat source section 3 disposed on the inside has a rod shape or a columnar shape (hereinafter simply referred to as a rod shape), and a combustible gas introduction pipe communicated with the first heat source section 2 from within the cylinder. A cylindrical gas flow path 27 is formed between the cylindrical first heat source unit 2 and the vertical part 8a of the combustible gas introduction pipe 8. The upper end of the second heat source unit 3 may be arranged so as to protrude slightly from the cylinder port (gas channel port) of the first heat source unit 2, or may be set to the same height without protruding, or may be retracted, and the lower end is combustible The vertical portion 8a of the property gas introduction pipe 8 is taken out of the pipe. A second electric heater (not shown) similar to the first electric heater is provided in the rod-shaped second heat source unit 3 so that the second heat source unit 3 can be heated. In order to provide the second electric heater in the rod, the electric heater may be embedded in the rod, or a cavity may be formed in the second heat source unit 3, and the electric heater may be disposed in the cavity. The heat generating part of the rod-shaped second heat source part 3 may be the entire length of the second heat source part, but it is only necessary to be at least the upper part overlapping the first heat source part 2. In this case, the electric heater may be disposed only on the upper part of the second heat source unit 3, and only the upper part constitutes the substantial second heat source unit 3.
[0032]
In addition, an air hole 4 is provided in the lower part of the cylindrical wall of the first heat source unit 2, and air taken into the combustion chamber 1 from an air intake port 12 provided in the lower part of the combustion chamber 1 It takes in in the gas flow path 27 formed between 2 heat-source parts 3, and mixes with the exhaust gas introduce | transduced into the gas flow path 27 through the combustible gas introduction pipe | tube 8. FIG. In order to facilitate mixing with the exhaust gas, a plurality of air holes 4 are provided along the outer periphery of the cylindrical wall of the first heat source unit 2.
[0033]
Since the pressure of the combustible gas flowing in the gas flow path 27 between the inner peripheral wall of the first heat source unit 2 and the outer peripheral wall of the second heat source unit 3 is lower than the outer peripheral pressure of the air hole 4, Air is drawn into the gas channel 27 between the inner peripheral wall of the first heat source unit 2 and the outer peripheral wall of the heat source unit 3 and flows through the gas channel 27.
[0034]
The temperature detector (not shown) includes a first temperature detector (not shown) that detects the temperature of the first heat source unit 2 and a second temperature detector (not shown) that detects the temperature of the second heat source unit 3. Z). The first temperature detector and the second temperature detector are composed of, for example, a thermocouple, and are embedded in the first heat source unit 2 and the second heat source unit 3, respectively.
[0035]
Two power cables 6 a and 6 b for supplying electric power to the first electric heater of the first heat source unit 2 are drawn out from the upper and lower portions of the cylindrical first heat source unit 2 and are passed through the lower part of the combustion chamber 1 through the temperature controller 7. Connected to. The two power cables 26 a and 26 b that supply power to the second electric heater of the second heat source unit 3 are both drawn from the lower end of the second heat source unit 3 and connected to the temperature controller 7.
[0036]
A cable 5 a for transmitting a temperature detection signal of the first temperature detector is drawn from a thermocouple embedded in the first heat source unit 2 through the air hole 4 and connected to the temperature controller 7 through the lower part of the combustion chamber 1. A cable 6 b for transmitting a temperature detection signal of the second temperature detector is drawn from the lower end of the rod-shaped second heat source unit 3 and connected to the temperature controller 7.
[0037]
The temperature controller 7 includes a first electric heater and a second electric heat based on the detected temperatures of the first temperature detector and the second temperature detector so that the first heat source unit 2 and the second heat source unit 3 reach a set temperature. The power to the heater is controlled.
[0038]
Hereinafter, the operation of the exhaust gas treatment apparatus will be described.
[0039]
The atmosphere in the combustion chamber 1 is sucked from the exhaust pipe 11 by a gas suction means such as an exhaust facility (not shown) provided in the exhaust pipe 11, and the inside of the combustion chamber 1 is introduced from the air intake port 12 provided in the lower part of the combustion chamber 1. The air is constantly flown into the combustion chamber 1 by taking in the atmosphere.
