CN101220958B - 燃烧加热器及排气燃烧装置 - Google Patents

燃烧加热器及排气燃烧装置 Download PDF

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Publication number
CN101220958B
CN101220958B CN2007101850840A CN200710185084A CN101220958B CN 101220958 B CN101220958 B CN 101220958B CN 2007101850840 A CN2007101850840 A CN 2007101850840A CN 200710185084 A CN200710185084 A CN 200710185084A CN 101220958 B CN101220958 B CN 101220958B
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CN
China
Prior art keywords
heater
burning
gas
heating wire
exhaust
Prior art date
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Active
Application number
CN2007101850840A
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English (en)
Chinese (zh)
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CN101220958A (zh
Inventor
渡边信一
石原将司
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Electric Co., Ltd.
Original Assignee
International Electric Semiconductor Tech Service
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Electric Semiconductor Tech Service filed Critical International Electric Semiconductor Tech Service
Publication of CN101220958A publication Critical patent/CN101220958A/zh
Application granted granted Critical
Publication of CN101220958B publication Critical patent/CN101220958B/zh
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23C—METHODS OR APPARATUS FOR COMBUSTION USING FLUID FUEL OR SOLID FUEL SUSPENDED IN  A CARRIER GAS OR AIR 
    • F23C3/00—Combustion apparatus characterised by the shape of the combustion chamber
    • F23C3/002—Combustion apparatus characterised by the shape of the combustion chamber the chamber having an elongated tubular form, e.g. for a radiant tube
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23C—METHODS OR APPARATUS FOR COMBUSTION USING FLUID FUEL OR SOLID FUEL SUSPENDED IN  A CARRIER GAS OR AIR 
    • F23C7/00—Combustion apparatus characterised by arrangements for air supply
    • F23C7/02—Disposition of air supply not passing through burner
    • F23C7/06—Disposition of air supply not passing through burner for heating the incoming air
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23Q—IGNITION; EXTINGUISHING-DEVICES
    • F23Q7/00—Incandescent ignition; Igniters using electrically-produced heat, e.g. lighters for cigarettes; Electrically-heated glowing plugs
    • F23Q7/06—Incandescent ignition; Igniters using electrically-produced heat, e.g. lighters for cigarettes; Electrically-heated glowing plugs structurally associated with fluid-fuel burners
    • F23Q7/10—Incandescent ignition; Igniters using electrically-produced heat, e.g. lighters for cigarettes; Electrically-heated glowing plugs structurally associated with fluid-fuel burners for gaseous fuel, e.g. in welding appliances
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Combustion & Propulsion (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Thermal Sciences (AREA)
  • Resistance Heating (AREA)
  • Incineration Of Waste (AREA)
  • Control Of Resistance Heating (AREA)
CN2007101850840A 2003-11-25 2004-11-25 燃烧加热器及排气燃烧装置 Active CN101220958B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003394449A JP3853781B2 (ja) 2003-11-25 2003-11-25 燃焼ヒータ及び排ガス燃焼装置
JP394449/03 2003-11-25

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CNB2004100962347A Division CN100357664C (zh) 2003-11-25 2004-11-25 燃烧加热器及排气燃烧装置

Publications (2)

Publication Number Publication Date
CN101220958A CN101220958A (zh) 2008-07-16
CN101220958B true CN101220958B (zh) 2011-06-01

Family

ID=34720513

Family Applications (2)

Application Number Title Priority Date Filing Date
CNB2004100962347A Active CN100357664C (zh) 2003-11-25 2004-11-25 燃烧加热器及排气燃烧装置
CN2007101850840A Active CN101220958B (zh) 2003-11-25 2004-11-25 燃烧加热器及排气燃烧装置

Family Applications Before (1)

Application Number Title Priority Date Filing Date
CNB2004100962347A Active CN100357664C (zh) 2003-11-25 2004-11-25 燃烧加热器及排气燃烧装置

Country Status (4)

