JP3808567B2 - クリーンルーム構造 - Google Patents

クリーンルーム構造 Download PDF

Info

Publication number
JP3808567B2
JP3808567B2 JP29679996A JP29679996A JP3808567B2 JP 3808567 B2 JP3808567 B2 JP 3808567B2 JP 29679996 A JP29679996 A JP 29679996A JP 29679996 A JP29679996 A JP 29679996A JP 3808567 B2 JP3808567 B2 JP 3808567B2
Authority
JP
Japan
Prior art keywords
air
speed
suction
floor
clean room
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP29679996A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10141723A5 (enExample
JPH10141723A (ja
Inventor
健司 鯉江
数彦 坂本
性根 鄭
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Nippon Air Technologies Co Ltd
Original Assignee
Shin Nippon Air Technologies Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Nippon Air Technologies Co Ltd filed Critical Shin Nippon Air Technologies Co Ltd
Priority to JP29679996A priority Critical patent/JP3808567B2/ja
Publication of JPH10141723A publication Critical patent/JPH10141723A/ja
Publication of JPH10141723A5 publication Critical patent/JPH10141723A5/ja
Application granted granted Critical
Publication of JP3808567B2 publication Critical patent/JP3808567B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Landscapes

  • Ventilation (AREA)
JP29679996A 1996-11-08 1996-11-08 クリーンルーム構造 Expired - Lifetime JP3808567B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29679996A JP3808567B2 (ja) 1996-11-08 1996-11-08 クリーンルーム構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29679996A JP3808567B2 (ja) 1996-11-08 1996-11-08 クリーンルーム構造

Publications (3)

Publication Number Publication Date
JPH10141723A JPH10141723A (ja) 1998-05-29
JPH10141723A5 JPH10141723A5 (enExample) 2004-10-21
JP3808567B2 true JP3808567B2 (ja) 2006-08-16

Family

ID=17838298

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29679996A Expired - Lifetime JP3808567B2 (ja) 1996-11-08 1996-11-08 クリーンルーム構造

Country Status (1)

Country Link
JP (1) JP3808567B2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180069249A (ko) * 2016-12-15 2018-06-25 주식회사 시스웍 수율 향상을 위한 클린룸 기류의 방향 및 세기의 모니터링 방법과 기류제어장치

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5195899B2 (ja) * 2010-12-28 2013-05-15 ダイキン工業株式会社 クリーンルーム用空調システム
JP5366030B2 (ja) * 2011-09-22 2013-12-11 村田機械株式会社 クリーンルーム用の自動倉庫
JP6531810B2 (ja) * 2017-12-01 2019-06-19 澁谷工業株式会社 無菌作業システム
JP2019173267A (ja) * 2018-03-26 2019-10-10 ダイキン工業株式会社 クリーンルーム用の透かし階段およびそれを備えた屋内システム
CN116293927B (zh) * 2022-12-14 2025-11-07 中国中元国际工程有限公司 一种ⅰ级洁净手术室送风天花
CN116608530B (zh) * 2023-06-19 2024-11-19 广州澳企实验室技术股份有限公司 一种微电子实验室去颗粒及化学污染物的ffu净化系统

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61165539A (ja) * 1985-01-16 1986-07-26 Nec Corp 空気調和システム
JPS62169949A (ja) * 1986-01-21 1987-07-27 Nec Corp フイルタ−装置
JPS63176944A (ja) * 1987-01-19 1988-07-21 Mitsubishi Electric Corp 清浄化室
JPH0646240U (ja) * 1992-11-27 1994-06-24 株式会社大氣社 クリーンルーム

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180069249A (ko) * 2016-12-15 2018-06-25 주식회사 시스웍 수율 향상을 위한 클린룸 기류의 방향 및 세기의 모니터링 방법과 기류제어장치
KR101880426B1 (ko) 2016-12-15 2018-07-27 주식회사 시스웍 수율 향상을 위한 클린룸 기류의 방향 및 세기의 모니터링 방법과 기류제어장치

Also Published As

Publication number Publication date
JPH10141723A (ja) 1998-05-29

Similar Documents

Publication Publication Date Title
JP3808567B2 (ja) クリーンルーム構造
KR20200086085A (ko) 미세먼지 제거 기능을 갖는 공기조화기
JPH10141723A5 (enExample)
JP4486727B2 (ja) 循環型クリーンルーム
JP2004012038A (ja) クリーンルーム
JPH0753219B2 (ja) クリ−ンル−ム自由空間内に高清浄域を形成する方法およびこの方法に使用するフイルタユニット
JP2551923Y2 (ja) クリーンルーム
JPS6127435A (ja) 空気清浄化システムに於る汚染空気の誘引混入防止装置
JP2536188B2 (ja) 空気清浄装置
JPS62299641A (ja) クリ−ンル−ムの気流方式
JPH10311556A (ja) 空調方法及び空調装置
JP3733396B2 (ja) 排煙装置
JPS62147249A (ja) クリ−ンル−ム
JPS62138638A (ja) エア−カ−テン設備
JP3820609B2 (ja) トンネル式のクリーンルームのフィルタダクト形成方法
JP3420722B2 (ja) 局所空気清浄装置
JPS59185923A (ja) クリーンルームの形成方法
JPH07310941A (ja) クリーンルーム
JPH0544663Y2 (enExample)
JP4356860B2 (ja) 製麹装置
JP3013098B2 (ja) 天井システム用フィルタユニット
JPH10185260A (ja) 吹出し用空気分配器
JPH03113221A (ja) 局所清浄の気流制御装置
JPS62182541A (ja) クリ−ンル−ム
JP3639021B2 (ja) トンネル式クリーンルーム用フィルタユニット

Legal Events

Date Code Title Description
A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20060130

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20060203

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20060404

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20060512

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20060518

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090526

Year of fee payment: 3

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100526

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100526

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110526

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110526

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120526

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130526

Year of fee payment: 7

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130526

Year of fee payment: 7

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140526

Year of fee payment: 8

EXPY Cancellation because of completion of term