JP3581224B2 - 平面型光学導波路素子 - Google Patents
平面型光学導波路素子 Download PDFInfo
- Publication number
- JP3581224B2 JP3581224B2 JP28214196A JP28214196A JP3581224B2 JP 3581224 B2 JP3581224 B2 JP 3581224B2 JP 28214196 A JP28214196 A JP 28214196A JP 28214196 A JP28214196 A JP 28214196A JP 3581224 B2 JP3581224 B2 JP 3581224B2
- Authority
- JP
- Japan
- Prior art keywords
- waveguide
- core
- width
- height
- region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
- G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12004—Combinations of two or more optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12119—Bend
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12166—Manufacturing methods
- G02B2006/12169—Annealing
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Power Engineering (AREA)
- Optical Integrated Circuits (AREA)
- Optical Couplings Of Light Guides (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US547767 | 1983-11-01 | ||
| US08/547,767 US5719976A (en) | 1995-10-24 | 1995-10-24 | Optimized waveguide structure |
Related Child Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001400472A Division JP4004794B2 (ja) | 1995-10-24 | 2001-12-28 | 平面型光学導波路素子 |
| JP2004137379A Division JP2004234031A (ja) | 1995-10-24 | 2004-05-06 | 平面型光学導波路素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH09166716A JPH09166716A (ja) | 1997-06-24 |
| JP3581224B2 true JP3581224B2 (ja) | 2004-10-27 |
Family
ID=24186043
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28214196A Expired - Fee Related JP3581224B2 (ja) | 1995-10-24 | 1996-10-24 | 平面型光学導波路素子 |
| JP2001400472A Expired - Fee Related JP4004794B2 (ja) | 1995-10-24 | 2001-12-28 | 平面型光学導波路素子 |
| JP2004137379A Pending JP2004234031A (ja) | 1995-10-24 | 2004-05-06 | 平面型光学導波路素子 |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001400472A Expired - Fee Related JP4004794B2 (ja) | 1995-10-24 | 2001-12-28 | 平面型光学導波路素子 |
| JP2004137379A Pending JP2004234031A (ja) | 1995-10-24 | 2004-05-06 | 平面型光学導波路素子 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US5719976A (enExample) |
| JP (3) | JP3581224B2 (enExample) |
Families Citing this family (87)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US5852505A (en) * | 1994-12-28 | 1998-12-22 | Lucent Technologies Inc. | Dense waveguide division multiplexers implemented using a first stage fourier filter |
| US5914889A (en) * | 1996-09-13 | 1999-06-22 | Lucent Technologies Inc. | Method and system for generating a mask layout of an optical integrated circuit |
| GB2334789B (en) * | 1998-06-12 | 2000-01-19 | Bookham Technology Ltd | A waveguide end face |
| JP2000275449A (ja) | 1999-03-25 | 2000-10-06 | Minolta Co Ltd | 光導波路 |
| JP2000329956A (ja) | 1999-05-24 | 2000-11-30 | Minolta Co Ltd | 光導波路 |
| US7194161B1 (en) | 1999-06-30 | 2007-03-20 | The Regents Of The University Of California | Wavelength-conserving grating router for intermediate wavelength density |
| JP3448518B2 (ja) * | 1999-07-30 | 2003-09-22 | 古河電気工業株式会社 | アレイ導波路回折格子 |
| US6288821B1 (en) | 1999-10-01 | 2001-09-11 | Lucent Technologies, Inc. | Hybrid electro-optic device with combined mirror arrays |
| AU1786301A (en) * | 1999-12-02 | 2001-06-12 | Tegal Corporation | Improved reactor with heated and textured electrodes and surfaces |
| JP3497794B2 (ja) * | 2000-02-08 | 2004-02-16 | 日本電信電話株式会社 | 光スポットサイズ変換器の作製方法 |
| US6757454B2 (en) * | 2000-02-10 | 2004-06-29 | Nippon Telegraph And Telephone Corporation | Polarization desensitized optical waveguide interferometer |
| US6506289B2 (en) | 2000-08-07 | 2003-01-14 | Symmorphix, Inc. | Planar optical devices and methods for their manufacture |
| US6498873B1 (en) * | 2000-08-31 | 2002-12-24 | Agere Systems Inc. | Photo detector assembly |
| US6533907B2 (en) | 2001-01-19 | 2003-03-18 | Symmorphix, Inc. | Method of producing amorphous silicon for hard mask and waveguide applications |