Country Link
JP (1) JP3853781B2 (ko)
KR (2) KR100682709B1 (ko)
CN (2) CN100357664C (ko)
TW (1) TWI278590B (ko)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102914617B (zh) * 2012-10-16 2015-01-07 上海天科化工检测有限公司 一种便携式固液物料燃烧危险性的筛选装置
CN103075725B (zh) * 2013-02-01 2015-02-25 浙江特富锅炉有限公司 燃用化工废气锅炉炉膛
CN103591592B (zh) * 2013-10-25 2016-04-27 包秀敏 基于氢气和氧气的废气焚烧装置
KR102368562B1 (ko) * 2020-02-11 2022-02-28 주식회사 포스코 가스 검사 장치 및 방법
CN115007085B (zh) * 2022-08-04 2022-12-02 江苏铧德氢能源科技有限公司 制氢装置中的气体分布器

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0410151A1 (de) * 1989-07-28 1991-01-30 Heraeus Quarzglas GmbH Infrarot-Strahler mmit elektrischer Heizwendel

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5657855A (en) * 1979-10-16 1981-05-20 Aisin Chem Co Ltd Thick coating paint
FR2591509B1 (fr) * 1985-12-17 1989-10-27 Labo Electronique Physique Dispositif antipollution pour l'elimination des gaz toxiques utilises dans l'elaboration des materiaux semiconducteurs du groupe iii-v.
JPH05240028A (ja) * 1992-02-28 1993-09-17 Asahi Glass Co Ltd 電気シースヒータおよびこれが組み込まれたディーゼル機関用パティキュレートトラップ
JP3016690B2 (ja) * 1994-05-30 2000-03-06 カンケンテクノ株式会社 半導体製造排ガス除害方法とその装置
DE4436908A1 (de) * 1994-10-15 1996-04-18 Philips Patentverwaltung Düse für eine Verbrennungsvorrichtung
JPH10162850A (ja) * 1996-11-27 1998-06-19 Sanyo Electric Co Ltd 燃料電池の未反応ガス燃焼処理装置
GB9719512D0 (en) * 1997-09-12 1997-11-19 Boc Group Plc Treatment of a combustible gas stream
JP2002162296A (ja) * 2000-11-27 2002-06-07 Nippon Dennetsu Co Ltd 温度感知センサー付きヒータ
KR100399793B1 (ko) * 2001-11-22 2003-09-29 (주) 윈테크 수소 가스 연소 방법 및 이를 수행하기 위한 시스템
JP4810227B2 (ja) * 2005-12-28 2011-11-09 シャープ株式会社 電子機器のキャビネットをインサート成形する方法及び布製カバーによって覆われたキャビネットを有する電子機器

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0410151A1 (de) * 1989-07-28 1991-01-30 Heraeus Quarzglas GmbH Infrarot-Strahler mmit elektrischer Heizwendel

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
JP特开平10-162850A 1998.06.19
JP特开平10-300054A 1998.11.13
JP特开平10-79354A 1998.03.24

Also Published As

Publication number Publication date
CN101220958A (zh) 2008-07-16
KR100682709B1 (ko) 2007-02-15
TW200526903A (en) 2005-08-16
KR20060127821A (ko) 2006-12-13
JP3853781B2 (ja) 2006-12-06
CN100357664C (zh) 2007-12-26
KR20050050576A (ko) 2005-05-31
JP2005156007A (ja) 2005-06-16
KR100830029B1 (ko) 2008-05-15
TWI278590B (en) 2007-04-11
CN1641265A (zh) 2005-07-20

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C06 Publication
PB01 Publication
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SE01 Entry into force of request for substantive examination
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GR01 Patent grant
C41 Transfer of patent application or patent right or utility model
TR01 Transfer of patent right

Effective date of registration: 20150930

Address after: Tokyo, Japan, Japan

Patentee after: Hitachi Kunisai Electric Corp.

Address before: Tokyo, Japan, Japan

Patentee before: International Electric Semiconductor Tech. Service

TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20190912

Address after: Tokyo, Japan, Japan

Patentee after: International Electric Co., Ltd.

Address before: Tokyo, Japan, Japan

Patentee before: Hitachi Kunisai Electric Corp.