CN1641265A - Burning heater and exhaust burning device - Google Patents
Burning heater and exhaust burning device Download PDFInfo
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- CN1641265A CN1641265A CNA2004100962347A CN200410096234A CN1641265A CN 1641265 A CN1641265 A CN 1641265A CN A2004100962347 A CNA2004100962347 A CN A2004100962347A CN 200410096234 A CN200410096234 A CN 200410096234A CN 1641265 A CN1641265 A CN 1641265A
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- Prior art keywords
- heater
- burning
- gas
- heating source
- retainer
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23C—METHODS OR APPARATUS FOR COMBUSTION USING FLUID FUEL OR SOLID FUEL SUSPENDED IN A CARRIER GAS OR AIR
- F23C3/00—Combustion apparatus characterised by the shape of the combustion chamber
- F23C3/002—Combustion apparatus characterised by the shape of the combustion chamber the chamber having an elongated tubular form, e.g. for a radiant tube
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23C—METHODS OR APPARATUS FOR COMBUSTION USING FLUID FUEL OR SOLID FUEL SUSPENDED IN A CARRIER GAS OR AIR
- F23C7/00—Combustion apparatus characterised by arrangements for air supply
- F23C7/02—Disposition of air supply not passing through burner
- F23C7/06—Disposition of air supply not passing through burner for heating the incoming air
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23Q—IGNITION; EXTINGUISHING-DEVICES
- F23Q7/00—Incandescent ignition; Igniters using electrically-produced heat, e.g. lighters for cigarettes; Electrically-heated glowing plugs
- F23Q7/06—Incandescent ignition; Igniters using electrically-produced heat, e.g. lighters for cigarettes; Electrically-heated glowing plugs structurally associated with fluid-fuel burners
- F23Q7/10—Incandescent ignition; Igniters using electrically-produced heat, e.g. lighters for cigarettes; Electrically-heated glowing plugs structurally associated with fluid-fuel burners for gaseous fuel, e.g. in welding appliances
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
Abstract
To provide a combustion heater and exhaust gas combustion equipment capable of positively igniting inflammable gas, stable in combustion efficiency, dispensing with igniting gas equipment, and easily assembled and disassembled. This combustion heater is provided with a heater source comprising a cylindrical heating wire holder and a heating wire wound around the outer periphery of the heating wire holder, and a heater cap for covering the heater source. The inflammable gas is ignited and burned outside the heater cap heated by the heating wire. The combustion heater is further provided with a cylindrical heater support for supporting the heater source covered with the heater cap, and a highly insulating cylindrical heater holder provided between the cylindrical heater support and the heater source to coaxially and linearly connect the heater support and the heater source. The lower part of the heater source fitted into the upper part of the heater holder is connected to the heater holder by a screw, and the upper part of the heater support fitted into the lower part of the heater holder is connected to the heater holder by a screw. The heater cap covering the heater source is locked at the upper opening end of the heater holder.
Description
Technical field
The present invention relates to make the burning heater and the exhaust burning device of the imflammable gas burning that contains from the gas of discharges such as semiconductor-fabricating device, being specially adapted to imflammable gas is hydrogen H
2Situation.
Background technology
Because contain dangerous imflammable gas mostly in the gas of in the manufacturing installation of semiconductor-fabricating device and liquid crystal manufacturing installation etc., discharging, handle ground to airborne release so must add.Therefore, use exhaust burning device, before airborne release by burning heater burning imflammable gas.In the past, the exhaust burning device with this burning heater had by the igniting/combustion system (for example, with reference to patent documentation 1) of metal heater and the igniting/combustion system (for example, with reference to patent documentation 2) of electric spark according to its kind.
Fig. 4 represents to adopt the exhaust burning device by the igniting/combustion system of metal heater.Have metal heater burner structure as described later.In the combustion chamber 14 that is provided with imflammable gas ingress pipe 8, discharge duct 11 and air inlet port 12, be provided with metal heater 13.Metal heater 13 comprises: heat is passed to the metal-back 15 in full week, the thermocouple 5 of temperature that is arranged in this shell 15 electrothermal heaters 16 as the thermo electric material that converts electrical energy into heat energy, detection metal heater 13 and the megohmite insulant 17 in the space of landfill in shell 15.For the temperature maintenance that makes the metal heater 13 that detects by thermocouple 5 in set point of temperature, and control the electric power that offers electrothermal heater 16 by being arranged on combustion chamber 14 outer temperature controllers 7.
Atmosphere (air) is by from the attraction of discharge duct 11 and enter in the combustion chamber 14 from air inlet port 12, and air is kept the state of proper flow in combustion chamber 14.At this, the controlled hydrogen (H of flow
2) from igniting with flowing out the gas pipe arrangement 24, by the heat energy of metal heater 13 with atmosphere in oxygen reaction and light.After the igniting, exhaust flows in the combustion chamber 14 and the oxygen mix the atmosphere from imflammable gas ingress pipe 8, makes the imflammable gas burning that contains in the exhaust by the combustion flame 10 of igniting generation and the heat energy of thermal source, carries out the burning of exhaust and handles.Gas after the burning is discharged from discharge duct 11.
Fig. 5 represents to adopt the exhaust burning device of the igniting/combustion system of electric spark.Basic structure is identical with igniting/combustion system that metal heater shown in Figure 2 causes.Difference is, igniting/burning is not by electrothermal heater but undertaken by electric spark.The structure of electric spark is: light electrode 28,28 and be connected with the step-up transformer 29 of booster tension, carry out spark discharge by high voltage.
Hydrogen (H
2) flow in the combustion chamber 14 of air proper flow with gas pipe arrangement 24 from igniting, make the oxygen reaction in hydrogen and the atmosphere and light by the energy of electric spark.After the igniting, exhaust in imflammable gas ingress pipe 8 flows into combustion chambers 14 and with atmosphere oxygen mix, the combustion flame 10 that produces by igniting makes the imflammable gas burning that contains in the exhaust, carries out the burning of exhaust and handles.Gas after the burning is discharged from discharge duct 11.