| US7351503B2 (en) * | 2001-01-22 | 2008-04-01 | Photronics, Inc. | Fused silica pellicle in intimate contact with the surface of a photomask |
| US6524754B2 (en) | 2001-01-22 | 2003-02-25 | Photronics, Inc. | Fused silica pellicle |
| US7469558B2 (en) * | 2001-07-10 | 2008-12-30 | Springworks, Llc | As-deposited planar optical waveguides with low scattering loss and methods for their manufacture |
| US6928215B1 (en) | 2001-07-25 | 2005-08-09 | Lightwave Microsystems Corporation | Optical tap for optical integrated circuits |
| US7404877B2 (en) * | 2001-11-09 | 2008-07-29 | Springworks, Llc | Low temperature zirconia based thermal barrier layer by PVD |
| US7290407B1 (en) | 2001-12-19 | 2007-11-06 | Jesse Chienhua Shan | Triangle-shaped planar optical waveguide having reduced scattering loss |
| EP1329749A1 (de) * | 2002-01-16 | 2003-07-23 | Alcatel | Integrierter optischer Richtkoppler mit sich verjüngenden Wellenleitern |
| US20030142388A1 (en) * | 2002-01-31 | 2003-07-31 | Sergey Frolov | Waveguide optical amplifier |
| JP3818169B2 (ja) * | 2002-02-22 | 2006-09-06 | 日本電気株式会社 | 導波路デバイス |
| US7378356B2 (en) | 2002-03-16 | 2008-05-27 | Springworks, Llc | Biased pulse DC reactive sputtering of oxide films |
| US6884327B2 (en) | 2002-03-16 | 2005-04-26 | Tao Pan | Mode size converter for a planar waveguide |
| US6876784B2 (en) * | 2002-05-30 | 2005-04-05 | Nanoopto Corporation | Optical polarization beam combiner/splitter |
| US7283571B2 (en) * | 2002-06-17 | 2007-10-16 | Jian Wang | Method and system for performing wavelength locking of an optical transmission source |
| US20040047039A1 (en) * | 2002-06-17 | 2004-03-11 | Jian Wang | Wide angle optical device and method for making same |
| US7386205B2 (en) * | 2002-06-17 | 2008-06-10 | Jian Wang | Optical device and method for making same |
| WO2003107046A2 (en) | 2002-06-18 | 2003-12-24 | Nanoopto Corporation | Optical components exhibiting enhanced functionality and method of making same |
| US6950581B2 (en) * | 2002-07-22 | 2005-09-27 | Intel Corporation | Optical coupler apparatus and methods having reduced geometry sensitivity |
| US7050233B2 (en) | 2002-08-01 | 2006-05-23 | Nanoopto Corporation | Precision phase retardation devices and method of making same |
| US8404376B2 (en) | 2002-08-09 | 2013-03-26 | Infinite Power Solutions, Inc. | Metal film encapsulation |
| US20070264564A1 (en) | 2006-03-16 | 2007-11-15 | Infinite Power Solutions, Inc. | Thin film battery on an integrated circuit or circuit board and method thereof |
| US8445130B2 (en) * | 2002-08-09 | 2013-05-21 | Infinite Power Solutions, Inc. | Hybrid thin-film battery |
| US9793523B2 (en) | 2002-08-09 | 2017-10-17 | Sapurast Research Llc | Electrochemical apparatus with barrier layer protected substrate |
| US8431264B2 (en) * | 2002-08-09 | 2013-04-30 | Infinite Power Solutions, Inc. | Hybrid thin-film battery |
| US8021778B2 (en) * | 2002-08-09 | 2011-09-20 | Infinite Power Solutions, Inc. | Electrochemical apparatus with barrier layer protected substrate |
| US8394522B2 (en) * | 2002-08-09 | 2013-03-12 | Infinite Power Solutions, Inc. | Robust metal film encapsulation |
| US8236443B2 (en) * | 2002-08-09 | 2012-08-07 | Infinite Power Solutions, Inc. | Metal film encapsulation |
| US6768843B1 (en) * | 2002-08-16 | 2004-07-27 | Wavesplitter Technologies, Inc. | Cascaded fourier filter interleaver having enhanced performance |
| AU2003261463A1 (en) * | 2002-08-27 | 2004-03-19 | Symmorphix, Inc. | Optically coupling into highly uniform waveguides |
| US6920272B2 (en) * | 2002-10-09 | 2005-07-19 | Nanoopto Corporation | Monolithic tunable lasers and reflectors |
| US7013064B2 (en) * | 2002-10-09 | 2006-03-14 | Nanoopto Corporation | Freespace tunable optoelectronic device and method |
