JP3831028B2 - 液晶表示装置 - Google Patents
液晶表示装置 Download PDFInfo
- Publication number
- JP3831028B2 JP3831028B2 JP32263296A JP32263296A JP3831028B2 JP 3831028 B2 JP3831028 B2 JP 3831028B2 JP 32263296 A JP32263296 A JP 32263296A JP 32263296 A JP32263296 A JP 32263296A JP 3831028 B2 JP3831028 B2 JP 3831028B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- electrode
- liquid crystal
- display device
- crystal display
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004973 liquid crystal related substance Substances 0.000 title claims description 148
- 239000000758 substrate Substances 0.000 claims description 272
- 229910052751 metal Inorganic materials 0.000 claims description 112
- 239000002184 metal Substances 0.000 claims description 112
- 239000000463 material Substances 0.000 claims description 8
- 238000009413 insulation Methods 0.000 claims description 3
- 239000007769 metal material Substances 0.000 claims description 2
- 239000010408 film Substances 0.000 description 160
- 229910052782 aluminium Inorganic materials 0.000 description 32
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 32
- 229910052715 tantalum Inorganic materials 0.000 description 19
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 19
- 239000004065 semiconductor Substances 0.000 description 17
- 238000010586 diagram Methods 0.000 description 16
- 238000000034 method Methods 0.000 description 16
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 15
- 239000010407 anodic oxide Substances 0.000 description 13
- 230000007547 defect Effects 0.000 description 11
- 230000008859 change Effects 0.000 description 10
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 10
- 238000007743 anodising Methods 0.000 description 9
- 239000012535 impurity Substances 0.000 description 9
- 150000002500 ions Chemical class 0.000 description 9
- 239000011159 matrix material Substances 0.000 description 9
- 230000003287 optical effect Effects 0.000 description 9
- 230000008569 process Effects 0.000 description 9
- 239000002131 composite material Substances 0.000 description 8
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 8
- 229910001936 tantalum oxide Inorganic materials 0.000 description 8
- 239000010409 thin film Substances 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- 125000006850 spacer group Chemical group 0.000 description 7
- 238000005530 etching Methods 0.000 description 6
- 230000003647 oxidation Effects 0.000 description 6
- 238000007254 oxidation reaction Methods 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 239000000956 alloy Substances 0.000 description 5
- 229910045601 alloy Inorganic materials 0.000 description 5
- 230000002950 deficient Effects 0.000 description 5
- 230000007704 transition Effects 0.000 description 5
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 4
- 230000005684 electric field Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 229910052681 coesite Inorganic materials 0.000 description 2
- 229910052906 cristobalite Inorganic materials 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 230000007261 regionalization Effects 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 229910052682 stishovite Inorganic materials 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000005264 High molar mass liquid crystal Substances 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910004446 Ta2 O5 Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Landscapes
- Liquid Crystal (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32263296A JP3831028B2 (ja) | 1996-12-03 | 1996-12-03 | 液晶表示装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32263296A JP3831028B2 (ja) | 1996-12-03 | 1996-12-03 | 液晶表示装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH10161095A JPH10161095A (ja) | 1998-06-19 |
| JPH10161095A5 JPH10161095A5 (enExample) | 2004-08-12 |
| JP3831028B2 true JP3831028B2 (ja) | 2006-10-11 |
Family
ID=18145886
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP32263296A Expired - Lifetime JP3831028B2 (ja) | 1996-12-03 | 1996-12-03 | 液晶表示装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3831028B2 (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4324259B2 (ja) * | 1998-07-07 | 2009-09-02 | シャープ株式会社 | 液晶表示装置の製造方法 |
| JP4754677B2 (ja) * | 2000-07-31 | 2011-08-24 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| JP4041336B2 (ja) * | 2001-06-29 | 2008-01-30 | シャープ株式会社 | 液晶表示装置用基板及びそれを備えた液晶表示装置及びその製造方法 |
| JP4316558B2 (ja) | 2005-06-28 | 2009-08-19 | 三星モバイルディスプレイ株式會社 | 有機発光表示装置 |
| JP4350106B2 (ja) | 2005-06-29 | 2009-10-21 | 三星モバイルディスプレイ株式會社 | 平板表示装置及びその駆動方法 |
| US7435633B2 (en) | 2006-03-14 | 2008-10-14 | Seiko Epson Corporation | Electroluminescence device, manufacturing method thereof, and electronic apparatus |
| JP4930704B2 (ja) * | 2006-03-14 | 2012-05-16 | セイコーエプソン株式会社 | 有機エレクトロルミネッセンス装置及び電子機器 |
| JP5090658B2 (ja) | 2006-04-06 | 2012-12-05 | 三菱電機株式会社 | 薄膜トランジスタ、及びその製造方法、並びにアクティブマトリクス型表示装置 |
| JP2010032838A (ja) * | 2008-07-30 | 2010-02-12 | Sumitomo Chemical Co Ltd | 表示装置および表示装置の製造方法 |
-
1996
- 1996-12-03 JP JP32263296A patent/JP3831028B2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH10161095A (ja) | 1998-06-19 |
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