JP3777498B2 - ターボ分子ポンプ - Google Patents

ターボ分子ポンプ Download PDF

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Publication number
JP3777498B2
JP3777498B2 JP2000189949A JP2000189949A JP3777498B2 JP 3777498 B2 JP3777498 B2 JP 3777498B2 JP 2000189949 A JP2000189949 A JP 2000189949A JP 2000189949 A JP2000189949 A JP 2000189949A JP 3777498 B2 JP3777498 B2 JP 3777498B2
Authority
JP
Japan
Prior art keywords
rotor
blade
peripheral surface
stator
inner peripheral
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2000189949A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002005078A5 (enExample
JP2002005078A (ja
Inventor
裕之 川崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP2000189949A priority Critical patent/JP3777498B2/ja
Priority to US09/883,927 priority patent/US6468030B2/en
Priority to DE60143779T priority patent/DE60143779D1/de
Priority to EP10008388A priority patent/EP2284400B1/en
Priority to EP08022297A priority patent/EP2053250B1/en
Priority to EP01115176A priority patent/EP1167773B1/en
Priority to KR1020010035856A priority patent/KR100743115B1/ko
Publication of JP2002005078A publication Critical patent/JP2002005078A/ja
Publication of JP2002005078A5 publication Critical patent/JP2002005078A5/ja
Application granted granted Critical
Publication of JP3777498B2 publication Critical patent/JP3777498B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/28—Rotors specially for elastic fluids for centrifugal or helico-centrifugal pumps for radial-flow or helico-centrifugal pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/28—Rotors specially for elastic fluids for centrifugal or helico-centrifugal pumps for radial-flow or helico-centrifugal pumps
    • F04D29/30—Vanes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
    • F04D29/4206—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for elastic fluid pumps
    • F04D29/4213—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for elastic fluid pumps suction ports
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
    • F04D29/44—Fluid-guiding means, e.g. diffusers
    • F04D29/441—Fluid-guiding means, e.g. diffusers especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
    • F04D29/44—Fluid-guiding means, e.g. diffusers
    • F04D29/441—Fluid-guiding means, e.g. diffusers especially adapted for elastic fluid pumps
    • F04D29/444—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2250/00—Geometry
    • F05D2250/50—Inlet or outlet
    • F05D2250/51—Inlet

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP2000189949A 2000-06-23 2000-06-23 ターボ分子ポンプ Expired - Lifetime JP3777498B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2000189949A JP3777498B2 (ja) 2000-06-23 2000-06-23 ターボ分子ポンプ
US09/883,927 US6468030B2 (en) 2000-06-23 2001-06-20 Turbo-molecular pump
EP10008388A EP2284400B1 (en) 2000-06-23 2001-06-22 Turbo-molecular pump
EP08022297A EP2053250B1 (en) 2000-06-23 2001-06-22 Turbo-molecular pump
DE60143779T DE60143779D1 (de) 2000-06-23 2001-06-22 Turbomolekulapumpe
EP01115176A EP1167773B1 (en) 2000-06-23 2001-06-22 Turbo-molecular pump
KR1020010035856A KR100743115B1 (ko) 2000-06-23 2001-06-22 터보분자펌프

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000189949A JP3777498B2 (ja) 2000-06-23 2000-06-23 ターボ分子ポンプ

Publications (3)

Publication Number Publication Date
JP2002005078A JP2002005078A (ja) 2002-01-09
JP2002005078A5 JP2002005078A5 (enExample) 2004-11-18
JP3777498B2 true JP3777498B2 (ja) 2006-05-24

Family

ID=18689508

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000189949A Expired - Lifetime JP3777498B2 (ja) 2000-06-23 2000-06-23 ターボ分子ポンプ

Country Status (5)

