TWI682127B - Radiant burner - Google Patents

Radiant burner Download PDF

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Publication number
TWI682127B
TWI682127B TW104134431A TW104134431A TWI682127B TW I682127 B TWI682127 B TW I682127B TW 104134431 A TW104134431 A TW 104134431A TW 104134431 A TW104134431 A TW 104134431A TW I682127 B TWI682127 B TW I682127B
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TW
Taiwan
Prior art keywords
radiant burner
sintered metal
metal fiber
sleeve
burner
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Application number
TW104134431A
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Chinese (zh)
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TW201623880A (en
Inventor
安德魯 詹姆斯 希利
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英商愛德華有限公司
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Priority to GB1421131.2A priority Critical patent/GB2532776A/en
Priority to GB1421131.2 priority
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Publication of TW201623880A publication Critical patent/TW201623880A/en
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Publication of TWI682127B publication Critical patent/TWI682127B/en

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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23DBURNERS
    • F23D14/00Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
    • F23D14/12Radiant burners
    • F23D14/16Radiant burners using permeable blocks
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23GCREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/065Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23DBURNERS
    • F23D14/00Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
    • F23D14/12Radiant burners
    • F23D14/14Radiant burners using screens or perforated plates
    • F23D14/145Radiant burners using screens or perforated plates combustion being stabilised at a screen or a perforated plate
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23NREGULATING OR CONTROLLING COMBUSTION
    • F23N1/00Regulating fuel supply
    • F23N1/02Regulating fuel supply conjointly with air supply
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23NREGULATING OR CONTROLLING COMBUSTION
    • F23N1/00Regulating fuel supply
    • F23N1/02Regulating fuel supply conjointly with air supply
    • F23N1/022Regulating fuel supply conjointly with air supply using electronic means
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23NREGULATING OR CONTROLLING COMBUSTION
    • F23N5/00Systems for controlling combustion
    • F23N5/02Systems for controlling combustion using devices responsive to thermal changes or to thermal expansion of a medium
    • F23N5/022Systems for controlling combustion using devices responsive to thermal changes or to thermal expansion of a medium using electronic means
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23DBURNERS
    • F23D2203/00Gaseous fuel burners
    • F23D2203/10Flame diffusing means
    • F23D2203/101Flame diffusing means characterised by surface shape
    • F23D2203/1012Flame diffusing means characterised by surface shape tubular
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23DBURNERS
    • F23D2203/00Gaseous fuel burners
    • F23D2203/10Flame diffusing means
    • F23D2203/105Porous plates
    • F23D2203/1055Porous plates with a specific void range
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23DBURNERS
    • F23D2203/00Gaseous fuel burners
    • F23D2203/10Flame diffusing means
    • F23D2203/106Assemblies of different layers
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23DBURNERS
    • F23D2212/00Burner material specifications
    • F23D2212/10Burner material specifications ceramic
    • F23D2212/103Fibres
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23DBURNERS
    • F23D2212/00Burner material specifications
    • F23D2212/20Burner material specifications metallic
    • F23D2212/201Fibres
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23GCREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2207/00Control
    • F23G2207/10Arrangement of sensing devices
    • F23G2207/101Arrangement of sensing devices for temperature
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23GCREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2209/00Specific waste
    • F23G2209/14Gaseous waste or fumes
    • F23G2209/142Halogen gases, e.g. silane
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23GCREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2900/00Special features of, or arrangements for incinerators
    • F23G2900/50007Co-combustion of two or more kinds of waste, separately fed into the furnace
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23NREGULATING OR CONTROLLING COMBUSTION
    • F23N2225/00Measuring
    • F23N2225/08Measuring temperature
    • F23N2225/16Measuring temperature burner temperature
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23NREGULATING OR CONTROLLING COMBUSTION
    • F23N2237/00Controlling
    • F23N2237/08Controlling two or more different types of fuel simultaneously

Abstract

A radiant burner and method are disclosed. The radiant burner is for treating an effluent gas stream from a manufacturing process tool, the radiant burner comprises: a sintered metal fibre sleeve through which combustion materials pass for combustion proximate to an inner combustion surface of the sintered metal fibre sleeve; and an insulating sleeve surrounding the sintered metal fibre sleeve and through which the combustion materials pass. In this way, a radiant burner is provided which does not crack due to rapid cycling caused by frequent idle steps during which the burner is extinguished. Also, by providing an insulating sleeve, the temperature within the radiant burner and the temperature of an outer surface of the radiant burner remain comparable with existing ceramic burners. This enables the radiant burner to be substituted in place of existing ceramic burners as a line-replaceable unit which does not suffer from cracking during such frequent and short-duration periods of process tool inactivity.

Description

輻射燃燒器 Radiation burner

本發明係關於一種輻射燃燒器及方法。 The invention relates to a radiant burner and method.

輻射燃燒器為吾人所知且通常用於處理來自用於(例如)半導體或平板顯示器製造產業中之一製造程序工具之一廢氣流。在此製造期間,殘餘全氟化合物(PFC)及其他化合物存在於自該程序工具泵送之廢氣流中。PFC難以自廢氣移除且將其等釋放到環境中係非所要的,此係因為已知其等具有相對高的溫室效應。 Radiation burners are known to us and are commonly used to treat an exhaust stream from one of the manufacturing process tools used in, for example, the semiconductor or flat panel display manufacturing industry. During this manufacturing period, residual perfluorinated compounds (PFC) and other compounds are present in the exhaust stream pumped from the process tool. It is difficult for PFC to be removed from exhaust gas and release them into the environment, which is undesirable because they are known to have a relatively high greenhouse effect.

