DE60143779D1 - Turbomolekulapumpe - Google Patents

Turbomolekulapumpe

Info

Publication number
DE60143779D1
DE60143779D1 DE60143779T DE60143779T DE60143779D1 DE 60143779 D1 DE60143779 D1 DE 60143779D1 DE 60143779 T DE60143779 T DE 60143779T DE 60143779 T DE60143779 T DE 60143779T DE 60143779 D1 DE60143779 D1 DE 60143779D1
Authority
DE
Germany
Prior art keywords
turbomolekulapumpe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60143779T
Other languages
English (en)
Inventor
Hiroyuki Kawasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Application granted granted Critical
Publication of DE60143779D1 publication Critical patent/DE60143779D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/28—Rotors specially for elastic fluids for centrifugal or helico-centrifugal pumps for radial-flow or helico-centrifugal pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/28—Rotors specially for elastic fluids for centrifugal or helico-centrifugal pumps for radial-flow or helico-centrifugal pumps
    • F04D29/30—Vanes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
    • F04D29/4206—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for elastic fluid pumps
    • F04D29/4213—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for elastic fluid pumps suction ports
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
    • F04D29/44—Fluid-guiding means, e.g. diffusers
    • F04D29/441—Fluid-guiding means, e.g. diffusers especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
    • F04D29/44—Fluid-guiding means, e.g. diffusers
    • F04D29/441—Fluid-guiding means, e.g. diffusers especially adapted for elastic fluid pumps
    • F04D29/444—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2250/00—Geometry
    • F05D2250/50—Inlet or outlet
    • F05D2250/51—Inlet
DE60143779T 2000-06-23 2001-06-22 Turbomolekulapumpe Expired - Lifetime DE60143779D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000189949A JP3777498B2 (ja) 2000-06-23 2000-06-23 ターボ分子ポンプ

Publications (1)

Publication Number Publication Date
DE60143779D1 true DE60143779D1 (de) 2011-02-17

Family

ID=18689508

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60143779T Expired - Lifetime DE60143779D1 (de) 2000-06-23 2001-06-22 Turbomolekulapumpe

Country Status (5)

Country Link
US (1) US6468030B2 (de)
EP (3) EP2053250B1 (de)
JP (1) JP3777498B2 (de)
KR (1) KR100743115B1 (de)
DE (1) DE60143779D1 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4147042B2 (ja) * 2002-03-12 2008-09-10 エドワーズ株式会社 真空ポンプ
US7645116B2 (en) * 2005-04-28 2010-01-12 Ebara Corporation Turbo vacuum pump
KR100721791B1 (ko) * 2005-05-23 2007-05-25 고이치 하츠모토 브래지어 컵
DE102006043327A1 (de) * 2006-09-15 2008-03-27 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
US8070419B2 (en) * 2008-12-24 2011-12-06 Agilent Technologies, Inc. Spiral pumping stage and vacuum pump incorporating such pumping stage
US8152442B2 (en) * 2008-12-24 2012-04-10 Agilent Technologies, Inc. Centripetal pumping stage and vacuum pump incorporating such pumping stage
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
EP2757266B1 (de) * 2013-01-22 2016-03-16 Agilent Technologies, Inc. Rotationsvakuumpumpe
DE102013218506A1 (de) * 2013-09-16 2015-03-19 Inficon Gmbh Schnüffellecksucher mit mehrstufiger Membranpumpe
CN114061008A (zh) * 2014-12-04 2022-02-18 瑞思迈私人有限公司 用于输送空气的可穿戴设备
US10641282B2 (en) * 2016-12-28 2020-05-05 Nidec Corporation Fan device and vacuum cleaner including the same

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2231654A1 (de) 1972-06-28 1974-01-17 Leybold Heraeus Gmbh & Co Kg Turbomolekularpumpe
JPS61226596A (ja) * 1985-03-29 1986-10-08 Hitachi Ltd タ−ボ分子ポンプ
JPH065077B2 (ja) * 1985-04-30 1994-01-19 株式会社島津製作所 ターボ分子ポンプ
DE3728154C2 (de) 1987-08-24 1996-04-18 Balzers Pfeiffer Gmbh Mehrstufige Molekularpumpe
DE3919529C2 (de) * 1988-07-13 1994-09-29 Osaka Vacuum Ltd Vakuumpumpe
JPH0261387A (ja) 1988-08-24 1990-03-01 Seiko Seiki Co Ltd ターボ分子ポンプ
US5358373A (en) 1992-04-29 1994-10-25 Varian Associates, Inc. High performance turbomolecular vacuum pumps
DE4314418A1 (de) * 1993-05-03 1994-11-10 Leybold Ag Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten
US5456575A (en) 1994-05-16 1995-10-10 Varian Associates, Inc. Non-centric improved pumping stage for turbomolecular pumps
US5618167A (en) * 1994-07-28 1997-04-08 Ebara Corporation Vacuum pump apparatus having peltier elements for cooling the motor & bearing housing and heating the outer housing
IT1281025B1 (it) * 1995-11-10 1998-02-11 Varian Spa Pompa turbomolecolare.
JP3792318B2 (ja) * 1996-10-18 2006-07-05 株式会社大阪真空機器製作所 真空ポンプ
JP3415402B2 (ja) * 1997-08-15 2003-06-09 株式会社荏原製作所 ターボ分子ポンプ
DE29715035U1 (de) 1997-08-22 1997-10-30 Leybold Vakuum Gmbh Reibungsvakuumpumpe
GB9725146D0 (en) * 1997-11-27 1998-01-28 Boc Group Plc Improvements in vacuum pumps
DE19821634A1 (de) * 1998-05-14 1999-11-18 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Stator und Rotor
DE19901340B4 (de) * 1998-05-26 2016-03-24 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Chassis, Rotor und Gehäuse sowie Einrichtung, ausgerüstet mit einer Reibungsvakuumpumpe dieser Art
JP3092063B2 (ja) 1998-06-17 2000-09-25 セイコー精機株式会社 ターボ分子ポンプ
JP3013083B2 (ja) 1998-06-23 2000-02-28 セイコー精機株式会社 ターボ分子ポンプ
TW504548B (en) * 1998-06-30 2002-10-01 Ebara Corp Turbo molecular pump
JP4210964B2 (ja) * 1998-12-29 2009-01-21 株式会社安川電機 浄水器
JP3788558B2 (ja) 1999-03-23 2006-06-21 株式会社荏原製作所 ターボ分子ポンプ

Also Published As

Publication number Publication date
KR100743115B1 (ko) 2007-07-27
EP2284400B1 (de) 2012-06-20
KR20020000524A (ko) 2002-01-05
US6468030B2 (en) 2002-10-22
EP2284400A1 (de) 2011-02-16
EP2053250A3 (de) 2009-07-15
EP1167773A3 (de) 2002-02-27
EP2053250B1 (de) 2011-12-28
US20010055526A1 (en) 2001-12-27
EP2053250A2 (de) 2009-04-29
JP2002005078A (ja) 2002-01-09
JP3777498B2 (ja) 2006-05-24
EP1167773A2 (de) 2002-01-02
EP1167773B1 (de) 2011-01-05

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