| WO2004072692A2 (en) * | 2003-02-10 | 2004-08-26 | Nanoopto Corporation | Universal broadband polarizer, devices incorporating same, and method of making same |
| KR100691168B1 (ko) | 2003-02-27 | 2007-03-09 | 섬모픽스, 인코포레이티드 | 유전 장벽층 필름 |
| US7238628B2 (en) * | 2003-05-23 | 2007-07-03 | Symmorphix, Inc. | Energy conversion and storage films and devices by physical vapor deposition of titanium and titanium oxides and sub-oxides |
| US8728285B2 (en) * | 2003-05-23 | 2014-05-20 | Demaray, Llc | Transparent conductive oxides |
| US20040258355A1 (en) * | 2003-06-17 | 2004-12-23 | Jian Wang | Micro-structure induced birefringent waveguiding devices and methods of making same |
| US7433118B2 (en) * | 2003-06-26 | 2008-10-07 | Lucent Technologies Inc. | Bridged polysesquioxane host matrices containing lanthanides chelated by organic guest ligands, and methods of making such matrices |
| US7075087B2 (en) * | 2003-06-27 | 2006-07-11 | Siemens Medical Solutions, Usa | Multi-modality diagnostic imager |
| US7142759B2 (en) * | 2004-01-13 | 2006-11-28 | Lionix Bv | Surface waveguide and method of manufacture |
| US6987920B1 (en) | 2004-06-28 | 2006-01-17 | Xerox Corporation | Waveguide structures and methods |
| US7959769B2 (en) * | 2004-12-08 | 2011-06-14 | Infinite Power Solutions, Inc. | Deposition of LiCoO2 |
| KR101021536B1 (ko) * | 2004-12-08 | 2011-03-16 | 섬모픽스, 인코포레이티드 | LiCoO2의 증착 |
| US7215841B2 (en) * | 2004-12-21 | 2007-05-08 | Intel Corporation | Extracting phase error in waveguides |
| US7838133B2 (en) * | 2005-09-02 | 2010-11-23 | Springworks, Llc | Deposition of perovskite and other compound ceramic films for dielectric applications |
| WO2007092748A2 (en) * | 2006-02-06 | 2007-08-16 | Ems Technologies, Inc. | Circular waveguide e-bend |
| KR20090069323A (ko) * | 2006-09-29 | 2009-06-30 | 인피니트 파워 솔루션스, 인크. | 가요성 기판의 마스킹 및 가요성 기판에 배터리 층을 증착하기 위한 재료의 구속 |
| US8197781B2 (en) * | 2006-11-07 | 2012-06-12 | Infinite Power Solutions, Inc. | Sputtering target of Li3PO4 and method for producing same |
| US7420434B2 (en) * | 2007-02-02 | 2008-09-02 | Ems Technologies, Inc. | Circular to rectangular waveguide converter including a bend section and mode suppressor |
| WO2008108422A1 (ja) * | 2007-03-07 | 2008-09-12 | Nec Corporation | 光導波路モジュール |
| US8268488B2 (en) | 2007-12-21 | 2012-09-18 | Infinite Power Solutions, Inc. | Thin film electrolyte for thin film batteries |
| CN101903560B (zh) * | 2007-12-21 | 2014-08-06 | 无穷动力解决方案股份有限公司 | 用于电解质膜的溅射靶的方法 |
| JP5705549B2 (ja) | 2008-01-11 | 2015-04-22 | インフィニット パワー ソリューションズ, インコーポレイテッド | 薄膜電池および他のデバイスのための薄膜カプセル化 |
| US8350519B2 (en) * | 2008-04-02 | 2013-01-08 | Infinite Power Solutions, Inc | Passive over/under voltage control and protection for energy storage devices associated with energy harvesting |
| US7822298B2 (en) * | 2008-04-15 | 2010-10-26 | Alcatel-Lucent Usa Inc. | Polarization component processor, method of processing polarization components and integrated photonic circuit employing the same |
| WO2010019577A1 (en) | 2008-08-11 | 2010-02-18 | Infinite Power Solutions, Inc. | Energy device with integral collector surface for electromagnetic energy harvesting and method thereof |
| JP5650646B2 (ja) * | 2008-09-12 | 2015-01-07 | インフィニット パワー ソリューションズ, インコーポレイテッド | 電磁エネルギーを介したデータ通信のための一体型伝導性表面を有するエネルギーデバイスおよび電磁エネルギーを介したデータ通信のための方法 |
| WO2010042594A1 (en) * | 2008-10-08 | 2010-04-15 | Infinite Power Solutions, Inc. | Environmentally-powered wireless sensor module |
| US20100294428A1 (en) * | 2009-05-20 | 2010-11-25 | Snyder Shawn W | Method of Integrating Electrochemical Devices Into and Onto Fixtures |
| EP2474056B1 (en) | 2009-09-01 | 2016-05-04 | Sapurast Research LLC | Printed circuit board with integrated thin film battery |
| JP5625449B2 (ja) * | 2010-03-31 | 2014-11-19 | 日本電気株式会社 | マッハ・ツェンダ干渉計、アレイ導波路回折格子及びマッハ・ツェンダ干渉計の製造方法 |