[0040]
An electric current is passed through the electric heaters of the first heat source unit 2 and the second heat source unit 3, and the first heat source unit 2 and the second heat source unit 3 are heated to the set temperature described above under the control of the temperature controller 7. As for the heating temperature, the mixed gas flowing through the gas flow path 27 formed between the first heat source unit 2 and the second heat source unit 3 is introduced from the combustible gas introduction pipe 8 without requiring an ignition gas such as hydrogen. The temperature should be sufficient for the combustible gas to be ignited directly.
[0041]
After the heating, the valve (not shown) of the combustible gas introduction pipe 8 is opened, and the exhaust port of the semiconductor manufacturing apparatus (not shown) and the combustible gas introduction pipe 8 are communicated with each other so that the exhaust gas discharged from the semiconductor manufacturing apparatus It introduces into the combustible gas introduction pipe 8. The exhaust gas rising up the gas flow path 27 is mixed with the air drawn in from the air holes 4 provided in the first heat source section 2 on the way, and combined with the double heat source 30 whose temperature is controlled by the temperature controller 7. When passing through the gas flow path 27 heated by the thermal energy, the combustible gas surely touches the heat source parts 2 and 3, so that the combustion temperature is raised. For this reason, the combustible gas undergoes a combustion reaction in the gas flow path 27 and ignites and burns without requiring a separate ignition device. The combustible gas is combusted by the high heat energy from the double heat source 30 and the oxygen of the air entering from the air hole 4, so that the combustible gas contained in the exhaust gas can be combusted efficiently even at a low concentration.
[0042]
The highly combustible gas cannot react only with oxygen taken into the gas flow path 27 from the air hole 4 and comes out from the outlet 2a of the first heat source unit 2 as unburned gas, but the outlet 2a In the vicinity, there is sufficient air taken into the combustion chamber from the air intake port 12, so that the highly combustible gas is sufficiently mixed with the air. Moreover, in the vicinity of the outlet 2a, not only is the temperature increased by the first heat source 2 and the second heat source 3, but also the flame 10 that burns in the gas flow path 27 and exits from the flow path is heated. Even a highly combustible gas is easily combusted.
[0043]
Although the upper inner wall of the combustion chamber 1 is exposed to a high temperature due to the heat of the flame 10 due to the combustion, in the embodiment, the cooling unit 9 blocks the heat because the cooling unit 9 is provided on the upper inner wall. In order to prevent the inner wall from being exposed to high temperature, the side wall of the combustion chamber 1 is effectively protected from heat.
[0044]
High-temperature exhaust gas generated by combustion, non-combustible gas contained in the exhaust gas from the beginning, and excess air are released into the atmosphere from the exhaust pipe 11.
[0045]
Here, the gap between the cylindrical first heat source section 2 and the rod-shaped second heat source section 3 is appropriate in the range of 2 to 20 mm in order to make combustion effective. When the gap is less than 2 mm, the ventilation resistance is increased, and air is not sufficiently taken in, resulting in incomplete combustion. On the other hand, if it exceeds 20 mm, a pressure difference will not occur, and air will not be taken into the gas flow path 27, and a combustion reaction will not occur.
[0046]
Moreover, the range of 30-300 mm is suitable for the full length of the cylindrical 1st heat-source part 2. As shown in FIG. When the total length is less than 30 mm, the air passing through the gas flow path 27 is not sufficiently heated, so that the combustion becomes incomplete. In addition, it is difficult to produce a heater commensurate with a length exceeding 300 mm.
[0047]
The set temperature of the first heat source unit 2 and the second heat source unit 3 controlled by the temperature controller 7 is suitably in the range of 650 to 1000 ° C. When the temperature is lower than 650 ° C., combustion becomes incomplete and H ₂ and O ₂ do not react. In addition, it is difficult to realize a heat source that produces a temperature exceeding 1000 ° C. and a combustion chamber structure that can withstand that temperature.
[0048]
The mixed gas flow rate of the combustible gas and the incombustible gas of the exhaust gas introduced from the combustible gas introduction pipe 8 into the combustion chamber 1 is suitably in the range of 5 to 200 L / min. When the mixed gas flow rate is less than 5 L / min, the combustion efficiency is poor. Conversely, if it exceeds 200 L / min, incomplete combustion is not preferable.
[0049]
As described above, according to the embodiment, the combustible gas is mixed with air and burned in the narrow gas flow path 27 heated at a high temperature by the double heat source. Without igniting gas equipment using, the combustible gas contained in the exhaust gas can be directly ignited and burned. This eliminates the need for a combustion-supporting gas other than the atmosphere or an ignition gas facility, thereby greatly simplifying the apparatus configuration.