已知的輻射燃燒器使用燃燒以自廢氣流移除PFC及其他化合物。通常,廢氣流為含有PFC及其他化合物之一氮氣流。一燃料氣體與廢氣流混合且該氣流混合物被輸送至由一多孔氣體燃燒器之出口表面橫向包圍之一燃燒室中。燃料氣體與空氣被同時供應至該多孔燃燒器以影響出口表面處之無焰燃燒,其中通過該多孔燃燒器之空氣量不僅足以消耗供應至該燃燒器之燃料氣體且亦消耗注射至該燃燒室中之氣流混合物中之全部可燃物。 Known radiant burners use combustion to remove PFC and other compounds from the exhaust gas stream. Generally, the waste gas stream is a nitrogen stream containing one of PFC and other compounds. A fuel gas is mixed with the exhaust gas flow and the gas flow mixture is delivered to a combustion chamber laterally surrounded by the outlet surface of a porous gas burner. Fuel gas and air are simultaneously supplied to the porous burner to affect flameless combustion at the outlet surface, wherein the amount of air passing through the porous burner is not only sufficient to consume the fuel gas supplied to the burner but also to inject into the combustion chamber All combustibles in the airflow mixture.

儘管存在用於處理廢氣流之技術,但其等各者具有其等自身之缺點。因此,期望提供一種用於處理一廢氣流之經改良技術。 Although there are technologies for treating exhaust gas streams, each of them has its own disadvantages. Therefore, it is desirable to provide an improved technique for treating an exhaust gas stream.

根據一第一態樣,提供一種用於處理來自一製造程序工具之一廢氣流之輻射燃燒器。該輻射燃燒器包括:一經燒結的金屬纖維套 管,燃燒材料通過其中以在接近該經燒結金屬纖維套管之一內燃燒表面處燃燒;及一絕緣套管,其包圍該經燒結金屬纖維套管且該燃燒材料通過該絕緣套管。 According to a first aspect, there is provided a radiant burner for treating an exhaust gas stream from a manufacturing process tool. The radiation burner includes: a sintered metal fiber sleeve A tube through which the burning material passes to burn near a combustion surface in one of the sintered metal fiber sleeves; and an insulating sleeve that surrounds the sintered metal fiber sleeve and the burning material passes through the insulating sleeve.

第一態樣認知到為了改良處理或消減廢氣流之能量效率,可期望在通常發生在處理閒置步驟期間之程序工具不活動週期期間熄滅輻射燃燒器。然而,第一態樣亦認知,此等閒置步驟可係頻繁的且具有短持續時間,且此急速循環可導致既有輻射燃燒器套管或襯套歸因於破裂而過早失效。 The first aspect recognizes that in order to improve the energy efficiency of the process or to reduce the exhaust gas flow, it may be desirable to extinguish the radiant burner during the period of inactivity of the process tool that typically occurs during the process idle step. However, the first aspect also recognizes that these idle steps can be frequent and have a short duration, and this rapid cycle can cause premature failure of the existing radiant burner sleeve or bushing due to rupture.

因此,可提供一種輻射燃燒器。該輻射燃燒器可處理或消減自一製造程序工具排放或排出之一廢氣流。該輻射燃燒器可包括可經燒結的一金屬纖維套管,燃燒材料可通過該金屬纖維套管以在接近或鄰近於該金屬纖維套管之一內燃燒表面處燃燒。該輻射燃燒器亦可包括一絕緣套管,該絕緣套管可包圍或至少部分地環繞該金屬纖維套管。燃燒材料亦可通過絕緣套管以抵達金屬纖維套管。以此方法提供一種輻射燃燒器,其在其熄滅期間不會歸因於由頻繁的閒置步驟所致之急速循環而破裂。此外,藉由提供一絕緣套管,輻射燃燒器內之溫度及輻射燃燒器之一外表面溫度保持與既有的陶瓷燃燒器相當。此使得輻射燃燒器能夠作為一現場可更換單元取代既有的陶瓷燃燒器,輻射燃燒器在程序工具不活動之此頻繁及短持續時間週期期間不會遭受破裂。 Therefore, a radiant burner can be provided. The radiant burner can treat or reduce a stream of exhaust gas discharged or discharged from a manufacturing process tool. The radiant burner may include a metal fiber sleeve that may be sintered, and the combustion material may pass through the metal fiber sleeve to burn at a combustion surface near or adjacent to one of the metal fiber sleeves. The radiant burner may also include an insulating sleeve, which may surround or at least partially surround the metal fiber sleeve. The burning material can also pass through the insulating sleeve to reach the metal fiber sleeve. In this way, a radiant burner is provided, which during its extinction will not be broken due to the rapid cycle caused by frequent idle steps. In addition, by providing an insulating sleeve, the temperature in the radiant burner and the temperature on the outer surface of one of the radiant burners are kept comparable to the existing ceramic burners. This allows the radiant burner to replace the existing ceramic burner as a field replaceable unit, and the radiant burner will not suffer from rupture during frequent and short duration periods of inactivity of the process tool.

在一項實施例中,該經燒結金屬纖維套管具有一80%至90%之孔隙率。 In one embodiment, the sintered metal fiber sleeve has a porosity of 80% to 90%.

在一項實施例中,該經燒結金屬纖維套管具有一150至300cc/min/cm2的透氣率。 In one embodiment, the sintered metal fiber sleeve has an air permeability of 150 to 300 cc/min/cm 2 .

在一項實施例中,該經燒結金屬纖維套管具有一690至1110kg/m3之密度。 In one embodiment, the sintered metal fiber sleeve has a density of 690 to 1110 kg/m 3 .

在一項實施例中,該絕緣套管係一陶瓷纖維敷層。 In one embodiment, the insulating sleeve is a ceramic fiber coating.

在一項實施例中,該絕緣套管具有一100至150Kg/m3之密度。 In one embodiment, the insulating sleeve has a density of 100 to 150 Kg/m 3 .

在一項實施例中,該絕緣套管具有隨著燃燒材料通過其中提供一40至60Pa之壓力降之密度。 In one embodiment, the insulating sleeve has a density that provides a pressure drop of 40 to 60 Pa as the burning material passes therethrough.

