JP3848841B2 - 表面プラズモンレーザ構造を有する装置 - Google Patents
表面プラズモンレーザ構造を有する装置 Download PDFInfo
- Publication number
- JP3848841B2 JP3848841B2 JP2001046367A JP2001046367A JP3848841B2 JP 3848841 B2 JP3848841 B2 JP 3848841B2 JP 2001046367 A JP2001046367 A JP 2001046367A JP 2001046367 A JP2001046367 A JP 2001046367A JP 3848841 B2 JP3848841 B2 JP 3848841B2
- Authority
- JP
- Japan
- Prior art keywords
- laser
- active region
- surface plasmon
- metal
- grating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 229910052751 metal Inorganic materials 0.000 claims description 28
- 239000002184 metal Substances 0.000 claims description 28
- 239000010931 gold Substances 0.000 claims description 14
- 239000004065 semiconductor Substances 0.000 claims description 13
- 239000010936 titanium Substances 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 9
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 8
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 8
- 229910052737 gold Inorganic materials 0.000 claims description 8
- 229910052719 titanium Inorganic materials 0.000 claims description 8
- 230000000737 periodic effect Effects 0.000 claims description 7
- 230000007704 transition Effects 0.000 claims description 7
- 230000005540 biological transmission Effects 0.000 claims description 5
- 239000010410 layer Substances 0.000 description 20
- 230000005855 radiation Effects 0.000 description 10
- 230000003287 optical effect Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 239000007789 gas Substances 0.000 description 7
- 230000035515 penetration Effects 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 239000004020 conductor Substances 0.000 description 4
- 239000012212 insulator Substances 0.000 description 4
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 3
- 239000011149 active material Substances 0.000 description 3
- 238000005253 cladding Methods 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000000284 extract Substances 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 230000008033 biological extinction Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 230000002860 competitive effect Effects 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000002508 contact lithography Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000003574 free electron Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000002329 infrared spectrum Methods 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000000603 solid-source molecular beam epitaxy Methods 0.000 description 1
- 238000012306 spectroscopic technique Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 230000005428 wave function Effects 0.000 description 1
- 238000003631 wet chemical etching Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
- H01S5/3401—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers having no PN junction, e.g. unipolar lasers, intersubband lasers, quantum cascade lasers
- H01S5/3402—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers having no PN junction, e.g. unipolar lasers, intersubband lasers, quantum cascade lasers intersubband lasers, e.g. transitions within the conduction or valence bands
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/185—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only horizontal cavities, e.g. horizontal cavity surface-emitting lasers [HCSEL]