In addition, as Fig. 4 and shown in Figure 5, metal heater mode and electric spark mode two modes need the igniting gas apparatus in order to carry out safe combustion.Usually use hydrogen (H as ignition gas
2).Igniting with the structure of gas apparatus is: igniting is connected with combustion chamber 14 with gas pipe arrangement 24, will flow through the hydrogen (H of this igniting with gas pipe arrangement 24
2) supply combustion chamber 14.For this reason, the hydrogen (H that is situated between and in pipe arrangement 24, flows by 19 removals of hand-operated valve 18 usefulness filters
2) in the impurity that contains, by visual surveillance pressure gauge 21 and with hand regulator 20 control hydrogen (H
2) pressure, be situated between and carry out flow-control by air valve 22 usefulness mass flow controllers 23.
Patent documentation 1: the spy opens flat 7-323211 communique
Patent documentation 2: the spy opens flat 6-129627 communique
In the metal heater of above-mentioned patent documentation 1, there is metal heater perisporium deterioration that high-temp combustion causes and the reaction heat that causes by high-temp combustion and make the electric heater broken string in the shell easily and limited the problem of the high-temperature part of serviceability temperature scope.In addition, so because shell is that metal electrical insulating property is poor.And, because with in the megohmite insulant of electrothermal heater landfill in shell, so that electrothermal heater when broken string changed the operation of electrothermal heater is very difficult.In the combustion chamber, except the imflammable gas ingress pipe, the gas pipe arrangement is used in the lead of the temperature controller that must be tightly connected and igniting, the complexity so the structure of combustion chamber becomes.
In addition, in the electric spark mode of patent documentation 2, sometimes since light electrode deterioration and can not spark discharge, can not light a fire.And, because the electric spark discharge of lighting a fire repeatedly during lighting when unignited, so if can produce unfavorable condition when the concentration of imflammable gas arrives very high concentration when lighting.In the combustion chamber, except the imflammable gas ingress pipe, the gas pipe arrangement is used in must be tightly connected step-up transformer and igniting, the complexity so the structure of combustion chamber becomes.
We can say that the metal heater mode is identical with the electric spark mode, promptly in air under the situation of oxygen surplus, the efficiency of combustion of the imflammable gas of low concentration is poor.And the igniting back is because the suction pressure of discharge duct changes combustion flame shakiness, efficiency of combustion instability.Because need igniting to use gas apparatus, so need the expense of cost equipment.
Summary of the invention
The objective of the invention is to solve above-mentioned prior art problem, provide heater to be difficult for broken string, the serviceability temperature wide ranges also can be lighted a fire reliably, and do not need to light a fire burning heater and exhaust burning device with gas apparatus.
In addition, the invention provides the exhaust burning device that can make efficiency of combustion stablize and can simply keep in repair.
First aspect present invention provides a kind of burning heater, and it is lighted and the imflammable gas that burns, and it comprises: heating source, and its tubular heating wire retainer by pottery system constitutes with the heating wire that is wound on this heating wire retainer periphery; Cover of heater, it is made for tubular by quartz, can freely cover above-mentioned heating source with dismantling.At the above-mentioned imflammable gas of can lighting and burn by the outside of the lid of above-mentioned heating source heating.
Because by stable on heating pottery and quartzy heating wire retainer and the cover of heater that constitutes heating source, thus burning heater can at high temperature be used, and can light/burn imflammable gas reliably.In addition, because can light imflammable gas reliably, do not need ignition installation.
And, because by pottery and quartzy heating wire retainer and the cover of heater that constitutes heating source, so can guarantee high electrical insulating property.
In addition, because cover the heating wire retainer of pottery system,, effectively protect heating wire also can reduce the broken string of heating wire so can reduce the damage of the cover of heater that causes by the imflammable gas burning by the cover of heater of the softening temperature quartz manufacturing higher than pottery.
Because cover of heater can be freely covers heating source with dismantling, so, make the replacing processing ease behind the broken string even the heating wire broken string as long as cover of heater is taken off from heating source, just can take out and the installation heating wire from the heating wire retainer.
Second aspect present invention, the burning heater in first aspect present invention also comprises: the temperature detection sensor that detects above-mentioned heating source temperature; The heating source that supporting is covered by above-mentioned cover of heater is inserted the tubular heater retainer that is connected with each lead that is connected with above-mentioned heating wire and temperature detection sensor simultaneously; Be arranged between above-mentioned tubular heater retainer and the above-mentioned heating source, and linearity connects the high-insulativity tubular heater stand of above-mentioned heating source and above-mentioned heater retainer.
Jie can lead to the outside with the heating wire that goes between from heating source by the heater retainer.And also can being situated between will be gone between by the heater retainer leads to the outside from temperature detection sensor.
In addition, because the heater retainer is connected with heating source, the heater stand of high-insulativity is between heating source and heater retainer, so can improve the electrical insulating property of heating source.
And, because linearity ground connects heating source and heater retainer, so carry out the use of burning heater easily.
Third aspect present invention, in the burning heater of second aspect present invention, the bore of above-mentioned cover of heater and above-mentioned heater stand about equally, above-mentioned heating source at least lower outer diameter and above-mentioned heater stand internal diameter about equally, above-mentioned heater retainer at least top external diameter and above-mentioned heater stand internal diameter about equally; Imbed the bottom of above-mentioned heating source on the top of above-mentioned heater stand and use connector to be connected with above-mentioned heater stand, imbed the top of above-mentioned heater retainer in the bottom of above-mentioned heater stand and use connector to be connected, cover of the upper, open end engaging of the above-mentioned cover of heater of above-mentioned heating source in above-mentioned heater stand with above-mentioned heater stand.
By heating source is imbedded in the heater stand, the heater retainer is imbedded in the heater stand, be situated between by heater stand, heater retainer and the lead of drawing from heating source because do not expose with the outside therebetween, so but guardwire not externally in the environment.