在一項實施例中,該經燒結金屬纖維套管被同軸地固持在該絕緣套管內。 In one embodiment, the sintered metal fiber sleeve is held coaxially within the insulating sleeve.

在一項實施例中,該輻射燃燒器包括可操作以固持該經燒結金屬纖維套管及該絕緣套管之一支撐件。 In one embodiment, the radiant burner includes a support operable to hold the sintered metal fiber sleeve and the insulating sleeve.

在一項實施例中,該絕緣套管被同軸地固持在支撐件內。 In one embodiment, the insulating sleeve is held coaxially within the support.

在一項實施例中,該經燒結金屬纖維套管包括一周向延伸之褶狀物。提供一褶狀物有助於適應經燒結金屬套管在不同溫度下之尺寸的變化。 In one embodiment, the sintered metal fiber sleeve includes circumferentially extending pleats. Providing a pleat helps to adapt to changes in the dimensions of the sintered metal sleeve at different temperatures.

在一項實施例中,該輻射燃燒器包括一溫度感測器,該溫度感測器與經燒結金屬纖維套管熱耦合且可操作以提供該經燒結金屬纖維套管之一溫度之一指示。因此,可提供該金屬纖維套管之溫度之一指示以便可建立該輻射燃燒器之操作溫度。 In one embodiment, the radiant burner includes a temperature sensor that is thermally coupled to the sintered metal fiber sleeve and is operable to provide an indication of a temperature of the sintered metal fiber sleeve . Therefore, an indication of the temperature of the metal fiber sleeve can be provided so that the operating temperature of the radiant burner can be established.

在一項實施例中,該溫度感測器與經燒結金屬纖維套管熱耦合於一外表面上。因此,可在由金屬纖維套管界定之一燃燒室外部提供一溫度感測器以便保護溫度感測器免於燃燒室內材料的影響。 In one embodiment, the temperature sensor and the sintered metal fiber sleeve are thermally coupled to an outer surface. Therefore, a temperature sensor can be provided outside a combustion chamber defined by the metal fiber sleeve in order to protect the temperature sensor from the materials in the combustion chamber.

在一項實施例中,該輻射燃燒器包括一源,該源可操作以用回應於溫度之選定的複數個混合比率之一者供應燃燒材料。因此,該等燃燒材料之混合比率可為了最佳化輻射燃燒器之操作條件及/或溫度而回應於溫度改變。 In one embodiment, the radiant burner includes a source operable to supply the burning material with one of a selected plurality of mixing ratios responsive to temperature. Therefore, the mixing ratio of these burning materials can be responded to temperature changes in order to optimize the operating conditions and/or temperature of the radiant burner.

在一項實施例中,該源可操作以在經燒結金屬纖維套管之溫度未能超過一操作溫度時以一實質上化學計量之混合比率供應燃燒材料。因此可為了改良輻射燃燒器之暖機時間而提供一化學計量的或燃 料富足的混合比率。 In one embodiment, the source is operable to supply the combustion material at a substantially stoichiometric mixing ratio when the temperature of the sintered metal fiber sleeve fails to exceed an operating temperature. Therefore, in order to improve the warm-up time of the radiant burner, a stoichiometric or Material rich mixing ratio.

在一項實施例中,該源可操作以在經燒結金屬纖維套管超過一操作溫度時以一實質上貧乏之混合比率供應燃燒材料。因此,一旦達到適當的操作條件,燃料含量即可降低。 In one embodiment, the source is operable to supply the combustion material at a substantially lean mixing ratio when the sintered metal fiber sleeve exceeds an operating temperature. Therefore, once the appropriate operating conditions are reached, the fuel content can be reduced.

根據一第二態樣,提供一種操作用於處理來自一製造程序工具之一廢氣流之一輻射燃燒器之方法,該方法包括:判定輻射燃燒器之一經燒結金屬纖維套管之一外表面溫度,燃燒材料通過該經燒結金屬纖維套管以在接近該經燒結金屬纖維套管之一內燃燒表面處燃燒;及以回應於溫度選定的複數個混合比率之一者供應燃燒材料。 According to a second aspect, a method of operating a radiant burner for processing an exhaust stream from a manufacturing process tool is provided, the method comprising: determining an outer surface temperature of a sintered metal fiber sleeve of a radiant burner , The burning material passes through the sintered metal fiber sleeve to burn near the combustion surface in one of the sintered metal fiber sleeves; and the burning material is supplied in one of a plurality of mixing ratios selected in response to the temperature.

在一項實施例中,該供應包括當經燒結金屬纖維套管之溫度未能超過一操作溫度時,以一實質上化學計量之混合比率供應燃燒材料。 In one embodiment, the supply includes supplying the combustion material at a substantially stoichiometric mixing ratio when the temperature of the sintered metal fiber sleeve fails to exceed an operating temperature.

在一項實施例中,該供應包括當經燒結金屬纖維套管之溫度超過一操作溫度時,以一實質上貧乏之混合比率供應燃燒材料。 In one embodiment, the supply includes supplying the combustion material at a substantially lean mixing ratio when the temperature of the sintered metal fiber sleeve exceeds an operating temperature.

在一項實施例中,該供應包括以實質上化學計量之混合比率供應燃燒材料持續一選定的時間週期。 In one embodiment, the supplying includes supplying the burning material at a substantially stoichiometric mixing ratio for a selected period of time.

在一項實施例中,該供應包括在該選定的時間週期逾時後,旋即以實質上貧乏之混合比率供應燃燒材料。 In one embodiment, the supplying includes supplying the combustion material at a substantially lean mixing ratio immediately after the selected time period expires.

在多項實施例中,該輻射燃燒器包括第一態樣之特徵。 In various embodiments, the radiant burner includes the features of the first aspect.

