JP3799221B2 - 薄膜磁気ヘッド及びその製造方法 - Google Patents
薄膜磁気ヘッド及びその製造方法 Download PDFInfo
- Publication number
- JP3799221B2 JP3799221B2 JP2000211590A JP2000211590A JP3799221B2 JP 3799221 B2 JP3799221 B2 JP 3799221B2 JP 2000211590 A JP2000211590 A JP 2000211590A JP 2000211590 A JP2000211590 A JP 2000211590A JP 3799221 B2 JP3799221 B2 JP 3799221B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- magnetic
- magnetic film
- air bearing
- bearing surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000010409 thin film Substances 0.000 title claims description 46
- 238000004519 manufacturing process Methods 0.000 title description 17
- 239000010408 film Substances 0.000 claims description 333
- 238000000034 method Methods 0.000 description 42
- 239000004020 conductor Substances 0.000 description 37
- 238000007747 plating Methods 0.000 description 24
- 239000000463 material Substances 0.000 description 11
- 229920002120 photoresistant polymer Polymers 0.000 description 11
- 238000009413 insulation Methods 0.000 description 9
- 230000001681 protective effect Effects 0.000 description 9
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 8
- 229910052742 iron Inorganic materials 0.000 description 8
- 229910052759 nickel Inorganic materials 0.000 description 8
- 238000004544 sputter deposition Methods 0.000 description 8
- 238000000992 sputter etching Methods 0.000 description 8
- 239000000758 substrate Substances 0.000 description 8
- 229910044991 metal oxide Inorganic materials 0.000 description 7
- 150000004706 metal oxides Chemical class 0.000 description 7
- 238000001039 wet etching Methods 0.000 description 7
- 230000004907 flux Effects 0.000 description 6
- 229910004298 SiO 2 Inorganic materials 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- 238000001312 dry etching Methods 0.000 description 5
- 229910052737 gold Inorganic materials 0.000 description 5
- 239000011347 resin Substances 0.000 description 5
- 229920005989 resin Polymers 0.000 description 5
- 238000009751 slip forming Methods 0.000 description 5
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 230000001939 inductive effect Effects 0.000 description 3
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229910052703 rhodium Inorganic materials 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 230000000740 bleeding effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
Images
Landscapes
- Photosensitive Polymer And Photoresist Processing (AREA)
- Magnetic Heads (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000211590A JP3799221B2 (ja) | 2000-07-12 | 2000-07-12 | 薄膜磁気ヘッド及びその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000211590A JP3799221B2 (ja) | 2000-07-12 | 2000-07-12 | 薄膜磁気ヘッド及びその製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002025009A JP2002025009A (ja) | 2002-01-25 |
| JP2002025009A5 JP2002025009A5 (enExample) | 2005-10-27 |
| JP3799221B2 true JP3799221B2 (ja) | 2006-07-19 |
Family
ID=18707673
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000211590A Expired - Fee Related JP3799221B2 (ja) | 2000-07-12 | 2000-07-12 | 薄膜磁気ヘッド及びその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3799221B2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005149604A (ja) | 2003-11-14 | 2005-06-09 | Alps Electric Co Ltd | 磁気ヘッドおよびその製造方法 |
-
2000
- 2000-07-12 JP JP2000211590A patent/JP3799221B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2002025009A (ja) | 2002-01-25 |
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