In addition, heating source is connected on the heater stand, the heater retainer is connected on the heater stand, so can support heating source reliably by the heater retainer with connector with connector.
And, as long as cover of heater covers heating source, be fastened on the heater stand, so take out and install the heating source of heating lid easily.
Fourth aspect present invention provides a kind of exhaust burning device, comprising: the combustion chamber, and it lights/imflammable gas that contains in the burning and gas-exhausting; Gas introduction port, it is arranged on the bottom of above-mentioned combustion chamber; The air inlet port, it makes air enter described combustion chamber; Exhaust outlet, it is arranged on the position relative with the above-mentioned gas introducing port, top, above-mentioned combustion chamber and gas is discharged from above-mentioned combustion chamber; The imflammable gas ingress pipe, it curves L shaped, and leading section inserts in the above-mentioned combustion chamber from the above-mentioned gas introducing port and imports above-mentioned exhaust from the base end part side; Heater housing, it connects the leading section of above-mentioned imflammable gas conduit and becomes tubular; The burning heater of the present invention second or the third aspect, it is guaranteed the gas passage and inserts coaxially and be fixed in the above-mentioned heating mantles, the imflammable gas that heating is supplied with by the above-mentioned gas path is lighted heated imflammable gas and the Air mixing gas that enters from above-mentioned air inlet port and produce combustion flame simultaneously; T shape pipe arrangement, it constitutes the L shaped corner part of above-mentioned imflammable gas ingress pipe, the end that above-mentioned T shape pipe arrangement is responsible for is connected to the leading section of above-mentioned imflammable gas ingress pipe, opens the above-mentioned person in charge's the other end and the arm of above-mentioned T shape pipe arrangement is connected to the base end part side of above-mentioned imflammable gas ingress pipe; Temperature controller, it connects heating wire and each right lead of electric heating of outwards drawing from the heater retainer of above-mentioned burning heater, and control offers the electric power of above-mentioned heating wire, so that reached the temperature of regulation by the detected temperature of temperature detection sensor.Insert the heater retainer of above-mentioned burning heater by leading section from the imflammable gas ingress pipe, and connect the person in charge of above-mentioned T shape pipe arrangement, the lower end of the heater retainer that will take out to the outside from the open other end of the above-mentioned person in charge is airtight to be fixed on the other end that the above-mentioned person in charge open, guarantees that the above-mentioned gas path is fixed on above-mentioned burning heater insertion in the above-mentioned heater housing.
By guaranteeing that in heating mantles the gas passage inserts burning heater, in the process of gas coming through path, fully heat imflammable gas, so the imflammable gas of low concentration also can burn efficiently by heating source.And because cover burning heater by heater housing, so after imflammable gas was lighted, combustion flame can not change and unstable owing to the suction pressure of discharge duct, efficiency of combustion is stable.
In addition, the L shaped corner part of imflammable gas ingress pipe is made of T shape pipe arrangement, uses this T shape pipe arrangement install combustion heater, and takes out the lead-in wire of heating wire and temperature detection sensor, so the installation of burning heater, taking-up become easily, also can easily keep in repair.
By corner part T shape pipe arrangement is set at the imflammable gas ingress pipe, and the heater retainer that makes burning heater connects this T shape pipe arrangement, take out lead-in wire from the gas introduction port of combustion chamber,, can keep in repair simply so compare with the situation of opening with special-purpose lead-in wire taking-up is set in the combustion chamber.
And so the heater retainer of fixed combustion heater coaxially on the person in charge of the T shape pipe arrangement that the L shaped corner part of imflammable gas ingress pipe is provided with is insertion fixed combustion heater in heater housing easily.
In addition, in fourth aspect present invention, the cooling tube that tubular is set between above-mentioned burning heater and above-mentioned exhaust outlet cools off the imflammable gas that is burnt by above-mentioned burning heater, and then Leng Que exhaust is discharged to atmosphere, so do not influence environment.
Fifth aspect present invention, in the exhaust burning device of fourth aspect present invention, 2～the 20mm that is spaced apart of above-mentioned heater housing and the cover of heater that covers above-mentioned heating source, the total length of above-mentioned heater housing or above-mentioned heating source is 30～300mm, the diameter of above-mentioned cover of heater is 10～20mm.
As the present invention, if each critical piece is set at above-mentioned size, the imflammable gas that further contains in the active combustion exhaust then.
Sixth aspect present invention, in the exhaust burning device aspect the present invention the 4th or the 5th, above-mentioned heating source and above-mentioned heater stand are pottery systems, and above-mentioned heater housing is quartzy system, will be made as 650～1200 ℃ by the temperature of the heating source of above-mentioned heating wire heating.
Constitute heating wire retainer and cover of heater by stable on heating pottery and quartz, make the temperature of burning heater rise to 650～1200 ℃, so the imflammable gas that contains in the exhaust is more effectively burnt.
According to the present invention, because heater is difficult for broken string, the serviceability temperature scope is wide also can light a fire reliably/burn, and then does not need igniting to use gas apparatus, so can simplify the structure of burning heater and device.
In addition,, can realize smooth combustion more efficiently, and can make maintenance easy according to the present invention.
Description of drawings
Fig. 1 is the decomposition/assembly drawing of the burning heater of embodiment;
Fig. 2 is that figure is finished in the assembling of the burning heater of embodiment;
Fig. 3 is the key diagram of the exhaust burning device of embodiment, and Fig. 3 (a) is a profilograph, and Fig. 3 (b) is the profile of burning heater major part;
Fig. 4 is the columnar enforcement illustration profile partly of the hear resistance metal of conventional example;
Fig. 5 is the profile of enforcement illustration part of the lighting of the electric spark/combustion system of conventional example, and Fig. 5 (a) is the positive profile of implementing the illustration part, and Fig. 5 (b) is the profile that the illustration part is implemented in the side;
Fig. 6 is the figure of the efficiency of combustion of comparing embodiment and conventional example.