進一步特定及較佳態樣陳述於隨附獨立技術方案及附屬技術方案中。附屬技術方案之特徵可與獨立技術方案之特徵適當組合且以不同於技術方案中明確陳述之組合而組合。 Further specific and preferred aspects are stated in the accompanying independent technical solutions and subsidiary technical solutions. The features of the subsidiary technical solutions may be combined with the features of the independent technical solutions as appropriate and in different combinations than those explicitly stated in the technical solutions.

在一設備特徵被描述為可操作以提供一功能之情況下,應瞭解此包含提供該功能或經調適或組態以提供該功能之一設備特徵。 In the case where a device feature is described as operable to provide a function, it should be understood that this includes a device feature that provides the function or is adapted or configured to provide the function.

8‧‧‧輻射燃燒器 8‧‧‧radiation burner

10‧‧‧入口 10‧‧‧ entrance

12‧‧‧噴嘴 12‧‧‧ nozzle

14‧‧‧燃燒室 14‧‧‧combustion chamber

15‧‧‧排氣口 15‧‧‧Exhaust

16‧‧‧孔徑 16‧‧‧Aperture

18‧‧‧陶瓷頂板 18‧‧‧Ceramic top plate

20‧‧‧多孔燃燒器元件 20‧‧‧Porous burner components

21‧‧‧出口表面 21‧‧‧Export surface

22‧‧‧充氣容積 22‧‧‧Inflatable volume

23‧‧‧入口表面 23‧‧‧ Entrance surface

24‧‧‧外殼 24‧‧‧Housing

100‧‧‧經燒結金屬纖維薄板 100‧‧‧Sintered metal fiber sheet

105‧‧‧外表面 105‧‧‧Outer surface

110‧‧‧穿孔網板 110‧‧‧Perforated screen

120A‧‧‧凸緣 120A‧‧‧Flange

120B‧‧‧凸緣 120B‧‧‧Flange

130‧‧‧陶瓷纖維敷層 130‧‧‧Ceramic fiber coating

140‧‧‧熱電偶 140‧‧‧thermocouple

現將參考隨圖進一步描述本發明之實施例,其中: 圖1繪示根據一項實施例之一輻射燃燒器;及圖2更詳細地繪示圖1所示之多孔燃燒器襯管之配置。 An embodiment of the present invention will now be further described with reference to the accompanying drawings, in which: FIG. 1 shows a radiant burner according to an embodiment; and FIG. 2 shows the configuration of the porous burner liner shown in FIG. 1 in more detail.

在對實施例作出任何更詳細論述之前,首先將提供一概述。實施例提供一種輻射燃燒器,其特別地適於在一所謂的「綠色模式」中操作,在燃燒器在程序工具不活動週期期間(例如,在閒置步驟期間)被熄滅之情況下,此等週期可係頻繁的且具有短持續時間。輻射燃燒器襯管具有被一絕緣套管包圍之替代一典型的陶瓷輻射燃燒器襯管之一經燒結金屬纖維套管。該經燒結金屬纖維套管與絕緣套管之組合提供一種相較於既有的燃燒器可在幾乎相同的條件下操作且具有改良的效率之輻射燃燒器,然而其能夠抵抗歸因於熱循環的震動。此外,為了改良低溫下之輻射燃燒器之暖機時間,在正常的操作期間燃燒材料之混合物可在復原至貧乏條件之前經調整以使混合物富足。 Before making any more detailed discussion of the embodiments, an overview will first be provided. The embodiment provides a radiant burner, which is particularly suitable for operation in a so-called "green mode", in the case where the burner is extinguished during a period of inactivity of the program tool (eg, during an idle step), etc. The cycle may be frequent and have a short duration. The radiant burner liner has a sintered metal fiber sleeve surrounded by an insulating sleeve instead of a typical ceramic radiant burner liner. The combination of the sintered metal fiber sleeve and the insulating sleeve provides a radiant burner that can operate under almost the same conditions and has improved efficiency compared to existing burners, yet it is resistant to thermal cycling Shock. In addition, in order to improve the warm-up time of radiant burners at low temperatures, the mixture of burning materials during normal operation can be adjusted to enrich the mixture before returning to lean conditions.

輻射燃燒器--一般組態及操作 Radiation burner-general configuration and operation

圖1繪示根據一項實施例之一輻射燃燒器,整體以8表示。該輻射燃燒器8處理通常藉由一真空泵送系統自一製造程序工具(諸如一半導體或平板顯示器程序工具)泵送之一廢氣流。該廢氣流在入口10處接收。該廢氣流自入口10輸送至一噴嘴12,噴嘴12將廢氣流注射至一圓柱形燃燒室14。在此實施例中,輻射燃燒器8包括周向配置之四個入口10,該四個入口之各者輸送由一各自的真空泵送系統自一各自工具泵送之一廢氣流。替代地,來自一單個程序工具之廢氣流可被分離成複數個流,該複數個流之各者被輸送至一各自入口。各噴嘴12係定位於一各自孔徑16內,孔徑16係形成於界定燃燒室14之一上表面或入口表面之一陶瓷頂板18中。燃燒室14具有由一多孔燃燒器元件20之一出口表面21界定之側壁,該等側壁在圖2中示意性繪示及更詳細地展示。燃燒器元件20係圓柱形的,且固持在一圓柱形外殼24內。 FIG. 1 shows a radiant burner according to an embodiment, which is indicated by 8 as a whole. The radiant burner 8 processes an exhaust gas stream that is usually pumped from a manufacturing process tool (such as a semiconductor or flat panel display process tool) by a vacuum pumping system. This exhaust gas flow is received at the inlet 10. The exhaust gas flow is delivered from the inlet 10 to a nozzle 12 which injects the exhaust gas flow into a cylindrical combustion chamber 14. In this embodiment, the radiant burner 8 includes four inlets 10 arranged circumferentially, each of which delivers an exhaust gas flow pumped from a respective tool by a respective vacuum pumping system. Alternatively, the exhaust gas stream from a single process tool can be separated into a plurality of streams, each of which is delivered to a respective inlet. Each nozzle 12 is positioned within a respective aperture 16 formed in a ceramic top plate 18 defining an upper surface or inlet surface of the combustion chamber 14. The combustion chamber 14 has side walls defined by an outlet surface 21 of a porous burner element 20, which are schematically shown in FIG. 2 and shown in more detail. The burner element 20 is cylindrical and is held in a cylindrical housing 24.