[0050]
In addition, since the heat source is a double heat source 30 that can control power independently, unlike the single heat source method, even if one of the heat sources is disconnected, heat can be supplied with the other heat source, so combustion continues. it can. Therefore, even if the heat source is partially disconnected, unburned gas is not generated, and it is possible to effectively prevent dangerous unburned gas from being released from the exhaust pipe 11 into the atmosphere.
[0051]
In addition, since the heat source 30 is a double heat source in which the gas flow path 27 is formed, the combustion region is provided in two places, that is, the gas flow path 27 and the upper part of the heat source 30. Can burn a low concentration combustible gas, and the other heat source 30 can burn a high concentration combustible gas. Therefore, the combustible gas contained in the exhaust gas can be burned effectively regardless of the combustible gas concentration.
[0052]
Further, since the cooling unit 9 blocks high heat radiated from the flame 10 generated by the double heat source 30 to the peripheral wall of the combustion chamber, the combustion chamber 1 can be effectively protected from high temperatures. Also, since the heat source 30 is made of ceramics as a heat insulating material, unlike the conventional single heat source method, the electric heater provided in the heat source is difficult to break, and the operating temperature range is also limited. The upper limit can be up to 1000 ° C. as described above.
[0053]
In particular, in the electric spark method, if the concentration of the combustible gas reaches a high concentration when ignited, there is a problem that a malfunction phenomenon occurs. In the embodiment, however, ignition can be performed reliably. Such a problem will not occur. Further, since the burner electrode is not used, there is no problem that the electrode cannot be ignited and not ignited due to deterioration of the electrode. Furthermore, even if the flame 10 formed at the upper part of the heat source 30 fluctuates due to the pressure of the exhaust pipe 11, it does not burn at one place where the flame 10 is emitted as described above, but at other places. Since the combustible gas is combusted even in a certain gas flow path, the combustion efficiency is also stabilized.
[0054]
FIG. 4 shows a comparison of combustion efficiency data when a mixed gas of H ₂ gas and N ₂ gas is combusted using the dual heat source of the embodiment and the single heat source of the conventional example. Unprocessed data is also shown when no combustion treatment is performed. The horizontal axis indicates the mixing ratio (H ₂ / (H ₂ + N ₂ )%) of hydrogen (H ₂ ) and nitrogen (N ₂ ) flowing from the combustible gas introduction pipe 8 in the direction of introducing the combustible gas. H ₂ residual concentration (ppm) measured at the exhaust pipe is shown.
[0055]
Here, in the double heat source,
Gap between the cylindrical first heat source part and the rod-like second heat source part: 4 mm
Total length of the cylindrical first heat source part: 80 mm
Set temperature of the first heat source part and the second heat source part: 900 ° C.
Flow rate of mixed gas of combustible gas H ₂ and non-combustible gas N _{2 of} exhaust gas: 90 L / min
In the single heat source, the temperature of the heat source section is 900 ° C.
[0056]
In the case of a single heat source, the H ₂ residual concentration is low because it is sufficiently combusted with a mixed gas with a mixing ratio of 30% or more, but it is almost unburned with a low mixing ratio of less than 30%. The unburned gas is discharged from the exhaust pipe 11 as it is. Therefore, the combustion treatment efficiency of low concentration H ₂ is poor and there is a problem of safety. On the other hand, in the case of a double heat source, the peak of H ₂ residual concentration is around 10% of the mixing ratio and can be burned with high efficiency. Although the H ₂ residual concentration was 2000 ppm in the single heat source, the double heat source was reduced to 200 ppm, 1/10 of the single heat source, and the combustion efficiency was remarkably improved. Therefore, the combustion treatment efficiency of the low concentration H ₂ is improved and the safety problem is solved.
[0057]
In the embodiment, the heat source is configured with a double heat source, but may be configured with multiple heat sources. For example, the number of the second heat source units 3 inserted into the cylinder of the first heat source unit 2 may be multiplexed by arranging two or more instead of one, or two tubes of the first heat source unit 2 may be arranged. Multiple lines may be arranged by coaxial arrangement. Moreover, although the shape of one 1st heat-source part 2 which comprises the heat source 30 was made into the cylindrical shape, you may comprise the shape of the cylindrical 1st heat-source part 2 with polygons, such as a hexagon or an octagon.