The specific embodiment
The embodiment of the invention below is described.
Fig. 1 represents the decomposition assembling figure of the burning heater of embodiment.Burning heater 30 mainly comprises: become heating source cylindrical shape heating source 32, cover heating source 32 the cylinder heater retainer 46 that the heating sources 32 that a cylinder heater lid 31, supporting covered by heater lid 31 are arranged, be arranged between heating source 32 and the heater retainer 46 and connect the cylinder heater frame 41 of heating source 32 and heater retainer 46 point-blank.
Above-mentioned heating source 32 is made of cylindrical shape heating wire retainer 33 with high electric insulation and the heating wire 34 that is wound on heating wire retainer 33 peripheries.Periphery wall at heating wire retainer 33 cuts spiral helicine groove 45, heating wire 34 is imbedded in this groove 45 and is wound on the periphery wall of heating wire retainer 33.The upper, open end of heating wire retainer 33 has been carried out chamfering in order to prevent breakage.For can inserting in interior week in the heater stand 41 of the openend that makes heating wire retainer 33 bottoms, be provided with the roughly circular protrusion 37 that has with the internal diameter external diameter about equally of heater stand 41 in axial foreign side.Thereby, form stage portion 40 in the periphery of this circular protrusion 37.The upper opening end in contact of this stage portion 40 and heater stand 41.On the part of projection 37, also be provided with tongue-shaped extension 38, on this extension 38, offer the screw 39 that is connected with heater stand 41 towards axial foreign side.
On heating wire 34, be connected with two leads (Fig. 2 48) of power supply usefulness.And, being provided with electric heating as the temperature detection sensor of the temperature that is used to detect heating source 32 to 35 in the face side of heating wire retainer 33, this electric heating also is connected with the lead that transmits detection signal (Fig. 2 49) 35.
Above-mentioned cover of heater 31 forms the cylindrical shape that lower openings is closed on top, covers heating source 32 and covers the periphery of the person in charge with heating source 32.
Above-mentioned heater retainer 46 is made of by the cylinder of the heating source 32 of heater lid 31 coverings supporting.Upper side at heater retainer 46 is provided with the screw 47 that is connected with heater stand 41.Heater retainer 46 has the function of supporting heating source 32, has lead-in wire that protection stretches out from heating source 32 simultaneously and the function of the protection tube of drawing to the outside.
In order to make cover of heater 31 cover heating sources 32, the external diameter of setting the internal diameter of above-mentioned cover of heater 31 and heating source 32 about equally.For cover of heater 31 being contacted with heater stand 41 and engaging, the bore of setting cover of heater 31 and heater stand 41 about equally.In addition, it is bigger slightly than the internal diameter of heater stand 41 to set the external diameter of heating source 32 cylindraceous.And, the external diameter of heater retainer 46 for can insert be set in the heater stand 41 with the internal diameter of heater stand 41 about equally.
When assembling such burning heater, by heater stand 41 is inserted in the bottom of heating source 32, screw 39 on the extension 38 that is arranged on heating source 32 is coincide with the screw 42 that is arranged on heater stand 41 tops, and on these screws 42,39 that coincide, be screwed into screw 44 and fastening, heating source 32 is installed on the heater stand 41.
In addition, heater stand 41 is inserted on the top of heater retainer 46, screw 43 that is arranged on heater stand 41 bottoms and the screw that is arranged on heater retainer 46 tops 47 are coincide, by on the screw 43,47 of these joints, being screwed into screw 44 and fastening, heater retainer 46 is installed on the heater stand 41.
Like this, be situated between by heater stand 41 with heater retainer 46 linearities be connected on the heating source 32, then cover of heater 31 is covered on heating source 32.Cover the cover of heater 31 of heating source 32 and descend along heating source 32, be fastened on the upper end open portion of heater stand 41 owing to conduct oneself with dignity.The periphery that contains the top of heating source 32 is thus covered by heater lid 31, the influence of the water droplet that protection heating wire 34 produces when not burnt and the thermal source of combustion flame.
Fig. 2 represents that the assembling of burning heater finishes figure.The lead 48,49 of heating source 32 and thermocouple is drawn from the lower ending opening of heater retainer 46 through the space in heater stand 41 and the heater retainer 46 from heating source 32.
Fig. 3 has represented to assemble the exhaust burning device of above-mentioned burning heater, and Fig. 3 (a) is a profile, and Fig. 3 (b) is the major part enlarged drawing.Exhaust burning device mainly has: combustion container 51, and it forms the combustion chamber 52 that burning has the exhaust of imflammable gas; Burning heater 30, it is arranged in the combustion chamber 52, emits to be used to the heat that makes imflammable gas light and burn; Temperature controller 65, it is as the control part according to detected temperatures control burning heater 30.
Combustion container 51 is made of the hear resistance parts of for example stainless steel etc., and lights/burn imflammable gas by becoming in the combustion chamber 52 of inside.52 bottoms are provided with gas introduction port 53 in the combustion chamber.Imflammable gas ingress pipe 58 inserts in the combustion chamber 52 from this air introducing port 53.One end of imflammable gas ingress pipe 58 curves L shaped up, front end inserts in the combustion chamber 52 from gas introduction port 53, the other end of imflammable gas ingress pipe 58 is connected with the exhaust outlet of not shown semiconductor-fabricating device, and the exhaust that contains imflammable gas of discharging from semiconductor-fabricating device imports in the combustion chamber 52.At this,, enumerate hydrogen H as the imflammable gas of discharging from semiconductor-fabricating device
2
For install combustion heater 30, with L shaped corner part with T shape pipe arrangement 59 formation imflammable gas ingress pipes 58 of being responsible for 59a and arm 59b.The end of the person in charge 59a of T shape pipe arrangement 59 is connected with the leading section of imflammable gas ingress pipe 58, and the open other end of being responsible for 59a is connected the arm 59b of T shape pipe arrangement 59 with the base end part of imflammable gas ingress pipe 58.