在燃燒器元件20之一入口表面與圓柱形外殼24之間界定一充氣容積22。燃料氣體(諸如天然氣或一烴)與空氣之一混合物經由入口噴嘴被引入至充氣容積22中。燃料氣體與空氣之該混合物自燃燒器元件之入口表面23經過至燃燒器元件之出口表面21以在燃燒室14內燃燒。 An inflation volume 22 is defined between one of the inlet surfaces of the burner element 20 and the cylindrical housing 24. A mixture of fuel gas (such as natural gas or a hydrocarbon) and air is introduced into the inflation volume 22 via an inlet nozzle. This mixture of fuel gas and air passes from the inlet surface 23 of the burner element to the outlet surface 21 of the burner element for combustion in the combustion chamber 14.

改變燃料氣體與空氣之混合物之標稱比率以將燃燒室14內之標稱溫度改變至適用於待處理之廢氣流之溫度。此外,調整將燃料氣體與空氣之混合物引入至充氣容積22之速率使得該混合物將在燃燒器元件20之出口表面21處燃燒而沒有可見火焰。敞開燃燒室40之排氣口15以使燃燒產物能夠自輻射燃燒器8輸出。 The nominal ratio of the mixture of fuel gas and air is changed to change the nominal temperature in the combustion chamber 14 to a temperature suitable for the exhaust gas stream to be treated. In addition, the rate at which the mixture of fuel gas and air is introduced into the charge volume 22 is adjusted so that the mixture will burn at the outlet surface 21 of the burner element 20 without visible flames. The exhaust port 15 of the combustion chamber 40 is opened to enable combustion products to be output from the radiant burner 8.

因此,可見透過入口10接收且由噴嘴12提供至燃燒室14之廢氣在燃燒室14內燃燒,該燃燒室藉由在燃燒器元件之出口表面21附近燃燒之燃料氣體與空氣之一混合物予以加熱。此燃燒引起對腔室14之加熱且提供燃燒產物(諸如氧氣)至燃燒室14,該等燃燒產物之一標稱範圍通常為7.5%至10.5%,其取決於燃料空氣混合物(CH4、C3H8、C4H10)及燃燒器之表面燃燒率。熱及燃燒產物與燃燒室14內之廢氣流反應以淨化廢氣流。例如,可在廢氣流內提供SiH4及NH3,其等與燃燒室內之O2反應以生成SiO2、N2、H2O、NOX。類似地,可在廢氣流內提供N2、CH4、C2F6,其等與燃燒室內之O2反應以生成CO2、HF、H2O。 Therefore, it can be seen that the exhaust gas received through the inlet 10 and provided by the nozzle 12 to the combustion chamber 14 is combusted in the combustion chamber 14 which is heated by a mixture of fuel gas and air combusted near the outlet surface 21 of the burner element . This combustion causes heating of the chamber 14 and provides combustion products (such as oxygen) to the combustion chamber 14, one of these combustion products typically has a nominal range of 7.5% to 10.5%, which depends on the fuel-air mixture (CH 4 , C 3 H 8 , C 4 H 10 ) and the surface burning rate of the burner. The heat and combustion products react with the exhaust flow in the combustion chamber 14 to purify the exhaust flow. For example, SiH 4 and NH 3 can be provided in the exhaust gas stream, which react with O 2 in the combustion chamber to generate SiO 2 , N 2 , H 2 O, NO X. Similarly, N 2 , CH 4 , C 2 F 6 can be provided in the exhaust gas stream, which reacts with O 2 in the combustion chamber to generate CO 2 , HF, H 2 O.

多孔燃燒器襯管配置 Porous burner liner configuration

現參考多孔燃燒器襯管20之配置。其構造在圖2中更詳細地展示。在此配置中,多孔燃燒器襯管20藉由輥軋及縫焊一經燒結金屬纖維薄板100至一穿孔網板110而構造,該襯管被固持在凸緣120A與120B之間。 Reference is now made to the configuration of the porous burner liner 20. Its structure is shown in more detail in FIG. 2. In this configuration, the porous burner liner 20 is constructed by rolling and seam welding a sintered metal fiber sheet 100 to a perforated mesh 110, the liner being held between flanges 120A and 120B.

該經燒結金屬纖維薄板100可係任何適當的經燒結金屬纖維,諸 如由南韓FiberTech公司供應之SFF1-35或SFFE-30,或者由美國Micron Fiber-Tech公司供應之S-mat或D-mat。通常,此經燒結金屬纖維具有在80%與90%之間之一孔隙率、150至300cc/min/cm2之一透氣率,及約694至1111kg/m3之一薄板密度。 The sintered metal fiber sheet 100 may be any suitable sintered metal fiber, such as SFF1-35 or SFFE-30 supplied by FiberTech of South Korea, or S-mat or D-mat supplied by Micron Fiber-Tech of the United States. Generally, the sintered metal fiber has a porosity of between 80% and 90%, an air permeability of 150 to 300 cc/min/cm 2 , and a sheet density of about 694 to 1111 kg/m 3 .