- H01S5/187—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only horizontal cavities, e.g. horizontal cavity surface-emitting lasers [HCSEL] using Bragg reflection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/1046—Comprising interactions between photons and plasmons, e.g. by a corrugated surface
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Nanotechnology (AREA)
- Chemical & Material Sciences (AREA)
- Biophysics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Semiconductor Lasers (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/512,566 US6501783B1 (en) | 2000-02-24 | 2000-02-24 | Distributed feedback surface plasmon laser |
| US09/512566 | 2000-02-24 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001291929A JP2001291929A (ja) | 2001-10-19 |
| JP2001291929A5 JP2001291929A5 (enExample) | 2004-10-14 |
| JP3848841B2 true JP3848841B2 (ja) | 2006-11-22 |
Family
ID=24039644
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001046367A Expired - Fee Related JP3848841B2 (ja) | 2000-02-24 | 2001-02-22 | 表面プラズモンレーザ構造を有する装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US6501783B1 (enExample) |
| EP (1) | EP1133035A3 (enExample) |
| JP (1) | JP3848841B2 (enExample) |
| CN (1) | CN1180518C (enExample) |
| CA (1) | CA2331194C (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009121833A (ja) * | 2007-11-12 | 2009-06-04 | Mitsubishi Electric Corp | センシング方法およびそのセンシング方法を応用したセンサ、マーカー |
Families Citing this family (63)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7043134B2 (en) | 1999-12-23 | 2006-05-09 | Spectalis Corp. | Thermo-optic plasmon-polariton devices |
| US6782020B2 (en) * | 2000-09-08 | 2004-08-24 | The Texas A&M University System | Infrared generation in semiconductor lasers |
| US6690699B2 (en) * | 2001-03-02 | 2004-02-10 | Lucent Technologies Inc | Quantum cascade laser with relaxation-stabilized injection |
| JP4599546B2 (ja) * | 2001-03-12 | 2010-12-15 | 独立行政法人科学技術振興機構 | 低次元プラズモン発光装置 |
| EP1283571B1 (de) | 2001-08-06 | 2015-01-14 | nanoplus GmbH Nanosystems and Technologies | Laser mit schwach gekoppeltem Gitterbereich |
| EP1343232B1 (en) | 2002-03-08 | 2007-05-02 | nanoplus GmbH Nanosystems and Technologies | A semiconductor laser array with a lattice structure |
| ITTO20020274A1 (it) * | 2002-03-27 | 2003-09-29 | Infm Istituto Nazionela Per La | Laser thz a semiconduttore incorporante guida d'onda a confinamento plasmonico controllato. |
| FR2845208A1 (fr) * | 2002-10-01 | 2004-04-02 | Thales Sa | Composants optoelectroniques a guidage de l'onde optique par ruban metallique |
| CA2453760A1 (en) | 2002-12-20 | 2004-06-20 | Spectalis Corp. | External-cavity lasers |
| JP4130163B2 (ja) * | 2003-09-29 | 2008-08-06 | 三洋電機株式会社 | 半導体発光素子 |
| JP4326297B2 (ja) * | 2003-09-30 | 2009-09-02 | シャープ株式会社 | モノリシック多波長レーザ素子およびその製造方法 |
| US7301263B2 (en) * | 2004-05-28 | 2007-11-27 | Applied Materials, Inc. | Multiple electron beam system with electron transmission gates |
| US7301977B2 (en) * | 2004-06-10 | 2007-11-27 | Nanoplus Gmbh | Tuneable unipolar lasers |
| US7302129B2 (en) * | 2004-10-12 | 2007-11-27 | Lockheed Martin Corporation | Optical transistor with sub-wavelength aperture |
| JP4536490B2 (ja) * | 2004-11-15 | 2010-09-01 | 浜松ホトニクス株式会社 | レーザ装置及びその制御方法 |
| JP4634956B2 (ja) * | 2006-04-14 | 2011-02-16 | 日本電信電話株式会社 | 光吸収測定装置 |
| JP5196750B2 (ja) * | 2006-08-25 | 2013-05-15 | キヤノン株式会社 | 発振素子 |
| CN100405681C (zh) * | 2006-09-08 | 2008-07-23 | 中国科学院上海微系统与信息技术研究所 | 可调谐分布反馈量子级联激光器的波导与光栅的结构及所述光栅的制备方法 |