Be provided with discharge duct 55 on the position corresponding with the gas introduction port 53 on 52 tops, combustion chamber, the gases that will contain in the combustion chamber 52 of exhaust of the imflammable gas that burnt are discharged in atmosphere.In addition, be provided with a plurality of air inlet ports 54 in the periphery of the gas introduction port 53 of 52 bottoms, combustion chamber that imflammable gas ingress pipe 58 inserts, atmosphere (air) enters in the combustion chamber 52 from the outside of combustion chamber 52.
The top of gas introduction port 53 that is arranged on the bottom of combustion chamber 52 is equipped with above-mentioned burning heater 30 perpendicular to axis.Its installation method is that burning heater 30 is packed in the combustion chamber 52, the heater retainer 46 of the bottom of formation burning heater 30 inserts in the imflammable gas ingress pipe 58 from the leading section of imflammable gas ingress pipe 58, connect the person in charge 59a of T shape pipe arrangement 59, take out from the other end of the opening of the person in charge 59a lower end of heater retainer 46.Lower end at this heater retainer 46 that takes out is provided with flange 68, blocks the lower ending opening of the person in charge 59a of T shape pipe arrangement 59, and by in the O shape ring 61 sealing T shape pipe arrangements 59.
Like this, 52 the bottom center install combustion heater 30 in the combustion chamber surrounds the heating source 32 of burning heater 30 then, and heater housing 56 is installed coaxially.This heater housing 56 is made of the cylinder of pottery system, has the unsettled function of combustion flame of preventing 62 and efficiency of combustion.Heater housing 56 is connected with the export mouth of the imflammable gas ingress pipe 8 that 52 the gas introduction port 53 from the combustion chamber inserts.The connection bore of imflammable gas ingress pipe 58 is made as for example NW25, and embeds the step groove 45 that is connected export mouth by the introducing port with the hollow of heater housing 56.The holding section is screwed by screw 62a, thus heater housing 56 is fixed on the imflammable gas ingress pipe 8.
Form the gas passage 60 that imflammable gas flows at heater housing 56 with by the gap of the burning heater 30 of heater lid 31 coverings.
In addition, the space between burning heater in combustion chamber 52 30 and the discharge duct 55 is provided with the cooling tube cylindraceous 57 that covers combustion flame 62.On this cylindric cooling tube 57 not shown water-cooled big envelope is set, the imflammable gas that cooling cooling tube 57 internal combustion are crossed is to low temperature.Emit the atmosphere from discharge duct 55 by the gas that will cool off like this and do not influence atmospheric environment.
In addition, two leads 48 and the lead 49 that stretch out from the lower end of heater retainer 46 are connected with the temperature controller 65 that is arranged on 52 outsides, combustion chamber.Temperature controller 65 is controlled the electric power that provides to heating wire 34 according to the detected temperatures of thermocouple 35, makes the temperature of heating source 32 form design temperature.By the design temperature of the heating source 32 of temperature controller 65 control in 650～1200 ℃ scope for well.Imperfect combustion when not reaching 650 ℃, H
2With O
2Do not react.Therefore, 650 ℃ is minimum temperature.In addition, be difficult to realize producing the thermal source of the temperature that surpasses 1200 ℃ and bearing the chamber structure of this temperature.Therefore, the maximum temperature of using on the structure is 1200 ℃.
The below action of this exhaust combusting room device of explanation.
By being connected the not shown exhaust equipment on the discharge duct 55, attract the gas in the combustion chamber 52 to make it through discharge duct 55, from the air inlet port 45 that is arranged on 52 bottoms, combustion chamber atmosphere is sucked in the combustion chamber 52, flow in the combustion chamber 52 of being everlasting during air.
Electric current flows in the heating wire 34 of heating source 32, by the control of temperature controller 65, the heating source 32 of heating source 30 is heated to above-mentioned design temperature.Heating-up temperature is set to make from imflammable gas ingress pipe 58 imports and the imflammable gas that mixes with atmosphere does not need hydrogen etc. to light the sufficient temperature that gas just can directly be lighted.
After burning heater 30 heating, open the valve (not shown) of imflammable gas ingress pipe 58, the exhaust outlet and the imflammable gas ingress pipe 58 that are communicated with not shown semiconductor-fabricating device will import imflammable gas ingress pipe 58 from the exhaust that semiconductor-fabricating device is discharged.Imflammable gas is flowed through and is arranged on the gas passage 60 in heating source 32 outsides, and the exhaust that contains this imflammable gas is mixing with air inlet port 54 leaked-in airs that 52 bottoms from the combustion chamber are provided with as the top of the burning heater 30 of the outlet of gas passage 60 and combustion reaction taking place, light and burn.When imflammable gas passes through gas passage 60, obtain heat energy by burning heater 30 and reach ignition temperature by temperature controller 65 controls.Therefore, no longer need special igniter, and in the flammability gas generation combustion reaction of the top of burning heater 30, light and burn.And, cover burning heater 30 by heater housing 56, when imflammable gas is flowed through in the gas passage 60 that forms between these parts, because fully heat imflammable gas by burning heater 30, so when even oxygen is superfluous in the air in the combustion chamber 52, even but the low also efficient burning of the imflammable gas concentration that contains in the exhaust.
Particularly be provided with heater housing 56 because of periphery at burning heater 30, even so the suction pressure of gas pipeline 55 when change, combustion flame does not shake yet, and efficiency of combustion was also stable when the imflammable gas concentration that contains in the exhaust was low, also can efficient burning when low concentration.
Specifically, Fig. 6 represents to use burning heater, the electric spark of conventional example, the metal heater of the embodiment imflammable gas H that relatively burns
2With inactive gas N
2Mist the time the efficiency of combustion data, the untreatment data when also expression is used for not the burning of reference.Transverse axis is represented to import the hydrogen (H that direction flows from imflammable gas ingress pipe 58 to imflammable gas
2) and nitrogen (N
2) mixing ratio (H
2/ (H
2+ N
2) %), the longitudinal axis is illustrated in the H of 55 measurements of discharge duct
2Residual concentration (ppm).