現參考表1,已發現具有焊接至穿孔支撐件110之經燒結金屬纖維薄板之一多孔燃燒器襯管在與既有的陶瓷多孔燃燒器襯管相同的條件下操作。在此實例中,一內徑152.4mm(6英寸)乘以軸向長度304.8mm(12英寸)且具有一表面積145,931mm2(226平方英寸)之經燒結金屬纖維薄板(及另一實例具有下文提及之一陶瓷纖維敷層)之多孔燃燒器襯管在610slm空氣中使用36slm天然氣來燃燒,其提供約80kW/m2(50,000BTU/hr/ft2)之一表面燃燒率及9%之一殘餘氧氣濃度(如在不存在廢氣流時量測)。燃燒排放物在存在200 l/min氮氣之模擬廢氣流下被量測。如可見,當廢氣流隨後被引入時,燃燒排放物(經燒結金屬薄板/經燒結金屬纖維薄板+陶瓷纖維敷層)比既有的燃燒器(陶瓷)更好。 Referring now to Table 1, it has been found that one of the porous burner liners with sintered metal fiber sheets welded to the perforated support 110 operates under the same conditions as the existing ceramic porous burner liners. In this example, a sintered metal fiber sheet having an inner diameter of 152.4 mm (6 inches) times an axial length of 304.8 mm (12 inches) and having a surface area of 145,931 mm 2 (226 square inches) (and another example has the following One of the ceramic fiber coatings mentioned is a porous burner liner that uses 36 slm natural gas to burn in 610 slm air, which provides a surface burn rate of about 80 kW/m 2 (50,000 BTU/hr/ft 2 ) and a rate of 9% A residual oxygen concentration (as measured in the absence of exhaust gas flow). Combustion emissions are measured under simulated exhaust gas flow in the presence of 200 l/min nitrogen. As can be seen, when the exhaust gas stream is subsequently introduced, the combustion emissions (sintered metal sheet/sintered metal fiber sheet + ceramic fiber cladding) are better than existing burners (ceramics).

Figure 104134431-A0202-12-0007-1
Figure 104134431-A0202-12-0007-1

然而,此一配置在低溫下之暖機時間可為約15分鐘,此在一短的週期(舉例而言,諸如10秒鐘)後復原至貧乏條件之前藉由在化學計量的條件下點火以縮短至不到10秒鐘。 However, the warm-up time of this configuration at low temperature may be about 15 minutes, which is achieved by igniting under stoichiometric conditions before returning to a lean condition after a short period (for example, such as 10 seconds) Reduced to less than 10 seconds.

此外,經燒結金屬纖維薄板100之外表面105之穩態溫度高於一陶瓷多孔燃燒器襯管之外表面之穩態溫度(相較於不到50℃,高出 120至140℃)。此溫度升高比燃燒室14慢許多且同時使用此參數來直接控制富足的開始係不可能的,外表面105溫度可有利地用於抑制富足的開始功能。 In addition, the steady-state temperature of the outer surface 105 of the sintered metal fiber sheet 100 is higher than the steady-state temperature of the outer surface of a ceramic porous burner liner (compared to less than 50°C, which is higher than 120 to 140°C). This temperature rise is much slower than that of the combustion chamber 14 and it is impossible to directly control the start of abundance using this parameter at the same time, and the temperature of the outer surface 105 can be advantageously used to suppress the start of abundance function.

構造一個三組件結構,其包括一機械的外支撐件(舉例而言,諸如,該穿孔網板100及凸緣120A、120B)、一可透氣的陶瓷纖維敷層130及經燒結金屬纖維薄板100,此導致改良的效能,如在表2及表3中所示。在此實例中,一內徑為152.4mm(6英寸)、軸向長度為152.4mm(6英寸)且具有焊接至穿孔支撐件之表面積為72,965mm2(113平方英寸)之經燒結金屬纖維薄板(及另一實例具有陶瓷纖維敷層)之多孔燃燒器襯管在310slm空氣中使用19slm天然氣來燃燒,其提供9%之一剩餘氧氣濃度(如在不存在廢氣流時量測)。以具有200 l/min氮氣之模擬的廢氣流之部分測得三氟化氮之消減。如可見,燃燒排放物(裸金屬/絕緣金屬)在隨後廢氣流被引入時比既有的陶瓷燃燒器好。 Construct a three-component structure that includes a mechanical outer support (for example, such as the perforated mesh panel 100 and flanges 120A, 120B), a breathable ceramic fiber coating 130, and a sintered metal fiber sheet 100 This results in improved performance, as shown in Table 2 and Table 3. In this example, a sintered metal fiber sheet with an inner diameter of 152.4 mm (6 inches), an axial length of 152.4 mm (6 inches), and a surface area of 72,965 mm 2 (113 square inches) welded to the perforated support (And another example has a ceramic fiber coating) The porous burner liner is burned in 310 slm air using 19 slm natural gas, which provides a residual oxygen concentration of 9% (as measured in the absence of exhaust gas flow). The reduction of nitrogen trifluoride was measured in the part of the simulated exhaust gas flow with 200 l/min nitrogen. As can be seen, the combustion emissions (bare metal/insulated metal) are better than the existing ceramic burners when the exhaust gas stream is subsequently introduced.

Figure 104134431-A0202-12-0008-2
Figure 104134431-A0202-12-0008-2
表2Table 2

Figure 104134431-A0202-12-0009-3
Figure 104134431-A0202-12-0009-3

選取陶瓷纖維敷層130以便在表面流率與上文描述之表面燃燒率相等時具有一最小壓力降。通常在約6mm與12mm之間,且較佳10mm之市售的敷層材料諸如具有128kg/m3之密度之Isofrax 1260(硅酸鈣)或Saffil(氧化鋁)在40至60Pa壓力降範圍中、在0.1m/s之迎面速度下、在具有線性的壓力-流率關係下具有可接受的效能。此兩種材料皆可從Unifrax有限公司購得。 The ceramic fiber coating 130 is selected to have a minimum pressure drop when the surface flow rate is equal to the surface combustion rate described above. Commercially available coating materials, usually between about 6 mm and 12 mm, and preferably 10 mm, such as Isofrac 1260 (calcium silicate) or Saffil (alumina) with a density of 128 kg/m 3 in the pressure drop range of 40 to 60 Pa , Under the head-on speed of 0.1m/s, it has an acceptable performance under the linear pressure-flow rate relationship. Both materials are available from Unifrax Co., Ltd.

