JP3584305B2 - 高性能ターボ分子真空ポンプ - Google Patents

高性能ターボ分子真空ポンプ Download PDF

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Publication number
JP3584305B2
JP3584305B2 JP12825193A JP12825193A JP3584305B2 JP 3584305 B2 JP3584305 B2 JP 3584305B2 JP 12825193 A JP12825193 A JP 12825193A JP 12825193 A JP12825193 A JP 12825193A JP 3584305 B2 JP3584305 B2 JP 3584305B2
Authority
JP
Japan
Prior art keywords
vacuum pump
stator
rotor
channel
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP12825193A
Other languages
English (en)
Japanese (ja)
Other versions
JPH06173880A (ja
Inventor
マーズベッド・ハブラニアン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Inc
Original Assignee
Varian Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=25366551&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JP3584305(B2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Varian Inc filed Critical Varian Inc
Publication of JPH06173880A publication Critical patent/JPH06173880A/ja
Application granted granted Critical
Publication of JP3584305B2 publication Critical patent/JP3584305B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
JP12825193A 1992-04-29 1993-04-30 高性能ターボ分子真空ポンプ Expired - Fee Related JP3584305B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US875891 1992-04-29
US07/875,891 US5358373A (en) 1992-04-29 1992-04-29 High performance turbomolecular vacuum pumps

Publications (2)

Publication Number Publication Date
JPH06173880A JPH06173880A (ja) 1994-06-21
JP3584305B2 true JP3584305B2 (ja) 2004-11-04

Family

ID=25366551

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12825193A Expired - Fee Related JP3584305B2 (ja) 1992-04-29 1993-04-30 高性能ターボ分子真空ポンプ

Country Status (4)

Country Link
US (6) US5358373A (enExample)
EP (4) EP0775828A1 (enExample)
JP (1) JP3584305B2 (enExample)
DE (1) DE69310993T2 (enExample)

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JP3013083B2 (ja) * 1998-06-23 2000-02-28 セイコー精機株式会社 ターボ分子ポンプ
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JP2021173257A (ja) * 2020-04-28 2021-11-01 株式会社島津製作所 ターボ分子ポンプおよびターボ分子ポンプのステータ
JP7396209B2 (ja) * 2020-06-03 2023-12-12 株式会社島津製作所 ターボ分子ポンプ、ターボ分子ポンプのロータおよびステータ
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Also Published As

Publication number Publication date
US5358373A (en) 1994-10-25
JPH06173880A (ja) 1994-06-21
EP0775828A1 (en) 1997-05-28
US5490761A (en) 1996-02-13
EP0568069B1 (en) 1997-05-28
EP0568069A3 (enExample) 1994-01-05
EP0770781A1 (en) 1997-05-02
US5482430A (en) 1996-01-09
DE69310993T2 (de) 1997-11-27
US5498125A (en) 1996-03-12
US5374160A (en) 1994-12-20
US5577881A (en) 1996-11-26
DE69310993D1 (de) 1997-07-03
EP0775829A1 (en) 1997-05-28
EP0568069A2 (en) 1993-11-03

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