Country Link
US (1) US6468030B2 (enExample)
EP (3) EP2284400B1 (enExample)
JP (1) JP3777498B2 (enExample)
KR (1) KR100743115B1 (enExample)
DE (1) DE60143779D1 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4147042B2 (ja) * 2002-03-12 2008-09-10 エドワーズ株式会社 真空ポンプ
US7645116B2 (en) * 2005-04-28 2010-01-12 Ebara Corporation Turbo vacuum pump
KR100721791B1 (ko) * 2005-05-23 2007-05-25 고이치 하츠모토 브래지어 컵
DE102006043327A1 (de) * 2006-09-15 2008-03-27 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
US8152442B2 (en) * 2008-12-24 2012-04-10 Agilent Technologies, Inc. Centripetal pumping stage and vacuum pump incorporating such pumping stage
US8070419B2 (en) * 2008-12-24 2011-12-06 Agilent Technologies, Inc. Spiral pumping stage and vacuum pump incorporating such pumping stage
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
EP2757266B1 (en) * 2013-01-22 2016-03-16 Agilent Technologies, Inc. Rotary vacuum pump
DE102013218506A1 (de) * 2013-09-16 2015-03-19 Inficon Gmbh Schnüffellecksucher mit mehrstufiger Membranpumpe
JP7188884B2 (ja) 2014-12-04 2022-12-13 レスメド・プロプライエタリー・リミテッド 空気送出用のウェラブルデバイス
US10641282B2 (en) * 2016-12-28 2020-05-05 Nidec Corporation Fan device and vacuum cleaner including the same

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2231654A1 (de) 1972-06-28 1974-01-17 Leybold Heraeus Gmbh & Co Kg Turbomolekularpumpe
JPS61226596A (ja) * 1985-03-29 1986-10-08 Hitachi Ltd タ−ボ分子ポンプ
JPH065077B2 (ja) * 1985-04-30 1994-01-19 株式会社島津製作所 ターボ分子ポンプ
DE3728154C2 (de) 1987-08-24 1996-04-18 Balzers Pfeiffer Gmbh Mehrstufige Molekularpumpe
DE3919529C2 (de) * 1988-07-13 1994-09-29 Osaka Vacuum Ltd Vakuumpumpe
JPH0261387A (ja) 1988-08-24 1990-03-01 Seiko Seiki Co Ltd ターボ分子ポンプ
US5358373A (en) 1992-04-29 1994-10-25 Varian Associates, Inc. High performance turbomolecular vacuum pumps
DE4314418A1 (de) * 1993-05-03 1994-11-10 Leybold Ag Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten
US5456575A (en) 1994-05-16 1995-10-10 Varian Associates, Inc. Non-centric improved pumping stage for turbomolecular pumps
US5618167A (en) * 1994-07-28 1997-04-08 Ebara Corporation Vacuum pump apparatus having peltier elements for cooling the motor & bearing housing and heating the outer housing
IT1281025B1 (it) * 1995-11-10 1998-02-11 Varian Spa Pompa turbomolecolare.
JP3792318B2 (ja) * 1996-10-18 2006-07-05 株式会社大阪真空機器製作所 真空ポンプ
JP3415402B2 (ja) * 1997-08-15 2003-06-09 株式会社荏原製作所 ターボ分子ポンプ
DE29715035U1 (de) 1997-08-22 1997-10-30 Leybold Vakuum GmbH, 50968 Köln Reibungsvakuumpumpe
GB9725146D0 (en) * 1997-11-27 1998-01-28 Boc Group Plc Improvements in vacuum pumps
DE19821634A1 (de) * 1998-05-14 1999-11-18 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Stator und Rotor
DE19901340B4 (de) * 1998-05-26 2016-03-24 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Chassis, Rotor und Gehäuse sowie Einrichtung, ausgerüstet mit einer Reibungsvakuumpumpe dieser Art
JP3092063B2 (ja) 1998-06-17 2000-09-25 セイコー精機株式会社 ターボ分子ポンプ
JP3013083B2 (ja) 1998-06-23 2000-02-28 セイコー精機株式会社 ターボ分子ポンプ
TW504548B (en) * 1998-06-30 2002-10-01 Ebara Corp Turbo molecular pump
JP4210964B2 (ja) * 1998-12-29 2009-01-21 株式会社安川電機 浄水器
JP3788558B2 (ja) 1999-03-23 2006-06-21 株式会社荏原製作所 ターボ分子ポンプ

Also Published As

Publication number Publication date
EP1167773B1 (en) 2011-01-05
KR20020000524A (ko) 2002-01-05
EP2053250A3 (en) 2009-07-15
US6468030B2 (en) 2002-10-22
US20010055526A1 (en) 2001-12-27
KR100743115B1 (ko) 2007-07-27
EP1167773A3 (en) 2002-02-27
EP2053250B1 (en) 2011-12-28
DE60143779D1 (de) 2011-02-17
EP2053250A2 (en) 2009-04-29
EP2284400B1 (en) 2012-06-20
EP1167773A2 (en) 2002-01-02
JP2002005078A (ja) 2002-01-09
EP2284400A1 (en) 2011-02-16

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