如圖2中所示,提供一熱電偶140,其與經燒結金屬纖維薄板100之外表面105熱耦合。熱電偶140或其他溫度感測器量測經燒結金屬纖維薄板100之溫度。當熱電偶140指示經燒結金屬纖維薄板100之溫度低於一臨限值時(其指示燃燒室14之操作溫度低於操作溫度),增加燃料對空氣的比率。當熱電偶140報告的溫度超過該臨限值時(其指示燃燒室14之操作溫度超過操作溫度),降低燃料對空氣的比率。 As shown in FIG. 2, a thermocouple 140 is provided, which is thermally coupled to the outer surface 105 of the sintered metal fiber sheet 100. The thermocouple 140 or other temperature sensor measures the temperature of the sintered metal fiber sheet 100. When the thermocouple 140 indicates that the temperature of the sintered metal fiber sheet 100 is below a threshold (which indicates that the operating temperature of the combustion chamber 14 is lower than the operating temperature), the fuel to air ratio is increased. When the temperature reported by thermocouple 140 exceeds this threshold (which indicates that the operating temperature of combustion chamber 14 exceeds the operating temperature), the fuel to air ratio is reduced.

應瞭解,雖然在此實施例中,一穿孔網板110及金屬凸緣120A、120B係用於提供機械支撐,但可提供用於固持經燒結金屬纖維薄板100及陶瓷纖維敷層130之其他配置。 It should be understood that although in this embodiment, a perforated mesh 110 and metal flanges 120A, 120B are used to provide mechanical support, other configurations for holding the sintered metal fiber sheet 100 and ceramic fiber coating 130 may be provided .

雖然未在圖2中繪示,但一周向褶狀物可提供於經燒結金屬纖維薄板100內以適應經燒結金屬纖維薄板100在不同溫度下長度的變化。 Although not shown in FIG. 2, the circumferential pleats may be provided in the sintered metal fiber sheet 100 to accommodate the change in length of the sintered metal fiber sheet 100 at different temperatures.

儘管本文中已參考隨圖詳細揭示本發明之闡釋性實施例,但是應瞭解本發明不受限於確切的實施例且熟悉此項技術可在不背離如由隨附專利申請範圍及其等效物界定之本發明之範疇之情況下實現其中之各種改變及修改。 Although the illustrative embodiments of the present invention have been disclosed in detail herein with reference to the accompanying drawings, it should be understood that the present invention is not limited to the exact embodiments and that familiarity with this technology can be made without departing from the scope of the accompanying patent application and its equivalent Various changes and modifications can be realized in the context of the scope of the invention as defined by the object.

14‧‧‧燃燒室 14‧‧‧combustion chamber

20‧‧‧多孔燃燒器元件 20‧‧‧Porous burner components

21‧‧‧出口表面 21‧‧‧Export surface

23‧‧‧入口表面 23‧‧‧ Entrance surface

100‧‧‧經燒結金屬纖維薄板 100‧‧‧Sintered metal fiber sheet

105‧‧‧外表面 105‧‧‧Outer surface

120A‧‧‧凸緣 120A‧‧‧Flange

120B‧‧‧凸緣 120B‧‧‧Flange

130‧‧‧陶瓷纖維敷層 130‧‧‧Ceramic fiber coating

140‧‧‧熱電偶 140‧‧‧thermocouple

Claims (13)

