JP3803999B2 - 欠陥検査装置 - Google Patents
欠陥検査装置 Download PDFInfo
- Publication number
- JP3803999B2 JP3803999B2 JP23791799A JP23791799A JP3803999B2 JP 3803999 B2 JP3803999 B2 JP 3803999B2 JP 23791799 A JP23791799 A JP 23791799A JP 23791799 A JP23791799 A JP 23791799A JP 3803999 B2 JP3803999 B2 JP 3803999B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- inspected
- compensation filter
- liquid crystal
- optical compensation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000007547 defect Effects 0.000 title claims description 87
- 238000007689 inspection Methods 0.000 title claims description 52
- 230000003287 optical effect Effects 0.000 claims description 151
- 239000004973 liquid crystal related substance Substances 0.000 claims description 64
- 230000002950 deficient Effects 0.000 claims description 50
- 239000004988 Nematic liquid crystal Substances 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 11
- 150000001875 compounds Chemical class 0.000 claims description 9
- 210000002858 crystal cell Anatomy 0.000 claims description 9
- 238000005286 illumination Methods 0.000 claims description 6
- 230000008859 change Effects 0.000 description 16
- 238000005259 measurement Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 8
- 238000002834 transmittance Methods 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 7
- 239000011521 glass Substances 0.000 description 6
- 230000006872 improvement Effects 0.000 description 5
- 230000010363 phase shift Effects 0.000 description 5
- 238000001514 detection method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000004985 Discotic Liquid Crystal Substance Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000011282 treatment Methods 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- YJTKZCDBKVTVBY-UHFFFAOYSA-N 1,3-Diphenylbenzene Chemical group C1=CC=CC=C1C1=CC=CC(C=2C=CC=CC=2)=C1 YJTKZCDBKVTVBY-UHFFFAOYSA-N 0.000 description 1
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 description 1
- 102000003668 Destrin Human genes 0.000 description 1
- 108090000082 Destrin Proteins 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 235000010724 Wisteria floribunda Nutrition 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 125000005647 linker group Chemical group 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000005268 rod-like liquid crystal Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 125000006837 triphenylylene group Chemical group 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
Images
Landscapes
- Liquid Crystal (AREA)
- Polarising Elements (AREA)
- Controlling Sheets Or Webs (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23791799A JP3803999B2 (ja) | 1999-08-25 | 1999-08-25 | 欠陥検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23791799A JP3803999B2 (ja) | 1999-08-25 | 1999-08-25 | 欠陥検査装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001059795A JP2001059795A (ja) | 2001-03-06 |
| JP2001059795A5 JP2001059795A5 (enExample) | 2005-06-09 |
| JP3803999B2 true JP3803999B2 (ja) | 2006-08-02 |
Family
ID=17022369
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23791799A Expired - Fee Related JP3803999B2 (ja) | 1999-08-25 | 1999-08-25 | 欠陥検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3803999B2 (enExample) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002148142A (ja) * | 2000-11-08 | 2002-05-22 | Sumitomo Chem Co Ltd | 液晶用視野角拡大フィルムの検査方法 |
| JP5158468B2 (ja) * | 2006-05-15 | 2013-03-06 | 大日本印刷株式会社 | 被検査基板の検査システム及び被検査基板の検査方法 |
| JP4960026B2 (ja) * | 2006-06-09 | 2012-06-27 | 富士フイルム株式会社 | フイルムの欠陥検査装置及びフイルムの製造方法 |
| KR101057626B1 (ko) * | 2008-01-07 | 2011-08-19 | 주식회사 엘지화학 | 화상 분석을 이용한 편광판 얼룩 검사 방법 및 이를 이용한 편광판 얼룩 자동 검사 시스템 |
| JP5173047B2 (ja) * | 2012-05-15 | 2013-03-27 | 株式会社ナナオ | 画面光演算装置またはその方法 |
| CN105866986B (zh) * | 2016-05-26 | 2019-09-20 | 明基材料有限公司 | 检测装置及检测方法 |
| CN108267450A (zh) * | 2018-02-28 | 2018-07-10 | 京东方科技集团股份有限公司 | 基板检测装置和方法 |
| CN111721502B (zh) * | 2019-03-22 | 2024-06-11 | 住友化学株式会社 | 检查方法及检查装置 |
| EP4001831A4 (en) * | 2019-07-18 | 2022-09-28 | Mitsubishi Electric Corporation | INSPECTION DEVICE, INSPECTION PROCEDURE AND PROGRAM |
| WO2021100192A1 (ja) * | 2019-11-22 | 2021-05-27 | シャープ株式会社 | 表示パネルの製造方法 |
| JP7777746B1 (ja) * | 2024-06-04 | 2025-12-01 | Ｊｆｅスチール株式会社 | フィルムの膜厚偏差測定方法、フィルムの膜厚偏差測定装置、フィルム製造方法およびフィルム製造装置 |
-
1999
- 1999-08-25 JP JP23791799A patent/JP3803999B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2001059795A (ja) | 2001-03-06 |
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