At this, the condition when present embodiment is obtained Fig. 6 data is:
The gap of burning heater and heater housing: 6mm
Burning heater total length: 150mm
Design temperature: 900 ℃
The imflammable gas H of exhaust
2With inactive gas N
2Mixed gas flow: 90L/min.
And the temperature of setting thermal source in electric spark, the metal heater is 900 ℃.
When using electric spark, because fully burning in the mist of mixing ratio more than 25%, so H
2Residual concentration is low; When the low mixing ratio that does not reach 25%, so because unburned ratio height H
2The residual concentration height, and intactly unburned gas is discharged from discharge duct 55.Therefore, low concentration H
2Low, the poor stability of efficiency of combustion.
In addition, when using metal heater, because fully burning in the mist of mixing ratio more than 20%, so H
2Residual concentration is low, when the low mixing ratio that does not reach 20%, so because unburned ratio height H
2The residual concentration height, and so unburned gas is discharged from discharge duct 55.Therefore, low concentration H
2Low, the poor stability of efficiency of combustion.
Yet, when using the burning heater of embodiment, H
2The maximum of residual concentration is near mixing ratio 10%, but efficient burning.H
2The maximum of residual concentration is 1000ppm when the electric spark formula, is 700ppm when metal heater, and burning heater 400ppm is reduced to 2/5～4/7 and efficiency of combustion significantly improves than existing thermal source.Therefore, solved low concentration H
2Efficiency of combustion and the problem of security aspect.
According to the above embodiments, heating imflammable gas in by the gas passage 60 of heating source 32 high temperature heating, 60 outlet mixes with air and burns in the gas passage, so do not need to use the ignition installation of the combustion-supporting gas of hydrogen etc., can directly light and burning and gas-exhausting in the imflammable gas that contains.Therefore, because do not need combustion-supporting gas and ignition installation beyond the atmosphere, so simplification device structure significantly.
In addition, because heating wire 34 is wound on the periphery of heating wire retainer 33,, can make burning heater 30 miniaturizations so compare during with interior week of heating wire 34 being wound on heating wire retainer 33.And, because heating wire 34 is wound on heating wire retainer 33 peripheries, so carry out operating winding easily.Because heating wire 34 is wound in the helicla flute 45 that heating wire retainer 33 peripheries are provided with, so heating wire 34 can not expose in the periphery of heating wire retainer 34.And, because cover the periphery of heating wire retainers 33, so can further protect heating wire 34 and can effectively keep temperature by the heating wire retainer 33 of heating wire 34 heating by cover of heater 31.Because can make the gas passage 60 of imflammable gas between heating wire retainer 33 and heater housing 56 be warming up to firing temperature, so the top of the cover of heater 31 that mixes with air or oxygen at heated imflammable gas can be lighted, imflammable gas burns reliably.
And, in an embodiment, because on the heating wire retainer of heating source 32, use pottery, so can realize high electric insulation and can effectively prevent electric leakage.In addition, because covering the high quartz of the property of softening that uses on the heater housing 56 of heating source 32 than pottery,, can more effective protection heating wire be subjected to the influence of water droplet and combustion flame so cover of heater is difficult for cracking and the crack.
Use quartzy and ceramic as the material that constitutes cover of heater 31 and heating wire retainer 33; thereby cover of heater 31 and heating wire retainer 33 internal and external peripheral walls that burning causes are difficult for deterioration; and because heating wire 34 does not directly expose from combustion flame 62 and internal environment, so in the reaction heat that burning causes, can effectively protect heating wire 34 yet.
In addition, the imflammable gas that burnt is by cooling tube 57 cooling and form the steam shape, contacts with cooling tube 57 internal faces and forms water droplet, and owing to the shakiness of pressure at expulsion is dispersed, water droplet falls and contacts on cover of heater 31.Although because the surface temperature of the contact heater of this water droplet lid 31 sharply changes; but because the material of cover of heater 31 is quartzy; so prevent the crackle that produces when picture uses pottery or crack etc., the heating wire 34 that can effectively protect cover of heater 31 inside is in case the influence of water droplet and break and leak electricity.
And, because can easily cover of heater 31 be taken out from heating source 32, so keep in repair easily.Particularly when heating wire 6 broken strings, need not change burning heater 30 integral body, only need to take out cover of heater 31, just can easily keep in repair at the new heating wire 34 of heating wire retainer 33 peripheries coiling from heating source 32.
Specifically, being treated to during heating wire 34 broken string: take out by flange 68 and be fixed on burning heater 30 on the T shape pipe arrangement 59 of imflammable gas ingress pipe 58.And, cover of heater 31 moves along heating source 32 tops and takes out from heating source 32, and with the heating wire 34 of broken string from the helicla flute 45 of heating source 32 take out and on the helicla flute 45 of heating source 32 the new heating wire 34 of package, cover of heater 31 is installed is also covered heating source 32 tops.Form burning heater 30 if on heating source 32, cover cover of heater 31, then it can be installed on the T shape pipe arrangement 59 of imflammable gas ingress pipe 58.Like this, can carry out in imflammable gas ingress pipe 58, taking out or the install combustion heater by once-through operation, perhaps cover of heater 31 can be taken out from heating source 32 or installs, so can easily and carry out the broken string replacing operation of heating wire 34 simply, maintenance becomes easy.
In addition, use the ceramic burner heater of such hollow in order to keep the disconnected hot little heater shape that forms.Because heating wire 34 is wound on periphery, so it is so not thick to the thickness of 35 cylinder-shaped ceramic material that electric heating is set yet.Thus, can avoid burner to maximize, can make the cost increase that the space dwindles and prevent to be provided with the clean room of semiconductor-fabricating device is set.