| US7583882B2 (en) * | 2006-11-10 | 2009-09-01 | University Of Alabama In Huntsville | Waveguides for ultra-long range surface plasmon-polariton propagation |
| ATE509398T1 (de) * | 2007-03-16 | 2011-05-15 | Harvard College | Verfahren und vorrichtung zur erzeugung einer terahertz-strahlung |
| JP4871816B2 (ja) * | 2007-08-31 | 2012-02-08 | キヤノン株式会社 | レーザ素子 |
| US8009716B2 (en) * | 2007-10-29 | 2011-08-30 | The Aerospace Corporation | Plasmon stabilized unimodal laser diodes |
| US8238702B2 (en) * | 2008-06-05 | 2012-08-07 | Colorado School Of Mines | Hybrid dielectric/surface plasmon polariton waveguide with grating coupling |
| DE102008045980A1 (de) * | 2008-09-05 | 2010-06-10 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Testverfahren zur On-Wafer-Charakterisierung von langwelligen Halbleiterlasern |
| US8809834B2 (en) * | 2009-07-06 | 2014-08-19 | University Of Seoul Industry Cooperation Foundation | Photodetector capable of detecting long wavelength radiation |
| US8227793B2 (en) | 2009-07-06 | 2012-07-24 | University Of Seoul Industry Cooperation Foundation | Photodetector capable of detecting the visible light spectrum |
| US8748862B2 (en) * | 2009-07-06 | 2014-06-10 | University Of Seoul Industry Cooperation Foundation | Compound semiconductors |
| US7995879B2 (en) * | 2009-07-28 | 2011-08-09 | The Invention Science Fund I, Llc | Surface state gain |
| US8249401B2 (en) * | 2009-07-28 | 2012-08-21 | The Invention Science Fund I Llc | Surface state gain |
| US8368990B2 (en) | 2009-08-21 | 2013-02-05 | University Of Seoul Industry Cooperation Foundation | Polariton mode optical switch with composite structure |
| US8023546B2 (en) * | 2009-09-22 | 2011-09-20 | Palo Alto Research Center Incorporated | Semiconductor laser with integrated contact and waveguide |
| US8368047B2 (en) * | 2009-10-27 | 2013-02-05 | University Of Seoul Industry Cooperation Foundation | Semiconductor device |
| CN101847828B (zh) * | 2010-05-07 | 2012-03-28 | 中国科学院半导体研究所 | 垂直发射量子级联激光器结构 |
| CN101882752B (zh) * | 2010-06-28 | 2011-11-30 | 北京航空航天大学 | 一种表面等离子体纳米激光器 |
| WO2012015990A2 (en) * | 2010-07-27 | 2012-02-02 | The Regents Of The University Of California | Plasmon lasers at deep subwavelength scale |
| CN102148476B (zh) * | 2011-03-08 | 2012-06-27 | 东南大学 | 深度亚波长表面等离子体激元微腔激光器 |
| US8805147B2 (en) * | 2011-05-17 | 2014-08-12 | Canon Kabushiki Kaisha | Waveguide, apparatus including the waveguide, and method of manufacturing the waveguide |
| US9389344B2 (en) | 2011-06-28 | 2016-07-12 | Colorado School Of Mines | Spectroscopic polarimeter |
| US8848756B2 (en) | 2011-09-16 | 2014-09-30 | Samsung Electronics Co., Ltd. | Surface plasmon laser |
| US9088126B2 (en) | 2013-10-17 | 2015-07-21 | The Trustees Of Princeton University | Single-mode quantum cascade lasers with enhanced tuning range |
| CN103532013B (zh) * | 2013-10-23 | 2015-12-30 | 中国科学院半导体研究所 | 一种低发散角的面发射量子级联激光器结构 |
| CN105765804B (zh) * | 2013-11-30 | 2019-06-18 | 统雷量子电子有限公司 | 量子级联激光器 |
| DE102014106209B3 (de) * | 2014-05-05 | 2015-08-27 | Nanoplus Nanosystems And Technologies Gmbh | Interbandkaskadenlaser sowie Verfahren zur Herstellung eines Interbandkaskadenlasers umfassend ein Rückkopplungselement |
| CN104157934B (zh) * | 2014-07-21 | 2016-05-04 | 南京航空航天大学 | 一种超宽带人工表面等离子滤波器 |
| CN104267503B (zh) * | 2014-09-30 | 2016-08-17 | 中国科学院半导体研究所 | 一种改善面发射半导体激光器慢轴远场的金属天线结构 |
| KR102360025B1 (ko) | 2014-10-16 | 2022-02-08 | 삼성전자주식회사 | 비정질 탄소원자층의 형성방법 및 비정질 탄소원자층을 포함하는 전자소자 |