[0058]
In the embodiment, the air intake 12 is provided at the bottom of the combustion chamber 1, but it may be provided at the outer periphery of the combustion chamber 1 or at both the bottom and outer periphery of the combustion chamber. When provided also in the outer peripheral portion, the air intake port 12 provided in the outer peripheral portion may be provided in a portion corresponding to the outlet of the gas channel 27.
[0059]
【The invention's effect】
According to the present invention, even when one of the heat sources is stopped due to disconnection by using multiple heat sources, the other heat source can continue its function. Further, by touching a multiple heat source having a large thermal energy, ignition and high-efficiency combustion can be reliably performed. Furthermore, since no gas equipment for ignition is required, the apparatus can be simplified.
[Brief description of the drawings]
FIG. 1 is a partial cross-sectional view of an exhaust gas treatment apparatus using a multiple heat source according to an embodiment.
FIG. 2 is a partial cross-sectional view of an exhaust gas treatment apparatus using a conventional single heat source.
FIGS. 3A and 3B are explanatory views of a conventional exhaust gas treatment apparatus using an electric spark, in which FIG. 3A is a partial front sectional view, and FIG. 3B is a partial side sectional view.
FIG. 4 is a H ₂ residual concentration characteristic chart comparing combustion efficiencies of a single heat source and a double heat source.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Combustion chamber 2 1st heat-source part 3 2nd heat-source part 4 Air hole 7 Temperature controller (control part)
8 Combustible gas introduction pipe 8c Outlet of the combustible gas introduction pipe 10 Flame 11 Exhaust pipe 12 Air intake 30 Double heat source

Claims (6)

A combustion chamber for adding air to the combustible gas contained in the exhaust gas and burning it,
  A combustible gas introduction pipe for introducing exhaust gas containing a combustible gas into the combustion chamber;
  An exhaust pipe for exhausting the combustion chamber;
  An air intake port for taking air into the combustion chamber;
  A plurality of heat sources provided in the combustion chamber, and a heat source that releases thermal energy for igniting and burning the combustible gas contained in the exhaust gas by combining the energy of these heat sources;
  Air provided in the lower portion of the heat source and mixed with the exhaust gas introduced into the combustion chamber from the lower portion of the heat source through the combustible gas introduction pipe through the air intake port. Holes,
An exhaust gas treatment apparatus characterized by comprising: A combustion chamber for adding air to the combustible gas contained in the exhaust gas and burning it,
  A combustible gas introduction pipe for introducing exhaust gas containing a combustible gas into the combustion chamber;
  An exhaust pipe for exhausting the combustion chamber;
  An air intake for taking air into the combustion chamber;
  A plurality of heat sources provided in the combustion chamber, and a heat source that releases thermal energy for igniting and burning the combustible gas contained in the exhaust gas by combining the energy of these heat sources;
  A gas flow path formed between the plurality of heat sources;
  An air hole provided at a lower portion of the heat source, and mixing air taken into the combustion chamber from the air intake port with exhaust gas introduced into the gas flow path through the combustible gas introduction pipe;
An exhaust gas treatment apparatus characterized by comprising: A combustion chamber for adding air to the combustible gas contained in the exhaust gas and burning it,
A combustible gas introduction pipe for introducing an exhaust gas containing a combustible gas into the combustion chamber;
An exhaust pipe for exhausting the combustion chamber;
An air intake port for taking air into the combustion chamber;
A cylindrical first heat source connected to the outlet of the combustible gas introduction pipe;
A second heat source part that is inserted into the cylinder of the first heat source part and forms a combustible gas flow path with the cylindrical first heat source part;
  The combustible gas flow path that is provided between the first heat source unit and the second heat source unit and that is provided in the lower part of the first heat source unit and that takes in the air taken into the combustion chamber from the air intake port. Air holes to be mixed with exhaust gas introduced into the combustible gas flow path through the combustible gas introduction pipe,
An exhaust gas treatment apparatus comprising: The exhaust gas treatment apparatus according to any one of claims 1 to 3, wherein a cooling unit is provided on an upper inner wall of the combustion chamber. The exhaust gas treatment apparatus according to claim 3, wherein a gap between the combustible gas passages is in a range of 2 to 20 mm. The exhaust gas treatment apparatus according to claim 3, wherein an overall length of the first heat source unit is in a range of 30 to 300 mm.

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