| JP2013528912A (ja) | 2010-06-07 | 2013-07-11 | インフィニット パワー ソリューションズ, インコーポレイテッド | 再充電可能高密度電気化学素子 |
| US20120263479A1 (en) * | 2011-04-18 | 2012-10-18 | Neophotonics Corporation | Optical network communication system with variable optical attenuation and method of operation thereof |
| JP5870509B2 (ja) * | 2011-05-30 | 2016-03-01 | ソニー株式会社 | 光源装置、光学ピックアップ、記録装置 |
| JP2014041175A (ja) * | 2012-08-21 | 2014-03-06 | Oki Electric Ind Co Ltd | 波長選択性経路切換素子 |
| US9685761B2 (en) | 2014-10-03 | 2017-06-20 | Aurrion, Inc. | Densely arrayed waveguides with low cross-coupling |
| US20190250329A1 (en) * | 2018-02-15 | 2019-08-15 | Nokia Solutions And Networks Oy | Optical Waveguide Processors For Integrated Optics |
| US11353650B2 (en) * | 2018-03-30 | 2022-06-07 | Nlight, Inc. | Single mode LMA (large mode area) fiber |
| CN108776367B (zh) * | 2018-04-20 | 2021-07-13 | 江伟 | 一种高密度光子集成的波导光栅阵列 |
| CN112119335B (zh) * | 2018-05-18 | 2023-05-02 | Agc株式会社 | 聚合物光波导及复合光波导 |
| US10884191B2 (en) * | 2019-06-06 | 2021-01-05 | International Business Machines Corporation | Flexible waveguide having an asymmetric optical-loss performance curve and improved worst-case optical-loss performance |
| US10935738B1 (en) | 2019-08-08 | 2021-03-02 | Stmicroelectronics S.R.L. | Architecture of an integrated optics device |
| US11181693B1 (en) * | 2020-10-21 | 2021-11-23 | Globalfoundries U.S. Inc. | Polarization-insensitive directional couplers |
| US20230288774A1 (en) * | 2021-11-03 | 2023-09-14 | The Trustees Of Columbia University In The City Of New York | Narrow Linewidth, Widely Tunable Integrated Lasers from Visible to Near-IR |
| US20230417988A1 (en) * | 2022-06-22 | 2023-12-28 | The Government Of The United States, As Represented By The Secretary Of The Navy | Methods and apparatuses for photonic filtering using nonuniform lattice filters |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2927795B2 (ja) * | 1988-03-29 | 1999-07-28 | 日本電気株式会社 | 光スイッチ |
| US4904042A (en) * | 1988-05-03 | 1990-02-27 | American Telephone And Telegraph Company | N×N optical star coupler |
| FR2666118B1 (fr) * | 1990-08-22 | 1992-10-30 | Snecma | Circuit d'alimentation en carburant d'un turbo-moteur. |
| US5136671A (en) * | 1991-08-21 | 1992-08-04 | At&T Bell Laboratories | Optical switch, multiplexer, and demultiplexer |
| US5285305A (en) * | 1991-12-12 | 1994-02-08 | At & T Bell Laboratories | Optical communication network with passive monitoring |
| JP3269505B2 (ja) * | 1992-11-19 | 2002-03-25 | 三菱瓦斯化学株式会社 | 高分子光導波路型光スターカプラ |
| US5309534A (en) * | 1993-02-24 | 1994-05-03 | At&T Bell Laboratories | Optical filter having multiple interferometric stages |
| GB2278206B (en) * | 1993-05-19 | 1996-04-03 | Northern Telecom Ltd | Polarisation insensitive wavelength multiplexing 2®2 fibre couplers |
| FI944253L (fi) * | 1993-09-17 | 1995-03-18 | Iot Integrierte Optik Gmbh | Integroidusti optinen 2 x 2 -kytkin |
| US5396507A (en) * | 1993-11-15 | 1995-03-07 | At&T Corp. | Reflective digitally tunable laser |
| NL9400993A (nl) * | 1994-06-17 | 1996-02-01 | Nederland Ptt | Polarisatie- en golflengte-onafhankelijk optisch vermogen splitsend circuit. |
-
1995
- 1995-10-24 US US08/547,767 patent/US5719976A/en not_active Expired - Lifetime
-
1996
- 1996-10-24 JP JP28214196A patent/JP3581224B2/ja not_active Expired - Fee Related
-
2001
- 2001-12-28 JP JP2001400472A patent/JP4004794B2/ja not_active Expired - Fee Related
-
2004
- 2004-05-06 JP JP2004137379A patent/JP2004234031A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| JP4004794B2 (ja) | 2007-11-07 |
| JP2002236230A (ja) | 2002-08-23 |
| JP2004234031A (ja) | 2004-08-19 |
| JPH09166716A (ja) | 1997-06-24 |
| US5719976A (en) | 1998-02-17 |
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| A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20040204 |
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