一種輻射燃燒器,其用於處理來自一製造程序工具之一廢氣流,該輻射燃燒器包括:一經燒結金屬纖維套管,燃燒材料通過其中以在接近該經燒結金屬纖維套管之一內燃燒表面處燃燒;及一絕緣套管,其包圍該經燒結金屬纖維套管且該等燃燒材料通過該絕緣套管。 A radiant burner for treating a waste gas stream from a manufacturing process tool, the radiant burner includes: a sintered metal fiber sleeve through which combustion materials pass to burn in one of the sintered metal fiber sleeves Burning at the surface; and an insulating sleeve that surrounds the sintered metal fiber sleeve and the burning materials pass through the insulating sleeve. 如請求項1之輻射燃燒器,其中該經燒結金屬纖維套管具有以下項之至少一者:80%至90%之一孔隙率、150至300cc/min/cm2之一透氣率及690至1110kg/m3之一密度。 The radiant burner of claim 1, wherein the sintered metal fiber sleeve has at least one of the following items: a porosity of 80% to 90%, a gas permeability of 150 to 300 cc/min/cm 2 and 690 to 1110kg / m 3 density one. 如請求項1或2之輻射燃燒器,其中該絕緣套管係一陶瓷纖維敷層。 The radiant burner according to claim 1 or 2, wherein the insulating sleeve is a ceramic fiber coating. 如請求項1或2之輻射燃燒器,其中該絕緣套管具有以下項之至少一者:100至150Kg/m3之一密度及隨著該等燃燒材料通過其中提供40至60Pa之一壓力降之一密度。 The radiant burner according to claim 1 or 2, wherein the insulating sleeve has at least one of the following items: a density of 100 to 150 Kg/m 3 and a pressure drop of 40 to 60 Pa as the combustion materials pass therethrough One density. 如請求項1或2之輻射燃燒器,其中該經燒結金屬纖維套管同軸地固持於該絕緣套管內。 The radiant burner according to claim 1 or 2, wherein the sintered metal fiber sleeve is held coaxially in the insulating sleeve. 如請求項1或2之輻射燃燒器,其包括可操作以固持該經燒結金屬纖維套管及該絕緣套管之一支撐件。 The radiant burner of claim 1 or 2, which includes a support operable to hold the sintered metal fiber sleeve and the insulating sleeve. 如請求項1或2之輻射燃燒器,其中該絕緣套管同軸地固持於該支撐件內。 The radiant burner according to claim 1 or 2, wherein the insulating sleeve is held coaxially in the support. 如請求項1或2之輻射燃燒器,其中該經燒結金屬纖維套管包括一周向延伸之褶狀物。 The radiant burner according to claim 1 or 2, wherein the sintered metal fiber sleeve includes a circumferentially extending pleat. 如請求項1或2之輻射燃燒器,其包括一溫度感測器,該溫度感測器與該經燒結金屬纖維套管熱耦合且可操作以提供該經燒結 金屬纖維套管之一溫度之一指示。 The radiant burner of claim 1 or 2 including a temperature sensor thermally coupled to the sintered metal fiber sleeve and operable to provide the sintered One of the temperature indications of one of the metal fiber sleeves. 如請求項1或2之輻射燃燒器,其中該溫度感測器與該經燒結金屬纖維套管熱耦合於一外表面。 The radiant burner of claim 1 or 2, wherein the temperature sensor and the sintered metal fiber sleeve are thermally coupled to an outer surface. 如請求項10之輻射燃燒器,其包括一源,該源可操作以用回應於該溫度選定的複數個混合比率之一者供應該等燃燒材料。 The radiant burner of claim 10, which includes a source operable to supply the combustion materials with one of a plurality of mixing ratios selected in response to the temperature. 如請求項11之輻射燃燒器,其中該源可操作以在該經燒結金屬纖維套管之該溫度未能超過一操作溫度時以一實質上化學計量之混合比率供應該等燃燒材料。 The radiant burner of claim 11, wherein the source is operable to supply the combustion materials at a substantially stoichiometric mixing ratio when the temperature of the sintered metal fiber sleeve fails to exceed an operating temperature. 如請求項11之輻射燃燒器,其中該源可操作以在該經燒結金屬纖維套管之該溫度超過一操作溫度時以一實質上貧乏之混合比率供應該等燃燒材料。 The radiant burner of claim 11, wherein the source is operable to supply the combustion materials at a substantially lean mixing ratio when the temperature of the sintered metal fiber sleeve exceeds an operating temperature.
TW104134431A 2014-11-28 2015-10-20 Radiant burner TWI682127B (en)

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016123041A1 (en) * 2016-11-29 2018-05-30 Webasto SE A fuel powered vehicle heater and method of operating a fuel powered vehicle heater
GB2591442A (en) * 2019-11-25 2021-08-04 Edwards Ltd Burner element fabrication

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2456861A (en) * 2008-01-25 2009-07-29 Viessmann Werke Kg A Device Comprising a Burner Head and a Method for Operating a Burner
CN202769674U (en) * 2012-04-13 2013-03-06 烟台众德环保设备科技有限公司 Surface combustion member and combustor head thereof
CN103697475A (en) * 2013-12-20 2014-04-02 连云港市晨鸿机械有限公司 Fiber material combustor, hot roller and roller heating device
TW201418629A (en) * 2012-07-26 2014-05-16 Edwards Ltd Radiant burner

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5356487A (en) * 1983-07-25 1994-10-18 Quantum Group, Inc. Thermally amplified and stimulated emission radiator fiber matrix burner
US4599066A (en) * 1984-02-16 1986-07-08 A. O. Smith Corp. Radiant energy burner
JPH03260513A (en) * 1990-03-07 1991-11-20 Harman Co Ltd Mixing ratio controller for burner
DE4113983B4 (en) * 1991-04-29 2005-09-08 Alstom Method for controlling a burner during the starting phase in a combustion plant operated with a flue gas circulation
US5510093A (en) * 1994-07-25 1996-04-23 Alzeta Corporation Combustive destruction of halogenated compounds
JP3404981B2 (en) * 1995-04-21 2003-05-12 日本鋼管株式会社 Gas heating device
TW342436B (en) * 1996-08-14 1998-10-11 Nippon Oxygen Co Ltd Combustion type harm removal apparatus (1)
JPH10122519A (en) * 1996-10-14 1998-05-15 Gastar Corp Surface combustion burner
DE29924386U1 (en) * 1998-05-11 2003-02-27 Dreizler Ulrich Boiler system fueled by gas of oil uses frequency converter to supply air control fan provides clean, efficient combustion for central heating installation
JP4100843B2 (en) * 1999-10-29 2008-06-11 株式会社ハーマンプロ Combustion device
US6558810B2 (en) * 2000-09-05 2003-05-06 Paul W. Garbo Forming sintered metal fiber porous mats
KR100785884B1 (en) * 2005-06-09 2007-12-17 씨제이 푸드 시스템 주식회사 A kitchen burner
JPWO2007037408A1 (en) * 2005-09-29 2009-04-16 謙治 岡安 Portable heat transfer device
CN202902356U (en) * 2012-11-20 2013-04-24 烟台众德环保设备科技有限公司 Fuel gas oven head
CN203082886U (en) * 2012-12-19 2013-07-24 烟台众德环保设备科技有限公司 Constructional element of surface burner and surface burner
CN203010611U (en) * 2012-12-24 2013-06-19 烟台众德环保设备科技有限公司 Surface combustion component

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2456861A (en) * 2008-01-25 2009-07-29 Viessmann Werke Kg A Device Comprising a Burner Head and a Method for Operating a Burner
CN202769674U (en) * 2012-04-13 2013-03-06 烟台众德环保设备科技有限公司 Surface combustion member and combustor head thereof
TW201418629A (en) * 2012-07-26 2014-05-16 Edwards Ltd Radiant burner
CN103697475A (en) * 2013-12-20 2014-04-02 连云港市晨鸿机械有限公司 Fiber material combustor, hot roller and roller heating device

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