Because at imflammable gas ingress pipe 58 inner install combustion heaters 30, externally lead 48,49 is taken out from imflammable gas ingress pipe 58, so compare with the situation of opening, can keep in repair easily with special-purpose lead taking-up is set in combustion chamber 52.
And, when being installed in ceramic heater in the combustion chamber 52, only the heater retainer 46 of tubular heating source 32 being fixed on the T shape pipe arrangement 59 that is installed on imflammable gas ingress pipe 58 and getting final product by flange 68, its installation also is easy to.
In addition, the degree of depth and the groove number of the groove 45 by changing heating source 32, according to the diameter of heating wire 34 with winding number and applicable to the burning of the different various exhausts of condition.
At this, the size of each parts that constitutes burning heater is described.Because the minimum diameter dimension that can make on the structure of burning heater 30 is 10mm, 20mm during structural greatest diametrical dimension when using the burning heater 30 of embodiment is so the diameter dimension of burning heater 30 is 10～20mm.In addition, with imflammable gas maximum stream flow and the related efficiency of combustion of burning heater diameter dimension, when being 30～300mm, the total length of burning heater can obtain the most effective performance.
With imflammable gas maximum stream flow and the related efficiency of combustion of burning heater diameter dimension, be the total length of 2～20mm, heater housing when being 30～300mm at the interval of heater housing 56 and burner 30 (width of gas passage 60), can obtain the most effective performance.The mixed traffic of imflammable gas and incombustibility gas is used under 5～200L/min.
In addition, will be set at 650～1000 ℃ by the temperature of temperature controller 65 controls.
In embodiments of the present invention, heating source 32 be shaped as cylindrical shape, but be not limited to this shape, for example can be polygons such as hexagon or octagon.In addition, in an embodiment, 52 bottom is provided with air inlet port 54 in the combustion chamber, also can be in the combustion chamber bottom and peripheral part two sides of 52 peripheral parts or combustion chamber 1 all be provided with.Also when peripheral part is provided with, the air inlet port that is arranged on peripheral part can be arranged on the position at corresponding burning heater top.
In addition, in an embodiment, airport is not set on heater housing, airport can be set on heater housing yet.So, imflammable gas is mixed in air flue with air and burn.Oxygen concentration is not enough to the burning heater top burning in the high combustion chamber of oxygen concentration that the high imflammable gas of clean-burning hydrogen concentration can be in the gas passage from the air capacity that airport imports.
Claims (6)
1. burning heater, it lights/burns imflammable gas, it is characterized in that, comprising:
Heating source, its tubular heating wire retainer by pottery system constitutes with the heating wire that is wound on this heating wire retainer periphery;
The tubular cover of heater of quartzy system, it can freely cover described heating source with dismantling,
Described imflammable gas can be lighted/be burnt in the outside at the lid that is heated by described heating source.
2. burning heater as claimed in claim 1, it comprises:
Temperature detection sensor, it detects the temperature of described heating source;
Tubular heater retainer, the heating source that its supporting is covered by described cover of heater is inserted simultaneously and is connected with each lead that is connected with temperature detection sensor with described heating wire;
The tubular heater stand of high-insulativity, it is arranged between described tubular heater retainer and the described heating source, and linearity connects described heating source and described heater retainer.
3. burning heater as claimed in claim 2, the bore of described cover of heater and described heater stand about equally, described heating source at least lower outer diameter and described heater stand internal diameter about equally, described heater retainer at least top external diameter and described heater stand internal diameter about equally, the bottom landfill of described heating source is connected on the described heater stand on the top of described heater stand and by connector, the top landfill of described heater retainer is connected on the described heater stand in the bottom of described heater stand and by described connector, and the described cover of heater that covers described heating source is fastened on the upper, open end of described heater stand.
4. exhaust burning device comprises:
The combustion chamber, it lights/imflammable gas that contains in the burning and gas-exhausting;
Gas introduction port, it is arranged on the bottom of described combustion chamber;
The air inlet port, it makes air enter described combustion chamber;
Exhaust outlet, it is arranged on the position relative with described gas introduction port, top, described combustion chamber and with described burning indoor gas and discharges;
The imflammable gas ingress pipe, it bends to L shaped, and leading section inserts in the described combustion chamber from described gas introduction port, and described exhaust imports from the base end part side;
The heater housing of tubular, its leading section with described imflammable gas ingress pipe is connected;
The described burning heater of claim 2 or claim 3, it is guaranteed the gas passage and inserts coaxially and be fixed in the described heater housing, the imflammable gas that heating is supplied with from described gas passage is lighted heated imflammable gas simultaneously and is produced combustion flame with the Air mixing gas that enters from described air inlet port;
T shape pipe arrangement, it constitutes the L shaped corner part of described imflammable gas ingress pipe, the end that described T shape pipe arrangement is responsible for is connected with the leading section of described imflammable gas ingress pipe, the open described person in charge's the other end is connected the arm of described T shape pipe arrangement with the base end part side of described imflammable gas ingress pipe;
Temperature controller, it leads to outside heating wire with heater retainer from described burning heater and each lead of thermocouple is connected, and control is to the electric power of described heating wire supply, so that reach set point of temperature by the detected temperature of temperature detection sensor,
By the heater retainer of described burning heater is inserted and connects the person in charge of described T shape pipe arrangement from the leading section of imflammable gas ingress pipe, the airtight other end that is fixed on the described person in charge's opening in heater retainer lower end that will externally take out from the other end of the described person in charge's opening, thus guarantee described gas passage and described burning heater inserted be fixed in the described heater housing.
5. exhaust burning device as claimed in claim 4, it is characterized in that, 2～the 20mm that is spaced apart of described heater housing and the cover of heater that covers described heater source, the total length of described heater housing or described heating source is 30～300mm, the diameter of described cover of heater is 10～20mm.