| EP3304660B1 (en) | 2015-06-05 | 2022-10-26 | The Government of the United States of America as represented by the Secretary of the Navy | Interband cascade lasers with low-fill factor top contact for reduced loss |
| KR102446410B1 (ko) | 2015-09-17 | 2022-09-22 | 삼성전자주식회사 | 광전소자 및 이를 포함하는 전자장치 |
| KR102384228B1 (ko) | 2015-09-30 | 2022-04-07 | 삼성전자주식회사 | 반도체 레이저 공진기 및 이를 포함하는 반도체 레이저 소자 |
| FR3054734B1 (fr) * | 2016-07-27 | 2018-09-07 | Universite Paris Sud | Diode laser a retroaction repartie |
| KR102610832B1 (ko) | 2016-08-03 | 2023-12-06 | 삼성전자주식회사 | 메타 광학 소자 및 이의 설계방법 |
| JP6669611B2 (ja) * | 2016-08-25 | 2020-03-18 | 日本電信電話株式会社 | ナノワイヤレーザ |
| CN108054634B (zh) * | 2018-01-03 | 2020-12-22 | 长春理工大学 | 一种窄线宽半导体激光器 |
| US10566764B2 (en) | 2018-06-18 | 2020-02-18 | International Business Machines Corporation | Plasmonic quantum well laser |
| CN109244827B (zh) * | 2018-09-12 | 2020-07-24 | 南京理工大学 | 一种用于纳米激光器的高斯型金属半导体谐振腔 |
| CN109830889A (zh) * | 2019-03-19 | 2019-05-31 | 北京工业大学 | 复合一维光子晶体纳米梁腔表面等离子体激光器 |
| EP3879642B1 (de) | 2020-03-13 | 2025-09-24 | Advanced Photonics Applications GmbH | Monomodiger halbleiterlaser mit phasenkontrolle |
| FR3118332B1 (fr) * | 2020-12-18 | 2023-07-14 | Commissariat Energie Atomique | Laser comprenant un miroir de Bragg distribué et procédé de réalisation |
| JP7662353B2 (ja) * | 2021-02-22 | 2025-04-15 | 株式会社東芝 | 面発光型半導体発光装置 |
| US20220344902A1 (en) * | 2021-04-22 | 2022-10-27 | Intraband LLC | Semiconductor Laser Structure for Higher-Order Mode Suppression |
| CN113659430B (zh) * | 2021-07-20 | 2023-04-11 | 杭州电子科技大学 | 一种基于半导体增益的低阈值Tamm态等离子激光器 |
| CN116544781A (zh) * | 2023-04-13 | 2023-08-04 | 中国科学院半导体研究所 | 一种半导体锁模激光器及其制备方法 |
| CN117075256B (zh) * | 2023-10-16 | 2024-02-13 | 潍坊先进光电芯片研究院 | 一种交错光栅的混合等离激元波导布拉格光栅偏振器 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0672311B1 (de) | 1992-12-03 | 1996-09-18 | Siemens Aktiengesellschaft | Abstimmbare oberflächenemittierende laserdiode |
| DE4240706A1 (de) | 1992-12-03 | 1994-06-09 | Siemens Ag | Oberflächenemittierende Laserdiode |
| US5502787A (en) | 1995-05-22 | 1996-03-26 | At&T Corp. | Article comprising a semiconductor waveguide structure |
| AU7598996A (en) | 1995-10-25 | 1997-05-15 | University Of Washington | Surface plasmon resonance probe systems based on a folded planar lightpipe |
| US5901168A (en) | 1997-05-07 | 1999-05-04 | Lucent Technologies Inc. | Article comprising an improved QC laser |
| US6301282B1 (en) | 1998-07-29 | 2001-10-09 | Lucent Technologies Inc. | Long wavelength semiconductor lasers incorporating waveguides based on surface plasmons |
-
2000
- 2000-02-24 US US09/512,566 patent/US6501783B1/en not_active Expired - Lifetime
-
2001
- 2001-01-17 CA CA002331194A patent/CA2331194C/en not_active Expired - Fee Related
- 2001-02-12 EP EP01301192A patent/EP1133035A3/en not_active Withdrawn
- 2001-02-22 JP JP2001046367A patent/JP3848841B2/ja not_active Expired - Fee Related
- 2001-02-23 CN CNB011049170A patent/CN1180518C/zh not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009121833A (ja) * | 2007-11-12 | 2009-06-04 | Mitsubishi Electric Corp | センシング方法およびそのセンシング方法を応用したセンサ、マーカー |
Also Published As
| Publication number | Publication date |
|---|---|
| CA2331194A1 (en) | 2001-08-24 |
| CN1180518C (zh) | 2004-12-15 |
| EP1133035A3 (en) | 2001-09-26 |
| EP1133035A2 (en) | 2001-09-12 |
| JP2001291929A (ja) | 2001-10-19 |
| US6501783B1 (en) | 2002-12-31 |
| CA2331194C (en) | 2004-05-04 |
| CN1322042A (zh) | 2001-11-14 |
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