6. as claim 4 or 5 described exhaust burning devices, it is characterized in that described heating source and described heater stand are the pottery systems, described cover of heater is quartzy system, and setting is 650～1200 ℃ by the temperature of the heating source of described heating wire heating.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003394449A JP3853781B2 (en) | 2003-11-25 | 2003-11-25 | Combustion heater and exhaust gas combustion apparatus |
| JP394449/2003 | 2003-11-25 | ||
| JP394449/03 | 2003-11-25 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2007101850840A Division CN101220958B (en) | 2003-11-25 | 2004-11-25 | Combustion heater and exhaust gas combustion device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1641265A true CN1641265A (en) | 2005-07-20 |
| CN100357664C CN100357664C (en) | 2007-12-26 |
Family
ID=34720513
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2007101850840A Active CN101220958B (en) | 2003-11-25 | 2004-11-25 | Combustion heater and exhaust gas combustion device |
| CNB2004100962347A Active CN100357664C (en) | 2003-11-25 | 2004-11-25 | Burning heater and exhaust burning device |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2007101850840A Active CN101220958B (en) | 2003-11-25 | 2004-11-25 | Combustion heater and exhaust gas combustion device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP3853781B2 (en) |
| KR (2) | KR100682709B1 (en) |
| CN (2) | CN101220958B (en) |
| TW (1) | TWI278590B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115007085A (en) * | 2022-08-04 | 2022-09-06 | 江苏铧德氢能源科技有限公司 | Gas distributor in hydrogen production plant |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102914617B (en) * | 2012-10-16 | 2015-01-07 | 上海天科化工检测有限公司 | Portable screening device for combustion danger of solid-liquid materials |
| CN103075725B (en) * | 2013-02-01 | 2015-02-25 | 浙江特富锅炉有限公司 | Chemical waste gas boiler furnace for combustion |
| CN103591592B (en) * | 2013-10-25 | 2016-04-27 | 包秀敏 | Based on the burned waste gas device of hydrogen and oxygen |
| KR102368562B1 (en) * | 2020-02-11 | 2022-02-28 | 주식회사 포스코 | Gas testing apparatus and method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5657855A (en) * | 1979-10-16 | 1981-05-20 | Aisin Chem Co Ltd | Thick coating paint |
| FR2591509B1 (en) * | 1985-12-17 | 1989-10-27 | Labo Electronique Physique | ANTI-POLLUTION DEVICE FOR THE ELIMINATION OF TOXIC GASES USED IN THE DEVELOPMENT OF GROUP III-V SEMICONDUCTOR MATERIALS. |
| EP0410151A1 (en) * | 1989-07-28 | 1991-01-30 | Heraeus Quarzglas GmbH | Infrared radiator with electrical heating coil |
| JPH05240028A (en) * | 1992-02-28 | 1993-09-17 | Asahi Glass Co Ltd | Electric sheath heater and diesel engine particulate trap for incorporating it |
| JP3016690B2 (en) * | 1994-05-30 | 2000-03-06 | カンケンテクノ株式会社 | Semiconductor manufacturing exhaust gas abatement method and apparatus |
| DE4436908A1 (en) * | 1994-10-15 | 1996-04-18 | Philips Patentverwaltung | Nozzle for a combustion device |
| JPH10162850A (en) * | 1996-11-27 | 1998-06-19 | Sanyo Electric Co Ltd | Fuel cell unconverted gas combustion processing device |
| GB9719512D0 (en) * | 1997-09-12 | 1997-11-19 | Boc Group Plc | Treatment of a combustible gas stream |
| JP2002162296A (en) * | 2000-11-27 | 2002-06-07 | Nippon Dennetsu Co Ltd | Heater with temperature detection sensor |
| KR100399793B1 (en) * | 2001-11-22 | 2003-09-29 | (주) 윈테크 | method for burning hydrogen gas and system for performing the same |
| JP4810227B2 (en) * | 2005-12-28 | 2011-11-09 | シャープ株式会社 | Method for insert molding a cabinet of an electronic device and an electronic device having a cabinet covered with a cloth cover |
-
2003
- 2003-11-25 JP JP2003394449A patent/JP3853781B2/en not_active Expired - Lifetime
-
2004
- 2004-11-17 TW TW093135173A patent/TWI278590B/en active
- 2004-11-24 KR KR1020040097040A patent/KR100682709B1/en active IP Right Grant
- 2004-11-25 CN CN2007101850840A patent/CN101220958B/en active Active
- 2004-11-25 CN CNB2004100962347A patent/CN100357664C/en active Active
-
2006
- 2006-10-30 KR KR1020060105711A patent/KR100830029B1/en active IP Right Grant
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115007085A (en) * | 2022-08-04 | 2022-09-06 | 江苏铧德氢能源科技有限公司 | Gas distributor in hydrogen production plant |
| CN115007085B (en) * | 2022-08-04 | 2022-12-02 | 江苏铧德氢能源科技有限公司 | Gas distributor in hydrogen production plant |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101220958A (en) | 2008-07-16 |
| KR100682709B1 (en) | 2007-02-15 |
| KR100830029B1 (en) | 2008-05-15 |
| TWI278590B (en) | 2007-04-11 |
| KR20060127821A (en) | 2006-12-13 |
| CN101220958B (en) | 2011-06-01 |
| TW200526903A (en) | 2005-08-16 |
| CN100357664C (en) | 2007-12-26 |
| JP2005156007A (en) | 2005-06-16 |
| JP3853781B2 (en) | 2006-12-06 |
| KR20050050576A (en) | 2005-05-31 |
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Effective date of registration: 20150922 Address after: Tokyo, Japan, Japan Patentee after: Hitachi Kunisai Electric Corp. Address before: Tokyo, Japan, Japan Patentee before: International Electric Semiconductor Tech. Service |
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Effective date of registration: 20190912 Address after: Tokyo, Japan, Japan Patentee after: International Electric Co., Ltd. Address before: Tokyo, Japan, Japan Patentee before: Hitachi Kunisai Electric Corp. |
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